Method of manufacturing patterned substrate and method of manufacturing semiconductor device using the same

A method of manufacturing a patterned substrate includes: providing an exposure mask, the exposure mask comprising: a plurality of inner light-shielding portions arranged in a lattice, a light-transmissive portion integrally connecting regions surrounding the plurality of inner light-shielding portions, and an outer light-shielding portion surrounding the light-transmissive portion; performing a plurality of exposures of a photoresist layer disposed on a substrate in a step-and-repeat-manner using the exposure mask, so as to form a plurality of inner projected parts corresponding to the inner light-shielding portions, the inner projected parts being aligned in a lattice as a whole; developing the photoresist layer on which the plurality of exposures have been performed; and etching the substrate using the developed photoresist layer as a mask; wherein, in the step of performing the plurality of exposures, a region corresponding to the light-transmissive portion formed by a predetermined one of the exposures and a region corresponding to the light-transmissive portion formed by another one of the exposures do not overlap each other on shortest straight lines connecting outermost inner projected parts formed by the predetermined exposure and respective inner projected parts formed by the another exposure that are located closest to the outermost inner projected parts of the predetermined exposure, while portions of the region corresponding to the light-transmissive portion formed by the predetermined exposure and portions of the region corresponding to the light-transmissive portion formed by the another exposure overlap each other in places other than the shortest straight lines.

METHOD FOR PRODUCING ANDROSTANTEROIDS

繰出容器

【課題】製造が容易で且つ製造コストの低減が可能な棒状部材の繰出容器を提供する。【解決手段】棒状部材の繰出容器は、軸方向に延びる円筒状の外装容器と、外装容器に対して相対回転可能であり、直線開口部が設けられ且つ外装容器の内側に収容される収容部、及び外装容器から突出した回転操作部を有する回転筒と、回転筒の内側に収容され、回転筒の直線開口部より突出するねじ被係合部が形成され、ねじ被係合部が直線開口部に沿って移動することにより回転筒とともに回転しつつ軸方向に進退可能で、且つ棒状部材を前側に保持可能な可動部材と、収容部の外周を覆い、軸と直交する断面が円弧状で、且つねじ係合部５ｃ’が内面に形成された２枚のねじ係合部材５Ａ’，５Ｂ’と、を備え、ねじ係合部５ｃ’が、ねじ係合部材の展開図において点対称で、且つ偶数条ねじである。【選択図】図５

Lichtempfindliches Einkomponenten Diazotypiematerial

Information processing apparatus and method for controlling an information processing apparatus

An information processing apparatus switches and displays, on a display unit, a first screen displaying a display component indicating each function of a first function group having a relatively high order among functions included in an application, a second screen displaying a display component indicating each function of a second function group including the first function group and a function group having an order lower than the first function group, a first setting screen receiving a setting of a first function included in the first function group displayed on the first screen and displaying a setting having a relatively high order in the first function, and a second setting screen receiving a setting of the first function included in the second function group displayed on the second screen and displaying more settings of the first function than the setting of the first function displayed on the first setting screen.

パターン化基板の製造方法および半導体装置の製造方法

【課題】複数の凸部のパターンの歪みが抑制されたパターン化基板の製造方法および半導体装置の製造方法を提供する。 【解決手段】パターン化基板の製造方法は、複数の内側遮光部と、内側遮光部の周辺領域を一体的に繋ぐ透光部とを有する露光マスクを用意する工程と、露光マスクを用いて、ステップアンドリピート法により複数回露光する露光工程において、所定の露光における最も外側に位置する１つの内側投影部と、他の露光における複数の内側投影部のうち所定の露光における１つの内側投影部の最も近くに配置される１つの内側投影部とを最短距離で結ぶ直線上において、所定の露光における透光部に対応する領域と他の露光における透光部に対応する領域とが重ならず、その他の領域のうちの少なくとも一部において所定の露光における透光部に対応する領域と他の露光における透光部に対応する領域とが重なるようにして、を複数回露光する。 【選択図】図６Ａ