12-03-2015 дата публикации
Номер: US20150072275A1
Принадлежит:
The present invention relates to a positive photosensitive resin composition and a method for forming a pattern by using the same. The positive photosensitive resin composition includes a novolac resin (A), a polysiloxane (B), an ortho-naphthoquinone diazide sulfonic acid ester (C) and a solvent (D). The novolac resin (A) includes a xylenol-type novolac resin (A-1). The xylenol-type novolac resin (A-1) is synthesized by polycondensing an aldehyde compound with a xylenol compound. 1. A positive photosensitive resin composition , comprising:a novolac resin (A);a polysiloxane (B);an ortho-naphthoquinone diazide sulfonic acid ester (C); anda solvent (D).2. The positive photosensitive resin composition of claim 1 , wherein the polysiloxane (B) is formed by polymerizing a compound having a structure of formula (I):{'br': None, 'sub': 1', 'a', '2', '4-a, 'Si(R)(OR)\u2003\u2003(I)'}{'sub': 1', '2, 'in formula (I), Rrepresents a hydrogen atom, an alkyl group of 1 to 10 carbons, an alkenyl group of 2-10 carbons, an aromatic group of 6 to 15 carbons, an alkyl group having an anhydride group, an alkyl group having an epoxy group, or an alkoxy group having an epoxy group; Rrepresents a hydrogen atom, an alkyl group of 1 to 6 carbons, an acyl group of 1 to 6 carbons, or an aromatic group of 6 to 15 carbons; and a represents an integer of 0 to 3.'}3. The positive photosensitive resin composition of claim 2 , wherein at least one of the Rcomprises an alkyl group having an anhydride group claim 2 , an alkyl group having an epoxy group claim 2 , or an alkoxy group having an epoxy group.4. The positive photosensitive resin composition of claim 1 , wherein the novolac resin (A) includes a xylenol-type novolac resin (A-1) claim 1 , and the xylenol-type novolac resin (A-1) is formed by polycondensing an aldehyde compound with an aromatic hydroxy compound claim 1 , wherein the aromatic hydroxy compound at least comprises a xylenol compound.5. The positive photosensitive resin composition ...
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