09-06-2022 дата публикации
Номер: US20220177362A1
At least one composite workpiece includes: a substrate body including at least one first surface and at least one second surface, the at least one first surface of the substrate body being shaped convexly at least in areas and the at least one second surface of the substrate body being shaped concavely at least in areas, and the at least one composite workpiece has a bow with an absolute value of between 0.1 μm and 50 μm due to the curved shape of the at least one first surface and the at least one second surface; and at least one first coating, at least the at least one first surface of the substrate body being coated at least in areas with the first coating. 1. At least one composite workpiece , comprising:a substrate body comprising at least one first surface and at least one second surface, the at least one first surface of the substrate body being shaped convexly at least in areas and the at least one second surface of the substrate body being shaped concavely at least in areas, and the at least one composite workpiece has a bow with an absolute value of between 0.1 μm and 50 μm due to the curved shape of the at least one first surface and the at least one second surface; andat least one first coating, at least the at least one first surface of the substrate body being coated at least in areas with the first coating.2. The at least one composite workpiece of claim 1 , wherein the substrate body is a wafer.3. The at least one composite workpiece of claim 1 , wherein the substrate body has the bow.4. The at least one composite workpiece of claim 1 , wherein the first coating at least one of:(i) comprises an anti-reflective coating;{'sub': 3', '4', '2', '2', '5', '2', '2', '5', '2', '2', '2', '2', '2', '5', '2', '2', '5', '2', '2', '2', '2, '(ii) comprises at least one of: (a) SiN, ZrO, TaO, HfO, NbO, TiO, SnO, indium tin oxide, ZnO, AN, a mixed oxide comprising at least one thereof, a mixed nitride comprising at least one thereof, or a mixed oxide nitride ...
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