TRANSFORMING METROLOGY DATA FROM A SEMICONDUCTOR TREATMENT SYSTEM USING MULTIVARIATE ANALYSIS

Metrology data from a semiconductor treatment system is transformed using multivariate analysis. In particular, a set of metrology data measured or simulated for one or more substrates treated using the treatment system is obtained. One or more essential variables for the obtained set of metrology data is determined using multivariate analysis. A first metrology data measured or simulated for one or more substrates treated using the treatment system is obtained. The first obtained metrology data is not one of the metrology data in the set of metrology data earlier obtained. The first metrology data is transformed into a second metrology data using the one or more of the determined essential variables. 1. A treatment system for etching a feature into a substrate , comprising:an etching system configured to etch a pattern in one or more substrates using a lithographic structure prepared in a film of light-sensitive material to radiation;a metrology system to measure a set of metrology data for said one or more substrates treated in said etching system for variations in process data for said etching system, wherein said process data comprises a gas pressure in said etching system, a flow rate of a process gas into said etching system, a power coupled to said process gas in said etching system, a time for performing an etching process in said etching system, a temperature of said one or more substrates, or a temperature of a substrate holder for supporting said one or more substrates, or any combination of two or more thereof; obtain said set of metrology data;', 'determine one or more essential variables for said obtained set of metrology data using multivariate analysis;', 'obtain new metrology data measured using said metrology system; and', 'transform said new metrology data into refined metrology data using said one or more essential variables,, 'a data processing system configured towherein said metrology data comprises optical metrology data, andwherein said ...

Accurate and Fast Neural network Training for Library-Based Critical Dimension (CD) Metrology

Approaches for accurate neural network training for library-based critical dimension (CD) metrology are described. Approaches for fast neural network training for library-based CD metrology are also described.

SYSTEM FOR IN-SITU FILM STACK MEASUREMENT DURING ETCHING AND ETCH CONTROL METHOD

Disclosed is an in-situ optical monitor (ISOM) system and associated method for controlling plasma etching processes during the forming of stepped structures in semiconductor manufacturing. The in-situ optical monitor (ISOM) can be optionally configured for coupling to a surface-wave plasma source (SWP), for example a radial line slotted antenna (RLSA) plasma source. A method is described to correlate the lateral recess of the steps and the etched thickness of a photoresist layer for use with the in-situ optical monitor (ISOM) during control of plasma etching processes in the forming of stepped structures. 1. An in-situ optical monitor (ISOM) configured for measuring reflection from a substrate during a plasma etching process in a plasma processing chamber , the optical monitor comprising: a light source for providing an incident light beam for substrate illumination, the incident light beam being reflected from the substrate to form a reflected light beam;', 'an optical window mounted on a wall of the plasma processing chamber opposite the substrate, the optical window being configured to transmit the incident light beam and the reflected light beam, the optical window comprising an upper window, a lower window, and a window mesh; and', 'a photodetector for measuring an intensity of the reflected light beam,'}], 'a reflectometer, comprisinga controller configured to receive the measured intensity of the reflected light beam and control the plasma etching process based on the measured intensity of the reflected light beam.2. The in-situ optical monitor (ISOM) of claim 1 , wherein the light source is a laser.3. The in-situ optical monitor (ISOM) of claim 1 , further comprising:a polarizer disposed in the incident beam path, reflected light beam path, or both.4. The in-situ optical monitor (ISOM) of claim 1 , wherein the plasma processing chamber comprises a surface wave plasma (SWP) source and the window mesh is part of a slotted antenna of the surface wave plasma ( ...

ACCURATE AND FAST NEURAL NETWORK TRAINING FOR LIBRARY-BASED CRITICAL DIMENSION (CD) METROLOGY

Approaches for accurate neural network training for library-based critical dimension (CD) metrology are described. Approaches for fast neural network training for library-based CD metrology are also described. 1. A method of fast neural network training for library-based critical dimension (CD) metrology , the method comprising:providing a training target for a first neural network;training the first neural network, the training comprising starting with a first number of neurons and iteratively increasing the number of neurons until the training target is reached using a second, larger, number of neurons;generating a second neural network based on the training and the second number of neurons; andproviding a spectral library based on the second neural network.2. The method of claim 1 , wherein iteratively increasing the number of neurons until the training target is reached comprises using a modified Levenberg-Marquardt approach.3. The method of claim 1 , wherein iteratively increasing the number of neurons comprises increasing the number of neurons in a hidden layer of the first neural network.4. The method of claim 1 , wherein the spectral library comprises a simulated spectrum claim 1 , the method further comprising:comparing the simulated spectrum to a sample spectrum.5. A machine-accessible storage medium having instructions stored thereon which cause a data processing system to perform a method of fast neural network training for library-based critical dimension (CD) metrology claim 1 , the method comprising:providing a training target for a first neural network;training the first neural network, the training comprising starting with a first number of neurons and iteratively increasing the number of neurons until the training target is reached using a second, larger, number of neurons;generating a second neural network based on the training and the second number of neurons; andproviding a spectral library based on the second neural network.6. The storage ...

MEMS BEAM STEERING AND FISHEYE RECEIVING LENS FOR LiDAR SYSTEM

The present disclosure describes a system and method for a binocular LiDAR system. The system includes a light source, a beam steering apparatus, a receiving lens, a light detector. The light source is configured to transmit a pulse of light. The beam steering apparatus is configured to steer the pulse of light in at least one of vertical and horizontal directions along an optical path. The lens is configured to direct the collected scattered light to the light detector. The electrical processing and computing device is electrically coupled to light source and the light detector. The light detector is configured to minimize the background noise. The distance to the object is based on a time difference between transmitting the light pulse and detecting scattered light.

LIDAR DETECTION SYSTEMS AND METHODS THAT USE MULTI-PLANE MIRRORS

Embodiments discussed herein refer to a relatively compact and energy efficient LiDAR system that uses a multi-plane mirror in its scanning system. 1. A light detection and ranging (LiDAR) system for use with a vehicle , comprising: a transceiver module operative to transmit and receive light energy;', 'a polygon structure that defines a lateral angle of the field of view of the LiDAR system; and', 'a moveable mirror positioned to redirect light energy passing between the transceiver module and the polygon structure, the moveable mirror operative to control an exit angle of light being redirected by the polygon structure, wherein the exit angle corresponds to a particular angle within a vertical field of view of the LiDAR system., 'a housing configured to be mounted to a windshield of the vehicle, the housing comprising2. The LiDAR system of claim 1 , wherein the movable mirror is a dual plane mirror.3. The LiDAR system of claim 2 , wherein the dual plane mirror is operative to oscillate between clockwise and counter-clockwise partial rotations about an axis.4. The LiDAR system of claim 2 , wherein the dual plane mirror comprises a first plane member and a second plane member claim 2 , wherein the first and second plane members are coupled together at a transition point.5. The LiDAR system of claim 4 , wherein the first and second plane members are aligned with respect to each other such that the first plane member controls negative exit angles and the second plane member controls positive exit angles.6. The LiDAR system of claim 2 , wherein the dual plane mirror yields a relatively higher resolution within a middle portion of the vertical field of view than top and bottom portions of the vertical field of view.7. The LiDAR system of claim 1 , wherein the moveable mirror is a single plane mirror.8. The LiDAR system of claim 7 , wherein the single plane mirror yields a relatively higher resolution at top and bottom portions of the vertical field of view than a middle ...

HIGH DENSITY LIDAR SCANNING

The present disclosure describes a system and method for LiDAR scanning. The system includes a light source configured to generate one or more light beams; and a beam steering apparatus optically coupled to the light source. The beam steering apparatus includes a first rotatable mirror and a second rotatable mirror. The first rotatable mirror and the second rotatable mirror, when moving with respect to each other, are configured to: steer the one or more light beams both vertically and horizontally to illuminate an object within a field-of-view; redirect one or more returning light pulses generated based on the illumination of the object; and a receiving optical system configured to receive the redirected returning light pulses. 1. A light detection and ranging (LiDAR) scanning system , comprising:a light source configured to generate one or more light beams; wherein an axis that is perpendicular to a reflective surface of the first rotatable mirror is configured to be at a first angle to a first rotating axis of the first rotatable mirror,', 'wherein an axis that is perpendicular to a reflective surface of the second rotatable mirror is configured to be at a second angle to a second rotating axis of the second rotatable mirror, wherein both the first angle and the second angle are greater than zero degree and less than 90 degree, and', steer the one or more light beams both vertically and horizontally to illuminate an object within a field-of-view, and', 'redirect one or more returning light pulses generated based on the illumination of the object; and, 'wherein the first rotatable mirror and the second rotatable mirror, when moving with respect to each other, are configured to], 'a beam steering apparatus optically coupled to the light source, the beam steering apparatus comprising a first rotatable mirror and a second rotatable mirror,'}a receiving optical system configured to receive the redirected returning light pulses.2. The system of claim 1 , wherein one or ...

LIDAR SYSTEMS AND METHODS THAT USE A MULTI-FACET MIRROR

Embodiments discussed herein refer to using LiDAR systems that uses a rotating polygon with a multi-facet mirror. Such multi-facet galvanometer mirror arrangements generate a point map that has reduced curvature. 125-. (canceled)26. A light detection and ranging (LiDAR) system for use with a vehicle , comprising:a light source operative to emit one or more light beams;a multi-faceted polygon structure that is operative to control scanning the light beams in a horizontal direction of a field of view (FOV) of the LiDAR system, wherein an angle of at least one facet of the multi-faceted polygon structure with respect to a rotational axis of the multi-faceted polygon structure is a non-zero angle; anda moveable mirror positioned to redirect the light beams passing between the light source and the multi-faceted polygon structure, the moveable mirror being operative to control scanning the light beams in a vertical direction of the FOV of the LiDAR system.27. The LiDAR system of claim 26 , wherein the movable mirror is a multi-faceted mirror operative to oscillate about a mirror rotation axis.28. The LiDAR system of claim 27 , wherein the multi-faceted mirror is a dual facet mirror having a first facet and a second facet claim 27 , the first facet and the second facet being arranged such that their respective faces are unparallel to each other.29. The LiDAR system of claim 27 , wherein the multi-faceted mirror is a dual facet mirror having a first facet and a second facet claim 27 , the first facet and second facet being connected together via a joint member.30. The LiDAR system of claim 27 , wherein the multi-faceted mirror is a dual facet mirror having a variable skew angle.31. The LiDAR system of claim 26 , wherein the moveable mirror is operative to at least partly produce a point cloud that is dense in one predetermined portion and sparse in another predetermined portion.32. The LiDAR system of claim 31 , wherein the light source is operative to emit a plurality of ...

DIFFERENTIAL ACOUSTIC TIME OF FLIGHT MEASUREMENT OF TEMPERATURE OF SEMICONDUCTOR SUBSTRATES

Disclosed is a method and apparatus for measuring semiconductor substrate temperature using a differential acoustic time of flight measurement technique. The measurement is based on measuring the time of flight of acoustic (ultrasonic) waves across the substrate, and calculating a substrate temperature from the measured time of flight and the known temperature dependence of the speed of sound for the substrate material. The differential acoustic time of flight method eliminates most sources of interference and error, for example due to varying coupling between an ultrasonic transducer and the substrate. To further increase the accuracy of the differential acoustic time of flight measurement, a correlation waveform processing algorithm is utilized to obtain a differential acoustic time of flight measurement from two measured ultrasonic waveforms. To facilitate signal recognition and processing, a symmetric Lamb mode may be used as mode of excitation of the substrate. 1. A method for determining the temperature of a substrate , comprising:disposing the substrate on a substrate support;contacting the substrate with a first ultrasonic transducer;contacting the substrate with a second ultrasonic transducer;exciting a Lamb wave in the substrate by energizing the first ultrasonic transducer and the second ultrasonic transducer;measuring at the second ultrasonic transducer a first ultrasonic waveform of the Lamb wave originating at the first ultrasonic transducer and propagating along a first path from the first ultrasonic transducer to the second ultrasonic transducer;measuring at the second ultrasonic transducer a second ultrasonic waveform of the Lamb wave originating from the first ultrasonic transducer and propagating along a second path from the first ultrasonic transducer to the second ultrasonic transducer, wherein the second path is different than the first path;calculating a difference of times of flight of the second ultrasonic waveform and the first ultrasonic ...

LIDAR SYSTEMS AND METHODS FOR EXERCISING PRECISE CONTROL OF A FIBER LASER

Embodiments discussed herein refer to LiDAR systems and methods that enable substantially instantaneous power and frequency control over fiber lasers. The systems and methods can simultaneously control seed laser power and frequency and pump power and frequency to maintain relative constant ratios among each other to maintain a relatively constant excited state ion density of the fiber laser over time. 119-. (canceled)20. A light detection and ranging (LiDAR) system , comprising:a fiber laser comprising a seed laser and a pump, the fiber laser being operative to provide light having a first output power and a first repetition rate; wherein one or both of the second output power and the second repetition rate are varied, on a pulse-to-pulse basis, from the first output power and the first repetition rate, respectively,', 'wherein the second output power is changeable within an output power range from a minimum output power to a maximum output power; and a scanning system operative to:', 'scan a first portion of a field-of-view (FOV) using the light having the first output power and the first repetition rate, and', 'scan a second portion of the FOV using the light having the second output power and the second repetition rate, the first portion and the second portion being different portions of the FOV., 'a controller operative to cause the fiber laser to transit to provide light having a second output power and a second repetition rate by proportionally varying a seed laser power of the seed laser and a pump power of the pump,'}21. The system of claim 20 , wherein the second output power is varied from the first output power based on a preconfigured output power setting or a power saving setting.22. The system of claim 20 , wherein the second output power is varied from the first output power while maintaining the second repetition rate the same as the first repetition rate.23. The system of claim 20 , wherein the first output power is greater than the second output ...

SPATIALLY RESOLVED OPTICAL EMISSION SPECTROSCOPY (OES) IN PLASMA PROCESSING

Disclosed is a method, computer method, system, and apparatus for measuring two-dimensional distributions of optical emissions from a plasma in a semiconductor plasma processing chamber. The acquired two-dimensional distributions of plasma optical emissions can be used to infer the two-dimensional distributions of concentrations of certain chemical species of interest that are present in the plasma, and thus provide a useful tool for process development and also for new and improved processing tool development. The disclosed technique is computationally simple and inexpensive, and involves the use of an expansion of the assumed optical intensity distribution into a sum of basis functions that allow for circumferential variation of optical intensity. An example of suitable basis functions are Zernike polynomials. 2. The method of claim 1 , wherein the N basis functions F(r claim 1 , θ) are Zernike polynomials Z(r claim 1 , θ).3. The method of claim 1 , wherein the N basis functions F(r claim 1 , θ) are the N lowest order Zernike polynomials Z(r claim 1 , θ).4. The method of claim 1 , wherein the step of fitting N fitting parameters acomprises least squares fitting.5. The method of claim 1 , wherein the step of fitting N fitting parameters acomprises utilizing a predetermined optical collection efficiency.6. The method of claim 5 , wherein optical collection efficiency was determined by simulation.7. The method of claim 5 , wherein optical collection efficiency was determined experimentally.8. The method of claim 1 , wherein the plasma optical emission measurement system comprises:N separate optical systems for each of N rays across the plasma processing chamber, each optical system collecting plasma optical emission spectra through at least one optical window disposed at a wall of the plasma processing chamber, and each optical system being coupled to a multi-channel spectrometer for measuring the plasma optical emission spectra.9. The method of claim 8 , wherein ...

Lidar with large dynamic range

A method for expanding a dynamic range of a light detection and ranging (LiDAR) system is provided. The method comprises transmitting, using a light source of the LiDAR system, a sequence of pulse signals consisting of two or more increasingly stronger pulse signals. The method further comprises receiving, using a light detector of the LiDAR system, one or more returned pulse signals corresponding to the transmitted sequence of pulse signals. The one or more returned pulse signals are above the noise level of the light detector. The method further comprises selecting a returned pulse signal within the dynamic range of the light detector, identifying a transmitted pulse signal of the transmitted sequence that corresponds to the selected returned pulse signal, and calculating a distance based on the selected returned signal and the identified transmitted signal.

2D SCANNING HIGH PRECISION LiDAR USING COMBINATION OF ROTATING CONCAVE MIRROR AND BEAM STEERING DEVICES

The present disclosure describes a system and method for coaxial LiDAR scanning. The system includes a first light source configured to provide first light pulses. The system also includes one or more beam steering apparatuses optically coupled to the first light source. Each beam steering apparatus comprises a rotatable concave reflector and a light beam steering device disposed at least partially within the rotatable concave reflector. The combination of the light beam steering device and the rotatable concave reflector, when moving with respect to each other, steers the one or more first light pulses both vertically and horizontally to illuminate an object within a field-of-view; obtain one or more first returning light pulses, the one or more first returning light pulses being generated based on the steered first light pulses illuminating an object within the field-of-view, and redirects the one or more first returning light pulses. 137-. (canceled)38. A light detection and ranging (LiDAR) scanning system , comprising:a first light source configured to provide one or more first light pulses;one or more beam steering apparatuses optically coupled to the first light source, each beam steering apparatus comprising an oscillation mirror and a light beam steering device, steer the one or more first light pulses both vertically and horizontally to illuminate an object within a field-of-view,', 'obtain one or more first returning light pulses, the one or more first returning light pulses being generated based on the steered first light pulses illuminating an object within the field-of-view, and', 'redirect the one or more first returning light pulses to one or more receiving optical systems disposed in the LiDAR scanning system., 'wherein the combination of the light beam steering device and the oscillation mirror, when moving with respect to each other, is configured to39. The system of claim 38 , wherein the polygon-shaped mirrors include flat or curved surfaces.40. ...

FIBER-BASED TRANSMITTER AND RECEIVER CHANNELS OF LIGHT DETECTION AND RANGING SYSTEMS

A LiDAR system is provided. The LiDAR system comprises a plurality of transmitter channels and a plurality of receiver channels. The plurality of transmitter channels are configured to transmit a plurality of transmission light beams to a field-of-view at a plurality of different transmission angles, which are then scanned to cover the entire field-of-view. The LiDAR system further comprises a collection lens disposed to receive and redirect return light obtained based on the plurality of transmission light beams illuminating one or more objects within the field-of-view. The LiDAR system further comprises a plurality of receiver channels optically coupled to the collection lens. Each of the receiver channels is optically aligned based on a transmission angle of a corresponding transmission light beam. The LiDAR system further comprises a plurality of detector assemblies optically coupled to the plurality of receiver channels. 1. A light detection and ranging (LiDAR) scanning system , comprising: a collection lens disposed to receive and redirect return light obtained based on the plurality of transmission light beams illuminating one or more objects within the field-of-view;', 'a plurality of receiver channels optically coupled to the collection lens, wherein each of the receiver channels is optically aligned based on a transmission angle of a corresponding transmission light beam; and', 'a plurality of detector assemblies optically coupled to the plurality of receiver channels, wherein each of the receiver channels directs redirected return light to a detector assembly of the plurality of detector assemblies., 'a plurality of transmitter channels configured to transmit a plurality of transmission light beams to a field-of-view at a plurality of different transmission angles;'}2. The system of claim 1 , wherein the plurality of transmitter channels comprises a plurality of transmitter optical fibers.3. The system of claim 1 , wherein the plurality of receiver ...

APPARATUS FOR CONTROLLING AND OPERATING AN AUTONOMOUS VEHICLE

An apparatus includes a chassis housing a control server compartment, a compute server compartment, and an input and output (IO) subsystem compartment. The apparatus further includes an IO subsystem inserted into the IO subsystem compartment, a compute server inserted into the compute server compartment, and a control server inserted into the control server compartment coupled to the compute server via an Ethernet connection. The IO subsystem includes one or more IO modules, where at least some of the IO modules can be coupled to sensors. The compute server receives the sensor data from the IO subsystem via some PCIe links and generates planning and control data based on the sensor data for controlling the autonomous vehicle. The control server controls and operates the autonomous vehicle by sending control commands to hardware of the autonomous vehicle based on the planning and control data received from the compute server. 1. An apparatus for controlling and operating an autonomous vehicle , the apparatus comprising:a chassis housing a plurality of compartments, including a control server compartment, a compute server compartment, and an input and output (IO) subsystem compartment;an IO subsystem inserted into the IO subsystem compartment, the IO subsystem having a plurality of IO modules, wherein at least some of the IO modules are to be coupled to one or more sensors;a compute server inserted into the compute server compartment, wherein the compute server receives the sensor data from the IO subsystem via a plurality of Peripheral Component Interconnect Express (PCIe) links and generates planning and control data based on the sensor data for controlling the autonomous vehicle; anda control server inserted into the control server compartment coupled to the compute server via an Ethernet connection, wherein the control server controls and operates the autonomous vehicle by sending a plurality of control commands to hardware of the autonomous vehicle based on the ...

LIDAR DETECTION SYSTEMS AND METHODS WITH HIGH REPETITION RATE TO OBSERVE FAR OBJECTS

Embodiments discussed herein refer to LiDAR systems that accurately observe objects that are relatively close and objects that are relatively far using systems and methods that employ a variable time interval between successive laser pulses and one or more filters. 136-. (canceled)37. A method , comprising:emitting, by a transmission system of a light ranging and detection (LiDAR) system, a plurality of transmission pulses using a plurality of variable time intervals comprising a first time interval and a second time interval, wherein the first time interval and the second time interval are not equal;receiving, by a receiver, a plurality of return pulses;calculating, by a receiver control circuitry, a first plurality of object distances, wherein each of the first plurality of object distances corresponds to one of the plurality of return pulses and one of the plurality of transmission pulses associated with the plurality of variable time intervals;determining, by the receiver control circuitry, a second plurality of object distances of a plurality of neighboring return pulses; anddetermining, by the receiver control circuitry, whether the second plurality of object distances of the plurality of neighboring return pluses fails to meet one or more filter criteria by determining a distance comparison value based on the time intervals associated with the plurality of transmission pulses, wherein the distance comparison value corresponds to a likelihood or probability that the second plurality of object distances of the plurality of neighboring return pulses fails to meet the one or more filter criteria.38. The method of claim 37 , wherein one or more of the first plurality of object distances is calculated based on a most recently emitted transmission pulse or a second most recently emitted transmission pulse.39. The method of claim 37 , wherein the plurality of variable time intervals further comprises a third time interval that is not equal to the first time interval ...

LIDAR SYSTEMS THAT USE A MULTI-FACET MIRROR

Embodiments discussed herein refer to using LiDAR systems that uses a rotating polygon with a multi-facet mirror. Such multi-facet galvanometer mirror arrangements generate a point map that has reduced curvature. 1. A light detection and ranging (LiDAR) system , comprising: a polygon comprising a plurality of facets and operative to rotate around a first rotational axis; and', 'a multi-facet mirror operative to rotate about a second rotational axis, wherein a planar face of at least one facet of the multi-facet mirror is aligned at a non zero skew angle with respect to the second rotational axis;, 'a beam steering system comprisinga laser system operative to emit light pulses that are steered by the beam steering system within a field of view (FOV) of the LiDAR system; anda receiver system operative to process return pulses corresponding to the emitted light pulses to generate a point map of the FOV.2. The LiDAR system of claim 1 , wherein the multi-facet mirror comprises two facets claim 1 , wherein each of the two facets comprises a planar face that is aligned at a non zero skew angle with respect to the second rotational axis.3. The LiDAR system of claim 1 , wherein the skew angle is an angle between a planar face of a facet of the multi-facet mirror and the second rotational axis.4. The LiDAR system of claim 1 , wherein the skew angle is a variable skew angle.5. The LiDAR system of claim 1 , wherein the variable skew angle depends on a rotation position of the multi-facet mirror.6. The LiDAR system of claim 1 , wherein the multi-facet mirror comprises three facets claim 1 , wherein a first of three facets is parallel with the second rotational axis claim 1 , and wherein a second and a third of the three facets are aligned at a skew angle with respect to the second rotational axis.7. The LiDAR system of claim 1 , wherein the multi-facet mirror reduces curvature in the point map.8. The LiDAR system of claim 1 , wherein the emitted light pulses comprise at least ...

2D SCANNING HIGH PRECISION LiDAR USING COMBINATION OF ROTATING CONCAVE MIRROR AND BEAM STEERING DEVICES

The present disclosure describes a system and method for coaxial LiDAR scanning. The system includes a first light source configured to provide first light pulses. The system also includes one or more beam steering apparatuses optically coupled to the first light source. Each beam steering apparatus comprises a rotatable concave reflector and a light beam steering device disposed at least partially within the rotatable concave reflector. The combination of the light beam steering device and the rotatable concave reflector, when moving with respect to each other, steers the one or more first light pulses both vertically and horizontally to illuminate an object within a field-of-view; obtain one or more first returning light pulses, the one or more first returning light pulses being generated based on the steered first light pulses illuminating an object within the field-of-view, and redirects the one or more first returning light pulses. 1. A light detection and ranging (LiDAR) scanning system , comprising:a first light source configured to provide one or more first light pulses; andone or more beam steering apparatuses optically coupled to the first light source, each beam steering apparatus comprising a rotatable concave reflector and a light beam steering device, wherein the combination of the light beam steering device and the rotatable concave reflector, when moving with respect to each other, is configured to:steer the one or more first light pulses both vertically and horizontally to illuminate an object within a field-of-view,obtain one or more first returning light pulses, the one or more first returning light pulses being generated based on the steered first light pulses illuminating an object within the field-of-view, andredirect the one or more first returning light pulses to one or more receiving optical systems disposed in the LiDAR scanning system.2. The system of claim 1 , wherein the rotatable concave reflector comprises a plurality of polygon-shaped ...

METHOD AND SYSTEM FOR ENCODING AND DECODING LiDAR

The present disclosure describes a system and method for encoding pulses of light for LiDAR scanning. The system includes a sequence generator, a light source, a modulator, a light detector, a correlator, and a microprocessor. The sequence generator generates a sequence code that the modulator encodes into a pulse of light from the light source. The encoded pulse of light illuminates a surface of an object, in which scattered light from the encoded light pulse is detected. The correlator correlates the scattered light with the sequence code that outputs a peak value associated with a time that the pulse of light is received. The microprocessor is configured to determine a time difference between transmission and reception of the pulse of light based on whether the amplitude of the peak exceeds the threshold value. The microprocessor calculates a distance to the surface of the object based on the time difference. 1. A light detection and ranging (LiDAR) scanning system , comprising:a light source, wherein the light source is configured to transmit a pulse of light to illuminate a surface of an object;a modulator operable to encode the pulse of light with a sequence code in response to a signal from a sequence generator;a light detector configured to detect a pulse of scattered light from the surface of the object originating from the light pulse;a correlator electrically coupled to the light detector, wherein the correlator is configured to correlate the pulse of scattered light with the sequence code and output a peak value associated with a time that the pulse of scattered light is received, and determine whether an amplitude of the peak value exceeds a threshold value;', determine a time difference between a time that pulse of light was transmitted and the time that the pulse of light is received; and', 'calculate a distance to the surface of the object based on the time difference., 'in accordance with a determination that the amplitude of the peak exceeds the ...

MULTIWAVELENGTH LIDAR DESIGN

A method for enabling light detection and ranging (LiDAR) scanning is provided. The method is performed by a system disposed or included in a vehicle. The method comprises receiving a first laser signal. The first laser signal has a first wavelength. The method further includes generating a second laser signal based on the first laser signal. The second laser signal has a second wavelength. The method further includes providing a plurality of third laser signals based on the second laser signal; and delivering a corresponding third laser signal of the plurality of third laser signals to a respective LiDAR scanner of the plurality of LiDAR scanners. Each of the LiDAR scanners are disposed at a separate location of the vehicle such that each of the LiDAR scanners is capable of scanning a substantial different spatial range from another LiDAR scanner. LiDAR systems can use multi-wavelength to provide other benefits as well. 1. A method for enabling light detection and ranging (LiDAR) scanning , the method being performed by a system disposed or included in a mounting object , comprising:receiving a first laser signal, the first laser signal having a first wavelength, wherein the first wavelength is within a wavelength range detectable by a first plurality of LiDAR scanners and is outside of a wavelength range detectable by a second plurality of LiDAR scanners; andgenerating a second laser signal based on the first laser signal, the second laser signal having a second wavelength, wherein the second wavelength is outside of a wavelength range detectable by the first plurality of LiDAR scanners and is within the wavelength range detectable by the second plurality of LiDAR scanners;2. The method of claim 1 , the method further comprising:providing a plurality of third laser signals based on the first laser signal;providing a plurality of fourth laser signals based on the second laser signal; anddelivering a corresponding third laser signal of the plurality of third laser ...

METHOD AND SYSTEM FOR ENCODING AND DECODING LiDAR

The present disclosure describes a system and method for encoding pulses of light for LiDAR scanning. The system includes a sequence generator, a light source, a modulator, a light detector, a correlator, and a microprocessor. The sequence generator generates a sequence code that the modulator encodes into a pulse of light from the light source. The encoded pulse of light illuminates a surface of an object, in which scattered light from the encoded light pulse is detected. The correlator correlates the scattered light with the sequence code that outputs a peak value associated with a time that the pulse of light is received. The microprocessor is configured to determine a time difference between transmission and reception of the pulse of light based on whether the amplitude of the peak exceeds the threshold value. The microprocessor calculates a distance to the surface of the object based on the time difference. 120.-. (canceled)21. A method , comprising:transmitting, with a light source, a pulse group signal, wherein the pulse group signal comprises a plurality of pulses having a characteristic;receiving a returned pulse group signal, wherein the returned pulse group signal corresponds to the transmitted pulse group signal scattered from a surface;correlating the returned pulse group signal with the transmitted pulse group signal based on the characteristic;determining a time difference between (1) a time associated with the transmitted pulse group signal and (2) a time associated with the returned pulse group signal; andcalculating a distance from the light source to the surface based on the time difference.22. The method of claim 21 , wherein the characteristic is a number of pulses in the transmitted pulse group signal.23. The method of claim 21 , wherein the characteristic is a pulse width of the pulse group signal.24. The method of claim 21 , wherein the characteristic is an amplitude of the pulse group signal.25. The method of claim 21 , wherein the ...

LIDAR DETECTION SYSTEMS AND METHODS

Embodiments discussed herein refer to a relatively compact and energy efficient LiDAR system that can be mounted to a windshield on the interior cabin portion of a vehicle. In order to accommodate the relatively compact size of the LiDAR system, multiple moveable components are used to ensure that a desired resolution is captured in the system's field of view. 1. A light detection and ranging (LiDAR) system for use with a vehicle , comprising: a transceiver module operative to transmit and receive light energy, the transceiver module comprising at least one lens that defines a vertical angle of a field of view of the LiDAR system;', redirect light energy transmitted from the transceiver module away from the housing; and', 'redirect light energy reflected from an object within the field of view of the LiDAR system to the transceiver module;, 'a polygon structure that defines a lateral angle of the field of view of the LiDAR system, the polygon structure operative to, 'a moveable platform coupled to the transceiver module, the moveable platform operative to move the transceiver module in a manner that results in an increase of resolution of a scene captured within the field of view., 'a housing configured to be mounted to a windshield of the vehicle, the housing comprising2. The LiDAR system of claim 1 , wherein the transceiver module comprises:a light source;wherein the at least one lens that defines a vertical angle of a field of view of the LiDAR system is included as part of a lens group that defines the vertical angle of a field of view; anda detector group.3. The LiDAR system of claim 2 , wherein the light source is a fiber optic light source.4. The LiDAR system of claim 2 , wherein the light source is a silicon based emitter light source claim 2 , the system further comprising a metal based printed circuit board (PCB) and driver circuitry mounted to the metal based PCB.5. The LiDAR system of claim 2 , wherein the light source comprises a plurality of silicon ...

HOT-PLUG CAPABLE INPUT AND OUTPUT (IO) SUBSYSTEM

An IO subsystem chassis includes IO modules and IO slots to receive the IO modules inserted from a frontend of a housing, a baseboard disposed within the housing, the baseboard including first connectors corresponding to the IO slots to receive and connect the IO modules. Each of the IO modules can be coupled a server via the backend panel using a cable. Each IO module includes an IO card having a peripheral device mounted thereon and a card holder having a first receiving socket to receive and hold the IO card plugged in vertically and downwardly. The card holder further includes a second connector to engage with or disengage from a corresponding one of the first connectors of the baseboard horizontally, when the IO module is inserted into or removed from a corresponding IO slot from the frontend, without having to removing the housing. 1. An input and output (IO) subsystem chassis , comprising:a plurality of IO modules;a housing having a frontend and a backend, the housing including a plurality of IO slots to receive the plurality of IO modules inserted from the frontend of the housing; anda baseboard disposed within the housing, the baseboard including a plurality of first connectors corresponding to the IO slots to receive and connect the plurality of IO modules, wherein each of the IO modules can be coupled a server via the backend panel using a cable, an IO card having a peripheral device mounted thereon, and', 'a card holder having a first receiving socket to receive and hold the IO card plugged in vertically and downwardly, wherein the card holder further includes a second connector to engage with or disengage from a corresponding one of the first connectors of the baseboard horizontally, when the IO module is inserted into or removed from a corresponding IO slot from the frontend, without having to removing the housing., 'wherein each of the IO modules comprises'}2. The IO subsystem chassis of claim 1 , wherein the IO card is inserted into or removed from ...

LIDAR SYSTEMS AND METHODS WITH BEAM STEERING AND WIDE ANGLE SIGNAL DETECTION

Embodiments discussed herein refer to using LiDAR systems for steering consecutive light pulses using micro electro-mechanical system (MEMS) to illuminate objects in a field of view. Embodiments discussed herein also refer to using a multiple lens array to process returned light pulses. 1. A light detection and ranging (LiDAR) system , comprising: a micro-electrical mechanical system (MEMS) structure; and', 'a mirror;, 'a beam steering system comprisinga laser system operative to emit light pulses that are steered by the beam steering system such that each emitted light pulse is steered along an optical path within a field of view (FOV); and an optical lens; and', 'a detector array comprising a plurality of detector segments; and, 'receiver system operative to receive return pulses from the FOV, the receiver system comprising activate a subset of the detector segments based on the optical path;', 'deactivate the detector segments not included within the subset; and', 'process a return pulse detected by the activated subset of detector segments., 'control circuitry operative to2. The LiDAR system of claim 1 , wherein the MEMS structure is a MEMS polygon.3. The LiDAR system of claim 1 , wherein the MEMS structure is a liquid crystal.4. The LiDAR system of claim 1 , wherein the MEMS structure comprises at least one micro mirror.5. The LiDAR system of claim 1 , wherein the optical lens is a wide angle lens.6. The LiDAR system of claim 1 , wherein the detector array is positioned at or near a focal plane of the optical lens.7. The LiDAR system of claim 1 , wherein the control circuitry is operative to register the optical path with the selective activation of the subset of detector segments such that only the subset of detector segments is active to receive the return pulse.8. The LiDAR system of claim 1 , wherein a deactivated detector segment is powered off and wherein an activated detector segment is powered on.9. The LiDAR system of claim 1 , wherein the beam ...

LIDAR SYSTEMS AND METHODS FOR EXERCISING PRECISE CONTROL OF A FIBER LASER

Embodiments discussed herein refer to LiDAR systems and methods that enable substantially instantaneous power and frequency control over fiber lasers. The systems and methods can simultaneously control seed laser power and frequency and pump power and frequency to maintain relative constant ratios among each other to maintain a relatively constant excited state ion density of the fiber laser over time. 1. A light detection and ranging (LiDAR) system , comprising: a seed laser; and', 'a pump;, 'a fiber laser having an excited state ion density and comprisingseed driver circuitry coupled to the seed laser;pump driver circuitry coupled to the pump; andcontrol circuitry coupled to the seed driver circuitry and the pump driver circuitry, the control circuitry operative to control operation of the seed driver circuitry and the pump driver circuitry to maintain the excited state ion density substantially constant over time.2. The LiDAR system of claim 1 , wherein the control circuitry executes an ion density stabilization algorithm to generate seed parameters that control the seed driver circuitry and pump parameters that control the pump driver circuitry.3. The LiDAR system of claim 1 , wherein the control circuitry receives a plurality of inputs that are provided to the ion density stabilization algorithm.4. The LiDAR system of claim 1 , wherein by maintaining the excited state ion density substantially constant over time claim 1 , an output power of the fiber laser can change to any output power level on a pulse-to-pulse basis.5. The LiDAR system of claim 1 , wherein by maintaining the excited state ion density substantially constant over time claim 1 , a repetition rate of the fiber laser can change to any desired repetition rate on a pulse-to-pulse basis.6. The LiDAR system of claim 5 , wherein an output pulse peak power level of the fiber laser remains substantially constant when the repetition rate changes.7. The LiDAR system of claim 1 , wherein in a power saving ...

RECEIVE PATH FOR LIDAR SYSTEM

In accordance with some embodiments, a light detection and ranging (LiDAR) system comprises: a light source configured to generate a pulse signal from the LiDAR system; one or more mirrors configured to steer a returned light pulse associated with the transmitted pulse signal along an optical receive path; a field lens positioned along the optical receive path, wherein the field lens is configured to redirect the returned light pulse; a fiber having a receiving end configured to receive the returned light pulse from the field lens along the optical receive path; and a light detector configured to receive the returned light pulse from an end of the fiber opposite the receiving end. 1. A light detection and ranging (LiDAR) system comprising:a light source configured to generate a pulse signal from the LiDAR system;one or more mirrors configured to steer a returned light pulse associated with the transmitted pulse signal along an optical receive path;a field lens positioned along the optical receive path, wherein the field lens is configured to redirect the returned light pulse;a fiber having a receiving end configured to receive the returned light pulse from the field lens along the optical receive path; anda light detector configured to receive the returned light pulse from an end of the fiber opposite the receiving end.2. The LiDAR system of claim 1 , wherein the field lens is configured to reduce walk-off error associated with the one or more mirrors.3. The LiDAR system of claim 1 , wherein the one or more mirrors include a polygon mirror configured to rotate.4. The LiDAR system of claim 3 , wherein the polygon mirror is also configured to direct the transmitted pulse signal from the LiDAR system.5. The LiDAR system of claim 1 , wherein the one or more mirrors include a parabolic mirror.6. The LiDAR system of further comprising:one or more lenses between and the end of the fiber opposite the receiving end and the light detector.7. The LiDAR system of further ...

LIDAR SYSTEMS WITH FIBER OPTIC COUPLING

Embodiments discussed herein refer to LiDAR systems that use diode lasers to generate a high-repetition rate and multi-mode light pulse that is input to a fiber optic cable that transmits the light pulse to a scanning system. 1. A light detection and ranging (LiDAR) system , comprising: control circuitry; and', 'a multi-diode laser and optical fiber coupling (MDOFC) coupled the control circuitry and operative to generate an integrated light beam derived from a plurality of light beams;, 'a control system constructed to be contained within an interior portion of a vehicle, the control system comprisinga scanning system constructed to be mounted to an exterior portion of the vehicle; anda fiber optic cable coupled to the MDOFC and the scanning system, wherein the fiber optic cable transmits the integrated light beam to the scanning system.2. The LiDAR system of claim 1 , wherein the MDOFC is a first of a plurality of MDFOCs claim 1 , and wherein fiber optic cable comprises a plurality of optical fibers claim 1 , and wherein each of the plurality of MDFOCs is coupled to a respective one of the plurality of optical fibers.3. The LiDAR system of claim 1 , wherein the MDOFC comprises a stack of at least two coupled pairs of laser diodes.4. The LiDAR system of claim 3 , wherein outputs of a first of the at least two coupled pairs of laser diodes generate a first integrated beam that is directed along a first plane claim 3 , and wherein outputs of a second of the least two coupled pairs generate a second integrated beam that is directed along a second plane claim 3 , wherein the first and second planes are offset by a fixed distance.5. The LiDAR system of claim 4 , wherein the first and second integrated beams form a third integrated beam that is input into the fiber optic cable.6. The LiDAR system of claim 1 , wherein the MDOFC comprises:first, second, third, and fourth diode sub-systems each operative to emit respective first, second, third, and fourth light pulses;first ...

LIDAR DETECTION SYSTEMS AND METHODS WITH HIGH REPETITION RATE TO OBSERVE FAR OBJECTS

Embodiments discussed herein refer to LiDAR systems that accurately observe objects that are relatively close and objects that are relatively far using systems and methods that employ a variable time interval between successive laser pulses and one or more filters. 1. A light detection and ranging (LiDAR) system , comprising: a laser;', 'time interval adjustment circuitry operative to generate variable time intervals; and', 'transmission control circuitry coupled to the laser and the time interval adjustment circuitry, wherein the control circuitry is operative to cause the laser to emit transmission pulses in accordance with the variable time intervals; and, 'a transmission system comprising a receiver operative to detect return pulses that are consequences of the transmission pulses; and', for each detected return pulse, calculate a plurality of object distances based on a plurality of successive transmission pulses;', 'compare at least two calculated object distances corresponding to a currently detected return pulse to at least two calculated distance objects corresponding to a previously detected return pulse to filter out calculated distance objects that fail filter criteria; and', 'provide object distances that pass the filter criteria as data points for constructing an image of objects observed by the LiDAR system., 'receiver control circuitry coupled to receive an output of the receiver and the variable time interval, the receiver control circuitry operative to], 'a receiver system comprising2. The LiDAR system of claim 1 , wherein the variable time interval changes for each transmission pulse.3. The LiDAR system of claim 1 , wherein the variable time interval is randomly selected between a minimum time interval and a maximum time interval.4. The LiDAR system of claim 1 , wherein the variable time interval is selected from a series of predetermined numbers.5. The LiDAR system of claim 3 , wherein a difference between the time interval of immediate ...

DISTRIBUTED LIDAR SYSTEMS

In accordance with some embodiments, a light detection and ranging (LiDAR) system comprise: a control system housing; a first LiDAR head housing separate and distinct from the control system housing; a light source within the control system housing configured to produce a first pulse signal; a light detector within the control system housing configured to detect a first return pulse signal associated with the pulse signal; a first pulse steering system within the first LiDAR housing configured to direct the first pulse signal in a first direction; a first fiber coupled to the light source and the first pulse steering system, the first fiber configured to carry the first pulse signal from the light source to the first pulse steering system; and a second fiber configured to carry a first returned pulse signal from the first LiDAR head housing to the light detector. 1. A light detection and ranging (LiDAR) system comprising:a light source housing;a light source mounted within the light source housing and configured to generate a pulse signal;a plurality of pre-amplifiers mounted within the light source housing and configured output an amplified pulse signal based on the pulse signal;a first laser pump configured to output a first pumping signal;a first fiber connector coupled to the light source housing and capable of outputting a first output pulse signal at a first power, wherein the first output pulse signal is based on the amplified pulse signal;a second fiber connector coupled to the light source housing and capable of outputting a second output signal based on the first pumping signal, wherein the second output signal is at a second power higher than the first power;a LiDAR head housing separate from the light source housing;a first fiber coupled to the LiDAR head housing and couplable to the first fiber connector;a second fiber to the LiDAR head housing and couplable to the second fiber connector;a combiner mounted in the LiDAR head housing and coupled to the ...

2-DIMENSIONAL STEERING SYSTEM FOR LIDAR SYSTEMS

A light detection and ranging (LiDAR) system includes a rotatable polygon having a plurality of reflective sides including a first reflective side. The rotatable polygon configured to scan one or more first light signals in a first direction. The LiDAR system also includes a scanning optic configured to scan the one or more first light signals in a second direction different than the first direction. A first light source is configured to direct the one or more first light signals to one or more of the plurality of reflective sides of the rotatable polygon or the scanning optic. A first detector is configured to detect a first return light signal associated with a signal of the one or more first light signals. One or more optics are configured to focus the first return light signal on the first detector. 1. A light detection and ranging (LiDAR) system comprising:a rotatable polygon having a plurality of reflective sides including a first reflective side, the rotatable polygon configured to scan one or more first light signals in a first direction;a scanning optic configured to scan the one or more first light signals in a second direction different than the first direction;a first light source configured to direct the one or more first light signals to one or more of the plurality of reflective sides of the rotatable polygon and the scanning optic;a first detector configured to detect a first return light signal associated with a signal of the one or more first light signals; andone or more optics configured to focus the first return light signal on the first detector.2. The system of further comprising:a second light source configured to direct one or more second light signals, different from the one or more first light signals, to one or more of the plurality of reflective sides of the rotatable polygon and the scanning optic; anda second detector configured to detect a second return light signal associated with a signal of the one or more second light signals.3. ...

MULTI-WAVELENGTH PULSE STEERING IN LIDAR SYSTEMS

A LiDAR system includes a steering system and a light source. In some cases, the steering system includes a rotatable polygon with reflective sides and/or a dispersion optic. The light source produces light signals, such as light pulses. In some cases, the light sources products light pulses at different incident angles and/or different wavelengths. The steering system scans the light signals. In some cases, the light pulses are scanned based on the wavelength of the light pulses. 1. A light detection and ranging (LiDAR) system comprising:a rotatable polygon having a plurality of reflective sides including a first reflective side;a first light source configured to guide a first pulse signal of a first plurality of pulse signals to the first reflective side of the rotatable polygon, the first pulse signal having a first incident angle on the first reflective side and having a first wavelength; anda second light source configured to guide a second pulse signal of a second plurality of pulse signals to the first reflective side of the rotatable polygon, the second pulse signal having a second incident angle on the first reflective side and having a second wavelength.2. The system of further comprising:a mirror configured to scan the first plurality of pulse signals along a first direction and the second plurality of pulse signals along the first direction.3. The system of wherein the first direction is parallel to an axis of rotation for the rotatable polygon.4. The system of claim 1 , wherein a scan area associated with the first plurality of pulses is different than a scan area associated with the second plurality of pulses.5. The system of claim 1 , wherein a scan area associated with the first plurality of pulses does not overlap with a scan area associated with the second plurality of pulses.6. The system of claim 1 , wherein the first pulse has a higher power than the second pulse.7. The system of claim 1 , wherein the first plurality of pulses have a higher ...

DISTRIBUTED LIDAR SYSTEMS

In accordance with some embodiments, a light detection and ranging (LiDAR) system comprises: a control system housing; a first LiDAR head housing separate and distinct from the control system housing; a light source within the control system housing, the light source configured to produce a first pulse signal; a light detector within the control system housing configured to detect a first return pulse signal associated with the pulse signal; a first pulse steering system within the first LiDAR head housing, the first pulse steering system configured to direct the first pulse signal in a first direction; a first fiber configured to carry the first pulse signal from the light source to the first pulse steering system; and a second fiber configured to carry a first returned pulse signal from the first LiDAR head housing to the light detector. 1. A light detection and ranging (LiDAR) system comprising:a control system housing;a first LiDAR head housing separate and distinct from the control system housing;a light source within the control system housing, the light source configured to produce a first pulse signal;a light detector within the control system housing configured to detect a first return pulse signal associated with the pulse signal;a first pulse steering system within the first LiDAR head housing, the first pulse steering system configured to direct the first pulse signal in a first direction;a first fiber coupled to the light source and the first pulse steering system, the first fiber configured to carry the first pulse signal from the light source to the first pulse steering system; anda second fiber coupled to the light detector and the first pulse steering system, the second fiber configured to carry a first returned pulse signal from the first LiDAR head housing to the light detector.2. The LiDAR system of claim 1 , wherein the light source is further configured to produce a second pulse signal and the light detector is further configured to detect a ...

HIGH RESOLUTION LIDAR USING MULTI-STAGE MULTI-PHASE SIGNAL MODULATION, INTEGRATION, SAMPLING, AND ANALYSIS

The present disclosure describes techniques for implementing high resolution LiDAR using multiple-stage multiple-phase signal modulation, integration, sampling, and analysis technique. In one embodiment, a system includes a pulsed light source, one or more optional beam steering apparatus, an optional optical modulator, an optional imaging optics, a light detection with optional modulation capability, and a microprocessor. The optional beam steering apparatus is configured to steer a transmitted light pulse. A portion of the scattered or reflected light returns and optionally goes through a steering optics. An optional optical modulator modulates the returning light, going through the optional beam steering apparatus, and generates electrical signal on the detector with optional modulation. The signal from the detector can be optionally modulated on the amplifier before digitally sampled. One or multiple sampled integrated signals can be used together to determine time of flight, thus the distance, with robustness and reliability against system noise. 1. A light detection and ranging (LiDAR) system , comprising:a first light source configured to transmit one or more light pulses through a light emitting optics;a light receiving optics configured to receive one or more returned light pulses corresponding to the transmitted one or more light pulses, wherein the returned light pulses are reflected or scattered from an object in a field-of-view of the LiDAR system;a light detection device configured to convert at least a portion of the received one or more returned light pulses into an electrical signal; 'wherein at least one of the signal processing device, light receiving optics and the light detection device is further configured to modulate one or more signals with respect to time in accordance with a modulation function;', 'a signal processing device configured to process the converted electrical signal, wherein the processing includes amplifying, attenuating or ...

LIDAR SAFETY SYSTEMS AND METHODS

Embodiments discussed herein refer to LiDAR systems and methods that monitor for fault conditions that could potentially result in unsafe operation of a laser. The systems and methods can monitor for faulty conditions involving a transmitter system and movement of mirrors in a scanning system. When a fault condition is monitored, a shutdown command is sent to the transmitter system to cease laser transmission. The timing by which the laser should cease transmission is critical in preventing unsafe laser exposure, and embodiments discussed herein enable fault detection and laser shutoff to comply with laser safety standards. 135.-. (canceled)36. A light detection and ranging (LiDAR) system , comprising:a transmitter system comprising a fiber laser; 'at least a first mirror operative to move according to a first motor motion, wherein the at least the first mirror at least partially controls directionality of laser pulses originating from the fiber laser; and', 'a scanning system comprising monitor the first motor motion and the transmitter system for a fault condition;', 'detect occurrence of the fault condition; and', 'instruct the fiber laser to shut down in response to a detected fault condition., 'monitoring circuitry operative to37. The LiDAR system of claim 36 , wherein the scanning system further comprises a second mirror operative to move according to a second motor motion claim 36 , wherein the first and second mirrors control directionality of laser pulses originating from the fiber laser claim 36 , and where the monitoring circuitry is further operative to:monitor the first motor motion, the second motor motion, and the transmitter system for a fault condition.38. The LiDAR system of claim 37 , wherein a first fault condition is improper operation of the first mirror claim 37 , and claim 37 , wherein a second fault condition is improper operation of the second mirror.39. The LiDAR system of claim 38 , wherein a third fault condition is improper operation of ...

NONDESTRUCTIVE INLINE X-RAY METROLOGY WITH MODEL-BASED LIBRARY METHOD

Described is a method and system for measuring parameters of a structure on a substrate, such as a via or a through-silicon via (TSV) using an imaging X-ray metrology system. A previously-trained Support Vector Machine (SVM) model is used to extract structure parameters from the acquired structure X-ray images. Training of the Support Vector Machine (SVM) model is accomplished by using a library of actual or simulated X-ray images, or a combination of the two image types, paired with structure parameter sets.

COMPENSATION CIRCUITRY FOR LIDAR RECEIVER SYSTEMS AND METHOD OF USE THEREOF

Embodiments discussed herein refer to LiDAR systems that use avalanche photo diodes for detecting returns of laser pulses. The bias voltage applied to the avalanche photo diode is adjusted to ensure that it operates at desired operating capacity. 1. A light detection and ranging (LiDAR) system , comprising: an avalanche photo diode (APD) having first and second terminals, the APD having an avalanche voltage threshold, wherein the avalanche voltage threshold is temperature dependent;', 'a variable voltage source coupled to the first terminal, the variable voltage source operative to apply a bias voltage to the first terminal;', 'an amplifier coupled to the second terminal; and', 'a controller coupled to the variable voltage source and operative to adjust a magnitude of the bias voltage applied to the first terminal to ensure that the applied bias voltage does not exceed the avalanche voltage threshold., 'a scanning system comprising2. The LiDAR system of claim 1 , wherein the scanning system further comprises a temperature sensor that monitors a temperature associated with the APD claim 1 , and wherein the controller is operative to:receive a temperature from the temperature sensor; andadjust the applied bias voltage based on the received temperature.3. The LiDAR system of claim 2 , wherein the controller is operative to:access a look-up table to determine the applied bias voltage based on the received temperature.4. The LiDAR system of claim 2 , wherein the temperature sensor is coupled to the controller.5. The LiDAR system of claim 1 , wherein an output of the amplifier is coupled to the controller.6. The LiDAR system of claim 5 , wherein the controller is operative to:conduct a bias voltage calibration sweep that sweeps the applied bias voltage across a range of applied bias voltages;monitor the output during the bias voltage calibration sweep;determine the avalanche threshold voltage based on the monitored output; andset the applied bias voltage to an optimal ...

LIDAR SYSTEMS AND METHODS FOR FOCUSING ON RANGES OF INTEREST

Embodiments discussed herein refer to LiDAR systems to focus on one or more regions of interests within a field of view. 1. A light detection and ranging (LiDAR) system , comprising: a polygon structure; and', 'a mirror coupled to a mirror controller that controls movement speed and direction of the mirror;, 'a beam steering system comprisinga laser system operative to emit light pulses that are steered by the beam steering system in accordance with a field of view (FOV); and 'coordinate the movement speed of the mirror and light pulse intervals when the light pulses emitted by the laser system are steered to at least one ROI within the FOV.', 'a region of interest (ROI) controller coupled to the beam steering system and the laser system, the ROI controller operative to2. The LiDAR system of claim 1 , wherein the ROI controller is operative to:for light pulses steered towards the at least one ROI, control the movement speed of the mirror such that it is slower compared to the movement speed of the mirror when the light pulses are steered towards a non-ROI.3. The LiDAR system of claim 1 , wherein the ROI controller is operative to:adjust the movement speed of the mirror based on a beam steering angle within the FOV.4. The LiDAR system of claim 1 , wherein the ROI controller is operative to:adjust a repetition rate of the light pulses based on the beam steering angle.5. The LiDAR system of claim 1 , wherein the ROI controller is operative to: set the movement speed to a ROI movement speed; and', 'set the repetition rate to a ROI repetition rate; and, 'when the beam steering system is directed to an ROI set the movement speed to a non-ROI movement speed; and', 'set the repetition rate to a non-ROI repetition rate, wherein the ROI movement speed is slower than the non-ROI movement speed, and wherein the ROI repetition rate is faster than the non-ROI repetition rate., 'when the beam steering system is directed to a non-ROI6. The LiDAR system of claim 5 , wherein the beam ...

LIDAR WITH LARGE DYNAMIC RANGE

A method for expanding a dynamic range of a light detection and ranging (LiDAR) system is provided. The method comprises transmitting, using a light source of the LiDAR system, a sequence of pulse signals consisting of two or more increasingly stronger pulse signals. The method further comprises receiving, using a light detector of the LiDAR system, one or more returned pulse signals corresponding to the transmitted sequence of pulse signals. The one or more returned pulse signals are above the noise level of the light detector. The method further comprises selecting a returned pulse signal within the dynamic range of the light detector, identifying a transmitted pulse signal of the transmitted sequence that corresponds to the selected returned pulse signal, and calculating a distance based on the selected returned signal and the identified transmitted signal. 131-. (canceled)32. A computer-implemented method for expanding a dynamic range of a light detector of a light detection and ranging (LiDAR) system , the method comprising:receiving, using the light detector of the LiDAR system, one or more returned pulse signals corresponding to a plurality of transmitted pulse signals, wherein at least two of the plurality of transmitted pulse signals having different power levels;selecting a returned pulse signal from the one or more returned pulse signals, wherein the selected returned pulse signal is within the dynamic range of the light detector;identifying a transmitted pulse signal of the plurality of transmitted pulse signals that corresponds to the selected returned pulse signal; andcalculating a distance based on the selected returned pulse signal and the identified transmitted pulse signal.33. The method of claim 32 , wherein a power ratio between two neighboring pulse signals of the plurality of transmitted pulse signals does not exceed the dynamic range of the light detector.34. The method of claim 32 , wherein the selected returned pulse signal is a first ...

SYSTEMS AND APPARATUSES FOR MITIGATING LIDAR NOISE, VIBRATION, AND HARSHNESS

An isolation system for a light detection and ranging (LiDAR) optical core assembly is provided. The LiDAR optical core assembly comprises a polygon-motor rotating element, an oscillating reflective element, and transmitting and collection optics. The isolation system comprises a polygon-motor base element coupled to the polygon-motor rotating element and a plurality of isolators substantially fixed to the polygon-motor base element and disposed relative to each other around a spatial location determined based on a center of gravity of at least one of the optical core assembly and the polygon-motor rotating element. The plurality of isolators is adapted to mitigate acoustic noise caused by at least the polygon-motor rotating element during operation of the optical core assembly.

Generation and use of integrated circuit profile-based simulation information

An exemplary method and system for generating integrated circuit (IC) simulation information regarding the effect of design and fabrication process decisionn includes creating and using a data store of profile-based information comprising metrology signal, structure profile data, process control parameters, and IC simulation attributes. An exemplary method and system for generating a simulation data store using signals off test gratings that model the effect of an IC design and/or fabrication process includes creating and using a simulation data store generated using test gratings that model the geometries of the IC interconnects. The interconnect simulation data store may be used in-line for monitoring electrical and thermal properties of an IC device during fabrication. Other embodiments include utilizing a metrology simulator and various combinations of a fabrication process simulator, a device simulator, and/or circuit simulator.

Metrology hardware specification using a hardware simulator

A method and system in metrology for integrated circuits, for incorporating the effects of small metrology hardware-based and material-based parameter variations into a library of simulated diffraction spectra. In a first embodiment, a method is disclosed for determining metrology hardware specification ranges that correspond to specified CD measurement accuracy. In a second embodiment, a method for modifying a library of simulated diffraction spectra for optimization to the particular parameters of a specific piece of metrology hardware and specific material batches is disclosed.

Selection of wavelengths for integrated circuit optical metrology

Specific wavelengths to use in optical metrology of an integrated circuit can be selected using one or more selection criteria and termination criteria. Wavelengths are selected using the selection criteria, and the selection of wavelengths is iterated until the termination criteria are met.

Optical metrology of single features

The profile of a single feature formed on a wafer can be determined by obtaining an optical signature of the single feature using a beam of light focused on the single feature. The obtained optical signature can then be compared to a set of simulated optical signatures, where each simulated optical signature corresponds to a hypothetical profile of the single feature and is modeled based on the hypothetical profile.

Model and parameter selection for optical metrology

A profile model for use in optical metrology of structures in a wafer is selected, the profile model having a set of geometric parameters associated with the dimensions of the structure. A set of optimization parameters is selected for the profile model using one or more input diffraction signals and one or more parameter selection criteria. The selected profile model and the set of optimization parameters are tested against one or more termination criteria. The process of selecting a profile model, selecting a set of optimization parameters, and testing the selected profile model and set of optimization parameters is performed until the one or more termination criteria are met.

Optical metrology optimization for repetitive structures

The top-view profiles of repeating structures in a wafer are characterized and parameters to represent variations in the top-view profile of the repeating structures are selected. An optical metrology model is developed that includes the selected top-view profile parameters of the repeating structures. The optimized optical metrology model is used to generate simulated diffraction signals that are compared to measured diffraction signals.

Method and system for encoding and decoding LiDAR

The present disclosure describes a system and method for encoding pulses of light for LiDAR scanning. The system includes a sequence generator, a light source, a modulator, a light detector, a correlator, and a microprocessor. The sequence generator generates a sequence code that the modulator encodes into a pulse of light from the light source. The encoded pulse of light illuminates a surface of an object, in which scattered light from the encoded light pulse is detected. The correlator correlates the scattered light with the sequence code that outputs a peak value associated with a time that the pulse of light is received. The microprocessor is configured to determine a time difference between transmission and reception of the pulse of light based on whether the amplitude of the peak exceeds the threshold value. The microprocessor calculates a distance to the surface of the object based on the time difference.

MEMS beam steering and fisheye receiving lens for LiDAR system

The present disclosure describes a system and method for a binocular LiDAR system. The system includes a light source, a beam steering apparatus, a receiving lens, a light detector. The light source is configured to transmit a pulse of light. The beam steering apparatus is configured to steer the pulse of light in at least one of vertical and horizontal directions along an optical path. The lens is configured to direct the collected scattered light to the light detector. The electrical processing and computing device is electrically coupled to light source and the light detector. The light detector is configured to minimize the background noise. The distance to the object is based on a time difference between transmitting the light pulse and detecting scattered light.

High resolution LiDAR using high frequency pulse firing

In accordance with some embodiments, a light detection and ranging (LiDAR) scanning system includes a light source. The light source is configured to transmit a pulse of light. The LiDAR scanning system also includes a beam steering apparatus configured to steer the pulse of light in at least one of vertically and horizontally along an optical path. The beam steering apparatus is further configured to concurrently collect scattered light generated based on the light pulse illuminating an object in the optical path. The scattered light is coaxial or substantially coaxial with the optical path. The LiDAR scanning system further includes a light converging apparatus configured to direct the collected scattered light to a focal point. The LiDAR scanning system further includes a light detector, which is situated substantially at the focal point. In some embodiments, the light detector can include an array of detectors or detector elements.

LiDAR systems and methods for exercising precise control of a fiber laser

Embodiments discussed herein refer to LiDAR systems and methods that enable substantially instantaneous power and frequency control over fiber lasers. The systems and methods can simultaneously control seed laser power and frequency and pump power and frequency to maintain relative constant ratios among each other to maintain a relatively constant excited state ion density of the fiber laser over time.

Multiwavelength LiDAR design

A method for enabling light detection and ranging (LiDAR) scanning is provided. The method is performed by a system disposed or included in a vehicle. The method comprises receiving a first laser signal. The first laser signal has a first wavelength. The method further includes generating a second laser signal based on the first laser signal. The second laser signal has a second wavelength. The method further includes providing a plurality of third laser signals based on the second laser signal; and delivering a corresponding third laser signal of the plurality of third laser signals to a respective LiDAR scanner of the plurality of LiDAR scanners. Each of the LiDAR scanners are disposed at a separate location of the vehicle such that each of the LiDAR scanners is capable of scanning a substantial different spatial range from another LiDAR scanner. LiDAR systems can use multi-wavelength to provide other benefits as well.

LiDAR detection systems and methods with high repetition rate to observe far objects

Embodiments discussed herein refer to LiDAR systems that accurately observe objects that are relatively close and objects that are relatively far using systems and methods that employ a variable time interval between successive laser pulses and one or more filters.

Distributed lidar systems

In accordance with some embodiments, a light detection and ranging (LiDAR) system comprise: a control system housing; a first LiDAR head housing separate and distinct from the control system housing; a light source within the control system housing configured to produce a first pulse signal; a light detector within the control system housing configured to detect a first return pulse signal associated with the pulse signal; a first pulse steering system within the first LiDAR housing configured to direct the first pulse signal in a first direction; a first fiber coupled to the light source and the first pulse steering system, the first fiber configured to carry the first pulse signal from the light source to the first pulse steering system; and a second fiber configured to carry a first returned pulse signal from the first LiDAR head housing to the light detector.

LiDAR with large dynamic range

A method for expanding a dynamic range of a light detection and ranging (LiDAR) system is provided. The method comprises transmitting, using a light source of the LiDAR system, a sequence of pulse signals consisting of two or more increasingly stronger pulse signals. The method further comprises receiving, using a light detector of the LiDAR system, one or more returned pulse signals corresponding to the transmitted sequence of pulse signals. The one or more returned pulse signals are above the noise level of the light detector. The method further comprises selecting a returned pulse signal within the dynamic range of the light detector, identifying a transmitted pulse signal of the transmitted sequence that corresponds to the selected returned pulse signal, and calculating a distance based on the selected returned signal and the identified transmitted signal.

High density LIDAR scanning

The present disclosure describes a system and method for LiDAR scanning. The system includes a light source configured to generate one or more light beams; and a beam steering apparatus optically coupled to the light source. The beam steering apparatus includes a first rotatable mirror and a second rotatable mirror. The first rotatable mirror and the second rotatable mirror, when moving with respect to each other, are configured to: steer the one or more light beams both vertically and horizontally to illuminate an object within a field-of-view; redirect one or more returning light pulses generated based on the illumination of the object; and a receiving optical system configured to receive the redirected returning light pulses.

COMPACT LIDAR SYSTEMS FOR VEHICLE CONTOUR FITTING

An apparatus of a light detection and ranging (LiDAR) scanning system for at least partial integration with a vehicle is disclosed. The apparatus comprises an optical core assembly including an oscillating reflective element, an optical polygon element, and transmitting and collection optics. The apparatus includes a first exterior surface at least partially bounded by at least a first portion of a vehicle roof or at least a portion of a vehicle windshield. A surface profile of the first exterior surface aligns with a surface profile associated with at least one of the first portion of the vehicle roof or the portion of the vehicle windshield. A combination of the first exterior surface and the one or more additional exterior surfaces form a housing enclosing the optical core assembly including the oscillating reflective element, the optical polygon element, and the transmitting and collection optics.

LiDAR systems and methods for focusing on ranges of interest

Embodiments discussed herein refer to LiDAR systems to focus on one or more regions of interests within a field of view.

Method and system for encoding and decoding lidar

【課題】本開示は、ライダー走査のために光パルスを符号化するシステムおよび方法を提供する。【解決手段】システムは、シーケンス生成器、光源、変調器、光検出器、相関器、およびマイクロプロセッサを含む。シーケンス生成器は、シーケンスコードを生成し、変調器は、シーケンスコードを光源からの光パルスに符号化する。符号化された光パルスは、物体の表面を照明し、符号化された光パルスからの散乱光が検出される。相関器は、散乱光をシーケンスコードと相関させ、光パルスが受け取られた時間に関連付けられたピーク値を出力する。マイクロプロセッサは、ピークの振幅が閾値を超過するかどうかに基づいて、光パルスの伝送と受取りとの間の時間差を判定するように構成される。マイクロプロセッサは、時間差に基づいて物体の表面までの距離を計算する。【選択図】なし

Model and parameter selection for optical metrology

High resolution lidar using high frequency pulse firing

Model and parameter selection for optical metrology

Verfahren zur Auswahl eines Profilmodells und zur Auswahl von Parametern des Profilmodells zur Verwendung bei der optischen Metrologie von Strukturen in einem Wafer, wobei das Verfahren Folgendes umfaßt: a) Festlegen eines oder mehrerer Abbruchkriterien; b) Festlegen eines oder mehrerer Parameterauswahlkriterien; c) Auswählen eines Profilmodells zur Verwendung bei der optischen Metrologie einer Struktur in einem Wafer, wobei das Profilmodell einen Satz von geometrischen Parametern aufweist, die mit Abmessungen der Struktur verbunden sind; d) Auswählen eines Satzes von Optimierungsparametern für das Profilmodell unter Verwendung eines oder mehrerer Eingangsbeugungssignale und des einen oder der mehreren Parameterauswahlkriterien, wobei der Satz von Optimierungsparametern aus dem Satz von geometrischen Parametern umgewandelt wird; e) Prüfen des ausgewählten Profilmodells und des Satzes von Optimierungsparametern gegen das eine oder die mehreren Abbruchkriterien; und f) Durchführen der Schritte c, d und e, bis das eine oder die mehreren Abbruchkriterien erfüllt sind. A method of selecting a profile model and selecting parameters of the profile model for use in optical metrology of structures in a wafer, the method comprising: a) defining one or more termination criteria; b) determining one or more parameter selection criteria; c) selecting a profile model for use in optical metrology of a structure in a wafer, the profile model having a set of geometric parameters associated with dimensions of the structure; d) selecting a set of optimization parameters for the profile model using one or more input diffraction signals and the one or more parameter selection criteria, wherein the set of optimization parameters is converted from the set of geometric parameters; e) checking the selected profile model and the set of optimization parameters against the one or more termination criteria; and f) performing steps c, d and e until the one or more termination criteria are met.

Optical metrology optimization for repetitive structures

An optical metrology model for a structure to be formed on a wafer is developed by characterizing a top-view profile and a cross-sectional view profile of the structure using profile parameters. The profile parameters of the top-view profile and the cross-sectional view profile are integrated together into the optical metrology model. The profile parameters of the optical metrology model are saved.

Generic interface for an optical metrology system

An optical metrology system includes a photometric device with a source configured to generate and direct light onto a structure, and a detector configured to detect light diffracted from the structure and to convert the detected light into a measured diffraction signal. A processing module of the optical metrology system is configured to receive the measured diffraction signal from the detector to analyze the structure. The optical metrology system also includes a generic interface disposed between the photometric device and the processing module. The generic interface is configured to provide the measured diffraction signal to the processing module using a standard set of signal parameters. The standard set of signal parameters includes a reflectance parameter chat characterizes the change in intensity of light when reflected on the structure and a polarization parameter that characterizes the change in polarization states of light when reflected on the structure.

Profile refinement for integrated circuit metrology

The present invention includes a method and system (53) for determining the profile of a structure (59) in an integrated circuit from a measured signal, the signal measured off the structure with a metrology device (40), selecting a best match of the measured signal in a profile data space, the profile data space having data points with a specified extent of non-linearity, and performing a refinement procedure to determine refined profile parameters. One embodiment includes a refinement procedure comprising finding a polyhedron in a function domain of cost functions of the profile library signals and profile parameters and minimizing the total cost function using the weighted average method. Other embodiments include profile parameter refinement procedures using sensitivity analysis, a clustering approach, regression-based methods, localized fine-resolution refinement library method, iterative library refinement method, and other cost optimization or refinement algorithms, procedures, and methods. Refinement of profile parameters may be invoked automatically or invoked based on predetermined criteria such as exceeding an error metric between the measured signal versus the best match profile library.

Profile refinement for integrated circuit metrology

The present invention includes a method and system (53) for determining the profile of a structure (59) in an integrated circuit from a measured signal, the signal measured off the structure with a metrology device (40), selecting a best match of the measured signal in a profile data space, the profile data space having data points with a specified extent of non-linearity, and performing a refinement procedure to determine refined profile parameters. One embodiment includes a refinement procedure comprising finding a polyhedron in a function domain of cost functions of the profile library signals and profile parameters and minimizing the total cost function using the weighted average method. Other embodiments include profile parameter refinement procedures using sensitivity analysis, a clustering approach, regression-based methods, localized fine-resolution refinement library method, iterative library refinement method, and other cost optimization or refinement algorithms, procedures, and methods. Refinement of profile parameters may be invoked automatically or invoked based on predetermined criteria such as exceeding an error metric between the measured signal versus the best match profile library.

High density lidar scanning

The present disclosure describes a system and method for LiDAR scanning. The system includes a light source (102) configured to generate one or more light beams (107,109, 111,112A,112 B,112C); and a beam steering apparatus optically coupled to the light source. The beam steering apparatus includes a first rotatable mirror (108) and a second rotatable mirror (110). The first rotatable mirror and the second rotatable mirror, when moving with respect to each other, are configured to: steer the one or more light beams both vertically and horizontally to illuminate an object within a field-of-view; redirect one or more returning light pulses generated based on the illumination of the object; and a receiving optical system configured to receive the redirected returning light pulses.

Optical metrology model optimization based on goals

The optimization of an optical metrology model for use in measuring a wafer structure is evaluated. An optical metrology model having metrology model variables, which includes profile model parameters of a profile model, is developed. One or more goals for metrology model optimization are selected. One or more profile model parameters to be used in evaluating the one or more selected goals are selected. One or more metrology model variables to be set to fixed values are selected. One or more selected metrology model variables are set to fixed values. One or more termination criteria for the one or more selected goals are set. The optical metrology model is optimized using the fixed values for the one or more selected metrology model variables. Measurements for the one or more selected profile model parameters are obtained using the optimized optical metrology model. A determination is then made as to whether the one or more termination criteria are met by the obtained measurements.

Differential acoustic time of flight measurement of temperature of semiconductor substrates

Disclosed is a method and apparatus for measuring semiconductor substrate temperature using a differential acoustic time of flight measurement technique. The measurement is based on measuring the time of flight of acoustic (ultrasonic) waves across the substrate, and calculating a substrate temperature from the measured time of flight and the known temperature dependence of the speed of sound for the substrate material. The differential acoustic time of flight method eliminates most sources of interference and error, for example due to varying coupling between an ultrasonic transducer and the substrate. To further increase the accuracy of the differential acoustic time of flight measurement, a correlation waveform processing algorithm is utilized to obtain a differential acoustic time of flight measurement from two measured ultrasonic waveforms. To facilitate signal recognition and processing, a symmetric Lamb mode may be used as mode of excitation of the substrate.

Optical metrology model optimization based on goals

The optimization of an optical metrology model for use in measuring a wafer structure is evaluated. An optical metrology model having metrology model variables, which includes profile model parameters of a profile model, is developed. One or more goals for metrology model optimization are selected. One or more profile model parameters to be used in evaluating the one or more selected goals are selected. One or more metrology model variables to be set to fixed values are selected. One or more selected metrology model variables are set to fixed values. One or more termination criteria for the one or more selected goals are set. The optical metrology model is optimized using the fixed values for the one or more selected metrology model variables. Measurements for the one or more selected profile model parameters are obtained using the optimized optical metrology model. A determination is then made as to whether the one or more termination criteria are met by the obtained measurements.

Split machine learning systems

Split machine learning systems can be used to generate an output for an input. When the input is received, a determination is made as to whether the input is within a first, second, or third range of values. If the input is within the first range, the output is generated using a first machine learning system. If the input is within the second range, the output is generated using a second machine learning system. If the input is within the third range, the output is generated using the first and second machine learning systems.

Model and parameter selection for optical metrology

Examining a structure formed on a semiconductor wafer using machine learning systems

A structure formed on a semiconductor wafer is examined by obtaining a first diffraction signal measured from the structure using an optical metrology device. A first profile is obtained from a first machine learning system using the first diffraction signal obtained as an input to the first machine learning system. The first machine learning system is configured to generate a profile as an output for a diffraction signal received as an input. A second profile is obtained from a second machine learning system using the first profile obtained from the first machine learning system as an input to the second machine learning system. The second machine learning system is configured to generate a diffraction signal as an output for a profile received as an input. The first and second profiles include one or more parameters that characterize one or more features of the structure.

Spatially resolved emission spectrospy in plasma processing

Disclosed is a method, computer method, system, and apparatus for measuring two-dimensional distributions of optical emissions from a plasma in a semiconductor plasma processing chamber. The acquired two-dimensional distributions of plasma optical emissions can be used to infer the two-dimensional distributions of concentrations of certain chemical species of interest that are present in the plasma, and thus provide a useful tool for process development and also for new and improved processing tool development. The disclosed technique is computationally simple and inexpensive, and involves the use of an expansion of the assumed optical intensity distribution into a sum of basis functions that allow for circumferential variation of optical intensity. An example of suitable basis functions are Zernike polynomials.

Movement profiles for smart scanning using galvonometer mirror inside lidar scanner

A light detection and ranging (LiDAR) scanning system is provided. The system comprises a light steering device; a galvanometer mirror controllable to oscillate between two angular positions; and a plurality of transmitter channels configured to direct light to the galvanometer mirror. The plurality of transmitter channels are separated by an angular channel spacing from one another. The system further comprises a control device. Inside an end-of-travel region, the control device controls the galvanometer mirror to move based on a first mirror movement profile. Outside the end-of-travel region, the control device controls the galvanometer mirror to move based on a second mirror movement profile. The second mirror movement profile is different from the first mirror-movement profile. Movement of the galvanometer mirror based on the first mirror movement profile facilitates minimizing instances of scanlines corresponding to the end-of-travel region having a pitch exceeding a first target pitch.

Compact lidar design with high resolution and ultra-wide field of view

A compact LiDAR device is provided. The compact LiDAR device includes a first mirror disposed to receive one or more light beams and a polygon mirror optically coupled to the first mirror. The polygon mirror comprises a plurality of reflective facets. For at least two of the plurality of reflective facets, each reflective facet is arranged such that: a first edge, a second edge, and a third edge of the reflective facet correspond to a first line, a second line, and a third line; the first line and the second line intersect to form a first internal angle of a plane comprising the reflective facet; and the first line and the third line intersect to form a second internal angle of the plane comprising the reflective facet. The first internal angle is an acute angle; and the second internal angle is an obtuse angle.

Lidar detection systems and methods that use multi-plane mirrors

Embodiments discussed herein refer to a relatively compact and energy efficient LiDAR system that uses a multi-plane mirror in its scanning system.

In-die optical metrology

To determine one or more features of an in-die structure on a semiconductor wafer, a correlation is determined between one or more features of a test structure to be formed on a test pad and one or more features of a corresponding in-die structure. A measured diffraction signal measured off the test structure is obtained. One or more features of the test structure are determined using the measured diffraction signal. The one or more features of the in-die structure are determined based on the one or more determined features of the test structure and the determined correlation.

Lidar systems with fiber optic coupling

Embodiments discussed herein refer to LiDAR systems that use diode lasers to generate a high-repetition rate and multi-mode light pulse that is input to a fiber optic cable that transmits the light pulse to a scanning system.

Optical metrology optimization for repetitive structures

Movement profiles for smart scanning using galvonometer mirror inside lidar scanner

A light detection and ranging (LiDAR) scanning system is provided. The system comprises a light steering device; a galvanometer mirror controllable to oscillate between two angular positions; and a plurality of transmitter channels configured to direct light to the galvanometer mirror. The plurality of transmitter channels are separated by an angular channel spacing from one another. The system further comprises a control device. Inside an end-of- travel region, the control device controls the galvanometer mirror to move based on a first mirror movement profile. Outside the end-of-travel region, the control device controls the galvanometer mirror to move based on a second mirror movement profile. The second mirror movement profile is different from the first mirror-movement profile. Movement of the galvanometer mirror based on the first mirror movement profile facilitates minimizing instances of scanlines corresponding to the end-of-travel region having a pitch exceeding a first target pitch.

Multiwavelength lidar design

【課題】車両の別個の場所に配置されたライダースキャナの各々が、別のライダースキャナとは実質的に異なる空間範囲を走査することを可能にする。 【解決手段】光検知測距（ライダー）の走査を可能にする方法が、車両内に配置または収容されたシステムによって実行される。この方法は、第１のレーザ信号を受け取ることを含む。第１のレーザ信号は、第１の波長を有する。この方法は、第１のレーザ信号に基づいて第２のレーザ信号を生成することをさらに含む。第２のレーザ信号は、第２の波長を有する。この方法は、第２のレーザ信号に基づいて複数の第３のレーザ信号を提供することと；複数の第３のレーザ信号のうちの対応する第３のレーザ信号を、複数のライダースキャナのうちのそれぞれのライダースキャナへ送達することとをさらに含む。 【選択図】図５

High resolution lidar using multi-stage multi-phase signal modulation, integration, sampling, and analysis

The present disclosure describes techniques for implementing high resolution LiDAR using multiple-stage multiple-phase signal modulation, integration, sampling, and analysis technique. In one embodiment, a system includes a pulsed light source, one or more optional beam steering apparatus, an optional optical modulator, an optional imaging optics, a light detection with optional modulation capability, and a microprocessor. The optional beam steering apparatus is configured to steer a transmitted light pulse. A portion of the scattered or reflected light returns and optionally goes through a steering optics. An optional optical modulator modulates the returning light, going through the optional beam steering apparatus, and generates electrical signal on the detector with optional modulation. The signal from the detector can be optionally modulated on the amplifier before digitally sampled. One or multiple sampled integrated signals can be used together to determine time of flight, thus the distance, with robustness and reliability against system noise.

Solid state pulse steering in lidar systems

LiDAR system and methods discussed herein use a dispersion element or optic that has a refraction gradient that causes a light pulse to be redirected to a particular angle based on its wavelength. The dispersion element can be used to control a scanning path for light pulses being projected as part of the LiDAR's field of view. The dispersion element enables redirection of light pulses without requiring the physical movement of a medium such as mirror or other reflective surface, and in effect further enables at least portion of the LiDAR's field of view to be managed through solid state control. The solid state control can be performed by selectively adjusting the wavelength of the light pulses to control their projection along the scanning path.

Allocating processing units to generate simulated diffraction signals used in optical metrology

In allocating processing units of a computer system to generate simulated diffraction signals used in optical metrology, a request for a job to generate simulated diffraction signals using multiple processing units is obtained. A number of processing units requested for the job to generate simulated diffraction signals is then determined. A number of available processing units is determined. When the number of processing units requested is greater than the number of available processing units, a number of processing units is assigned to generate the simulated diffraction signals that is less than the number of processing units requested.

Model and parameter selection for optical metrology

A profile model for use in optical metrology of structures in a wafer is selected, the profile model having a set of geometric parameters associated with the dimensions of the structure. A set of optimization parameters is selected for the profile model using one or more input diffraction signals and one or more parameter selection criteria. The selected profile model and the set of optimization parameters are tested against one or more termination criteria. The process of selecting a profile model, selecting a set of optimization parameters, and testing the selected profile model and set of optimization parameters is performed until the one or more termination criteria are met.

2D SCANNING HIGH PRECISION LiDAR USING COMBINATION OF ROTATING CONCAVE MIRROR AND BEAM STEERING DEVICES

The present disclosure describes a system and method for coaxial LiDAR scanning. The system includes a first light source configured to provide first light pulses. The system also includes one or more beam steering apparatuses optically coupled to the first light source. Each beam steering apparatus comprises a rotatable concave reflector and a light beam steering device disposed at least partially within the rotatable concave reflector. The combination of the light beam steering device and the rotatable concave reflector, when moving with respect to each other, steers the one or more first light pulses both vertically and horizontally to illuminate an object within a field-of-view; obtain one or more first returning light pulses, the one or more first returning light pulses being generated based on the steered first light pulses illuminating an object within the field-of-view, and redirects the one or more first returning light pulses.

2D SCANNING HIGH PRECISION LiDAR USING COMBINATION OF ROTATING CONCAVE MIRROR AND BEAM STEERING DEVICES

The present disclosure describes a system and method for coaxial LiDAR scanning. The system includes a first light source configured to provide first light pulses. The system also includes one or more beam steering apparatuses optically coupled to the first light source. Each beam steering apparatus comprises a rotatable concave reflector and a light beam steering device disposed at least partially within the rotatable concave reflector. The combination of the light beam steering device and the rotatable concave reflector, when moving with respect to each other, steers the one or more first light pulses both vertically and horizontally to illuminate an object within a field-of-view; obtain one or more first returning light pulses, the one or more first returning light pulses being generated based on the steered first light pulses illuminating an object within the field-of-view, and redirects the one or more first returning light pulses.

Optical metrology model optimization based on goals

The optimization of an optical metrology model for use in measuring a wafer structure is evaluated. An optical metrology model having metrology model variables, which includes profile model parameters of a profile model, is developed. One or more goals for metrology model optimization are selected. One or more profile model parameters to be used in evaluating the one or more selected goals are selected. One or more metrology model variables to be set to fixed values are selected. One or more selected metrology model variables are set to fixed values. One or more termination criteria for the one or more selected goals are set. The optical metrology model is optimized using the fixed values for the one or more selected metrology model variables. Measurements for the one or more selected profile model parameters are obtained using the optimized optical metrology model. A determination is then made as to whether the one or more termination criteria are met by the obtained measurements.

Optical metrology of a structure formed on a semiconductor wafer using optical pulses

A structure formed on a wafer can be examined by directing an incident pulse at the structure, the incident pulse being a sub-picosecond optical pulse. A diffraction pulse resulting from the incident pulse diffracting from the structure is measured. A characteristic of the profile of the structure is then determined based on the measured diffraction pulse.

Lidar systems and methods with beam steering and wide angle signal detection

Embodiments discussed herein refer to using LiDAR systems for steering consecutive light pulses using micro electro-mechanical system (MEMS) to illuminate objects in a field of view. Embodiments discussed herein also refer to using a multiple lens array to process returned light pulses.

Compact lidar design with high resolution and ultra-wide field of view

A compact LiDAR device is provided. The compact LiDAR device includes a first mirror disposed to receive one or more light beams and a polygon mirror optically coupled to the first mirror. The polygon mirror comprises a plurality of reflective facets. For at least two of the plurality of reflective facets, each reflective facet is arranged such that: a first edge, a second edge, and a third edge of the reflective facet correspond to a first line, a second line, and a third line; the first line and the second line intersect to form a first internal angle of a plane comprising the reflective facet; and the first line and the third line intersect to form a second internal angle of the plane comprising the reflective facet. The first internal angle is an acute angle; and the second internal angle is an obtuse angle.

Method and system for encoding and decoding LiDAR

The present disclosure describes a system and method for encoding pulses of light for LiDAR scanning. The system includes a sequence generator, a light source, a modulator, a light detector, a correlator, and a microprocessor. The sequence generator generates a sequence code that the modulator encodes into a pulse of light from the light source. The encoded pulse of light illuminates a surface of an object, in which scattered light from the encoded light pulse is detected. The correlator correlates the scattered light with the sequence code that outputs a peak value associated with a time that the pulse of light is received. The microprocessor is configured to determine a time difference between transmission and reception of the pulse of light based on whether the amplitude of the peak exceeds the threshold value. The microprocessor calculates a distance to the surface of the object based on the time difference.

Multiwavelength lidar design

A method for enabling light detection and ranging (LiDAR) scanning is provided. The method is performed by a system disposed or included in a vehicle. The method comprises receiving a first laser signal. The first laser signal has a first wavelength. The method further includes generating a second laser signal based on the first laser signal. The second laser signal has a second wavelength. The method further includes providing a plurality of third laser signals based on the second laser signal; and delivering a corresponding third laser signal of the plurality of third laser signals to a respective LiDAR scanner of the plurality of LiDAR scanners. Each of the LiDAR scanners are disposed at a separate location of the vehicle such that each of the LiDAR scanners is capable of scanning a substantial different spatial range from another LiDAR scanner. LiDAR systems can use multi-wavelength to provide other benefits as well.

Stray light filter structures for lidar detector array

Embodiments of the present disclosure provide stray light filter structures in light detection and ranging (LiDAR) systems to attenuate stray light and reduce unwanted scattering. In some embodiments, a micro lens array is used together with a pinhole array to block stray light in the optical path just prior to the photodetector. In some embodiments, a bandpass optical filter is used in the optical path prior to the microlens array. In other embodiments, a slit filter is used further upstream in the optical path to block unwanted stray light and allow returning signal light to pass to imaging optics that provide a returning signal light image at a photodetector. In some embodiments, the imaging optics include a collimating lens and a focusing lens. In some embodiments, an optical bandpass filter is positioned on the optical path between the collimating lens and the focusing lens to reject light that is outside of a an expected wavelength range for returning signal light. These and other embodiments and details are further disclosed herein.

Jet pump

The present disclosure provides a jet pump, including a pump body provided with a water inlet and a water outlet. A jet tube and an impeller are provided in the pump body. Fluid passes through the water inlet, the jet tube, the impeller, and the water outlet in sequence. At least one flow-increasing channel is provided at the outer periphery of the jet tube. The flow-increasing channel is provided around the outside of the jet tube. The flow-increasing channel is in communication with the water inlet and an inlet of the impeller. Fluid passing through the flow-increasing channel is thrown to the pressurizing chamber by the impeller. The flow-increasing channel is provided with a valve core. The movement of the valve core in the flow-increasing channel causes the flow-increasing channel to be opened or closed. A cavitation problem is relieved by providing the flow-increasing channel, and the present disclosure has a simple production process and a low production cost.

Lidar systems and methods for focusing on ranges of interest

Embodiments discussed herein refer to LiDAR systems to focus on one or more regions of interests within a field of view.

Virtual windows for LiDAR safety systems and methods

Embodiments discussed herein refer to LiDAR systems and methods that use a virtual window to monitor for potentially unsafe operation of a laser. If an object is detected within the virtual window, the LiDAR system can be instructed to deactivate laser transmission.

Solid state pulse steering in LiDAR systems

LiDAR system and methods discussed herein use a dispersion element or optic that has a refraction gradient that causes a light pulse to be redirected to a particular angle based on its wavelength. The dispersion element can be used to control a scanning path for light pulses being projected as part of the LiDAR's field of view. The dispersion element enables redirection of light pulses without requiring the physical movement of a medium such as mirror or other reflective surface, and in effect further enables at least portion of the LiDAR's field of view to be managed through solid state control. The solid state control can be performed by selectively adjusting the wavelength of the light pulses to control their projection along the scanning path.

Multimodal detection with integrated sensors

A system for multimodal detection is provided. The system comprises a light collection and distribution device configured to perform at least one of collecting light signals from a field- of-view (FOV) and distributing the light signals to a plurality of detectors. The light signals have a plurality of wavelengths comprising at least a first wavelength and a second wavelength. The system further comprises a multimodal sensor comprising the plurality of detectors. The plurality of detectors comprises at least a light detector of a first type and a light detector of a second type. The light detector of the first type is configured to detect light signals having a first light characteristic. The light detector of the first type is configured to perform distance measuring based on light signals having the first wavelength. The light detector of the second type is configured to detect light signals having a second light characteristic.

LiDAR systems with fiber optic coupling

Embodiments discussed herein refer to LiDAR systems that use diode lasers to generate a high-repetition rate and multi-mode light pulse that is input to a fiber optic cable that transmits the light pulse to a scanning system.

A method for accurate time-of-flight calculation on saturated and non-saturated lidar receiving pulse data

A method for calculating time-of-flight on a LiDAR system is provided. The method comprises transmitting outgoing light pulses to a beam steering system that redirects the outgoing light pulses to a field of view of the LiDAR system; detecting return pulses corresponding to the outgoing light pulses; obtaining an intensity of a return pulse of the detected return pulses; determining whether the intensity of the return pulse is within an intensity threshold; and based on the determination, selecting a pulse-center based method or a pulse-edge based method for measuring a time-of-flight between the return pulse and the corresponding outgoing light pulse. The time-of-flight is a time lapse between a timing of the return pulse and a timing of the corresponding outgoing light pulse. The method further comprises measuring the time-of-flight based on the selected method.