02-01-2014 дата публикации
Номер: US20140004000A1
This invention relates to a method of making lead-free piezoelectric ceramic films. Specifically, the invention is directed to a method for fabricating lead-free piezoelectric free standing films having enhanced piezoelectric properties. The films may be used for a number of applications including incorporation in microelectronic devices such as energy harvesting devices and sensor technologies. 120-. (canceled)21. A free standing film that is substantially lead-free , wherein the free standing film is produced from a lead-free piezoelectric material selected from the group consisting of solid solutions comprising one or more of (BiK)TiO , (BiNa)TiO , Ba(ZrTi)O , BaTiO , (BiK)TiO , (BiNa)TiO , Ba(ZrTi)O , Bi(ZnTi)O , (NaK)NbO , BiScO—PbTiOBaTiO—(BiK)TiO , (BiNa)TiO—(BiK)TiO , (BiNa)TiO—BaTiO , (BiNa)TiO—Ba(ZrTi)Oand (BiNa)TiO—BaTiO—(BiK)TiO.22. The film of claim 21 , wherein said film has a piezoelectric coefficient −dof about 200 pm/V to about 2000 pm/V.23. The film of claim 21 , wherein said piezoelectric coefficient −dis about 1500 pm/V to about 1800 pm/V.24. The film of claim 21 , wherein said piezoelectric coefficient −dis about 1600 pm/V to about 1700 pm/V.25. The film of claim 21 , wherein said film has a thickness of about 4 μm to about 100 μm.26. The film of claim 22 , wherein the free standing film exhibits asymmetrical non-180° domain switching.27. A microelectronic device comprising a piezoelectric layer produced from a film as claimed in .28. A microelectronic device comprising a piezoelectric layer produced from a film as claimed in .29. The film of claim 28 , wherein said microelectronic device is selected from the group consisting of: an energy harvesting device and a piezoelectric sensor.30. A piezoelectric sensor comprising:a non-piezoelectric layer;{'sub': 0.5', '0.5', '0.945', '0.055', '0.96', '0.04', '3', '0.5', '0.5', '3', '3', '0.5', '0.5', '3', '3', '0.5', '0.5', '3', '3', '0.5', '0.5', '3', '3', '0.5', '0.5', '3', '3', '0.5', '0.5', '3', '0. ...
Подробнее