01-01-2015 дата публикации
Номер: US20150004314A1
Принадлежит:
A first compound having an atom in an oxidized state is reacted with a bis(trimethylsilyl) six-membered ring system or related compound to form a second compound having the atom in a reduced state relative to the first compound. The atom in an oxidized state is selected from the group consisting of Groups 2-12 of the Periodic Table, the lanthanides, As, Sb, Bi, Te, Si, Ge, Sn, and Al. 2. The method of wherein R claim 1 , R claim 1 , R are each independently Calkyl; R claim 1 , R claim 1 , R claim 1 , Rare each independently H or Calkyl; and Rand Rare H.4. The method of wherein R claim 3 , R claim 3 , R are each independently Calkyl; R claim 3 , R claim 3 , R claim 3 , Rare each independently H or Calkyl; and R claim 3 , and Rare H.6. The method of wherein the atom is in a positive oxidation state of 1 claim 1 , 2 claim 1 , 3 claim 1 , 4 claim 1 , 5 claim 1 , or 6.7. The method of wherein R claim 1 , R claim 1 , R claim 1 , and Rare each independently hydrogen claim 1 , methyl claim 1 , ethyl claim 1 , n-propyl claim 1 , isopropyl claim 1 , n-butyl claim 1 , sec-butyl claim 1 , isobutyl claim 1 , t-butyl claim 1 , or phenyl.8. The method of wherein R claim 1 , R claim 1 , and R are each independently hydrogen claim 1 , methyl claim 1 , ethyl claim 1 , n-propyl claim 1 , isopropyl claim 1 , n-butyl claim 1 , sec-butyl claim 1 , isobutyl claim 1 , t-butyl claim 1 , or phenyl.9. The method of wherein the atom is Cu claim 1 , Cr claim 1 , Mn claim 1 , Fe claim 1 , Co claim 1 , Ti claim 1 , or Ni.10. The method of comprising a deposition cycle including:a) contacting a substrate with the vapor of the first compound having an atom in an oxidized state to form a first modified surface; andc) contacting the first modified surface with the vapor of the reducing agent.11. The method of wherein a metal-containing layer is deposited on the substrate.12. The method of wherein the metal-containing layer includes a metal atom in the zero oxidation state.14. The method of wherein ...
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