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Космические корабли и станции, автоматические КА и методы их проектирования, бортовые комплексы управления, системы и средства жизнеобеспечения, особенности технологии производства ракетно-космических систем

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26-12-2017 дата публикации

Оптическая схема ультрапрецизионного голографического датчика линейных перемещений с управляемым фазовым модулятором

Номер: RU0000176011U1
Автор: Александр Юрьевич Жердев, Владимир Васильевич Маркин, Владимир Евгеньевич Талалаев, Дмитрий Сергеевич Лушников, Сергей Борисович Одиноков, Юрий Петрович Чугунов
Принадлежит: федеральное государственное бюджетное образовательное учреждение высшего образования "Московский государственный технический университет имени Н.Э. Баумана (национальный исследовательский университет)" (МГТУ им. Н.Э. Баумана)

Оптическая схема ультрапрецизионного голографического датчика линейных перемещений состоит из источника когерентного оптического излучения, коллимирующей системы, пропускающей дифракционной решетки, многосекционного фазового элемента, представляющего собой единый оптический элемент с несколькими зонами, изготовленными встык друг с другом с возможностью внесения этими зонами фазовых сдвигов в дифрагирующие оптические пучки, блока приемников указанных регистрируемых оптических сигналов. При этом многосекционный фазовый элемент выполнен в виде управляемого фазового модулятора с возможностью управляемого изменения фазовых сдвигов.Технический результат заключается в повышении точности датчика за счёт получения в реальном времени максимального приращения сигнала при минимальном изменении контролируемого параметра. 7 ил. 176011 ил ко РОССИЙСКАЯ ФЕДЕРАЦИЯ (19) (11) ара за в (13) (51) МПК СОР 5/38 (2006.01) СОВ ПЛА (2006.01) ФЕДЕРАЛЬНАЯ СЛУЖБА ПО ИНТЕЛЛЕКТУАЛЬНОЙ СОБСТВЕННОСТИ (12) ОПИСАНИЕ ПОЛЕЗНОЙ МОДЕЛИ К ПАТЕНТУ (52) СПК СО 5/38 (201708): СВ ПИЯ (201708) (21)(22) Заявка: 2017115350, 02.05.2017 (24) Дата начала отсчета срока действия патента: 02.05.2017 Дата регистрации: 26.12.2017 Приоритет(ь): (22) Дата подачи заявки: 02.05.2017 (45) Опубликовано: 26.12.2017 Бюл. № 36 Адрес для переписки: 105005, Москва, ул. 2-я Бауманская, 5, стр. 1, МГТУ им. Н.Э. Баумана, ЦЗИС, для Одинокова С.Б. (каф. РЛ-2) (72) Автор(ы): Одиноков Сергей Борисович (КО), Лушников Дмитрий Сергеевич (КО), Маркин Владимир Васильевич (КО), Жердев Александр Юрьевич (КО), Чугунов Юрий Петрович (КО), Талалаев Владимир Евгеньевич (КО) (73) Патентообладатель(и): федеральное государственное бюджетное образовательное учреждение высшего образования "Московский государственный технический университет имени Н.Э. Баумана (национальный исследовательский университет)" (МГТУ им. Н.Э. Баумана) (КО) (56) Список документов, цитированных в отчете о поиске: 0$ 5569913 А1, 29.10.1996. 05 7911624 В2, 22.03.2011. $9 371422 АТ, ...

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Номер записи: 1
14-12-2021 дата публикации

Устройство для исследования перемещения сыпучих материалов по поверхности

Номер: RU0000208339U1
Автор: Андрей Владимирович Чванов, Андрей Юрьевич Розов, Сергей Юрьевич Розов
Принадлежит: Федеральное автономное учреждение "Российский дорожный научно-исследовательский институт" (ФАУ "РОСДОРНИИ")

Устройство для исследования перемещения сыпучих материалов по поверхности относится к области исследования свойств сыпучих материалов, в особенности противогололедных материалов, применяемых для устранения зимней скользкости на дорожных покрытиях. Устройство включает станину, установленный на станине наклонный лоток для направления материала, закрепленное над лотком средство подачи исследуемого сыпучего материала, установленную на станине принимающую платформу, расположенную одним концом под нижней частью лотка, и закрепленную над принимающей платформой видеокамеру. На принимающей платформе закреплены исследуемое покрытие, имитирующее дорожную поверхность, и воздушные сопла, соединенные трубопроводами с размещенным на станине компрессором, а средство подачи исследуемого сыпучего материала закреплено с возможностью фиксации в различных положениях по длине наклонного лотка и по высоте над ним. Исследуя различные сыпучие материалы и поверхности, имитирующие дорожное покрытия, можно определять расстояния, на которые перемещаются частицы сыпучего материала по дорожному покрытию при различных условиях, и скорости частиц материала при встрече с исследуемым покрытием. Эти исследования позволяют определять виды сыпучих противогололедных материалов и возможные скорости встречи частиц материала с дорожным покрытием, обеспечивающие допустимое по условиям эксплуатации распределение материалов по дорожному покрытию. РОССИЙСКАЯ ФЕДЕРАЦИЯ (19) RU (51) МПК G01N 19/00 G01B 11/14 G01N 15/00 G01N 21/85 (11) (13) 208 339 U1 (2006.01) (2006.01) (2006.01) (2006.01) ФЕДЕРАЛЬНАЯ СЛУЖБА ПО ИНТЕЛЛЕКТУАЛЬНОЙ СОБСТВЕННОСТИ (12) ОПИСАНИЕ ПОЛЕЗНОЙ МОДЕЛИ К ПАТЕНТУ (52) СПК G01N 19/00 (2021.08); G01B 11/14 (2021.08); G01N 15/00 (2021.08); G01N 21/85 (2021.08) (21)(22) Заявка: 2021110290, 13.04.2021 (24) Дата начала отсчета срока действия патента: Дата регистрации: Приоритет(ы): (22) Дата подачи заявки: 13.04.2021 (45) Опубликовано: 14.12.2021 Бюл. № 35 (56) Список документов, цитированных в отчете ...

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Номер записи: 2
12-01-2012 дата публикации

Method and system for measuring patterned structures

Номер: US20120008147A1
Автор: Boaz Brill, Moshe Finarov
Принадлежит: Nova Measuring Instruments Ltd

A method and system are presented for determining a line profile in a patterned structure, aimed at controlling a process of manufacture of the structure. The patterned structure comprises a plurality of different layers, the pattern in the structure being formed by patterned regions and un-patterned regions. At least first and second measurements are carried out, each utilizing illumination of the structure with a broad wavelengths band of incident light directed on the structure at a certain angle of incidence, detection of spectral characteristics of light returned from the structure, and generation of measured data representative thereof. The measured data obtained with the first measurement is analyzed, and at least one parameter of the structure is thereby determined. Then, this determined parameter is utilized, while analyzing the measured data obtained with the second measurements enabling the determination of the profile of the structure

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Номер записи: 3
08-03-2012 дата публикации

Deflection measuring device according to the interferometer principle

Номер: US20120057169A1
Автор: Henrik Krisch
Принадлежит: Krohne Messtechnik GmbH and Co KG

An interferometer type deflection measuring device having a radiation source, a first fiber-optic means forming a first light path, a second fiber-optic means forming a second light path, a deflection body and an evaluation circuit, the first and second fiber-optic means receiving radiation from the radiation source on an input side, and radiation guided in the first and second fiber-optic means, respectively, being brought together on an output side with interference radiation being conveyed to the evaluation circuit for evaluation. The first fiber-optic means and the second fiber-optic means are arranged only on the deflection body, at least one of the first and second fiber-optic means being connected on the input side to the beam source with a single feed optical fiber and at least one of the first and second fiber-optic means being connected on the output side to the evaluation circuit by a single evaluation optical fiber.

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Номер записи: 4
12-04-2012 дата публикации

Providing Thermal Compensation for Topographic Measurement at an Elevated Temperature Using a Non-Contact Vibration Transducer

Номер: US20120086952A1
Автор: Arvind K. Sinha
Принадлежит: International Business Machines Corp

A mechanism for providing thermal compensation when measuring surface topography at an elevated temperature using a non-contact vibration transducer, such as a laser Doppler vibrometer (LDV). Thermal compensation is provided to a detector output signal to correct for thermal diffraction of a reflected portion of a beam of radiant energy directed at a surface of a test object. The thermal compensation is based on a calculated deviation between the detector output signal r 2 at an elevated temperature and the detector output signal r 1 at approximately room temperature. In one embodiment, the thermal compensation mechanism calculates a stationary signal r 3 (t) which represents the detector output signal without noise and corrected for thermal diffraction at the elevated temperature according to the following equation: r 3  ( t ) = lim T → ∞  1 / T  ∫ - t / 2 + t / 2  r 2 *  ( t ) * r 2 *  ( t + Δ   t )    t , wherein T represents the total number of spectrums measured at the elevated temperature at multiple times upon which the compensation is based, and wherein r 2 *=r 2 −r 2 (baseline).

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Номер записи: 5
24-05-2012 дата публикации

Method for detection of tunnel excavation by brillouin optical time domain reflectometry

Номер: US20120130930A1
Автор: Assaf Klar, Raphael LINKER
Принадлежит: Individual

A non transitory computer readable medium and a method of detecting excavation of an underground tunnel, the method includes: propagating a light pulse through an underground optic fiber; generating detection signals responsive to Brillion scattered light resulting from the propagating of the light pulse through the underground optic fiber; wherein the detection signals represent tension values at multiple locations along the underground optic fiber; and processing the detection signals to detect excavation of the underground tunnel.

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Номер записи: 6
31-05-2012 дата публикации

Jig for measuring dimensions of workpiece

Номер: US20120134573A1
Автор: Akimasa Suda, Hiroyuki Nakazawa, Takafumi Higashio
Принадлежит: Sumitomo Wiring Systems Ltd, Suzuki Co Ltd

A jig 20 that is installed on a device for measuring dimensions of a workpiece 10 based on images obtained by taking pictures of the workpiece 10 with a camera K includes a chuck mechanism 50 holding the workpiece K, a first rotation drive mechanism 80 that rotates the chuck mechanism 50 around a predetermined first rotation axis A, a first base 30 holding the first rotation drive mechanism 80 , a second rotation drive mechanism 40 that rotates the first base 30 around a second rotation axis B orthogonal to the first rotation axis A, and a second base 21 holding the second rotation drive mechanism 40 . The first base 30 has an opening 31 A in the area around the first rotation axis A such that the workpiece 10 held by the chuck mechanism 50 is seen from the back of the first base 30 through the opening 31 A.

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Номер записи: 7
12-07-2012 дата публикации

Remote displacement sensor, including an optical strain gauge, an assembly and system therewith

Номер: US20120176629A1
Автор: Mark A. Ritter, Roy D. Allen
Принадлежит: ILLINOIS TOOL WORKS INC

The disclosure relates to a remote displacement sensor, such as an optical strain gauge, which uses an optical amplifier implemented by patterns, such as, but not limited to, moiré patterns, to calculate changes in position or gauge length. In the embodiment implemented as a strain gauge with moiré patterns, two foil layers are provided, a lower foil layer with a reference or static moiré pattern generated by the overlaying of a first pattern with parallel lines at a first fundamental frequency and a second pattern with parallel lines at a second fundamental frequency. The lower foil layer further includes a first section with a first pattern with parallel lines at the first fundamental frequency while the upper layer provides a second section with a second pattern with parallel lines at the second fundamental frequency. The overlaying of the foils causes an overlying of the first and second sections thereby causing a moiré pattern of the same wavelength as the reference pattern. However, relative movement of the two foils perpendicular to the parallel lines, in response to a movement in the gauge length in response to strain on the specimen, causes a phase change in the overlaid pattern which is greater than the relative movement. The image of the optical strain gauge is captured by a camera or other optical device and the resulting image is processed by a Fast Fourier Transform or similar algorithm to determine the phase change, thereby calculating the change in gauge length and therefore the resulting strain.

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Номер записи: 8
23-08-2012 дата публикации

Optical Apparatus, Method of Scanning, Lithographic Apparatus and Device Manufacturing Method

Номер: US20120212718A1
Автор: Arie Jeffrey Den Boef
Принадлежит: ASML Netherlands BV

An apparatus measures positions of marks on a lithographic substrate. A measurement optical system comprises illumination subsystem for illuminating the mark with a spot of radiation and a detecting subsystem for detecting radiation diffracted by the mark. A tilting mirror moves the spot of radiation relative to the reference frame of the measurement optical system synchronously with a scanning motion of the mark itself, to allow more time for accurate position measurements to be acquired. The mirror tilt axis is arranged along the intersection of the mirror plane with a pupil plane of the objective lens to minimize artifacts of the scanning. The same geometrical arrangement can be used for scanning in other types of apparatus, for example a confocal microscope.

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Номер записи: 9
18-10-2012 дата публикации

Displacement sensor using multiple position sensitive photodetectors

Номер: US20120262733A1
Автор: Kim Atherton
Принадлежит: Mitutoyo Corp

A position sensing device having a high range to resolution ratio comprises a light source arrangement, a moving aperture arrangement and a multiple position sensitive detector (PSD) arrangement. The multiple PSD arrangement comprises a plurality of position sensitive detectors arranged along at least two detection tracks along a measuring axis. Each of the plurality of position sensitive detectors shares a common portion of a total measuring range along the measuring axis with an adjacent position sensitive detector which is on a different detector track. The total measurement range is larger than the detector range of each of the position sensitive detectors.

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Номер записи: 10
25-10-2012 дата публикации

Toner-Density Calculating Method, Reflective Optical Sensor, Reflective Optical Sensor Device, and Image Forming Apparatus

Номер: US20120268750A1
Автор: Koji Masuda
Принадлежит: Individual

A toner density is calculated from outputs of light-receiving elements based on a difference between a reflection property of a supporting member and a reflection property of a toner pattern. Light-emitting elements aligned in one direction that is inclined to a sub-direction emit a detection light in such a manner that a distance between adjacent spots falling on the supporting member in a second direction is equal to or smaller than a width of the toner pattern in the second direction. The light-receiving elements receive a reflected light reflected from the supporting member and/or the toner pattern. The light-receiving elements are aligned, opposed to the supporting member, in a one direction corresponding to the light-emitting elements.

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Номер записи: 11
28-02-2013 дата публикации

Method for ascertaining material characteristics of an object

Номер: US20130050711A1
Автор: Thomas Ertl
Принадлежит: DeguDent GmbH

The invention relates to a method for ascertaining material characteristics of an object, in particular optical properties of preferably semi-transparent objects. The aim of the invention is to obtain material characteristics without complex measuring methods. This is achieved in that spectrally resolved data from measured data of the object are calculated with spectrally resolved data of a reference body in order to ascertain the material characteristics, the measured data being ascertained with a confocal 3D measuring system.

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Номер записи: 12
14-03-2013 дата публикации

Measurement apparatus and measurement method

Номер: US20130066595A1
Автор: Akihiro HATADA
Принадлежит: Canon Inc

A measurement apparatus includes a processor configured to obtain a phase corresponding to an optical path length between the target surface and the reference surface based upon the a signal of interference light, to correct an error of the phase, and to calculate an absolute distance between the target surface and the reference surface based upon the phase in which the error has been corrected. The processor corrects the error of the phase by calculating a common phase error contained in a first measured phase calculated for the first reference wavelength and a second measured phase calculated for the second reference wavelength, and by subtracting the common phase error from the first measured phase and the second measured phase.

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Номер записи: 13
28-03-2013 дата публикации

Device and method for alignment of an appliance

Номер: US20130074348A1
Автор: Hunze Sven
Принадлежит:

The invention provides a device and a method for relative positioning of an appliance having a shaft end in relation to fastening elements which are arranged at a distance to the longitudinal axis of the shaft end and at a distance in front of the end of the shaft end and is disposed for generation of a first and a second light fan which extend symmetrically along the longitudinal axis of the shaft end and form light lines extending over the end of the shaft end. 1. Device for alignment of an appliance having a shaft end , the device having a contact piece having a recess having a longitudinal axis for arrangement against a shaft end , and having optical elements having at least one light source , wherein the optical elements are disposed to generate a first light fan and a second light fan extending in planes which are arranged symmetrically to a common longitudinal median plane arranged along the longitudinal axis , wherein at least one of the optical elements is disposed to pivot the first light fan against the second light fan.2. Device according to which is disposed to generate the first and second light fans symmetrically to the common longitudinal median plane which runs through the longitudinal axis of the shaft end.3. Device according to having a plumbing device for determination of the vertical.4. Device according to having a plumbing device claim 1 , wherein the optical elements are disposed to generate the first and second light fans symmetrically to the vertical.5. Device according to claim 1 , in which the contact piece has a recess symmetrical to a longitudinal axis against which the shaft end lies such that its longitudinal axis is in parallel to the longitudinal axis of the recess.6. Device according to claim 1 , which is disposed for generation of a third light fan extending in a plane perpendicular to the plane of the first and/or the second light fan.7. Device according to claim 6 , characterized in that the third light fan is arranged ...

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Номер записи: 14
28-03-2013 дата публикации

METHOD AND SYSTEM FOR HELPING TO POSITION A COMPONENT ON A STRUCTURAL ELEMENT

Номер: US20130074350A1
Автор: Fretigny Yves, Le Mer Erwan, Le Scolan Eric
Принадлежит:

A method for helping to position a component on the wall of a structural element, including the steps: 16-. (canceled)7. A method for helping to position a piece on a wall of an element of a structure , the method comprising the following steps:elaborating an image intended to be projected on the wall of the structural element using a projector from a virtual model of the structure and from a position and an orientation of the projector with respect to the structure, the image including an outline delimiting an area for implanting the piece on the wall of the element of the structure, the wall of the element of the structure being used as a projection substrate for said outline, and at least one additional motif providing positioning information of the piece with respect to a direction normal to the wall of the element of the structure, said additional motif corresponding to a predefined set of points of the piece, said piece being used as a projection substrate for the at least one additional motif;projecting the elaborated image on the element of the structure;placing a surface of the piece which should come and face the wall, inside the outline projected on the element of the structure; andwhile keeping contact between the piece and the element, modifying the positioning of the piece with respect to the direction normal to the wall of the element, until said predefined set of points of the piece coincides with said additional motif.8. The method as recited in wherein said additional motif is a line segment limited by a first end located inside said outline and a second end located away from said outline.9. The method as recited in wherein the second end of the line segment and a predefined point of said set of points of the piece coincide.10. The method as recited in wherein the line segment corresponds to a generatrix or an edge of said piece.11. A system for helping to position a piece on the wall of an element of a structure claim 8 , the system comprising:a ...

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Номер записи: 15
28-03-2013 дата публикации

MEASUREMENT APPARATUS AND CONTROL METHOD

Номер: US20130077854A1
Автор: Kobayashi Kazuhiko, Uchiyama Shinji
Принадлежит: CANON KABUSHIKI KAISHA

A measurement apparatus which measures the relative position and orientation of an image-capturing apparatus capturing images of one or more measurement objects with respect to the measurement object, acquires a captured image using the image-capturing apparatus. The respective geometric features present in a 3D model of the measurement object are projected onto the captured image based on the position and orientation of the image-capturing apparatus, thereby obtaining projection geometric features. Projection geometric features are selected from the resultant projection geometric features based on distances between the projection geometric features in the captured image. The relative position and orientation of the image-capturing apparatus with respect to the measurement object is then calculated using the selected projection geometric features and image geometric features corresponding thereto detected in the captured image. 1an image acquiring unit configured to acquire a captured image from the image-capturing apparatus;a projection unit configured to project geometric features of a 3D model of the measurement object onto the captured image based on a position and orientation of the image-capturing apparatus to obtain projection geometric features;a selecting unit configured to select projection geometric features to be used in calculation of the position or orientation from the projection geometric features obtained by the projection unit based on distances with respect to the projection geometric features in the captured image; anda calculating unit configured to calculate the relative position or orientation of the image-capturing apparatus with respect to the measurement object using the projection geometric features selected by the selecting unit and image geometric features corresponding to the selected projection geometric features detected in the captured image.. A measurement apparatus for measuring relative position or orientation of an image- ...

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Номер записи: 16
04-04-2013 дата публикации

FIBER OPTIC INSTRUMENT ORIENTATION SENSING SYSTEM AND METHOD

Номер: US20130083310A1
Автор: Ramamurthy Bhaskar S., Schlesinger Randall L., Tanner Nael A., Younge Robert G.
Принадлежит: KONINKLIJKE PHILIPS ELECTRONICS N.V.

An instrument system that includes an image capture device, an elongate body, an optical fiber and a controller is provided. The elongate body is operatively coupled to the image capture device. The optical fiber is operatively coupled to the elongate body and has a strain sensor provided on the optical fiber. The controller is operatively coupled to the optical fiber and adapted to receive a signal from the strain sensor and to determine a position or orientation of the image capture device based on the signal. 1. An instrument system , comprising:an image capture device;an elongate body operatively coupled to the image capture device;an optical fiber operatively coupled to the elongate body and having a strain sensor provided on the optical fiber; and receive a signal from the strain sensor; and', 'determine a position or orientation of the image capture device based on the signal., 'a controller operatively coupled to the optical fiber and adapted to2. The instrument system of claim 1 , wherein the image capture device comprises a fluoroscope claim 1 , an optical camera claim 1 , an infrared camera claim 1 , an ultrasound imager claim 1 , a magnetic resonance imager claim 1 , or a computer tomography imager.3. The instrument system of claim 1 , wherein the controller is adapted to determine an orientation of the image capture device by determining a roll or twist angle of the image capture device.4. The instrument system of claim 1 , wherein the strain sensor comprises a Bragg grating provided on the optical fiber.5. The instrument system of claim 1 , wherein the optical fiber is a first optical fiber and the strain sensor is a first strain sensor claim 1 , the instrument system comprising a second optical fiber having a second strain sensor provided thereon and operatively coupled to the elongate body claim 1 , wherein the controller is operatively coupled to the second optical fiber and is adapted to receive a signal from the second strain sensor.6. A method ...

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Номер записи: 17
04-04-2013 дата публикации

3D OPTICAL DETECTION SYSTEM AND METHOD FOR A MOBILE STORAGE SYSTEM

Номер: US20130083316A1
Автор: Mimeault Yvan, Perreault Louis
Принадлежит:

A mobile storage having a mobile storage unit having a detection side; an opposing component having an aisle side facing the detection side; the mobile storage unit being movable between a closed position and an open position wherein an aisle is defined; at least one detection module having an optical pulse emitter and an optical detector both provided at an end, facing the aisle, the optical pulse emitter emitting a light pulse, the optical detector detecting a reflection of the light pulse. An object detection method for a mobile storage comprising comparing a temporal reflection signal to a background temporal reflection signal to detect the presence of an object; and indicating a status of the aisle to be presence of an object if the object is detected to be present. 1. A mobile storage comprising:a mobile storage unit extending along a longitudinal axis, having a detection side;an opposing component extending substantially parallel to the longitudinal axis, having an aisle side facing the detection side of the mobile storage unit, the opposing component being one of a wall, a second mobile storage unit and a stationary storage unit;the mobile storage unit being movable between a closed position wherein the detection side of the mobile storage unit and the aisle side of the opposing component are juxtaposed and an open position wherein the mobile storage unit and the opposing component are spaced-apart and a longitudinally extending aisle is defined therebetween;the mobile storage having at least one detection module having an optical pulse emitter and an optical detector both provided at an end of one of the detection side of the mobile storage unit and the aisle side of the opposing component, facing the aisle, the optical pulse emitter emitting a light pulse in a field-of-illumination, the optical detector detecting a reflection of the light pulse in a field-of-view, the field-of-illumination and the field-of-view being adapted to at least partly overlap and ...

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Номер записи: 18
04-04-2013 дата публикации

SYSTEM FOR MONITORING THE POSITION OF A TUBE'S DISTAL END RELATIVE TO A BLOOD VESSEL

Номер: US20130083331A1
Автор: Rensen Judith Margreet, Rensen Wouter Harry Jacinth
Принадлежит: KONINKLIJKE PHILIPS ELECTRONICS N.V.

The invention relates to a system () for monitoring a position of a distal end () of a tube () with respect to a blood vessel () of a mamma. The system comprises a source () for generating an outgoing beam () of electromagnetic radiation having a predefined electromagnetic spectrum. The system furthermore comprises a guideway () for guiding the outgoing beam to the distal end, and for guiding an incoming beam () of electromagnetic radiation reflected by surroundings of the distal end in response to said outgoing beam to a measurement arrangement () which is arranged for measuring a parameter () associated with an electromagnetic spectrum of the incoming beam. The system furthermore comprises a comparator arrangement () for comparing said parameter with a reference parameter () associated with a reference electromagnetic spectrum representing a predefined location of the distal end inside the mammal. 1101301402502602102302104304403503603106306. A system ( , , , , ) for monitoring a position of a distal end ( , ) of a tube ( , , , , ) with respect to a blood vessel ( , ) of a mammal comprising:{'b': 110', '310', '408', '508', '608', '112', '312', '410', '510', '610, 'a source (, , , , ) for generating an outgoing beam (, , , , ) of electromagnetic radiation having a predefined electromagnetic spectrum,'}{'b': 114', '314', '116', '316', '416', '522', '618', '118', '318', '120', '320', '412', '518', '614, 'a guideway (, ) for guiding the outgoing beam to the distal end, and for guiding an incoming beam (, , , , ) of electromagnetic radiation reflected by surroundings (, ) of the distal end in response to said outgoing beam to a measurement arrangement (, , , , ),'}{'b': 122', '322', '414', '520', '616, 'the measurement arrangement for measuring a parameter (, , , , ) associated with an electromagnetic spectrum of the incoming beam, and'}{'b': 124', '324', '426', '524', '626', '126', '326', '428', '526', '628, 'a comparator arrangement (, , , , ) configured for comparing ...

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Номер записи: 19
11-04-2013 дата публикации

DEVICE AND METHOD FOR DETECTING PRESENCE OF AN OBJECT

Номер: US20130087695A1
Автор: Hanson Vagn Steen Gruner, Jakobsen Michael Linde, Pedersen Henrik Chresten
Принадлежит: OPDI Technologies A/S

The present invention relates to a method () and device () for detecting presence of an object () by means of influencing propagation of light () arriving to a detector (). The device () for detecting presence of the object () at the device () comprises a light source (), a first redirecting structure (), a second redirecting structure (), and a light detector device (). The light source () is adapted to emit light () towards the first redirecting structure (), which is adapted to redirect light () from the light source () towards the second redirecting structure (), which is adapted to return light () from the first redirecting structure () back towards the first redirecting structure (), which is adapted to redirect light () from the second redirecting structure () towards the light detector device (). The device () has a sensing zone () formed by light () propagating between the first redirecting structure () and the second redirecting structure (). 2. The device according to claim 1 , wherein the second redirecting structure comprises a retroreflecting structure.3. The device according to claim 1 , wherein the second redirecting structure comprises a plane mirror.4. The device according to claim 1 , wherein the light source and the light detector device are adjacent in relation to the redirecting structures.5. The device according to claim 1 , wherein the first redirecting structure comprises a first secondary redirecting structure claim 1 , and the second redirecting structure comprises a second secondary redirecting structure claim 1 , and wherein the light source is adapted to emit light towards the first secondary redirecting structure claim 1 , the first secondary redirecting structure is adapted to redirect light from the light source towards the second secondary redirecting structure claim 1 , the second secondary redirecting structure is adapted to return light from the first secondary redirecting structure back towards the first secondary redirecting ...

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Номер записи: 20
11-04-2013 дата публикации

Optical Guide-Based Displacement/Force Sensor

Номер: US20130088710A1
Автор: Brastaviceanu Tiberius Eugen, Pavlov Ivan Alexandrovich
Принадлежит:

A displacement and force sensor device using as a transducer an opto-mechanical assembly including an optical guide is claimed here. The transducer operates in bending mode, where the amount of bending induces a change in light signal intensity propagating through the transducer. The change in light signal is proportional to the bending and proportional to the force applied on the transducer after calibration of the said transducer. The transducer is free-ended and needs at least one point of contact with the test specimen to induce bending or with the material in contact with the test specimen. The sensor can give information about displacement and force. Said specimen can be solid, liquid or gas. The transducer can be incorporated into a material which stiffness is measured. The transducer is capable of sensing displacement in the sub-pm scale, with sub-ms time resolution, and to measure forces as small as 10N. 1. a transducer sensitive to deformation using an opto-mechanical assembly that includes an optical guide , operating in bending mode , where the amount of bending induces a change in the intensity of the light signal propagating through the transducer , with at least one point of contact needed with the test specimen to induce bending , and the sensor giving information on displacement and force , said specimen being solid , liquid or gas.2. a displacement and force sensor device using a transducer according to and comprising also of a light source claim 1 , a light detector and a device or a material (light guide) aimed to physically connect the three following parts: light source claim 1 , light detector claim 1 , transducer.3. a displacement and force transducer according to claim 1 , embedded in a material which deformation is to be measured claim 1 ,4. an arrangement of several displacement and force transducers according to claim 1 , embedded or not in a material which deformation is to be measured claim 1 ,5. a displacement and force sensor device ...

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Номер записи: 21
18-04-2013 дата публикации

DEVICE FOR OPTICALLY MEASURING THE CURVATURE OF A ROTOR BLADE OF A WIND POWER PLANT

Номер: US20130093879A1
Автор: Bertolotti Fabio
Принадлежит: SSB Wind Systems GmbH & Co. KG

This disclosure relates to a device for optically measuring the curvature of a rotor blade () of a wind power plant (). The rotor blade is fixed at the blade root () to a rotor hub () or a rotor (). The device includes at least one light-emitting external marking () fixed to the rotor blade () at a distance from the blade root (), at least one camera () fixed to the rotor () for capturing the light () emitted from the external marking (). The device provides first location information as a function of the relative position of the camera () with respect to the external marking (). An evaluating device () is coupled to the camera (), and a position detection means detects the relative location of the camera () with respect to the blade root () and provides second location information as a function of said relative location. The evaluating device () determines at least one variable characterizing the curvature of the rotor blade () while evaluating the position information. 123-. (canceled)24. A device for optically measuring the bending of a rotor blade of a wind turbine secured to a rotor hub of a rotor with the blade root thereof , the device comprising:a light-emitting external marking adapted to be secured to the rotor blade at a distance spaced from the blade root;a camera adapted to be secured to the rotor for receiving light emitted by the external marking and providing first position information dependent on a relative position of the camera with respect to the external marking; andan evaluation device coupled to the camera and including a position detector which detects the relative position of the camera with respect to the blade root and provides second position information dependent on the relative position, wherein the evaluation device determines at least one variable characterizing the bending of the rotor blade by evaluating the position information.25. The device according to claim 24 , wherein the at least one variable characterizing the bending of ...

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Номер записи: 22
18-04-2013 дата публикации

Nested Binary Code Symbol

Номер: US20130094013A1
Автор: Hovis Gregory, Ranson William, Vachon Reginald
Принадлежит: DIRECT MEASRUEMENTS, INC.

A non-linear strain gage includes a target for association with an object for which at least one of strain and fatigue damage is to be measured, a sensor, and a computer. The target incorporates a nested binary code symbol for perimeter-based deformation and strain analysis and emits a detectable physical quantity. The binary code symbol includes a boundary binary code symbol having a perimeter constructed of line segments and at least a core code symbol that provides encoded data. The core code symbol is nested within and concentric with the boundary binary code symbol. A method of measuring strain on an object directly using the non-linear strain gage is also provided. 1. A non-linear strain gage comprising: [ a solid, continuous outer perimeter;', 'first and second data regions along adjacent sides of the perimeter, each data region comprising at least one row of a plurality of data cells, each data cell representing a single bit of binary data;', 'first and second utility regions along adjacent sides of the perimeter opposite the first and second data regions, each utility region comprising at least one row of a plurality of utility cells of alternating appearance;', 'first and second finder cells at opposite corners of the rectangle; and', 'inner and outer quiet regions distinguishing the first and second data regions, the first and second utility regions, and the first and second finder cells from their background; and, '(a) a rectangular boundary binary code symbol including, '(b) a core code symbol that provides encoded data;, 'a target for association with an object for which at least one of strain and fatigue damage is to be measured, the target incorporating a nested binary code symbol for perimeter-based deformation and strain analysis, the target emitting a detectable physical quantity and comprisingsensor means for pre-processing the detectable physical quantity emitted by the target and outputting data representing the physical quantity, the sensor ...

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Номер записи: 23
18-04-2013 дата публикации

METHOD AND APPARATUS FOR IMAGING THREE-DIMENSIONAL STRUCTURE

Номер: US20130094031A1
Автор: Babayoff Noam, Glaser-Inbari Isaia
Принадлежит: CADENT LTD.

An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor. 1(a) providing an array of incident light beams propagating in an optical path leading through a focusing optics and through a probing face; the focusing optics defining one or more focal planes forward said probing face in a position changeable by said optics, each light beam having its focus on one of said one or more focal plane; the beams generating a plurality of illuminated spots on the structure;(b) detecting intensity of returned light beams propagating from each of these spots along an optical path opposite to that of the incident light;(c) repeating steps (a) and (b) a plurality of times, each time changing position of the focal plane relative to the structure;(d) for each of the illuminated spots, determining a spot-specific position, being the position of the respective focal plane yielding a maximum measured intensity of a respective returned light beam; and(e) generating data representative of the topology of said portion.. A method for determining surface topology of a portion of a three-dimensional structure, comprising: This Application is a Continuation Application of U.S. patent application Ser. No. 13/082,623, filed on Apr. 8, 2011, which was a Continuation Application of U.S. patent application Ser. No. 12/654,699, filed on Dec. 29, 2009, now U.S. Pat. No. 7,944,569 which was a Continuation Application of U.S. patent application Ser. No. 12/314,064, filed on Dec. 3, 2008, now U.S. Pat. No. 7,796,277, which was a Continuation Application of U.S. patent application Ser. No. 11/652,055, filed on Jan. 11, 2007, now U.S. Pat. No. 7,477,402, which was a Continuation Application of U.S. patent application Ser. No. 11/377,403, filed on Mar. 17, 2006, now U.S. Pat. No. 7,230,725, which was a Continuation Application of U. ...

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Номер записи: 24
18-04-2013 дата публикации

METHOD AND SYSTEM FOR USE IN MONITORING PROPERTIES OF PATTERNED STRUCTURES

Номер: US20130096876A1
Автор: BRILL BOAZ, COHEN YOEL
Принадлежит: NOVA MEASURING INSTRUMENTS LTD.

A method and system are presented for use in characterizing properties of an article having a structure comprising a multiplicity of sites comprising different periodic patterns, where method includes providing a theoretical model of prediction indicative of optical properties of different stacks defined by geometrical and material parameters of corresponding sites, said sites being common in at least one of geometrical parameter and material parameter; performing optical measurements on at least two different stacks of the article and generating optical measured data indicative of the geometrical parameters and material composition parameters for each of the measured stacks; processing the optical measured data, said processing comprising simultaneously fitting said optical measured data for the multiple measured stacks with said theoretical model and extracting said at least one common parameter, thereby enabling to characterize the properties of the multi-layer structure within the single article. 1. A method for characterizing properties of an article having a multi-layer structure comprising a multiplicity of sites comprising different periodic patterns , the method comprising:providing a theoretical model of prediction indicative of optical properties of different stacks defined by geometrical and material parameters of corresponding sites, said sites being common in at least one of geometrical parameter and material parameter;performing optical measurements on at least two different stacks of the article and generating optical measured data indicative of the geometrical parameters and material composition parameters for each of the measured stacks;processing the optical measured data, said processing comprising simultaneously fitting said optical measured data for the multiple measured stacks with said theoretical model and extracting said at least one common parameter, thereby enabling to characterize the properties of the multi-layer structure within the ...

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Номер записи: 25
25-04-2013 дата публикации

OPTICAL SYSTEM AND MULTI FACET MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Номер: US20130100429A1
Автор: Baier Juergen, Fiolka Damian
Принадлежит: CARL ZEISS SMT GMBH

An optical system of a microlithographic projection exposure apparatus includes a multi facet mirror having a support plate and a plurality of mirror facets. Each mirror facet includes a mirror substrate and a reflective coating applied thereon, and is attached to the support plate. Actuators are provided that induce a deformation of the support plate. The deformation changes the orientation and/or position, but not the shape, of at least two mirror facets. In this way aberrations can be corrected. 1. What is claimed is:An optical system, comprising: a support plate;', 'a plurality of mirror facets, each mirror facet comprising a mirror substrate and a reflective coating supported by the mirror substrate, and each mirror facet being attached to the support plate; and', 'at least one actuator configured to deform the support plate,, 'a multi facet mirror comprising during use of the optical system, each deformation caused by the at least one actuator changes a relative orientation and/or a relative position of at least two mirror facets without changing a shape of the at least two mirror facets; and', 'the optical system is a microlithographic illumination system., 'wherein2. The optical system of claim 1 , comprising facet actuators configured to individually change the orientation and/or the position of the mirror facets with respect to the support plate.3. The optical system of claim 1 , wherein the mirror facets are fixedly attached to the support plate so that the mirror facets cannot be adjusted with respect to the support plate.4. The optical system of claim 1 , wherein the at least one actuator is configured to induce a continuous range of different deformations of the support plate.5. The optical system of claim 1 , wherein claim 1 , for at least some of the mirror facets claim 1 , a gap is present between a portion of the mirror substrate and the support plate.6. The optical system of claim 1 , wherein the at least one actuator is configured to produce ...

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Номер записи: 26
25-04-2013 дата публикации

Method and Apparatus for Detecting a Vehicle Movement

Номер: US20130100438A1
Автор: BREUER Karsten, Gerami-Manesch Bijan, Hanslik Daniel, Hoffmann Guido, Sandkuhler Dirk
Принадлежит: WABCO GmbH

The description relates to a method and a motion sensor for detecting a vehicle movement with respect to a subsurface. The motion sensor comprises a light source unit () for emitting light of at least one wavelength onto the subsurface (), at least one detector () for detecting light reflected by the subsurface, and an evaluation device () for detecting a change in the intensity of the detected reflected light over time. 11. A method for registering a vehicle movement in relation to an underlying surface () , wherein the method comprises:{'b': 11', '1, 'emitting at least one light beam () onto the underlying surface ();'}{'b': 21', '1, 'detecting light () reflected on the underlying surface (); and'}ascertaining whether the light intensity of the reflected light changes in a predetermined time interval within a predetermined variance.2. The method as claimed in claim 1 , wherein the light beam is emitted substantially perpendicular to the underlying surface.3. The method as claimed in one of the preceding claims claim 1 , wherein the reflected light comprises diffusely reflected light.4. The method as claimed in one of the preceding claims claim 1 , wherein the emission of the light comprises light of multiple wavelengths in the infrared range.5. A use of an optical surface sensor for determining a vehicle movement.6210212102. A movement sensor ( claim 1 , ) for registering a vehicle movement in relation to an underlying surface () claim 1 , wherein the movement sensor ( claim 1 , ) comprises:{'b': 12', '1, 'a light source unit () for emitting light of at least one wavelength onto the underlying surface (),'}{'b': '22', 'at least one detector () for detecting light reflected from the underlying surface, and'}{'b': '50', 'an analysis unit () for registering a change of the intensity of the detected reflected light over time.'}72102. The movement sensor ( claim 6 , ) as claimed in claim 6 , which is also a surface sensor.8210212. The movement sensor ( claim 6 , ) as ...

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Номер записи: 27
25-04-2013 дата публикации

Methods and apparatuses for position and force detection

Номер: US20130100461A1
Автор: Hendrik Herrmann, Reinold Wischnewski
Принадлежит: CARL ZEISS MICROSCOPY GMBH

Methods and apparatuses for detection of a force acting on an object trapped in optical tweezers and/or for detection of a position change of an object illuminated by a light beam are described. In this respect, light scattered from the object is guided via a telescope arrangement to a detector such that a diverging beam falls onto the detector.

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Номер записи: 28
02-05-2013 дата публикации

Container Inspection Apparatus and Method

Номер: US20130107249A1
Автор: George H. Hall, Jr., Stephen M. Graff, Timothy A. Kohler
Принадлежит: Owens Brockway Glass Container Inc

A method of and apparatus for inspecting a container having a base and a mouth. Light is directed through the container base into the container, and out of the container through the container mouth, using at least one light source disposed beneath the container base. A plurality of images of the container mouth is obtained from the light transmitted through the container mouth. Minimum bore diameters of the container mouth are calculated from the plurality of images, and an overall lowest minimum bore diameter (OLMBD) of the minimum bore diameters is identified. A value other than the OLMBD is determined to be an effective minimum bore diameter of the container mouth.

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Номер записи: 29
02-05-2013 дата публикации

DEVICE FOR TESTING THE QUALITY OF MICROSTRUCTURIZATION

Номер: US20130107278A1
Автор: Dieckhoff Stefan, Markus Susanne, Meyer Udo
Принадлежит:

A device is described for testing the quality of microstructurization of a surface () in the case of a known target microstructurization quality, comprising a radiation source () for coherent radiation, a first detector () and a second detector () and a masking system, which are set up and arranged with respect to one another so that 1. Device for testing the quality of microstructurization of a surface in the case of known target microstructurization quality , comprising a radiation source for coherent radiation , a first detector , a second detector and a masking system , which are set up and arranged with respect to one another so that(a) radiation emitted by the radiation source onto a surface, which is provided with a microstructurization of the target quality, produces a diffraction pattern,(b) the diffraction maximum of order “n” of the diffraction pattern would, without the masking system, impinge on the first detector,(c) the masking system prevents ≧80% of the photons that are to be assigned to the diffraction maximum of order “n” from impinging on the detector and(d) the diffraction maximum of order “a” of the diffraction pattern impinges on the second detector,wherein “n” is selected from the group consisting of 1, 2, 3, 4, 5, 6, 7, 8, 9 and 10 and “a” is selected from the group consisting of 1, 2, 3, 4, 5, 6, 7, 8, 9 and 10 and a≠n.2. Device according to claim 1 , wherein the first detector and the second detector are arranged at an angle to one another.312. Device according to claim 1 , comprising a signal evaluator claim 1 , for comparing the signal produced by the first detector with a target value Z and/or the signal produced by the second detector with a target value Z.412. Device according to claim 3 , wherein the signal evaluator is set up for comparing the signal produced by the first detector with a limit G and/or the signal produced by the second detector with a limit G.5. Arrangement claim 1 , comprising a device according to and a ...

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Номер записи: 30
09-05-2013 дата публикации

THREE-DIMENSIONAL IMAGING USING A SINGLE CAMERA

Номер: US20130113885A1
Автор: Frigerio Federico, Hart Douglas P., Marini Davide M.
Принадлежит:

The attenuation and other optical properties of a medium are exploited to measure a thickness of the medium between a sensor and a target surface. Disclosed herein are various mediums, arrangements of hardware, and processing techniques that can be used to capture these thickness measurements and obtain three-dimensional images of the target surface in a variety of imaging contexts. This includes general techniques for imaging interior/concave surfaces as well as exterior/convex surfaces, as well as specific adaptations of these techniques to imaging ear canals, human dentition, and so forth. 1. A method comprising:positioning a balloon in a cavity, the balloon including a fluorescent substance that fluoresces over a range of wavelengths;inflating the balloon with a medium until a surface of the balloon conforms to a target surface within the cavity, wherein the medium absorbs a first wavelength of light within the range of wavelengths more than a second wavelength of light within the range of wavelengths;illuminating the surface of the balloon at an excitation wavelength for the fluorescent substance;measuring an intensity of the first wavelength and an intensity of the second wavelength in a direction of a location on the surface when illuminated;calculating a thickness of the medium in the direction of the location based upon a ratio of the intensity of the first wavelength and the intensity of the second wavelength; andcombining a plurality of similarly calculated thickness measurements of the medium in a plurality of directions toward the surface of the inflatable membrane to obtain a three-dimensional image of the inflatable membrane.2. The method of wherein the cavity is a human ear canal.3. The method of wherein the balloon includes an elastic membrane.4. The method of wherein the medium has a substantially greater coefficient of attenuation for the first wavelength than the second wavelength.5. The method of wherein the medium includes a gas.6. The method ...

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Номер записи: 31
09-05-2013 дата публикации

DEVICE FOR SENSING A CAPSULE IN A BEVERAGE PRODUCTION APPARATUS

Номер: US20130114089A1
Автор: Jarisch Christian, Kaeser Stefan, Perentes Alexandre
Принадлежит: NESTEC S.A.

The invention aims to provide a device sensing a capsule () inserted in a receptacle () in machine and physical parameters of liquid supplied by a beverage production apparatus flowing through the capsule in function of the type of capsule. The capsule containing beverage ingredient is inserted in a cylindrical or conical wide mouthed receptacle having an upper opening for inserting the capsule and a lower bottom closing the receptacle. The receptacle rotates around an axis of a hollow shaft () attached at the center and perpendicularly to the external face of the bottom of the receptacle, said shaft forming a hole at the center of the inner face of the bottom of the receptacle. The device comprises a rod sliding in the shaft and passing through the hole of the inner face of the bottom of the receptacle, said rod () being provided with a spring maintaining an end of the rod lifted inside the receptacle in contact with the capsule, the other end being inside the shaft. The device further comprising means for measuring the position of the end of the rod in the shaft, in order to control, in function of the size of the capsule inserted in the receptacle, rotation speed of the receptacle, discharge and physical parameters of liquid supplied by the beverage production apparatus flowing through the capsule. 1. Device for sensing a capsule in a beverage production apparatus , comprising a receptacle for receiving the capsule containing beverage ingredient , the receptacle having an upper opening for inserting the capsule and a bottom , the device comprises at least one sensing member for sensing the relative position of an external surface of the capsule in the receptacle , the relative position being representative of the size of the receptacle when the capsule is arranged in the receptacle and a member for providing a code which is related to the sensed relative position of the surface.2. Device according to claim 1 , wherein the sensing member comprises a retractable ...

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Номер записи: 32
16-05-2013 дата публикации

DIAPHRAGM POSITION MEASURING METHOD, DIAPHRAGM POSITION MEASURING APPARATUS, DIAPHRAGM POSITIONING METHOD AND DIAPHRAGM POSITIONING APPARATUS

Номер: US20130120762A1
Автор: Wada Kazuhiro
Принадлежит:

A diaphragm position measuring method and a diaphragm position measuring apparatus are disclosed, which are capable of measuring a deviation quantity between a center of an optical diaphragm and an optical axis with high accuracy. A diaphragm positioning method and a diaphragm positioning apparatus are further disclosed, which are capable of disposing the optical diaphragm in a lens unit with the high accuracy. A light condensing spot is formed by getting a collimated beam of light incident upon lenses of the lens units supported on a glass sheet, and a position of the light condensing spot, if detected by a microscope, can be used as a reference point for positioning the optical diaphragm. A central processing unit can obtain a deviation quantity between the position of the light condensing spot and a central position of the optical diaphragm, which is acquired by the microscope, and the lens unit can be effectively inspected by use of a result thereof. It is thereby feasible to detect the deviation quantity of the central position of the optical diaphragm with an error equal to or smaller than ±3 μm. 1. A diaphragm position measuring method of measuring a position of an optical diaphragm in a lens unit including the optical diaphragm , lenses and a mirror frame holding the optical diaphragm and the lenses , the method comprising:a step of forming a light condensing spot by getting a collimated beam of light parallel with an optical axis of the lenses incident upon the lenses of the lens unit;a step of detecting a position of the light condensing spot;a step of detecting a central position of the optical diaphragm; anda step of obtaining a deviation quantity between the position of the light condensing spot and the central position of the optical diaphragm.2. The diaphragm position measuring method according to claim 1 , wherein the step of detecting the central position of the optical diaphragm involves obtaining geometrically the central position of the optical ...

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Номер записи: 33
16-05-2013 дата публикации

MEASUREMENT SYSTEM OF A LIGHT SOURCE IN SPACE

Номер: US20130120763A1
Автор: Franzi Edoardo, Grenet Eric, Hasler David, MASA Peter
Принадлежит:

A system measures the position of a light source in space using an imager and transparent surface with a pattern on top. The pattern consists of a repetitive pattern and a distinctive element. The system achieves sub-micron precision. It also handles the measurement of several light sources simultaneously, and the measurement of the position of a retroreflector instead of the light. 123-. (canceled)25. The measurement system of claim 24 , wherein the component patterns are made of microlenses and in that the distinctive element is a set of at least one missing microlens region.26. The measurement system of claim 24 , wherein the component is a grating composed of opaque repetitive patterns realized on a planar surface including a distinctive element.27. The measurement system according to claim 24 , comprising M imaging devices and M components claim 24 , wherein each component is attached between the light source and its respective imaging device claim 24 , and wherein the relative position between each imaging-component couple is fixed and defined claim 24 , and wherein M is greater or equal to two claim 24 , and wherein the imaging devices are not all coplanar claim 24 , and wherein the computation means are designed to compute the three dimensional position of the light source.28. The measurement system according to claim 24 , wherein the imaging device is composed of a plurality of sensitive pixels disposed in two dimensions; and wherein the computation means are designed to compute the elevation along the first dimension and the elevation along the second dimension of the light source from the repetitive patterns and from the distinctive element present in said image.29. The measurement system according to claim 28 , wherein at least 80% of said pixels that record said image of the shadow affect either the elevation value along the first dimension or the elevation value along the second dimension claim 28 , or both at the same time.30. The measurement system ...

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Номер записи: 34
23-05-2013 дата публикации

Thermally Stable Optical Sensor Mount

Номер: US20130128254A1
Автор: Badami Vivek G.
Принадлежит: ZYGO CORPORATION

Disclosed is an apparatus including a mechanical reference frame and a rigid object mechanically coupled to the reference frame by two or more constraints. The stiffnesses of at least two of the constraints are different from one another, and the relative locations and stiffnesses of the constraints cause a designated point on the rigid object to remain stationary with respect to the reference frame during thermal expansion of the rigid object over a range of temperatures. 1. An apparatus comprising:a. a mechanical reference frame; andb. a rigid object mechanically coupled to the reference frame by two or more constraints,c. wherein stiffnesses of at least two of the constraints are different from one another, and wherein the relative locations and the stiffnesses of the constraints cause a designated point on the rigid object to remain stationary with respect to the reference frame during thermal expansion of the rigid object over a range of temperatures.2. The apparatus of claim 1 , wherein the rigid object supports a measurement probe and wherein the designated point is a datum of the measurement probe.3. The apparatus of claim 2 , wherein the different stiffnesses are selected to cause the position of a thermal center of the rigid object to align with the measurement probe datum.4. The apparatus of claim 2 , wherein the measurement probe is an optical encoder head and the reference frame comprises an encoder scale.5. The apparatus of claim 4 , wherein the optical encoder head is an interferometric encoder head.6. The apparatus of claim 4 , wherein the optical encoder head is configured to optically monitor changes in position of the reference frame relative to the measurement datum.7. The apparatus of claim 6 , wherein the optical encoder head is configured to optically monitor changes in position of the reference frame along each of multiple degrees of freedom.8. The apparatus of claim 1 , wherein the two or more constraints comprise three or more constraints.9 ...

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Номер записи: 35
23-05-2013 дата публикации

METHOD FOR DETECTING THE SHAPE AND/OR DIMENSIONS OF A WHEEL ON VEHICLE REPAIR WORKSHOP MACHINES OR THE LIKE

Номер: US20130128281A1
Автор: Matteucci Andrea, Montanari Marco
Принадлежит: SICAM S.R.L.

The method (M) for detecting the shape and/or dimensions of a wheel () on vehicle repair workshop machines or the like comprises the stages of: projection (B, B) of a line of light () onto the surface of a portion of a wheel () mounted rotating on a vehicle repair workshop machine () or the like; acquisition (C, C) of at least a two-dimensional image (I) of the projected line of light (); processing (F) of the acquired image (Ii) to determine the profile (P) of the portion of the wheel (); at least two stages (D, D) of complete rotation of the wheel (); and a distributed detection stage (A), wherein the projection stage (B, B) and acquisition stage (C, C) are performed in correspondence to first angular positions (α) of the wheel () during the first rotation stage (D), and in correspondence to second angular positions (α) of the wheel () during the second rotation stages (D), at least some of the first angular positions (α) and the second angular positions (α) being non-coincident. 1) A method for detecting the shape and/or dimensions of a wheel on vehicle repair workshop machines , comprising the stages of:projecting a line of light onto the surface of at least a portion of a wheel mounted and rotating on a vehicle repair workshop machine, said line of light being generated by at least one light emitter;acquiring a two-dimensional image of said projected line of light, said acquisition stage being performed by at least one light sensor; andprocessing of said acquired image to determine the profile of said portion of the wheel;said method including at least two stages of complete rotation of said wheel and a distributed detection stage, wherein said projection stage and acquisition stage are performed in correspondence to a group of first angular positions of said wheel during the first of said rotation stages, and in correspondence to a group of second angular positions of said wheel during the second of said rotation stages,wherein said group of first angular ...

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Номер записи: 36
23-05-2013 дата публикации

AUTOMATIC MEASUREMENT OF DIMENSIONAL DATA WITH A LASER TRACKER

Номер: US20130128284A1
Автор: Bridges Robert E., Steffensen Nils P., Steffey Kenneth
Принадлежит: FARO TECHNOLOGIES, INC.

Measuring with a system having retroreflector targets and a laser tracker includes storing a list of nominal coordinates for three targets and at least one added point; capturing on a photosensitive array of the tracker a portion of the light emitted by a light beam and reflected off the three targets; obtaining spot positions on a photosensitive array of a tracker camera from light reflected off the three targets; determining a correspondence between three spot positions on the tracker photosensitive array and the nominal coordinates of the three targets; directing a beam of light from the tracker to the three targets based at least in part on the nominal coordinates of the first target and the first spot position; measuring 3-D coordinates of the three targets with the tracker; determining 3-D coordinates of the at least one added point based at least in part on the measured 3-D coordinates of the three targets and the nominal coordinates of the at least one added point. 1providing the system including a collection of retroreflector targets and a laser tracker, the collection of retroreflector targets including at least three non-collinear retroreflector targets, the at least three non-collinear retroreflector targets including a first target, a second target, and a third target, the laser tracker in a first frame of reference fixed with respect to tracker surroundings, the laser tracker having a structure, a first light source, an absolute distance meter, a first angular transducer, a second angular transducer, a tracking system, a first camera, a second light source, and a processor, the structure rotatable about a first axis and a second axis, the first light source producing a first light beam that cooperates with the absolute distance meter, the first angular transducer measuring a first angle of rotation about the first axis, the second angular transducer measuring a second angle of rotation about the second axis, the tracking system configured to move the ...

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Номер записи: 37
30-05-2013 дата публикации

OPTICAL SENSOR

Номер: US20130135627A1
Автор: Essig Horst, Geiger Fabian, Klass Dieter, Weber Juergen-Ralf
Принадлежит: Leuze Electronic GmbH + Co. KG

A method for optically monitoring an object within a monitoring area includes transmitting light rays with a light transmitting unit that form a line of light on the object. The line of light reflected from the object is imaged on an array of receiving elements that detects the reflected line of light and produces receiving element signals that correspond to measuring points on the object. The receiving element signals are evaluated to structure a distance profile of the object using a triangulation principle. The evaluating includes generating at least one evaluation window which covers in a first direction a local region extending along the line of light and in a second direction a distance range, and using the measuring points located farthest outside within the evaluation window for a left limit point and a right limit point for determining object data. 1. A method for optically monitoring an object within a monitoring area , comprising:transmitting light rays with a light transmitting unit that form a line of light on the object;imaging the line of light as reflected from the object on an array of receiving elements that detects the reflected line of light and produces receiving element signals that correspond to measuring points on the object; andevaluating the receiving element signals to structure a distance profile of the object using a triangulation principle, the evaluating including generating at least one evaluation window which covers in a first direction a local region extending along the line of light and in a second direction a distance range, and using the measuring points located farthest outside within the evaluation window for a left limit point and a right limit point for determining object data.2. The method according to claim 1 , wherein the measuring points have respective position values and the evaluating includes forming output signals from the position values for the left limit point and the right limit point which represent edge ...

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Номер записи: 38
30-05-2013 дата публикации

THREE DIMENSIONAL POSITION OBSERVATION METHOD AND APPARATUS

Номер: US20130136311A1
Автор: MIZUTANI Kana, NISHIZAKA Takayuki
Принадлежит: JAPAN SCIENCE AND TECHNOLOGY AGENCY

A three-dimensional position observation apparatus provided with a lens system having focusing and diaphragm mechanisms, for forming an image on an imaging plane by light from an observation object includes a beam steering member disposed in a light path extending from the observation object to the imaging plane, for changing a traveling direction of observation light into a plurality of different directions, and an image analyzing unit for analyzing a position of the observation object based on a positional relation between a plurality of images on the imaging plane formed by light passing through the beam steering member. 111-. (canceled)12. A three-dimensional position observation method using a three-dimensional position observation apparatus provided with a lens system having focusing and diaphragm mechanisms , for forming an image on an imaging plane by light from an observation object , the three-dimensional position observation method comprising:disposing a beam steering member in a light path extending from the observation object to the imaging plane, the beam steering member for changing a traveling direction of observation light into a plurality of different directions; andanalyzing a position of the observation object based on a positional relation between a plurality of images on the imaging plane formed by light passing through the beam steering member with an image analyzing unit.13. (canceled)14. A three-dimensional position observation apparatus provided with a lens system having focusing and diaphragm mechanisms , for forming an image on an imaging plane by light from an observation object , the three-dimensional position observation apparatus comprising:a beam steering member disposed in a light path extending from the observation object to the imaging plane, for changing a traveling direction of observation light into a plurality of different directions; andan image analyzing unit for analyzing a position of the observation object based on a ...

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Номер записи: 39
06-06-2013 дата публикации

Profile measuring apparatus, structure manufacturing system, method for measuring profile, method for manufacturing structure, and non-transitory computer readable medium

Номер: US20130141734A1
Автор: Hiroshi Aoki
Принадлежит: Nikon Corp

There is provided a form measuring apparatus including; an imager configured to take an image of a object, an irradiator configured to irradiate a measurement light from a projection direction different from the direction along which the imager performs imaging to form a predetermined light amount distribution on the object, a reference light generator configured to generate a reference light to irradiate the object, and a detector configured to detect a target area for form measurement of the object based on a pickup image taken by the imager as the reference light is irradiated on the object.

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Номер записи: 40
06-06-2013 дата публикации

TARGET FOR LARGE SCALE METROLOGY SYSTEM

Номер: US20130141735A1
Автор: Cooper Alexander, NOVAK W. Thomas, Sogard Michael
Принадлежит:

A target () for a metrology system () that monitors the position of an object () includes a target housing () and a photo detector assembly (). The target housing () can include a first target surface (A), and a second target surface (B) that is at an angle relative to the first target surface (A). The photo detector assembly () can include a first detector (A) that is secured to the first target surface (A), and a second detector (B) that is secured to the second target surface (B). Each of the detectors (A) (B) can be a quad cell that includes four detector cells (A) (B) (C) (D) that are separated by a gap (). 1. A target for a metrology system that monitors an object , the metrology system including a transmitter that generates a moving beam , the target comprising:a target housing including a first target surface, and a second target surface that is at an angle relative to the first target surface; anda photo detector assembly including a first detector secured to the first target surface and a second detector secured to the second target surface, the first detector generating a first signal that is used to identify when the beam impinges on the first detector, and the second detector generating a second signal that is used to identify when the beam impinges on the second detector.2. The target of wherein at least one of the detectors is a position sensitive detector.3. The target of wherein at least one of the detectors is a split detector that includes at least two detector cells separated by a gap.4. The target of wherein at least one of the detectors is a quad cell that includes four detector cells that are separated by a gap.5. The target of wherein the target housing includes a third target surface that is at an angle relative to the first target surface and the second target surface claim 1 , and wherein the photo detector assembly includes a third detector that is secured to the third target surface.6. The target of wherein the target housing is shaped ...

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Номер записи: 41
06-06-2013 дата публикации

OPTICAL POSITION DETECTING DEVICE, ROBOT HAND, AND ROBOT ARM

Номер: US20130144438A1
Автор: KIYOSE Kanechika
Принадлежит: SEIKO EPSON CORPORATION

An optical position detecting device includes a plurality of light source sections which emits detection light, a light detection section which receives the detection light reflected by a target object located in an emitting space of the detection light, a light source driving section which turns on some light source sections among the plurality of light source sections in a first period and turns on, in a second period, light source sections different from the light source sections turned on in the first period, and a position detecting section which detects the position of the target object on the basis of a light-receiving result of the light detection section in the first period and the second period. Each of the light source sections includes a plurality of light-emitting elements arrayed in a direction intersecting the direction of the optical axis of the detection light. 1. An optical position detecting device comprising:a plurality of light source sections which emit light;a light detection section which receives the light reflected by a target object; anda position detecting section which is electrically connected to the light detection section and includes a signal processor to detect the position of the target object,wherein the light source sections include a plurality of light-emitting elements arrayed in a direction intersecting the direction of an optical axis of the light.2. The optical position detecting device according to claim 1 ,wherein a light source driving section executes the first mode where some light-emitting elements of the plurality of light-emitting elements are turned on and the second mode where light-emitting elements different from at least those in the first mode among the plurality of light-emitting elements are turned on.3. The optical position detecting device according to claim 2 ,wherein the light source driving section turns on some light-emitting elements of the plurality of light-emitting elements in the first mode, and ...

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Номер записи: 42
13-06-2013 дата публикации

IMAGE PROCESSING APPARATUS AND IMAGING APPARATUS USING THE SAME

Номер: US20130147948A1
Автор: Higuchi Mirai, Monji Tatsuhiko, Muramatsu Shoji, Sakano Morihiko, Shima Takeshi
Принадлежит:

It is possible to provide an image processing apparatus capable of carrying out calibration easily and precisely without requiring a special facility and provide an imaging apparatus making use of the image processing apparatus. The imaging apparatus comprises at least two cameras and . The image processing apparatus or the image processing apparatus comprises a corresponding-area computing section for finding a relation between areas on images taken by the cameras and ; a coincidence-degree computing section for finding a degree of coincidence of information obtained from corresponding areas on the images taken by the cameras and ; and a camera-parameter computing section for finding camera parameters on the basis of the coincidence degree computed by the coincidence-degree computing section 1. An image processing apparatus comprising:a correction-data reading section for reading pre-stored correction data to be used for correcting two images taken in such a way that their visual fields overlap each other and at least one of their positions, their angles and their zoom ratios are different from each other or for reading correction data computed by carrying out processing;an image correcting section for correcting a taken image by making use of said correction data read by said correction-data reading section;a corresponding-area computing section for computing corresponding areas selected from the inside of each of two images corrected by said image correcting section;a coincidence-degree computing section for computing at least one of a degree of coincidence of image patterns extracted from said corresponding areas, a degree of coincidence of coordinates of said corresponding areas and a degree of coincidence of gaps between said corresponding areas;a camera-parameter computing section for computing camera parameters on the basis of a coincidence degree computed by said coincidence-degree computing section; anda correction-data storing section for storing said ...

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Номер записи: 43
13-06-2013 дата публикации

Device Manufacturing Method and Associated Lithographic Apparatus, Inspection Apparatus, and Lithographic Processing Cell

Номер: US20130148121A1
Автор: Arie Jeffrey Den Boef, Kaustuve Bhattacharyya, Martin Jacobus Johan Jak, Michael Kubis
Принадлежит: ASML Netherlands BV

Disclosed is a device manufacturing method, and accompanying inspection and lithographic apparatuses. The method comprises measuring on the substrate a property such as asymmetry of a first overlay marker and measuring on the substrate a property such as asymmetry of an alignment marker. In both cases the asymmetry is determined. The position of the alignment marker on the substrate is then determined using an alignment system and the asymmetry information of the alignment marker and the substrate aligned using this measured position. A second overlay marker is then printed on the substrate; and a lateral overlay measured on the substrate of the second overlay marker with respect to the first overlay marker using the determined asymmetry information of the first overlay marker.

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Номер записи: 44
13-06-2013 дата публикации

EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE

Номер: US20130148123A1
Автор: HAYASHI Nozomu
Принадлежит: CANON KABUSHIKI KAISHA

An exposure method comprises: a first detection step of detecting a position of a first mark by a first scope; a second detection step of detecting a position of a second mark by a second scope having a magnification higher than the first scope; a first calculation step of calculating a first correction value based on the detection results obtained in the first and second detection steps; a third detection step of detecting a position of a third mark by the second scope after the substrate is aligned based on the first correction value calculated in the first calculation step; a second calculation step or calculating a second correction value based on the detection results obtained in the second and third detection steps; and an exposure step of exposing the substrate after the substrate is aligned based on the second correction value calculated in the second calculation step. 1. An alignment method by aligning a substrate using a mark formed on the substrate , the method comprising:a first detection step of detecting a position of a first mark by detecting the first mark using a scope of first magnification;a shift step of shifting the substrate, based on a shift correction value obtained from a detection result in the first detection step, from a position of the substrate when the first mark was detected by the scope of first magnification to a position of the substrate where a second mark, different from the first mark, enters a field of a scope of second magnification higher than the first magnification;a second detection step of detecting a position of the second mark which has entered the field of the scope of second magnification, by detecting the second mark using the scope of second magnification;a first calculation step of calculating a first correction value based on the result of detecting the position of the first mark by the scope of the first magnification obtained in the first detection step and the result of detecting the position of the second mark ...

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Номер записи: 45
13-06-2013 дата публикации

APPARATUS AND METHOD FOR MEASURING DISTANCE

Номер: US20130148129A1
Автор: Urner David, Warden Matthew
Принадлежит: ISIS INNOVATION LIMITED

A method of tracking the position of an object, comprising using reference interference data from first output beam, reference interference data from a second output beam, measurement interference data from the first output beam, measurement interference data from the second output beam, and knowledge of the difference between the absolute phase offset of the first output beam and the absolute phase offset of the second output beam for both a reference interferometer (′) and a measurement interferometer () to calculate a parameter indicative of the absolute phase offset of the measurement interferometer () for the first output beam. The calculated parameter is used to calculate the ratio of the optical path differences of the measurement interferometer () and the reference interferometer (′). 1. A method of tracking the position of an object , the method comprising:varying during a measurement period an optical frequency of at least one of (i) a first laser, providing a first output beam, and (ii) a second laser, providing a second output beam;simultaneously directing the first and second output beams into both (a) a reference interferometer having arms with a known optical path difference and (b) a measurement interferometer having arms with an unknown optical path difference, the unknown optical path difference giving rise to an interferometer phase difference for the first output beam and an interferometric phase difference for the second output beam, each interferometric phase difference consisting of an absolute phase offset and an unwrapped phase;obtaining, in the measurement period, reference interference data from the reference interferometer and measurement interference data from the measurement interferometer;distinguishing, on the one hand, interference data resulting from the first output beam from, on the other hand, interference data resulting from the second output beam, in both the reference interference data and the measurement interference data; ...

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Номер записи: 46
13-06-2013 дата публикации

POSITION MEASURING DEVICE AND METHOD FOR DETERMINING AN ABSOLUTE POSITION

Номер: US20130148131A1
Автор: Wagner Jean-Jacques
Принадлежит: ELESTA RELAYS GMBH

A position measuring apparatus with 112-. (canceled)13. A position measuring device , comprising:at least one material measure having an optical structure comprising a plurality of focusing optical elements;at least one light receiver arranged at a distance from the material measure;a light source arranged at a distance from the material measure and at a distance from the light receiver; andat least one transparent substrate present between the material measure and the light receiver, wherein the light receiver is deposited directly on the transparent substrate, on the side of the substrate opposite the material measure in the form of a thin-film structure consisting of a plurality of layers arranged one above another; anda supporting plate comprises a plurality of circuit-board conductors, the transparent substrate and the supporting plate are joined solidly together by a Flip-Chip assembly, the material measure has two or more tracks with optical elements, wherein a first track serves for production of an incremental signal, and the light receiver is formed as a sensor zone, each comprising a plurality of light receiver elements, wherein at least one first and one second sensor zones are provided, wherein the first sensor zone is configured to interact with the first track for producing an incremental signal and wherein the second sensor zone is configured to interact with a second track, which is a coded track.14. The position measuring device of claim 13 , wherein the light source and the light receiver comprise a sensor head and wherein the material measure is movable relative to the sensor head.15. The position measuring device of claim 14 , wherein the material measure is mounted on a movable element claim 14 , the sensor head is arranged on a carrier claim 14 , and the sensor head is displaceable relative to the movable element when the movable element is in a resting position.16. The position measuring device of claim 14 , further comprising a motor ...

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Номер записи: 47
20-06-2013 дата публикации

METHOD FOR DETERMINING DEFECTS IN A WIND TURBINE BLADE ROOT ATTACHMENT AND MEASURING TOOL FOR CARRYING OUT SUCH METHOD

Номер: US20130152411A1
Автор: Bulacio Bossio Horacio
Принадлежит: ALSTOM WIND, S.L.U.

Reference bores are selected in blade extender and one or more reference plates are provided at a height (h; h) from extender flange. A reference laser device is provided within reference bores which beam impinging on reference plates is in line with bore axis. A blade root bore is selected and a laser device is fitted therein such that a measuring laser beam impinging on plates is in line with axis of blade root bore. The measuring laser beam can be then assessed. A measuring tool is used having a first end to which laser devices can be attached or other devices such as a comparator, and a movable second end for being inserted within the corresponding bores with a tight fit. 1100. A method for determining defects in a wind turbine blade root attachment , the blade root attachment comprising a number of blade root bores formed in a blade root portion and a number of reference bores formed in a blade extender or a hub , the blade root and reference bores being suitable for receiving attaching studs therein for attaching the blade root portion () to the blade extender or hub , the method comprising the steps of:selecting at least two of said reference bores;providing at least one reference plate from one end of the blade extender;{'b': '20', 'providing a reference laser device such that a reference laser beam is in line with an axis (′) of the selected reference bores and impinges on said reference plates;'}selecting at least one blade root bore;providing a measuring laser device in said blade root bore such that a measuring laser beam is in line with an axis of said blade root bore and impinges on said reference plates; andassessing the measuring laser beam for determining defects.2. The method of claim 1 , wherein said laser assessing step includes comparing a line representing the measuring laser beam with a line representing the reference laser beam and determining their relative angular deviation (α).312. The method of claim wherein at least two reference plates ...

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Номер записи: 48
20-06-2013 дата публикации

OPTICAL POSITION DETECTION DEVICE, HAND DEVICE, AND DISPLAY DEVICE WITH POSITION DETECTION FUNCTION

Номер: US20130155028A1
Автор: NAKANISHI Daisuke
Принадлежит: SEIKO EPSON CORPORATION

A position detection device includes: a light source adapted to form a light intensity distribution of a detection light beam; a first detector adapted to receive a reflected light beam of the detection light beam reflected by an object in a detection area where the light intensity distribution is formed; a transmissive member disposed between the detection area and the light source, and between the detection area and the first detector, and having a first surface directed toward the detection area and a second surface directed toward the light source; a second detector adapted to receive a light beam reflected by the second surface out of the detection light beam; a position detector adapted to detect the object based on the detection result in the first detector; and a light blocking member disposed between the second detector and the detection area, and adapted to block the reflected light beam. 1. A position detection device adapted to detect a position of a target object , comprising:a light source section forming a light intensity distribution of a detection light beam;a first light detector receiving a reflected light beam of the detection light beam reflected by the target object;a transmissive member disposed between the detection area and the light source section, and between the detection area and the first light detector;a second light detector receiving a light beam reflected by the transmissive member out of the detection light beam emitted from the light source section; anda light blocking member disposed between the second light detector and the transmissive member, and adapted to block the reflected light beam.2. The position detection device according to claim 1 , whereinthe second light detector is disposed at a position overlapping the first light detector in a plan view with respect to a flat surface of the transmissive member.3. The position detection device according to claim 1 , whereinthe light source section forms a first light intensity ...

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Номер записи: 49
20-06-2013 дата публикации

Projection aligner

Номер: US20130155398A1
Автор: Yuken Nakamoto
Принадлежит: Orc Manufacturing Co Ltd

A projection aligner comprises a projection optical system for radiating a luminous flux including ultraviolet rays onto a photomask, and projecting said luminous flux which has passed through the photomask onto a substrate to which photoresist is applied; a substrate table for mounting the substrate, and a light blocking means for covering the peripheral portion of the substrate to block luminous flux. The light blocking means ( 80 ) includes a first light blocking member ( 84 ) and a second light blocking member ( 86 ) each having a substantially semicircular opening, and moving means ( 82, 83 ) for moving the first light blocking means and the second light blocking means approaching each other and away from each other. As the first light blocking member and the second light blocking member are moved to approach each other, the first light blocking member and the second light blocking member form an annular shape and cover the peripheral portion of the substrate (CB).

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Номер записи: 50
20-06-2013 дата публикации

METHOD FOR MONITORING THE MANUFACTURING PROCESS OF HOT-MANUFACTURED TUBES MADE FROM STEEL

Номер: US20130158699A1
Автор: Deppe Gerd-Joachim, van der Logt Mark
Принадлежит: V & M DEUTSCHLAND GMBH

A method for monitoring the manufacturing process of hot-rolled tubes in which the type and dimensional characteristics of structures produced by the rolling process on an outer surface of the tube are evaluated to assess the process state. Immediately subsequent to the rolling process in the exit side region of a rolling stand the outer surface of at least one defined portion of the tube is detected by measuring technology, linearly by means of an optical laser stripe method and in a clocked manner in the form of profile lines, and the profile lines are then combined to form an at least two-dimensional topography and the topography is evaluated to assess the process state. 1. A method for monitoring the manufacturing process of hot-rolled steel tubes in which the type and dimensional characteristics of structures produced by the rolling process on an outer surface of the tube are evaluated to assess the process state , said method comprising:detecting the outer surface of at least one defined portion of the tube immediately subsequent to the rolling process in the exit side region of a rolling stand linearly by an optical laser stripe in a clocked manner in the form of profile lines;combining the profile lines to form an at least two-dimensional topography; andevaluating the topography to assess the process state.2. The method of claim 1 , wherein the hot-rolled steel tubes are produced by a hot Pilger process.3. The method of claim 2 , wherein the topography of the outer surfaces is detected in an automated manner.4. The method of claim 3 , wherein the outer surface of the tube is detected in a spatially-resolved and time-resolved manner claim 3 , and wherein the topography composed there from is compared with a reference image of an already rolled tube claim 3 , serving as a reference body claim 3 , of the same steel grade class and same nominal dimensions of the same measurement location in each case and is evaluated to assess the process state.5. The method of ...

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Номер записи: 51
20-06-2013 дата публикации

Computing device and method for detecting defective hardware of image measurement machine

Номер: US20130158930A1
Автор: Chih-Kuang Chang, Hua-Wei Yang, Min-Jun Huang
Принадлежит: Hon Hai Precision Industry Co Ltd, Hongfujin Precision Industry Shenzhen Co Ltd

A method for detecting defective hardware of an image measurement machine, the method creates a hardware-recording table that records abnormalities to occur in hardware components of the image measurement machine, and detects device connecting faults, port connecting faults, and hardware faults of the image measurement machine. If any fault is detected, the method searches a serial number and one or more solutions for the fault from the hardware-recording table, and displays the serial number and the one or more solutions on a display screen of the computing device.

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Номер записи: 52
20-06-2013 дата публикации

Threat detection systems and methods using image intensifiers and position-sensing photodiodes

Номер: US20130158943A1
Автор: Odhner Jefferson E.
Принадлежит:

Threat detection systems and methods are disclosed that employ position-sensing photodiodes (PSDs) to locate a munitions flash within a field of view of a collection optical system. Image intensifiers are used to form intensified first and second focus spots from the focus spots formed by the collection optical system over two different wavelength bands. The intensified focus spots are then detected by corresponding PSDs. The flash is then located on a map of the monitored terrain, which map can be displayed to a system user. Processing electronics determine whether the flash is actually munitions-based or is from another non-threatening light source. 1. A method of detecting a threat from a potassium-based munition in a section of monitored terrain , comprising:collecting first light originating from a flash from a potassium-based munition using a collection optical system having a field of view;intensifying the collected first light to form first intensified light;detecting on a first position-sensing photodiode (PSD) a first intensified light spot formed from the first intensified light and converting the detected first intensified light spot into a first electrical signal;monitoring with a second PSD second light that does not come from the potassium-based munition and that is collected by the collection optical system, and providing a second electrical signal from the second PSD;comparing the first and second electrical signals to determine whether the detected first intensified light spot represents a threat from the potassium-based munition; andlocating the threat within the field of view of the collection optical system.2. The method of claim 1 , further comprising intensifying the second light and detecting the intensified second light with the second PSD when forming the second electrical signal.3. The method of claim 1 , further comprising:providing a map of the monitored terrain section; andoverlaying the threat location on the map.4. The method of claim ...

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Номер записи: 53
27-06-2013 дата публикации

Lithographic Apparatus and Method

Номер: US20130162966A1
Автор: BEERENS Ruud Antonius Catharina Maria, Cadee Theodorus Petrus Maria, LAFARRE Raymond Wilhelmus Louis, Van Der Pasch Engelbertus Antonius Fransiscus, Vermeulen Johannes Petrus Martinus Bernardus
Принадлежит: ASML Netherlands B.V.

A displacement measurement system comprising at least one retro reflector and a diffraction grating. Said displacement measurement system is constructed and arranged to measure a displacement by providing a first beam of radiation to the measurement system, wherein the diffraction grating is arranged to diffract the first beam of radiation a first time to form diffracted beams. The at least one retro reflector is arranged to subsequently redirect the diffracted beams to diffract a second time on the diffraction grating. The at least one retro reflector is arranged to redirect the diffraction beams to diffract at least a third time on the diffraction grating before the diffracted beams are being recombined to form a second beam. And the displacement system is provided with a sensor configured to receive the second beam and determine the displacement from an intensity of the second beam. 1. A displacement measurement system , for measuring a displacement of a first beam of radiation , the displacement measurement system comprising:a diffraction grating configured to diffract the first beam of radiation a first time to form one or more diffracted beams;at least one retro reflector configured to redirect the diffracted beams to diffract a second time on the diffraction grating, wherein the at least one retro reflector is arranged to redirect the diffraction beams to diffract at least a third time on the diffraction grating before the diffracted beams are being recombined to form a second beam; anda sensor configured to receive the second beam and determine the displacement from an intensity of the second beam.2. The displacement measurement system according to claim 1 , wherein the displacement measurement system is arranged such that the diffracted beams after being diffracted for the third time on the diffraction grating are redirected by at least one retro reflector to diffract a fourth time on the diffraction grating before being recombined to form the second beam.3 ...

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Номер записи: 54
27-06-2013 дата публикации

POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND METHOD FOR MANUFACTURING DEVICE

Номер: US20130163004A1
Автор: MATSUMOTO Takahiro
Принадлежит: CANON KABUSHIKI KAISHA

A position detection apparatus that illuminates diffraction gratings formed on two objects with light from a light source and receives diffracted light from the diffraction gratings to acquire relative positions of the two objects includes: an optical system configured to cause plus n-th order diffracted light and minus n-th order diffracted light from each of the diffraction gratings to interfere with each other, where n is a natural number; a light receiving unit; and a processing unit, wherein the light receiving unit receives a two-beam interference light from each of the diffraction gratings, and wherein the processing unit acquires the relative positions of the two objects by using the two-beam interference light at an area where two-beam interference lights of the diffracted light from the respective diffraction gratings do not overlap each other among the two-beam interference lights of the diffracted light from each of the diffraction gratings. 1. A position detection apparatus that illuminates diffraction gratings formed on two objects with light from a light source and receives diffracted light from the diffraction gratings to acquire relative positions of the two objects , the position detection apparatus comprising:an optical system configured to cause plus n-th order diffracted light and minus n-th order diffracted light from each of the diffraction gratings to interfere with each other, where n is a natural number;a light receiving unit; anda processing unit,wherein the light receiving unit receives a two-beam interference light of the plus n-th order diffracted light and the minus n-th order diffracted light from each of the diffraction gratings formed on the two objects, andwherein the processing unit acquires the relative positions of the two objects by using the two-beam interference light at an area where two-beam interference lights of the diffracted light from the respective diffraction gratings do not overlap each other among the two-beam ...

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Номер записи: 55
27-06-2013 дата публикации

LENS ARRAY AND LENS EDGE DETECTION METHOD THEREOF

Номер: US20130163007A1
Автор: Kanke Shinya, Tanazawa Masahiro
Принадлежит: Enplas Corporation

To enable detection of images of peripheral end sections of a first lens face and a second lens face when the positions of the first lens face and the second lens face are measured, to be performed simply by detection operations on the first lens face side, the first lens face is formed having a smaller diameter than the second lens face corresponding to the first lens face and the image of the peripheral end section of the second lens face can be detected from the first lens face side by transmission of light from a light-transmissive substrate 1. A lens array comprising:a plurality of circular first lens faces formed on one end surface in a thickness direction of a plate-shaped light-transmissive substrate; anda plurality of circular second lens faces formed on the other end surface in the thickness direction of the light-transmissive substrate such as to be respectively coaxial with the plurality of first lens faces and respectively corresponding to the first lens faces, whereinto enable detection of images of peripheral end sections of the first lens face and the second lens face, when positions of the first lens faces and the second lens faces are measured, to be performed simply by detection operations from the first lens face side, the first lens face is formed having a smaller diameter than the second lens face corresponding to the first lens face, and the image of the peripheral end section of the second lens face can be detected from the first lens face side by transmission of light by the light-transmissive substrate.2. The lens array according to claim 1 , wherein:a certain shape capable of being used for setting a position reference when the position of the first lens face is measured is formed in the light-transmissive substrate such as to be detectable from the first lens face side.3. The lens array according to claim 2 , wherein:the certain shape is an outer shape of a positioning structure used to perform positioning when an optical transmission ...

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Номер записи: 56
04-07-2013 дата публикации

Laser Centering Tool for Surface Areas

Номер: US20130167384A1
Автор: Olexa Chris
Принадлежит:

A laser centering tool for surface areas used to find the center point of a surface. The laser centering tool uses single or multiple laser sources to project a plurality of lines on a horizontal or vertical surface. It may comprise of multiple lasers, rotational plates, prism, beam splitter, gear housing, and/or a gear mechanism. At least one center laser line remains stationary between at least two edge laser lines. The edge lasers may be moved to outline the edge of a surface. At least one center laser projects a beam that indicates the center point of the edge lasers. The edge laser lines may be moved by rotational plates, a set of mirrors, or prism. 1. A device comprising:a housing;a center light source mated to the housing configured to generate a center reference light line projected onto a surface;a left light source configured to generate a left reference light line projected onto the surface wherein the left light source is connected to a left rotational element;a right light source configured to generate a right reference light line projected onto the surface wherein the right light source is connected to a right rotational element;a power source for providing power to the center light source, left light source, and right light source;a gear system within the housing which controls the rotation of the left rotation element and right rotational element configured to move the left rotational element and right rotational element in unison and in opposite rotational directions; andwherein the movement of the left rotational element and right rotational element cause the left reference light line and the right reference light line to move in equal increments away from or towards the center reference light line.2. The device of claim 1 , wherein the device further includes a sensor for receiving a reflected light signal from the center light source claim 1 , wherein the reflected light signal can be used to determine the distance from the device to the ...

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Номер записи: 57
04-07-2013 дата публикации

Surface Processing Progress Monitoring System

Номер: US20130169958A1
Автор: GOTO Hiroomi, KATO Rui, NAGUMO Yuzo
Принадлежит: SHIMADZU CORPORATION

Provided is a technique for calculating a hole depth or substrate thickness with high accuracy during surface processing work, such as etching or grinding. A difference spectrum calculator calculates the difference between a spectrum acquired at one time and another spectrum acquired at a time earlier than the aforementioned time by a predetermined. The base spectra which are contained in the observed spectra but do not contribute to interference can be regarded as common to the observed spectra. Therefore, the difference spectrum is a virtually normalized interference spectrum. A Fourier transform operator performs a frequency analysis on the difference spectrum, using a Fourier transform or similar technique. In the thereby obtained signal, a clear peak originating from the interference appears at a position corresponding to the optical path length. From this peak position, an optical distance calculator determines the optical path length, calculates the hole depth, and displays the calculated result. 1. A surface processing progress monitoring system for measuring a size of a target structure , such as a depth or level difference of a hole or groove formed on a substrate by surface processing work , or a thickness of a thin layer or substrate increasing or decreasing due to the surface processing work , including a light source for generating a measurement light having a predetermined wavelength width , an interference optical system for producing interference of two lights respectively reflected by a first portion and a second portion of the target structure , a dispersing device for wavelength-dispersing an interference light produced by the interference optical system , and a detector for detecting , for each wavelength , a wavelength-dispersed light produced by the dispersing device , the surface processing progress monitoring system further comprising:a) a spectrum acquiring section for acquiring, by the detector, two spectra of a predetermined wavelength ...

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Номер записи: 58
04-07-2013 дата публикации

METHOD AND APPARATUS FOR DETECTING SHAPE OF STRIP-SHAPED MEMBER AND TWO-DIMENSIONAL DISPLACEMENT SENSOR

Номер: US20130169974A1
Автор: Iwayama Shinya
Принадлежит: KABUSHIKI KAISHA BRIDGESTONE

A two-dimensional displacement sensor includes first and second laser units that emit first laser light incident on the surface of the strip-shaped member from a direction intersecting the thickness direction of the strip-shaped member and second laser light incident on the surface of the strip-shaped member from a direction parallel to the thickness direction of the strip-shaped member, a camera that has a light receiving element for receiving light reflected from the surface of the strip-shaped member and measures the amount of displacement of the surface of the strip-shaped member from the reflected light receiving position detected by the light receiving element, an optical element for focusing the reflected light on the light receiving element, and a switching member for switching the laser light to be incident on the surface of the strip-shaped member between the first laser light and the second laser light. 1. A two-dimensional displacement sensor comprising:an emission means for emitting first laser light incident on a surface of a strip-shaped member from a direction intersecting a thickness direction of the strip-shaped member and emitting second laser light incident on the surface of the strip-shaped member from a direction parallel to the thickness direction of the strip-shaped member;a displacement measuring means having a light receiving element for receiving light reflected from the surface of the strip-shaped member and measuring an amount of displacement of the surface of the strip-shaped member from a reflected light receiving position detected by the light receiving element;an optical element for focusing the reflected light on the light receiving element; anda switching means for switching the laser light to be incident on the surface of the strip-shaped member between the first laser light and the second laser light.2. The two-dimensional displacement sensor according to claim 1 , wherein the emission means comprises:a laser light emission means ...

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Номер записи: 59
04-07-2013 дата публикации

MEDICAL ROBOTIC SYSTEM AND CONTROL METHOD THEREOF

Номер: US20130172908A1
Автор: KWON Woong, Lee Kwang Kyu, Roh Kyung Shik, Sang Tae Jun
Принадлежит: SAMSUNG ELECTRONICS CO., LTD.

A medical robot system and a method to control the medical robot system are used to detect position information of a surgical instrument in an incised region, thereby improving the safety of robotic surgery. A surgical instrument may be inserted in a through-hole of a trocar inserted into an incised region of a patient. The medical robotic system includes a surgical instrument position detection apparatus to detect position information of the surgical instrument in the through-hole of the trocar, when the surgical instrument is inserted into the through-hole. The medical robotic system further includes a console to control an operation of a surgical robot having the surgical instrument, based on the detected position information of the surgical instrument. 1. A medical robotic system comprising:a surgical instrument position detection apparatus to detect position information of a surgical instrument inserted in a trocar which is inserted into an incised region of a patient; anda console to control an operation of a surgical robot having the surgical instrument, based on the detected position information of the surgical instrument.2. The medical robotic system according to claim 1 , wherein the surgical instrument position detection apparatus comprises:a quadrangular frame forming an external appearance of the surgical instrument position detection apparatus including a first subframe disposed in a horizontal direction, and a second subframe disposed in a vertical direction, contacting the first subframe;a sensing unit comprising a first photodiode array mounted in the first subframe and a second photodiode array mounted in the second subframe; a coordinate detection unit to detect an X-coordinate of the surgical instrument in the trocar based on output values of the first photodiode array and a Y-coordinate of the surgical instrument in the trocar based on output values of the second photodiode array; anda transmission unit to transmit the detected coordinate ...

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Номер записи: 60
11-07-2013 дата публикации

WAVELENGTH DETECTOR AND CONTACT PROBE USING IT

Номер: US20130176561A1
Автор: Hidaka Kazuhiko
Принадлежит: MITUTOYO CORPORATION

A contact probe includes a stylus and an optical detector configured to detect a posture of the stylus optically. An illumination subject portion is formed on the stylus and has three or more reflection surfaces. The optical detector includes three or more fibers, a light source, a condenser lens group, and a wavelength detector. The wavelength detector calculates posture information of the stylus on the basis of wavelength variations of reflection light beams that are caused by variations of intervals between the condenser lens group and the three or more reflection surfaces, respectively. The contact probe acquires coordinates of a position of the contact to the object to be measured on the basis of posture information obtained by the optical detector. 1. A wavelength detector comprising:a parallel lens group configured to convert light beams having partial wavelength ranges, which are extracted from three or more reflection light beams produced by irradiating with three or more illumination light beams having a spectrum in a prescribed wavelength range to three or more reflection surfaces of an illumination subject portion, into light beams that are parallel with each other using three or more lenses;a spectroscope element configured to receive the light beams coming from the parallel lens group, and to output the light beams in exit directions corresponding to their partial wavelength ranges, respectively;a detection lens group configured to condense the output light beams of the spectroscope element using three or more lenses, respectively; anda photodetecting element group configured to detect focusing positions of three or more light beams condensed by the detection lens group, respectively, the photodetecting element group comprising a plurality of photodetecting elements which are arranged in a single plane and cover variation ranges of the focusing positions, depending on the exit directions from the spectroscope element, of the three or more light beams ...

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Номер записи: 61
11-07-2013 дата публикации

DISPLACEMENT DETECTION DEVICE AND METHOD

Номер: US20130176576A1
Автор: KUBOTA Yuji, Ogawa Akihito, Okano Hideaki, TATSUTA Shinichi, UEDA Yasuhito, Usui Takashi, Watabe Kazuo
Принадлежит: KABUSHIKI KAISHA TOSHIBA

According to one embodiment, a displacement detection device includes a light source, objective lens, beam splitter, aperture limiting element, and detection device. The beam splitter may separate reflected light into portions. The reflected light may be reflected by the medium and then transmitted through the objective lens. The aperture limiting element may include an aperture limited so as to block a portion of the reflected light. The detection device may detect displacement of the medium in a direction of the optical axis based on the reflected light having passed through the aperture limiting element. 1. A displacement detection device comprising:a light source that generates light;an objective lens that condenses the light in such a manner that the light travels toward a medium, the medium being rotatable around an axis of rotation and the axis being orthogonal to an optical axis of the objective lens;a beam splitter that separates reflected light into portions, the reflected light being reflected by the medium and then transmitted through the objective lens;an aperture limiting element including an aperture limited so as to block a portion of the reflected light; anda detection device that detects displacement of the medium in a direction of the optical axis based on the reflected light having passed through the aperture limiting element.2. The device according to claim 1 , wherein a range of the reflected light which is blocked is set depending on a maximum rotation angle of the medium.3. The device according to claim 1 , wherein the aperture is rectangular and comprises an aperture center at a position displaced from the optical axis by a given amount.4. The device according to claim 1 , wherein the aperture is circular and comprises an aperture center at a position displaced from the optical axis by a given amount.5. The device according to claim 3 , wherein the position is set depending on a maximum rotation angle of the medium.6. The device according to ...

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Номер записи: 62
11-07-2013 дата публикации

METHOD AND APPARATUS FOR IMAGING THREE-DIMENSIONAL STRUCTURE

Номер: US20130177866A1
Автор: Babayoff Noam, Glaser-Inbari Isaia
Принадлежит: CADENT LTD.

An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor. 1. An apparatus for imaging at least a portion of a patient's dentition , the apparatus comprising:an illumination unit configured to transmit a parent light beam comprising a first wavelength component and a second wavelength component;an optical system configured to generate an illuminated region on a portion of a patient's dentition, wherein the first wavelength component is focused at a first focal plane and the second wavelength component is focused at a second focal plane;a translation mechanism configured to change the position of the first focal plane and the second focal plane at the same time;a detector unit configured to measure intensity of returned light beams of the first wavelength component and the second wavelength component; anda processor coupled to the detector unit and configured to determine a surface topology of the patient's dentition based at least in part on a first intensity of a first returned light beam of the first wavelength component and a second intensity of a second returned light beam of the second wavelength component.2. The apparatus of claim 1 , further comprising an optics expander unit configured to expand the parent light beam into an array of incident light beams claim 1 , each comprising the first wavelength component and the second wavelength component.3. The apparatus of claim 1 , wherein the apparatus comprises a hand held probe including one or more of the illumination unit claim 1 , the optical system claim 1 , the translation mechanism claim 1 , the detector unit and the processor.4. The apparatus of claim 1 , wherein the translation mechanism comprises a motor.5. The apparatus of claim 1 , wherein the illuminated region is oriented in an X-Y plane and the first focal plane and the ...

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Номер записи: 63
11-07-2013 дата публикации

SELECTING AN EARPIECE BASED ON DYNAMIC DATA

Номер: US20130179120A1
Автор: Frigerio Federico, Hart Douglas P., Johnston Douglas M., Menon Manas C., Vlasic Daniel
Принадлежит: Massachusetts Institute of Technology

The attenuation and other optical properties of a medium are exploited to measure a thickness of the medium between a sensor and a target surface. Disclosed herein are various mediums, arrangements of hardware, and processing techniques that can be used to capture these thickness measurements and obtain dynamic three-dimensional images of the target surface in a variety of imaging contexts. This includes general techniques for imaging interior/concave surfaces as well as exterior/convex surfaces, as well as specific adaptations of these techniques to imaging ear canals, human dentition, and so forth. 1. A method comprising:providing a library of earpieces, the library including three-dimensional shape data for a plurality of preexisting earpiece types;obtaining dynamic data from an ear canal of a subject, the dynamic data including data from the ear canal characterizing changes in a shape of the ear canal related to at least one of a compliance of the ear canal to changes in pressurization or a shape change of the ear canal in response to a musculoskeletal movement of a head of the subject; andselecting one of the plurality of preexisting earpiece types from the library that provides a best fit to the ear canal based on the dynamic data, thereby providing a selected type.2. The method of further comprising obtaining static data from the ear canal of the subject claim 1 , the static data including a three-dimensional representation of a surface of the ear canal.3. The method of further comprising making an initial selection of one of the plurality of preexisting earpiece types from the library based upon the static data claim 2 , and evaluating a fit of the one of the plurality of preexisting earpiece types based on the dynamic data.4. The method of further comprising selecting a size for the selected type according to the static data.5. The method of wherein the plurality of preexisting earpiece types include hearing aids.6. The method of wherein the plurality of ...

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Номер записи: 64
18-07-2013 дата публикации

MEASUREMENT SYSTEM FOR OPTICAL TOUCH TRIGGER OR SCANNING PROBE WITH A CONCAVE MIRROR

Номер: US20130182242A1
Автор: MASA Peter
Принадлежит: CSEM CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE SA

Method for determining the position and/or displacement of a mobile element with respect to a fixed frame, including using a fixed light source emitting a light beam, arranging the source with respect to the mobile element and a sensor to induce an interaction between the beam and sensor, includes using a concave mirror, integral in movement with the mobile element, for reflecting the beam in direction to the sensor, arranging on the path of the beam a fixed optical mask which presents a two dimensional regular pattern interlaced with an absolute code, detecting and processing the image casted by the mask on the sensor, computing the displacement value of the image on the sensor and using the computed displacement value for computing and providing the position and/or the displacement in at least one direction of the mobile element in dependence of the image's displacement. 111222. A measurement method for determining position and/or displacement of a mobile element with respect to a fixed frame , wherein a fixed light source () emitting a light beam is used , the light source () is arranged with respect to the mobile element and with respect to a sensor () in a way so as to induce an interaction between the light beam and the sensor () which depends on the position of the mobile element and wherein processing and computing means are used for providing a value of the position and/or the displacement of the mobile element in dependence of the output signal of the sensor () , [{'b': 3', '2, 'a) using a concave mirror (), fixed to the mobile element, for reflecting the light beam in direction to the sensor (),'}, {'b': '4', 'b) arranging on the path of the light beam a fixed optical mask () which comprises a two dimensional regular pattern,'}, {'b': 4', '2, 'c) detecting and processing a displacing image casted by the optical mask () on the sensor (),'}, {'b': '2', 'd) computing the displacement value of said displacing image on said sensor (), and'}, "e) using the ...

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Номер записи: 65
18-07-2013 дата публикации

Apparatus And Method Of Measuring Roughness And Other Parameters Of A Structure

Номер: US20130182263A1
Автор: Andrei V. Shchegrov, Gregory Brady, Kevin Peterlinz
Принадлежит: KLA Tencor Corp

Systems and methods are presented to enhance and isolate residual signals indicative of the speckle field based on measurements taken by optically based metrology systems. Structural irregularities such as roughness and topographical errors give rise to light scattered outside of the specularly reflected component of the diffracted light. The scattered light interferes constructively or destructively with the specular component in a high numerical aperture illumination and detection system to form a speckle field. Various methods of determining residual signals indicative of the speckle field are presented. Furthermore, various methods of determining structural irregularities based on analysis of the residual signals are presented. In various embodiments, illumination with a high degree of spatial coherence is provided over any of a wide range of angles of incidence, multiple polarization channels, and multiple wavelength channels. In addition, diffracted light is collected over a wide range of angles of detection.

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Номер записи: 66
25-07-2013 дата публикации

Active illumination scanning imager

Номер: US20130188043A1
Автор: Decoster Yves
Принадлежит: IEE INTERNATIONAL ELECTRONICS & ENGINEERING S.A.

An active-illumination scanning imager () comprises a light source () for producing a light beam (), an optical collimator () for collimating the light beam, a scanning mirror () for scanning the light beam through a scene () to be imaged, and a light detector () arranged with respect to the scanning mirror in such a way as to receive a fraction () of said light beam reflected from said scene, via the scanning mirror. The imager further includes an actuator () configured to position the light source and/or the optical collimator relative to each other and/or the light detector relative to the scanning mirror, and a controller () operatively connected to the actuator for controlling the positioning. 1. Active-illumination scanning imager , comprising a light source for producing a light beam , an optical collimator for collimating said light beam in at least one direction transversal to a beam direction , a scanning mirror for scanning said light beam through a scene to be imaged and a light detector arranged with respect to said scanning mirror in such a way as to receive a fraction of said light beam reflected from said scene , via said scanning mirror;wherein said imager further comprises an actuator configured to position at least one of said light source and/or said optical collimator relative to one another and/or to position said light detector relative to said scanning mirror, and a controller operatively connected to said actuator for controlling said positioning.2. The imager as claimed in claim 1 , wherein said controller comprises an interface for operatively connecting said scanner to a sensor claim 1 , said controller being configured to attempt to achieve a predefined sensor response through controlling said positioning.3. The imager as claimed in claim 1 , wherein said light detector is operatively connected to said controller and wherein said controller is configured to control said positioning in response to a detection signal from said detector.4. ...

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Номер записи: 67
25-07-2013 дата публикации

NORMAL VECTOR TRACING ULTRA-PRECISION SHAPE MEASUREMENT METHOD

Номер: US20130188199A1
Автор: Endo Katsuyoshi, Higashi Yasuo, Uchikoshi Junichi
Принадлежит: OSAKA UNIVERSITY

[Object] 1. A normal vector tracing ultra-precision shape measurement method , comprising the steps of preparing at least two pairs of biaxial goniometers and a uniaxial straight-ahead stage changing a distance between rotation centers of the goniometers , wherein one pair of goniometers constitutes a sample system and holds an object to be measured at a movable part thereof , and the other pair of goniometers constitutes an optical system and has at a movable part thereof a light source and a light detector using a quartered photodiode (QPD) based on a null method; controlling the two pairs of biaxial goniometers to overlap completely a measurement beam emitted from the light source and a reflection beam reflected on the surface of the object to be measured; controlling the uniaxial straight-ahead stage to keep constant a light path length L between the light detector and the surface of the object to be measured; and measuring a normal vector at an arbitrary measurement point on the surface of the object to be measured to determine the shape of the object to be measured , wherein , of the two pairs of biaxial goniometers and the uniaxial straight-ahead stage , one pair of biaxial goniometers and the uniaxial straight-ahead stage are subjected to fully-closed feedback control (follow-up control) under which output from the QPD is input directly into an axis drive motor , the remaining pair of biaxial goniometers is subjected to semi-closed feedback control (constant value control) , encoder outputs on all the axes and QPD output are acquired simultaneously , and measurement point coordinates and normal vectors derived from the encoder outputs are corrected with the QPD output , thereby to eliminate influence of steady-state deviation in the goniometer control system.2. The normal vector tracing ultra-precision shape measurement method according to claim 1 , wherein the biaxial goniometers constituting the optical system and the uniaxial straight-ahead stage are ...

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Номер записи: 68
25-07-2013 дата публикации

MEASUREMENT DEVICE, MEASUREMENT METHOD, AND COMPUTER PROGRAM PRODUCT

Номер: US20130188860A1
Автор: OKADA Ryuzo, Seki Akihito
Принадлежит: KABUSHIKI KAISHA TOSHIBA

According to an embodiment, a second calculator calculates a three-dimensional position of a measurement position and error in the three-dimensional position using a first image, the measurement position, a second image, and a correspondence position. A selection unit determines whether there is an image pair, in which error in the three-dimensional position becomes smaller than the error calculated by the second calculator, from among image pairs of the plurality of images, when there is an image pair, selects the image pair, and when there is no image pair, decides on the three-dimensional position. Each time an image pair is selected, the second calculator calculates a new three-dimensional position of the measurement position and error using new first and second images each included in the image pair, and first and second projection positions where the three-dimensional positions are projected onto the new first and second images, respectively. 1. A measurement device comprising:a display controller configured to display a first image from among a plurality of images captured from different viewpoints on a display unit;a setting unit configured to set a measurement position on the first image;a first calculator configured to calculate a correspondence position, which corresponds to the measurement position, on a second image other than the first image from among the plurality of images;a second calculator configured to calculate a three-dimensional position of the measurement position and an error in the three-dimensional position using the first image, the measurement position, the second image, and the correspondence position; anda selection unit configured to determine, each time the three-dimensional position and the error are calculated by the second calculation unit, whether or not there is an image pair, in which an error in the three-dimensional position becomes smaller than the error calculated by the second calculator, from among image pairs of the ...

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Номер записи: 69
25-07-2013 дата публикации

SYSTEM AND METHOD FOR INSPECTING RAILROAD TIES

Номер: US20130191070A1
Автор: AARON CHARLES W., BELCHER JEB E., Bertilson Zechariah, GRISSOM GREGORY T., II John A., KAINER JOHN J., MAURICIO ANTONIO R., Nagel, Orrel Steven C., Pagliuco David M., Villar Christopher M., Wamani Wilson T.
Принадлежит: GEORGETOWN RAIL EQUIPMENT COMPANY

A system for inspecting railroad ties in a railroad track includes a light generator, an optical receiver and a processor. The light generator is oriented to project a beam of light across the railroad track while moving along the railroad track in a travel direction. The optical receiver is oriented to receive at least a portion of the beam of light reflected from the railroad track and configured to generate image data representative of a profile of at least a portion of the railroad track. The processor is configured to analyze the image data by applying one or more algorithms configured to find boundaries of a railroad tie and determine one or more condition metrics associated with the railroad tie. 1. A system for inspecting railroad ties in a railroad track , comprising:a. a light generator, oriented to project a beam of light across the railroad track while moving along the railroad track in a travel direction;b. an optical receiver, oriented to receive at least a portion of the beam of light reflected from the railroad track and configured to generate image data representative of a profile of at least a portion of the railroad track; and 'i. find boundaries of a railroad tie; and', 'c. a processor, configured to analyze the image data by applying one or more algorithms configured toii. determine one or more condition metrics associated with the railroad tie.2. A system in accordance with claim 1 , wherein the processor comprises a machine vision algorithm for finding the boundaries of the railroad tie claim 1 , the algorithm configured to:a. identify regions of the image data that are smooth relative to surrounding regions, relative to a smoothness threshold;b. find at least two edges of a smooth region, oriented approximately perpendicular to the travel direction;c. identify two of the found edges which are spaced apart by approximately a width of a tie as the first and second edges; andd. identify the first and second edges as the boundaries of the ...

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Номер записи: 70
01-08-2013 дата публикации

SYSTEM AND METHOD FOR WIND TURBINE BLADE INSPECTION

Номер: US20130194567A1
Автор: FRITZ Peter James, HARDING Kevin George, SONG Guiju, Wan Xinjun, Xie Guangping, Xu Shukuan
Принадлежит: GENERAL ELECTRIC COMPANY

A system for inspection of a blade of a wind turbine in operation is provided. The system comprises a light projection unit, an imaging unit and a processing unit. The light projection unit generates and projects a light pattern towards a blade of a wind turbine in operation. The imaging unit captures a plurality of scanning light patterns on the blade of the wind turbine during rotation of the blade. The processing unit is configured to process the plurality of the captured d light patterns from the imaging unit for inspection of deflection of the blade. A method for inspection of a blade of a wind turbine in operation is also presented. 1. A system for inspection of a blade of a wind turbine in operation , comprising:a light projection unit for generating and projecting a light pattern towards a blade of a wind turbine in operation;an imaging unit for capturing a plurality of scanning light patterns on the blade of the wind turbine during rotation of the blade; anda processing unit for processing the plurality of the captured light patterns from the imaging unit for inspection of deflection of the blade.2. The system of claim 1 , wherein the light projection unit is disposed in a distance away from the blade of the wind turbine claim 1 , and wherein the imaging unit is disposed between the light projection unit and the blade.3. The system of claim 1 , wherein the light projection unit and the imaging unit are disposed fixedly on the ground.4. The system of claim 1 , wherein the light projection unit and the imaging unit are disposed on a nacelle of the wind turbine.5. The system of claim 1 , wherein the light pattern from the light projection unit comprises at least one column with at least one light marker disposed along a top to bottom direction.6. The system of claim 5 , wherein the light pattern comprises a plurality of columns each comprising a single light marker claim 5 , and wherein the two adjacent light markers are spaced along the top to bottom ...

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Номер записи: 71
01-08-2013 дата публикации

Multiple Optical Channel Autocorrelator Based on Optical Circulator

Номер: US20130194580A1
Автор: Ai Zhou, Jun Yang, Libo Yuan
Принадлежит: Harbin Engineering University

A multiple optical channel autocorrelator based on an optical fiber circulator includes a broad-band light source, at least an optical-fiber sensor array, an adjustable multiple light beams generator, at least an optical fiber circulator and at least a photoelectric detector. The optical-fiber sensor array is composed of the sensing fibers connected end to end. The online mirrors are formed by the connecting end faces of the adjacent fibers. The adjustable multiple light beams generator includes a fixed arm and an adjustable arm. The optical path difference between the fixed arm and the adjustable arm is adjustable in order to match the optical path of each sensor in the sensor array. The optical fiber circulator couples the signals generated by the multiple light beams generator to the sensor array, and couples the signals returned by the sensor array to the photoelectric detector. The photoelectric detector is connected to the optical fiber circulator. The multiple optical channel autocorrelator based on the optical fiber circulator can implement the real-time online measurement of the physical quantity of multipoint strain or deformation, and has advantages of low light source power loss, high efficiency and good stability.

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Номер записи: 72
01-08-2013 дата публикации

MULTIWAVELENGTH INTERFEROMETER

Номер: US20130194582A1
Автор: TOKIMITSU Takumi
Принадлежит: CANON KABUSHIKI KAISHA

A multiwavelength interferometer () includes a light beam splitter () that separates each of a plurality of light beams having wave lengths different from each other into measuring light and reference light, an interference signal generator () that generates an interference signal of interference light of the reference light and reflected light obtained by illuminating the measuring light on a surface () to be measured to be reflected on the surface for each wavelength, an illumination state changer () that changes an illumination state of the measuring light on the surface, a detector () that detects the interference signal while the illumination state is changed, and a measurement unit () that measures a position of the surface using phases of a plurality of interference signals for each wavelength and intensity information of at least one interference signal of the plurality of interference signals. 1. A multiwavelength interferometer comprising:a light beam splitter configured to separate each of a plurality of light beams having wavelengths different from each other into measuring light and reference light;an interference signal generator configured to generate an interference signal of interference light of the reference light and reflected light that is obtained by illuminating the measuring light on a surface to be measured to be reflected on the surface to be measured for each wavelength;an illumination state changer configured to change an illumination state of the measuring light on the surface to be measured;a detector configured to detect the interference signal while the illumination state is changed; anda measurement unit configured to measure a position of the surface to be measured using phases of a plurality of interference signals for each wavelength and intensity information of at least one interference signal of the plurality of interference signals.2. The multiwavelength interferometer according to claim 1 , wherein the intensity information is ...

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Номер записи: 73
01-08-2013 дата публикации

INTERFEROMETER DEVICES FOR DETERMINING INITIAL POSITION OF A STAGE OR THE LIKE

Номер: US20130194583A1
Автор: Goodwin Eric Peter
Принадлежит: Nikon Corporation

An exemplary device has a stationary portion and a movable portion. The stationary portion has a first corner-cube, an optical system including a beamsplitter, and a light detector. The movable portion comprises a second corner-cube mountable on an object that is displaceable in a principal direction relative to the stationary portion. The beamsplitter splits a beam of collimated broadband light into a reference beam and a measurement beam that are directed by the optical system to make multiple roundtrip passes from the optical system to the respective corner cubes and back. The reference beam and measurement beam interfere with each other to produce a coherence envelope sensed by the detector, wherein a detected displacement of the coherence envelope corresponds to a respective position of the object in the principal direction. 1. A position-measurement device , comprising:a first portion comprising a first corner-cube and an optical system including a beamsplitter and a light detector; anda second portion that is movable relative to the first portion, the second portion comprising a second corner-cube mountable on an object that is displaceable in a principal direction relative to the first portion, the beamsplitter splitting a beam of collimated broadband light into a reference beam and a measurement beam that are directed by the optical system to make respective multiple roundtrip passes from the optical system to the respective corner cubes and back and that interfere with each other to produce a coherence envelope sensed by the detector, wherein a detected displacement of the coherence envelope corresponds to a respective position of the object in the principal direction.2. The device of claim 1 , wherein the first portion further comprises a source of the beam of collimated broadband light.3. The device of claim 1 , wherein:the optical system directs the reference beam to make multiple roundtrip passes in a first direction;the optical system directs the ...

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Номер записи: 74
01-08-2013 дата публикации

Position-Measuring Device and System Having a Plurality of Position-Measuring Devices

Номер: US20130194584A1
Автор: Drescher Joerg, Holzapfel Wolfgang, Joerger Ralph, Kaelberer Thomas, Meissner Markus, Musch Bernhard
Принадлежит: DR. JOHANNES HEIDENHAIN GMBH

In position-measuring devices and a systems having a plurality of position-measuring devices for determining the position of an object in several spatial degrees of freedom, the plurality of optical position-measuring devices scan the object from a single probing direction, and the probing direction coincides with one of the two main axes of motion. 1. A position-measuring device for determining a position of an object along a third axis oriented perpendicularly to two orthogonal , first and second main axes of motion of the object , comprising:a light source adapted to emit a beam of rays along the first main axis of motion in a direction of the object;a measuring standard arranged on the object and including graduation markings disposed periodically along the third axis;at least one reflector arranged along the third axis and set apart from the object;a retroreflector system; anda detector system;wherein position signals with respect to motion of the object along the third axis are generatable from superposition of a measuring beam and a reference beam produced from the beam of rays.2. The position-measuring device according to claim 1 , wherein the retroreflector system includes a beam-splitter element claim 1 , a reference reflector claim 1 , and a retroreflector.3. The position-measuring device according to claim 1 , wherein the reflector: (a) includes an incident-light diffraction grating having graduation markings disposed periodically along the first main axis of motion; or (b) includes a plane mirror disposed perpendicularly to the measuring beam that falls on the plane mirror.4. The position-measuring device according to claim 1 , wherein the measuring standard includes an incident-light diffraction grating adapted to diffract beams of rays only in a +/−1order and to reflect diffracted partial beams of rays of the +/−1order in a direction of the reflector.5. The position-measuring device according to claim 1 , wherein the retroreflector system is adapted ...

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Номер записи: 75
01-08-2013 дата публикации

System for Detecting Motion, Lithographic Apparatus and Device Manufacturing Method

Номер: US20130194586A1
Автор: Loopstra Erik Roelof, Van Der Pasch Engelbertus Antonius Fransiscus, Van Eijk Jan, Vermeulen Johannes Petrus Martinus Bernardus
Принадлежит: ASML Netherlands B.V.

A system for detecting motion of a body, the system comprising: a body; a first grating mounted substantially stationary relative to a frame of reference; a second grating mounted on the body; a detector arranged to receive one or more radiation beams diffracted at the first and second gratings thereby to detect motion of the body relative to the frame of reference; wherein the detector is coupled to the body and moveable relative to the body. 1. A system for detecting motion of a body , the system comprising:a body;a first grating mounted substantially stationary relative to a frame of reference;a second grating mounted on the body; anda detector arranged to receive one or more radiation beams diffracted at the first and second gratings thereby to detect motion of the body relative to the frame of reference;wherein the detector is coupled to the body and moveable relative to the body.2. The system of claim 1 , wherein the detector is coupled to the body by a body mounted guide adapted to couple the detector to the body by constraining the movement of the detector relative to the body in at least one of the six degrees of freedom excluding in a direction substantially parallel to an elongate direction of the second grating.3. The system of claim 1 , wherein the detector is coupled to the body by a body mounted support adapted to couple the detector to the body by supporting the detector on the body.4. The system of claim 1 , wherein the body and detector are coupled by a bearing.5. The system of claim 1 , further comprising a grating guide mounted substantially stationary relative to the first grating and adapted to constrain movement of the detector relative to the first grating in at least one of the six degrees of freedom excluding in a direction substantially parallel to an elongate direction of the first grating.6. The system of claim 1 , further comprising a detector actuator adapted to move the detector relative to the body in a direction substantially ...

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Номер записи: 76
01-08-2013 дата публикации

LENS POSITION DETECTING CIRCUIT

Номер: US20130194587A1
Автор: Nagata Yasunori, Tabuchi Yoshihisa
Принадлежит: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC

A position of a lens is detected by detecting, using a phototransistor, light that is emitted from a photodiode and that varies depending on lens position. A control unit divides a moving range of the lens into a plurality of areas, approximates a relationship between lens positions and current of the phototransistor for each of the areas, corrects a current of the phototransistor using the approximated relationship so as to obtain a corrected detection current having a linear relationship with respect to lens positions, and detects the position of the lens using the obtained corrected detection current. 1. A lens position detecting circuit that detects a position of a lens by detecting , using a phototransistor , light that is emitted from a photodiode and that varies depending on lens position , the lens position detecting circuit comprising:a correcting circuit that divides a moving range of the lens into a plurality of areas, approximates a relationship between lens positions and current of the phototransistor for each of the areas, and corrects a current of the phototransistor using the approximated relationship so as to obtain a corrected detection current having a linear relationship with respect to lens positions; anda detecting circuit for detecting the position of the lens using the obtained corrected detection current.2. The lens position detecting circuit according to claim 1 , wherein the correcting circuit linearly approximates the relationship between lens positions and current of the phototransistor for each area.3. The lens position detecting circuit according to claim 2 , wherein the correcting circuit stores a slope a and an intercept b for each of the areas claim 2 , and calculates the corrected detection current Q for each area according to Q=aP+b claim 2 , where P denotes the current of the phototransistor. The present invention relates to a lens position detecting circuit that detects a position of a lens by detecting, using a phototransistor, ...

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Номер записи: 77
08-08-2013 дата публикации

TARGET APPARATUS AND METHOD

Номер: US20130201470A1
Автор: Bridges Robert E., Cramer Peter G., Hoffer, JR. John M., Lasley Daniel G., Mehler Robert C., Steffensen Nils P., Steffey Kenneth
Принадлежит: FARO TECHNOLOGIES, INC.

A method is provided of obtaining the characteristics of a target by a device. The method includes providing the target having a target frame of reference, a retroreflector and a body. Providing a contact element rigidly fixed with respect to the body. A device is provided having a frame of reference and a light source, the device configured to measure a distance and two angles from the device to the retroreflector reference point. An identifier element located on the body. A workpiece surface is provided. The contact element contacts the workpiece surface. The retroreflector is illuminated with light from the light source and returns a reflected light. A distance and two angles are measured based at least in part on the reflected light. The first information is read with a first reader attached to the device. A three-dimensional coordinate of a point on the workpiece surface is calculated. 1. A method of obtaining characteristics of a target by a device , the method comprising the steps of:providing the target, wherein the target has a target frame of reference and includes a first retroreflector and a body, the body containing an opening, the opening sized to hold the first retroreflector, the opening open to the exterior of the body, the first retroreflector at least partially disposed in the opening, the first retroreflector having a first retroreflector reference point in the target frame of reference;providing a spherical contact element having a region of spherical curvature rigidly fixed with respect to the body, the spherical contact element having a sphere center and a sphere radius;providing the device, wherein the device has a device frame of reference and a first light source, the device being configured to measure a distance and two angles from the device to the first retroreflector reference point;providing an identifier element located on the body, the identifier element configured to store first information, the identifier element being one of a bar ...

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Номер записи: 78
08-08-2013 дата публикации

DEVICE FOR OPTICALLY SCANNING AND MEASURING AN ENVIRONMENT

Номер: US20130201487A1
Автор: Lutz Benjamin, Ossig Martin
Принадлежит: FARO TECHNOLOGIES, INC.

A device for optically scanning and measuring an environment is designed as a laser scanner having a light emitter that emits an emission light beam and a light receiver that receives a reception light beam which is reflected from an object in the environment of the laser scanner. The laser scanner also includes a control and evaluation unit which, for a multitude of measuring points, determines at least the distance to the object. The spot of the emission light beam temporarily moves along a prism of the laser scanner, the prism having at least two different brightness levels and/or colors. 1. A device for optically scanning and measuring an environment , comprising:a laser scanner, having a light emitter—that emits an emission light beam and a light receiver that receives a reception light beam reflected from an object in the environment of the laser scanner; andthe laser scanner also having a with a control and evaluation unit which, for a multitude of measuring points, determines a distance to the object;wherein a spot of the emission light beam temporarily moves along a prism of the laser scanner, the prism having at least two different brightness levels and/or colors.2. The device according to claim 1 , wherein the prism is configured at a traverse of a carrying structure of the laser scanner.3. The device according to claim 1 , wherein the prism is located perpendicular to a direction of motion of the spot of the emission light beam claim 1 , the prism having a profile with two trapezoids between which a triangle projects.4. The device according to claim 3 , wherein the spot of the emission light beam illuminates a top of the triangle and at least a portion of sides of the triangle.5. The device according to wherein the different brightness levels and/or colors alternate along a direction of motion of the spot of the emission light beam.6. The device according to claim 1 , wherein the control and evaluation unit carries out a distance correction through use ...

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Номер записи: 79
08-08-2013 дата публикации

OPTICAL POSITION DETECTION DEVICE

Номер: US20130201492A1
Автор: TAKAHASHI Masaki
Принадлежит: SEIKO EPSON CORPORATION

An optical position detection device, includes: a light source adapted to emit at least one detection light beam toward one side in a Z-axis direction; a first detector having a light receiving section directed to the one side in the Z-axis direction; a second detector located at a position on the one side in the Z-axis direction, the position being distant from the light source and the first detector, and having a light receiving section directed to the one side in the Z-axis direction; and a position derivation section adapted to derive a position of a object located in a first space between the first detector and the second detector and a position of a object located in a second space on the one side of the second detector in the Z-axis direction based on a light receiving result in the first detector and the second detector. 1. An optical position detection device adapted to optically detect a position of a target object , comprising:a plate having a plane elongating an X-axis direction and a Y-axis direction;a position detecting light source adapted to emit light beam toward the plate;a first light detector having a light receiving section directed to a one side in a Z-axis direction intersecting the plate;a second light detector located at a position on the one side in the Z-axis direction, the position being distant from the position detecting light source and the first light detector; anda position derivation section adapted to derive a position of a target object located in a first space between the first light detector and the second light detector and a position of a target object located in a second space on the one side of the second light detector in the Z-axis direction based on a light receiving result in the first light detector and a light receiving result in the second light detector.2. The optical position detection device according to claim 1 , whereinthe position derivation section derives the position of the target object located in the second ...

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Номер записи: 80
15-08-2013 дата публикации

IN SITU SUBSTRATE DETECTION FOR A PROCESSING SYSTEM USING INFRARED DETECTION

Номер: US20130206065A1
Автор: Berger David, Logan William, Milliron Benjamin, Roberts Dale
Принадлежит: First Solar, Inc.

Infrared detection is used to monitor the temperature within a vapor transport deposition processing chamber. Changes in temperature that occur when a substrate passes an infrared detector are detected and used to precisely locate a position of the substrate within the chamber. Position correction of the substrate can also be implemented.

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Номер записи: 81
15-08-2013 дата публикации

METHOD FOR MANUFACTURING ANODIZED ALUMINA, AND DEVICE AND METHOD FOR INSPECTING THE SAME

Номер: US20130206601A1
Автор: FUKUYAMA Mitsufumi, MATSUBARA Yuji
Принадлежит:

The present invention relates to a method of manufacturing an article having a fine concave-convex structure on a surface thereof, the structure having pores in which a pore interval is less than or equal to a wavelength of visible light, including: irradiating a surface of the article having the fine concave-convex structure on the surface, with light from an illumination device; capturing an image of reflected light from the surface of the article having the fine concave-convex structure on the surface using imaging device; acquiring color information from an image captured by the imaging device; and inspecting the article having the fine concave-convex structure based on the color information. According to the present invention, it is possible to easily inspect the depth of the pores of anodized alumina and the pitch between the pores, and to provide a method of manufacturing anodized alumina having a stable pore shape. 1. A method of manufacturing an article having anodized alumina on a surface thereof , the structure having two or more pores in which a pore interval is less than or equal to a wavelength of visible light , comprising:irradiating a surface of the article having anodized alumina on the surface thereof, with light from an illumination device after the anodized alumina is formed;capturing an image of reflected light from the surface of the article having anodized alumina on the surface using an imaging device;acquiring color information from an image captured by the imaging device; andinspecting a shape of the pore of the article having anodized alumina on the surface based on the color information.2. The method of manufacturing an article having anodized alumina on a surface thereof according to claim 1 , wherein in the capturing the image of the reflected light from the surface of the article having anodized alumina on the surface using the imaging device claim 1 , an angle of an optical axis of the imaging device is 45 to 89.9 degrees with ...

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Номер записи: 82
15-08-2013 дата публикации

DEVICE AND METHOD FOR MEASURING VIA HOLE OF SILICON WAFER

Номер: US20130206992A1
Автор: Jin Jong Han, KANG Chu-Shik, Kim Jae Wan, Kim Jong Ahn
Принадлежит: Korea Research Institute of Standards and Science

The present invention pertains to a device and a method for measuring a via hole of a silicon wafer, wherein it is possible to precisely measure the depth of the via hole without damaging the wafer. Broadband infrared light is radiated to a silicon wafer which has a superior light transmission property, so that the depth of the via hole may be measured from the light which is reflected from each boundary surface of the wafer and the interference signal of reference light. The via hole measuring device according to the present invention includes: a light source unit for generating broadband infrared light; and an interferometer for radiating the light generated from the light source unit to a silicon wafer, so as to measure the depth of a via hole formed on the wafer according to the spectrum period of the interference signal of the light, which is reflected from the silicon wafer. 1121. A device for measuring a via hole of a silicon wafer , the device comprising a light source unit () , and an interferometer () that irradiates a light generated from the light source unit () to the silicon wafer and measures a depth of the via hole formed in the wafer from an interference signal of a light reflected by the silicon wafer , wherein:{'b': '1', 'the light source unit () generates a broadband infrared light,'}{'b': '2', 'the interferometer () senses an interference signal that is generated as the broadband infrared light is reflected by interfaces of a bottom surface of the via hole and a front surface or a rear surface of the silicon wafer, and'}optical path differences for a plurality of frequency components are simultaneously acquired through spectrum period analysis for the interference signal to measure a depth and a diameter of the via hole.22. The device according to claim 1 , wherein the interferometer () includes:{'b': 21', '1, 'a collimation lens () that converts the light output from the light source unit () to a parallel light;'}{'b': 22', '21', '100, 'a beam ...

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Номер записи: 83
15-08-2013 дата публикации

METHOD OF MEASUREMENT AND APPARATUS

Номер: US20130208286A1
Автор: Kurahashi Yasuhiro
Принадлежит: Makino Milling Machine Co., LTD

In the machine tool () pertaining to the present invention, an imaging device () takes an image of a tool () being moved in the feeding direction. Contour lines () are identified by means of the plurality of sets of image data generated from imaging. The movement trajectory () and the central axis () of the tool () are identified on the basis of the contour lines (). When the movement trajectory () and the central axis () are offset, said offset can be used to correct the positioning of the tool () with the machine tool (). As a result, the processing accuracy of a workpiece improves. Moreover, when the dimensions of a tool () that has a tilted posture are measured, it is possible to determine the actual tool diameter or the actual blade position in the tilted posture. The aforementioned blade position and tool diameter can be used to correct the positioning of the machine tool (). Thus, the processing accuracy of the workpiece improves even more. 1. A method of measurement of tool dimensions which uses an image capture device which moves relative to a tool so as to capture an image of said tool and which uses the obtained image data to measure the dimensions of said tool ,the method of measurement of tool dimensions comprising the steps of:capturing an image of said tool which moves along a predetermined feed direction by said image capture device at a plurality of positions and reading out a plurality of image data which are generated at the positions of said movement; andspecifying a contour of said tool at each of the plurality of said image data and using the specified plurality of contours as the basis to specify the movement path of said tool and the center axial line of said tool.2. The method of measurement of tool dimensions according to claim 1 , wherein said movement path of the tool is specified by calculating the trend in the positions of a reference point claim 1 , which has a predetermined positional relationship with the contour of said tool claim 1 ...

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Номер записи: 84
22-08-2013 дата публикации

LIGHT EMITTING DEVICES AND PACKAGES AND RELATED METHODS WITH ELECTRODE MARKS ON LEADS

Номер: US20130215434A1
Автор: Hussell Christopher P., Joo Sung Chul
Принадлежит: CREE, INC.

Light emitting devices, packages and related methods are disclosed with electrical leads with one or more indicators. A package can include a leadframe that can include at least a first lead and a second lead. The first lead can include a first end for electrical connection to at least one light emitting device and a second end extending toward a first side of the package. The second lead can include a first end for electrical connection to at least one light emitting device and a second end extending toward a second side of the package. One or both of the second end of the first lead or the second end of the second lead can comprise an indicator serving as an identifier. 1. A light emitting device comprising:a package for association with at least one light emitting device;a leadframe comprising at least a first lead and a second lead, the first lead comprising a first end for electrically connecting to the at least one light emitting device and a second end extending toward a first side of the package, the second lead comprising a first end for electrically connecting to the at least one light emitting device and a second end extending toward a second side of the package; andone or both of the second end of the first lead or the second end of the second lead comprising an indicator serving as an identifier.2. The light emitting device of claim 1 , wherein the first lead comprises a positive electrode terminal and the second lead comprises a negative electrode terminal.3. The light emitting device of claim 1 , wherein the second end of the first lead extends beyond the first side of the package claim 1 , and the second end of the second lead extends beyond the second side of the package.4. The light emitting device of claim 1 , comprising at least one light emitting device electrically connected to the first and second leads.5. The light emitting device of claim 1 , wherein the indicator comprises a cutout or notch in the second end of the first lead or the second ...

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Номер записи: 85
22-08-2013 дата публикации

MEASURING UNIT, MEASURING SYSTEM AND METHOD FOR DETERMINING A RELATIVE POSITION AND RELATIVE ORIENTATION

Номер: US20130215435A1
Автор: HÖLLER Frank, Koos Christian, Schmidt Oliver, Spruck Bernd
Принадлежит: CARL ZEISS AG

A measuring unit set up to determine a relative position and relative orientation between the measuring unit and an arrangement of at least three optical elements. The measuring unit comprises a length measuring device, which emits measuring beams at at least three locations spaced apart from one another, and at least one beam directing device set up to direct the measuring beams to optical elements of the arrangement. The beam directing device is controllable in order to guide at least one of the measuring beams to a plurality of optical elements of the arrangement in a time-sequential manner in order to carry out a plurality of length measuring operations in a time-sequential manner in such a manner that, in the plurality of length measuring operations, each measuring beam of the at least one measuring beam strikes precisely one of the optical elements. A total of six lengths are measured in this manner. 1. A measuring unit for determining a relative position and relative orientation between the measuring unit and an arrangement of at least three optical elements , the at least three optical elements being spaced apart from each other by known distances , the measuring unit comprising:a length measuring device configured to emit measuring beams at at least three locations which are spaced apart from each other by known distances;at least one beam directing device configured to direct the measuring beams onto optical elements of the arrangement;the at least one beam directing device being controllable to direct at least one of the measuring beams onto several optical elements of the arrangement in a time-sequential manner to perform plural length measuring operations in a time-sequential manner such that in the plural length measuring operations each measuring beam of the at least one measuring beam respectively impinges on only one of the optical elements; andwherein the length measuring device and the beam directing device are configured to measure at least six ...

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Номер записи: 86
22-08-2013 дата публикации

PARTICLE ANALYTICAL DEVICE

Номер: US20130218519A1
Автор: TOCHINO Shigemi
Принадлежит: HORIBA, LTD.

A particle analytical device comprises a light receiving part that receives the scattered light emitted from the particle group on which the light and that outputs an electric current signal, a data processing part that processes data based on time series data of a number of pulses obtained by the electric current signal, and a control part that halts a movement of the light receiving part in case that the overcurrent is detected based on the electric current signal and that restarts the movement of the light receiving part after a predetermined time passes and is characterized by that the data processing part holds the time series data until the light receiving part is halted and processes the data after the movement of the light receiving part is restarted by the use of the held time series data and the time series data obtained after the restart. 1. A particle analytical device comprisinga light irradiation part that irradiates the light toward a particle group that moves in a dispersion medium,a light receiving part that receives the scattered light emitted from the particle group on which the light from the light irradiation part is irradiated and that outputs an electric current signal,a data processing part that processes data concerning particle analysis based on time series data of a number of pulses obtained by the electric current signal output by the light receiving part,an overcurrent detecting part that detects flowing of an overcurrent in the light receiving part based on the electric current signal output by the light receiving part, anda control part that halts a movement of the light receiving part in case that the overcurrent detecting part detects the overcurrent and that restarts the movement of the light receiving part after a predetermined time passes from a time when the movement of the light receiving part is halted, whereinthe data processing part holds the time series data until the halt at a time when the movement of the light receiving ...

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Номер записи: 87
29-08-2013 дата публикации

DETECTOR, IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

Номер: US20130221556A1
Автор: Mishima Kazuhiko, Miyaharu Takafumi
Принадлежит: CANON KABUSHIKI KAISHA

A detector, which detects a relative position between a first object and a second object in a first direction, includes: an illumination optical system configured to obliquely illuminate a first mark arranged on the first object, and a second mark arranged on the second object; and a detection optical system configured to detect interfering light generated by light beams diffracted by the first mark and the second mark, respectively, illuminated by the illumination optical system. The illumination optical system forms a light intensity distribution including at least one pole on a pupil plane thereof. The detection optical system includes a stop provided with an aperture on a pupil plane thereof. A shape of the aperture includes a side parallel to the first direction. 1. A detector which detects a relative position between a first object and a second object in a first direction , the detector comprising:an illumination optical system configured to obliquely illuminate a first mark arranged on the first object, and a second mark arranged on the second object; anda detection optical system configured to detect interfering light generated by light beams diffracted by the first mark and the second mark, respectively, illuminated by said illumination optical system,wherein said illumination optical system forms a light intensity distribution including at least one pole on a pupil plane thereof,said detection optical system includes a stop provided with an aperture on a pupil plane thereof, anda shape of the aperture includes a side parallel to the first direction.2. The detector according to claim 1 , wherein a shape of the aperture includes a pair of sides parallel to the first direction and a pair of sides perpendicular to the first direction.3. The detector according to claim 2 , wherein the aperture has a rectangular shape.4. The detector according to claim 2 , wherein each of the pair of sides parallel to the first direction claim 2 , and each of the pair of sides ...

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Номер записи: 88
29-08-2013 дата публикации

MOVEMENT AND POSITION IDENTIFICATION SENSOR

Номер: US20130221994A1
Автор: Blank Thomas, Hager Marco, Huber Dominic
Принадлежит: Sensolute GmbH

Disclosed is a movement sensor that comprises a plurality of plate-type layers on which individual sensors are arranged. The layers are configured in the way set forth in the claims. 111.-. (canceled)12. A movement sensor , wherein the movement sensor comprises a plurality of plate-type layers on which individual sensors are arranged , and whereinone of the layers is configured as a cover plate and one of the layers is configured as a base plate,the cover plate and the base plate have corner points in which connection contacts are arranged,the cover plate and the base plate each have a sensor-associated surface, which sensor-associated surfaces are connected to the connection contacts via conductor tracks,at least one plate-type layer configured as a chamber plate having a cutout is arranged between the cover plate and the base plate,the chamber plate has corner points in which connection contacts are arranged,the sensor-associated surfaces of the cover plate and of the base plate are arranged with register accuracy over the cutout of the chamber plate, such that a closed hollow chamber is produced, inner surfaces of which are electrically conductively connected to the connection contacts arranged in the corner points thereof via conductor tracks,an electrically conductive ball is arranged in the hollow chamber,the connection contacts are configured as contact columns led through all plate-type layers,the cover plate has a conductor track connected to the base plate via a contact column without an electrical connection to a contact surface of the base plate arising, andthe cover plate, the base plate and inner surfaces of the hollow chamber of the chamber plate are electrically insulated from one another.13. The movement sensor of claim 12 , wherein the plate-type layers are configured in a quadrilateral fashion.14. The movement sensor of claim 12 , wherein via conductor tracks the chamber plate electrically conductively connects an inner wall of the hollow chamber ...

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Номер записи: 89
29-08-2013 дата публикации

DISTANCE MEASURING DEVICE AND DISTANCE MEASURING METHOD

Номер: US20130222577A1
Автор: MASUDA Kensuke, YAMANAKA Yuji
Принадлежит:

Disclosed is a distance measuring device including an imaging lens configured to condense incident light from an object, a lens array configured in such a manner that light having passed through the imaging lens is incident thereon, an imaging element array configured to receive light having passed through the lens array to output image information, and a distance calculating part configured to calculate a distance to the object based on the image information, wherein the lens array includes plural lenses with different numeric apertures. 1. A distance measuring device comprising an imaging lens configured to condense incident light from an object , a lens array configured in such a manner that light having passed through the imaging lens is incident thereon , an imaging element array configured to receive light having passed through the lens array to output image information , and a distance calculating part configured to calculate a distance to the object based on the image information , wherein the lens array includes plural lenses with different numeric apertures.2. The distance measuring device as claimed in claim 1 , wherein the plural lenses include a first lens and second lens with curvatures being mutually equal and a portion of an aperture part of the second lens is shielded in such a manner that a numerical aperture of the second lens is smaller than a numerical aperture of the first lens.3. The distance measuring device as claimed in claim 1 , wherein the plural lenses include a third lens and fourth lens with curvatures being changed to provide different numerical apertures thereof.4. The distance measuring device as claimed in claim 1 , wherein the plural lenses include a fifth lens and sixth lens with refractive indices being changed to provide different numerical apertures thereof.5. The distance measuring device as claimed in claim 1 , wherein the plural lenses include lenses with plural parameters selected from the group consisting of aperture ...

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Номер записи: 90
29-08-2013 дата публикации

AUTOMATIC MEASUREMENT OF DIMENSIONAL DATA WITH A LASER TRACKER

Номер: US20130222791A1
Автор: Bridges Robert E., Steffensen Nils P., Steffey Kenneth
Принадлежит: FARO TECHNOLOGIES, INC.

Measuring with a system having retroreflector targets and a laser tracker includes storing a list of coordinates for three targets and at least one added point; capturing on a photosensitive array a portion of the light emitted by a light beam and reflected off the targets; obtaining spot positions on a photosensitive array of a tracker camera from the reflected light; determining a correspondence between three spot positions on the photosensitive array and the coordinates of the targets; directing a beam of light from the tracker to the targets based at least in part on the coordinates of the first target and the first spot position; measuring 3-D coordinates of the targets with the tracker; determining 3-D coordinates of the at least one added point based at least in part on the measured 3-D coordinates of the targets and the coordinates of the at least one added point. 1. A method for measuring with a system , the method comprising steps of:providing the system including a collection of retroreflector targets and a laser tracker, the collection of retroreflector targets including at least three non-collinear retroreflector targets, the at least three non-collinear retroreflector targets including a first target, a second target, and a third target, the laser tracker in a first frame of reference fixed with respect to tracker surroundings, the laser tracker having a structure, a first light source, an absolute distance meter, a first angular transducer, a second angular transducer, a tracking system, a first camera, a second light source, and a processor, the structure rotatable about a first axis and a second axis, the first light source producing a first light beam that cooperates with the absolute distance meter, the first angular transducer measuring a first angle of rotation about the first axis, the second angular transducer measuring a second angle of rotation about the second axis, the tracking system configured to move the first light beam to a center of ...

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Номер записи: 91
05-09-2013 дата публикации

METHOD FOR USING A HANDHELD APPLIANCE TO SELECT, LOCK ONTO, AND TRACK A RETROREFLECTOR WITH A LASER TRACKER

Номер: US20130229512A1
Автор: Bridges Robert E., Pease Gregory D., Steffey Kenneth
Принадлежит: FARO TECHNOLOGIES, INC.

A method for locking onto and tracking a selected retroreflector target with a laser tracker includes steps of: actuating by the operator the handheld appliance and sending a wireless signal; responding to the wireless message by repetitively carrying out steps in the following loop and exiting the loop when an exit condition is met: reflecting part of the cone of light by the at least one retroreflector target and capturing an array image on the photosensitive array; determining which retroreflector target meets the retroreflector target criterion; determining whether the position detector is receiving the reflected beam; establishing that the exit condition is met when the position detector receives the reflected beam and the reflected beam comes from the selected retroreflector target; and steering the first light beam toward the selected retroreflector target. 2. The method of claim 1 , wherein claim 1 , in the step of providing a handheld appliance claim 1 , the handheld appliance is a handheld phone.3. The method of claim 1 , wherein claim 1 , in the step of providing a handheld appliance claim 1 , the handheld appliance is a remote control.4. The method of claim 1 , wherein the step of determining a retroreflector target criterion further includes choosing by the operator a retroreflector target criterion with the handheld appliance.5. The method of claim 1 , wherein the step of determining a retroreflector target criterion further includes providing and using a default retroreflector target criterion.6. The method of claim 4 , wherein the criterion is selected from the group consisting of: the retroreflector target having an image nearest a center of the photosensitive array claim 4 , the retroreflector target having an image nearest an edge of the photosensitive array claim 4 , the retroreflector target having an image having the greatest speed from among the retroreflector target images as determined from successive array images claim 4 , the ...

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Номер записи: 92
05-09-2013 дата публикации

Method and Apparatus for Electric Powered Vehicle Recharging Safety

Номер: US20130229656A1
Автор: Liu Jinshui
Принадлежит: Futurewei Technologies, Inc.

An apparatus comprising a charging pin in a recharging inlet of an electric powered vehicle (EPV) recharging inlet, a ground pin in the recharging inlet and substantially parallel to the charging pin, a safety pin in the recharging inlet and substantially parallel to the charging pin and the ground pin, an electric power source coupled to the safety pin, and a control circuit coupled to the electric power source and the safety pin, wherein the length of the safety pin extended in the recharging inlet is substantially shorter than the length of the ground pin and longer than the length of the charging pin. 1. An apparatus comprising:a recharging inlet inside an electric powered vehicle (EPV);a light source coupled to the inside wall of the EPV recharging inlet;a light detector located within the EPV recharging inlet and positioned between the recharging inlet pins and the light source; anda plurality of threads around the inside wall of the recharging inlet and positioned between the light source and the light detector,wherein the light detector is configured to detect light from the light source and/or external light,wherein the threads are configured to receive a housing cap that substantially blocks light from the light source and external light from reaching the light detector when the housing cap is properly mounted onto the EPV recharging inlet, andwherein the threads are configured to allow light from at least one of the light sources and external light to reach the light detector when the housing cap is not properly mounted onto the EPV recharging inlet.2. The apparatus of claim 1 , wherein the threads do not impede a light path from the light source to the light detector.3. The apparatus of claim 1 , wherein the housing cap comprises a plurality of second threads on an outside wall of an extended cap part claim 1 , and wherein the second threads are configured to interlock with the threads on the inside wall of the EPV recharging inlet when the housing cap ...

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Номер записи: 93
05-09-2013 дата публикации

STRUCTURED ILLUMINATION APPARATUS, STRUCTURED ILLUMINATION MICROSCOPY APPARATUS, AND PROFILE MEASURING APPARATUS

Номер: US20130229665A1
Автор: NOMURA Tatsushi
Принадлежит: NIKON CORPORATION

A structured illumination apparatus includes a light modulator being disposed in an exit flux of light from a light source and in which a sonic wave propagation path is arranged in a direction traversing the exit flux of light; a driving unit generating a sonic standing wave in the sonic wave propagation path by giving a driving signal for vibrating a medium of the sonic wave propagation path to the light modulator; and an illuminating optical system making mutually different diffracted components of the exit flux of light passed through the sonic wave propagation path to be interfered with each other, and forming interference fringes of the diffracted components on an observational object. 1. A structured illumination apparatus , comprising:a light modulator being disposed in an exit flux of light from a light source, and in which a sonic wave propagation path is arranged in a direction traversing the exit flux of light;a driving unit generating a sonic standing wave in the sonic wave propagation path by giving a driving signal for vibrating a medium of the sonic wave propagation path to the light modulator; andan illuminating optical system making mutually different diffracted components of the exit flux of light passed through the sonic wave propagation path to be interfered with each other, and forming interference fringes of the diffracted components on an observational object.2. The structured illumination apparatus according to claim 1 , whereinthe driving unit generates the sonic standing wave by setting a frequency of the driving signal given to the light modulator to a predetermined frequency.3. The structured illumination apparatus according to claim 2 , further comprisingan adjusting unit adjusting at least one of the frequency and an amplitude of the driving signal in accordance with a temperature of the medium of the sonic wave propagation path.4. The structured illumination apparatus according to claim 3 , further comprisinga temperature sensor ...

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Номер записи: 94
05-09-2013 дата публикации

LIGHT SOURCE FOR A SENSOR AND A DISTANCE-MEASURING OPTOELECTRONIC SENSOR

Номер: US20130229668A1
Автор: WERBER Armin
Принадлежит: SICK AG

A laserscanner comprising a new light source is described wherein the light beam is no more deflected by a rotating mirror but rather comprises a ring like light-guiding element with an adjacent channel on the convex side. The channel contains two polar fluids having different refractive indexes, which fluids are not mixed and can be moved in said channel in the longitudinal direction by means of electrical forces due to the effect of electrowetting. The refractive indexes are suitable chosen such that total reflection occurs at the first fluid and a coupling out of the light where the second fluid is located. In that way the second fluid acts like a revolving window through which the light can exit. Such a scanner has no more mechanical wear with enhancement of the lifetime and capabilities. 11014401441144142144442444648446446421442464248421442504842. A light source for an optoelectronic sensor () , which can transmit the light () in different observation directions , with a light transmitting element () for the generation of transmitted light () and a deflection unit () , with which the transmitted light () can be deflected in different directions , characterized in that the deflector () comprises a curved light-guiding element () into which the transmitted light () can be coupled , and a channel () is immediately adjacent to the convex side of said light-guiding element () , and the channel () contains two polar fluids ( and ) having different refractive indexes , which fluids are not mixed and can be moved in said channel () in the longitudinal direction () by means of electrical forces due to the effect of electrowetting , wherein the refractive index of the first fluid () is smaller than the one of the light-guiding element () , so that the transmitted light () coupled into the light-guiding element () is totally reflected in those sections in which the first fluid () is adjacent said light-guiding element () , and the refractive index of the second fluid () ...

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Номер записи: 95
05-09-2013 дата публикации

METHOD, APPARATUS, AND MANUFACTURE FOR A TRACKING CAMERA OR DETECTOR WITH FAST ASYNCHRONOUS TRIGGERING

Номер: US20130229669A1
Автор: Smits Gerard Dirk
Принадлежит:

An image projection device for displaying an image onto a remote surface. The image projection device employs a scanner to project image beams of visible light and tracer beams of light onto a remote surface to form a display of the image. The device also employs a light detector to sense at least the reflections of light from the tracer beam pulses incident on the remote surface. The device employs the sensed tracer beam light pulses to predict the trajectory of subsequent image beam light pulses and tracer beam light pulses that form a display of the image on the remote surface in a pseudo random pattern. The trajectory of the projected image beam light pulses can be predicted so that the image is displayed from a point of view that can be selected by, or automatically adjusted for, a viewer of the displayed image. 1. A method , comprising:for each of a plurality of positions in an array, wherein each of the plurality of positions in the array has a corresponding threshold, triggering a hit event when a light level associated with the position reaches the corresponding threshold;in response to each triggered hit event, providing a signal that includes position information associated with a position at which the hit event occurred and further includes time information associated with a time at which the hit event occurred; andin response to each triggered hit event, resetting the position at which the triggered hit event occurred such that, after a detection reset cycle for the position, another hit event is triggered at the position when the light level associated with the position reaches the corresponding threshold again.2. The method of claim 1 , wherein providing the signal is further accomplished such that the signal further includes light level value information associated with the light level at the position when the hit event was triggered.3. The method of claim 1 , wherein providing the signal is accomplished such that the time information includes a ...

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Номер записи: 96
05-09-2013 дата публикации

DETECTION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE

Номер: US20130230798A1
Автор: MAEDA Hironori
Принадлежит: CANON KABUSHIKI KAISHA

A detection apparatus, which detects a mark formed on a lower surface of a target object, includes: a first detector which illuminates the mark from an upper surface side of the target object to detect an image of the illuminated mark; a second detector which detects an upper surface position of the target object; and a processor which obtains information indicating a focus position to focus on the mark in the first detector, based on the upper surface position detected by the second detector. 1. A detection apparatus which detects a mark formed on a lower surface of a target object , the apparatus comprising:a first detector which illuminates the mark from an upper surface side of the target object to detect an image of the illuminated mark;a second detector which detects an upper surface position of the target object; anda processor which obtains information indicating a focus position to focus on the mark in said first detector, based on the upper surface position detected by said second detector.2. The apparatus according to claim 1 , wherein said processor obtains the information based on the upper surface position detected by said second detector claim 1 , a thickness of the target object claim 1 , and a refractive index of the target object.3. The apparatus according to claim 1 , wherein said first detector illuminates the mark with infrared light.4. The apparatus according to claim 1 , wherein said second detector guides light to be obliquely incident on an upper surface of the target object claim 1 , and detects the light reflected by the upper surface of the target object to detect the upper surface position of the target object.5. The apparatus according to claim 1 , wherein said second detector ejects a gas toward an upper surface of the target object claim 1 , and detects a pressure of the gas rebounded by the upper surface of the target object to detect the upper surface position of the target object.6. The apparatus according to claim 1 , wherein said ...

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Номер записи: 97
12-09-2013 дата публикации

THREE-DIMENSIONAL MEASURING DEVICE AND METHOD

Номер: US20130235387A1
Автор: KIM Taeg Gyum
Принадлежит: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Disclosed herein is a three-dimensional (3D) measuring device and method. The 3D measuring device includes a light source emitting a laser beam, a focal point adjusting device adjusting a focal position of the laser beam, a rotating reflection mirror reflecting the laser beam of which the focal position is adjusted by the focal point adjusting device, a scanning lens disposed on a route of the laser beam so as to scan a measuring target with the laser beam reflected by the rotating reflection mirror, a condenser lens condensing the laser beam reflected on the measuring target, and at least one detection unit receiving the laser beam condensed on the condenser lens to thereby detect a laser beam signal. 1. A three-dimensional (3D) measuring device , comprising:a light source emitting a laser beam;a focal point adjusting device adjusting a focal position of the laser beam;a rotating reflection mirror reflecting the laser beam of which the focal position is adjusted by the focal point adjusting device;a scanning lens disposed on a route of the laser beam so as to scan a measuring target with the laser beam reflected by the rotating reflection mirror;a condenser lens condensing the laser beam reflected on the measuring target; andat least one detection unit receiving the laser beam condensed on the condenser lens to thereby detect a laser beam signal.2. The 3D measuring device according to claim 1 , wherein the light source includes a first light source and a second light source which emit laser beams having mutually different wavelengths.3. The 3D measuring device according to claim 1 , wherein the focal point adjusting device includes a first focal point adjusting device and a second focal point adjusting device which align the focal position of the laser beam with one of an upper end portion and a lower end portion of the measuring target.4. The 3D measuring device according to claim 1 , wherein the focal point adjusting device adjusts the focal position of the laser ...

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Номер записи: 98
12-09-2013 дата публикации

DYNAMIC AUTOFOCUS METHOD AND SYSTEM FOR ASSAY IMAGER

Номер: US20130235388A1
Автор: Moon John A., Ren Hongji, Segale Darren R.
Принадлежит: Illumina, Inc.

Method of detecting surface features of a microarray. The method includes providing a microarray to an optical scanner, wherein the microarray includes a surface having features. The method also includes carrying out a scanning process using the optical scanner, wherein the scanning process includes: (i) acquiring images of sequential regions on the surface, wherein a defocus spread is applied to the optical scanner during the acquiring, (ii) determining a focus score for the images, (iii) adjusting the optical scanner to a different defocus spread based on the focus score, and (iv) repeating (i) through (iii) at the different defocus spread, thereby acquiring images of further sequential regions on the surface. The method also includes analyzing the images to distinguish different target molecules at the features of the microarray. The images that are analyzed were acquired at the defocus spread and at the different defocus spread during the scanning process. 1. (canceled)2. A method of detecting surface features of a microarray , comprising(a) providing a microarray to an optical scanner, wherein the microarray comprises a surface having features; (i) acquiring images of sequential regions on the surface, wherein a defocus spread is applied to the optical scanner during the acquiring,', '(ii) determining a focus score for the images,', '(iii) adjusting the optical scanner to a different defocus spread based on the focus score, and', '(iv) repeating (i) through (iii) at the different defocus spread, thereby acquiring images of further sequential regions on the surface; and, '(b) carrying out a scanning process using the optical scanner, wherein the scanning process comprises(c) analyzing the images to distinguish different target molecules at the features of the microarray, wherein the images that are analyzed were acquired at the defocus spread and at the different defocus spread during the scanning process.3. The method of claim 2 , wherein the target molecules ...

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Номер записи: 99
12-09-2013 дата публикации

Position-Measuring Device and System Having Such a Position-Measuring Device

Номер: US20130235390A1
Автор: Drescher Joerg, Holzapfel Wolfgang, Joerger Ralph, Kaelberer Thomas, Meissner Markus, Musch Bernard
Принадлежит: DR. JOHANNES HEIDENHAIN GMBH

A position-measuring device, as well as a system having such a position-measuring device, is used for determining the position of a first object relative to a second object, the first and the second object being movable relative to one another along at least two measuring directions. The position-measuring device has an optical unit that is linked to one of the two objects and includes at least one light source, a detector system, as well as further optical elements in a defined configuration. In addition, the position-measuring device includes a measuring standard-reflector unit, which is provided on the other object, and has at least two differently formed regions in one track that are optically scannable by the optical unit for position sensing. The different formation of the regions makes switching among the various measuring directions possible during position sensing, and positional signals can be generated by the optical unit relative to the relative movement of the two objects for each measuring direction. 1. A position-measuring device for measuring a position of a first object relative to a second object , the first object and the second object being movable relative to one another along at least two measuring directions , comprising:an optical unit attachable to one of the objects and including at least one light source, a detector system, and further optical elements in a defined configuration; anda measuring standard-reflector unit attachable to the other object and including at least two differently formed regions in one track that are optically scannable by the optical unit for position sensing;wherein the different formation of the regions provide for switching among the measuring directions during position sensing; andwherein the optical unit is adapted to generate positional signals in accordance with relative movement of the two objects for each measuring direction.2. The position-measuring device according to claim 1 , wherein measuring ...

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Номер записи: 100