01-02-2018 дата публикации
Номер: US20180030983A1
Принадлежит:
The present invention relates to a technology of efficiently cooling a vacuum pump that produces a vacuum in a process chamber of a semiconductor manufacturing facility. The present invention provides a new type of vaccum pump cooling method that keeps the internal temperature of a vacuum pump at a predetermined level by circulating oil through rotors of the vacuum pump, such that it is possible to prevent a rapid increase in the temperature of the vacuum pump and smoothly lubricate bearings at the early stage of operation, whereby it is possible to ensure stability when performing processes and operating the pump and economically maintain the facility. 1. A vacuum pump with a cooling apparatus , comprising:{'b': 12', '10', '11, 'a pump housing () having an inlet () for receiving gas and an outlet () for discharging gas;'}{'b': 13', '13', '12, 'i': a', 'b, 'a pair of rotors (, ) supported at both ends in the pump housing () and generating vacuum pressure by rotating in mesh with each other;'}{'b': 14', '13', '13', '13, 'i': a', 'a', 'b, 'a motor () connected to a shaft of the rotor () to drive the rotors (, ); and'}{'b': 15', '13', '13, 'i': a', 'b, 'gears () for cooperation between the rotors (, );'}{'b': 31', '12, 'a first temperature sensor () disposed at a gas inlet side of the pump housing () to detect temperature of gas;'}{'b': 32', '18, 'a second temperature sensor () disposed in a main oil line of the oil supply unit () to detect temperature of oil; and'}{'b': 33', '31', '32, 'a micro processor () variably controlling temperature of oil on the basis of temperature values input from the first temperature sensor () and the second temperature sensor (),'}{'b': 16', '13', '13', '17', '16', '17', '18', '13', '13', '16, 'i': a', 'b', 'a', 'b, 'wherein holes () are formed in parallel along axial lines of the rotors (, ), oil supply pipes () are disposed in the holes (), oil is supplied into the oil supply pipes () from an oil supply unit (), and the oil cools the ...
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