03-01-2019 дата публикации
Номер: US20190004020A1
Принадлежит:
The present invention generally relates to bimetal-doped, metal oxide-based sensors and platforms and integrated chemical sensors incorporating the same, methods of making the same, and methods of using the same. 1. A chemical sensor platform , comprising:{'sub': 2', '2, '(a) an oxidized silicon membrane, comprising a silicon (Si) layer and a silicon oxide (SiO) layer, wherein the SiOlayer is located on top of the silicon layer and, comprises: a plurality of separate sensor areas;'}{'sub': '2', '(b) at least one heating element in contact with the SiOlayer and located near at least one edge of each sensor area;'}{'sub': '2', '(c) a plurality of pairs of electrical leads, each in contact with the SiOlayer, wherein 1 pair of electrical leads is at least partly located on each of the separate sensor areas;'}(d) a plurality of metal oxide layers, wherein 1 metal oxide layer is located on each of the plurality of sensor areas and is in contact with at least a part of the pair of electrical leads located on the same area; and,(e) a plurality of bimetal layers, wherein 1 bimetal layer is located in each sensor area and is in contact with the metal oxide layer in that area, wherein the bimetal layer, comprises: Au and Pd or Au and Pt.2. The chemical sensor platform of claim 1 , wherein the bimetal layers claim 1 , comprise: Au and Pd.3. The chemical sensor platform of claim 1 , wherein the bimetal layers claim 1 , comprise: Au and Pt.4. The chemical sensor platform of claim 1 , wherein the membrane claim 1 , further comprises: a plurality of Si/SiOconnectors.5. The chemical sensor platform of claim 1 , wherein the membrane claim 1 , further comprises: 4 Si/SiOconnectors.6. The chemical sensor platform of claim 1 , wherein bimetal layer claim 1 , comprises: Au and Pd and the molar ratio of Au to Pd is from 10:1 to 1:1.7. The chemical sensor platform of claim 1 , wherein bimetal layer claim 1 , comprises: Au and Pd and the molar ratio of Au to Pd is about 9:1.8. The chemical ...
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