27-05-2021 дата публикации
Номер: US20210161007A1
A structure according to the embodiment includes a first crystal grain, a second crystal grain, and a first region. The first crystal grain includes silicon nitride. The second crystal grain includes a first element selected from a first group consisting of scandium, yttrium, lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, aluminum, chromium, zirconium, magnesium, zinc, titanium, gallium, beryllium, calcium, strontium, barium, hafnium, vanadium, niobium, tantalum, tungsten, iron, cobalt, nickel, and copper, and oxygen. The first region includes an oxide of the first element. 1. A structure comprising:a first crystal grain including silicon nitride;a second crystal grain including a first element selected from a first group consisting of scandium, yttrium, lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, aluminum, chromium, zirconium, magnesium, zinc, titanium, gallium, beryllium, calcium, strontium, barium, hafnium, vanadium, niobium, tantalum, tungsten, iron, cobalt, nickel, and copper, and oxygen; anda first region including an oxide of the first element.2. The structure according to claim 1 , whereinthe second crystal grain is provided in the first crystal grain.3. The structure according to claim 1 , whereina plurality of the first crystal grains are provided, andthe first crystal grains are provided around the second crystal grain.4. The structure according to claim 1 , whereina plurality of the first crystal grains and a plurality of the second crystal grains are provided,part of the first crystal grains are provided around one of the second crystal grains, andanother one of the second crystal grains is provided in another one of the first crystal grains.5. The structure according to claim 1 , whereinthe second crystal grain is positioned between ...
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