04-04-2013 дата публикации
Номер: US20130082182A1
The present invention relates to a bolometer (10) comprising a substrate (12), a first membrane (16) formed by removing a first sacrificial layer (14) on the substrate (12), the first membrane (16) comprising a measuring element (18) for measuring an amount of incident electromagnetic radiation (R), a second membrane (22) formed by removing a second sacrificial layer (20) on the first membrane (16), the second membrane (22) enclosing the first membrane (16), a first cavity (24) formed between the substrate (12) and the first membrane (16), and a second cavity (26) formed between the first membrane (16) and the second membrane (22). The present invention further relates to a method of manufacturing a bolometer, as well as a thermographic image sensor and medical device. 110. A bolometer () comprising:{'b': '12', 'a substrate (),'}{'b': 16', '14', '12', '16', '18, 'a first membrane () formed by removing a first sacrificial layer () on the substrate (), the first membrane () comprising a measuring element () for measuring an amount of incident electromagnetic radiation (R),'}{'b': 22', '20', '16', '22', '16, 'a second membrane () formed by removing a second sacrificial layer () on the first membrane (), the second membrane () enclosing the first membrane (),'}{'b': 24', '12', '16, 'a first cavity () formed between the substrate () and the first membrane (), and'}{'b': 26', '16', '22, 'a second cavity () formed between the first membrane () and the second membrane ().'}21616161612161416161214a,bcc. The bolometer of claim 1 , the first membrane () comprising two end portions () where the first membrane () is attached to a planar surface of the substrate () and a middle portion () arranged on the first sacrificial layer () such that the middle portion () of the first membrane () is spaced apart from the planar surface of the substrate () when the first sacrificial layer () is removed.32222222216222022221620a,bcc. The bolometer of claim 1 , the second membrane () ...
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