06-08-2015 дата публикации
Номер: US20150219450A1
Принадлежит:
A measurement head () irradiates a film () of a product substrate () with primary X-rays to detect fluorescent X-rays generated from the film (). Analysis means () obtains thickness of the film () from intensity of the fluorescent X-rays detected by the measurement head (). 1. A film thickness measurement device , comprising:{'b': '1', 'a base ();'}{'b': 2', '1', '10, 'a substrate stage () which is provided on the base () and on which a product substrate () having a film is placed;'}{'b': 4', '2', '1', '2, 'a gantry () that extends in a first direction (A) with respect to the substrate stage () and is installed in the base () so as to be movable in a second direction (B) with respect to the substrate stage ();'}{'b': 5', '4, 'a slider () that is installed in the gantry () so as to be movable in the first direction (A);'}{'b': 23', '5', '12', '10', '2', '12, 'a measurement head () that is fixed to the slider () and irradiates a film () of the product substrate () placed on the substrate stage () with primary X-rays to detect fluorescent X-rays generated from the film (); and'}{'b': 33', '12', '23, 'analysis means () that obtains thickness of the film () from intensity of the fluorescent X-rays detected by the measurement head ().'}2. The film thickness measurement device according to claim 1 , further comprising:{'b': 21', '5', '10', '2, 'a camera () that is fixed to the slider () and detects an alignment mark of the product substrate () placed on the substrate stage ();'}{'b': 31', '10', '2', '21, 'substrate position correction means () that corrects position information of the product substrate () placed on the substrate stage () based on a detection result of the camera ();'}{'b': 22', '5', '10', '2, 'a displacement sensor () that is fixed to the slider () and measures distance to the product substrate () placed on the substrate stage (); and'}{'b': 32', '23', '22', '10', '2', '23, 'head position adjustment means () that adjusts a position of the measurement head ...
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