11-10-2023 дата публикации
Номер: EP4047641A3
A method for producing a semiconductor device includes a semiconductor chip mounting step of subsequently pressing a plurality of semiconductor chips (B1, B2) by a first pressing member (A) (e.g., a collet) to respectively bond the plurality of semiconductor chips (B1, B2) to a plurality of mounting areas (E1, E2) (e.g., die pads) provided on a substrate (D) (e.g., a lead frame), wherein the bonding is performed in a state where adhesive sheets (2) are respectively interposed between the plurality of semiconductor chips (B1, B2) and the plurality of mounting areas (E1, E2), wherein each of the adhesive sheets (2) includes sinterable metal particles that can be sintered by heating at a temperature of 400 °C or less, and the first pressing member (A) is heated to a temperature at which the sinterable metal particles can be sintered, for example, to a temperature of 250 °C or more, thereby subjecting the sinterable metal particles in the adhesive sheet (2) to a primary sintering. The substrate (D) may be mounted on a stage (H), and the primary sintering may be performed by heating the stage (H), in addition to the collet (A), to a temperature equal to or higher than the temperature at which the sinterable metal particles can be sintered. The method may further comprise performing, after the semiconductor chip mounting step, a secondary heating step of heating the substrate (D) with the plurality of semiconductor chips (B1, B2) mounted thereon to a temperature at which the sinterable metal particles can be sintered, thereby performing a secondary sintering, wherein, in the secondary heating step, the heating is performed while not pressing part or all of the plurality of semiconductor chips (B1, B2) onto the substrate (D) or, alternatively, while pressing part or all of the plurality of semiconductor chips (B1, B2) onto the substrate (D), for example, using a heating and pressing device (F) that includes two parallel flat plates configured to apply heat and located so ...
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