14-01-2016 дата публикации
Номер: US20160011426A1
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The assembly to homogenize a light beam, especially from an excimer laser, has at least two optical functional surfaces () in succession along the light path (z). Two groups of refractive or diffractive imaging elements are at the optical surfaces as cylinder lenses (), with at least two imaging elements of different characteristics within at least one of the groups. The light beam is finally carried through a Fourier lens () to the working plane (). 15100. A device for homogenizing laser radiation () , comprising:{'b': 1', '10', '100', '1', '11', '100', '1', '10', '11', '3', '100', '101', '102', '103, 'a first lens array () having a first optically functional boundary surface () through which the laser radiation (), which has an intensity profile in form of a Gaussian profile, can enter the first lens array (), and a second optically functional boundary surface () through which the laser radiation () can exit from the first lens array (), wherein at least one of the two optically functional boundary surfaces (, ) comprises a plurality of lens means (), which are capable of splitting the laser radiation () into a plurality of sub-beams (, , ), as well as'}{'b': 2', '1', '20', '101', '102', '103', '2', '21', '101', '102', '103', '2', '20', '21', '4', '101', '102', '103', '3', '1', '100', '101', '102', '103', '101', '102', '103', '101', '102', '103', '4', '2', '3', '1, 'a second lens array (), which is arranged in the beam path behind the first lens array (), with a first optically functional boundary surface (), through which the sub-beams (, , ) can enter the second lens array (), and with a second optically functional boundary surface (), through which the sub-beams (. , ) can exit the second lens array (), wherein at least one of the two optically functional boundary surfaces (, ) comprises a plurality of lens means () configured to refract the sub-beams (, , ), wherein the lens means () of the first lens array () are designed to split the laser radiation () into ...
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