05-07-2018 дата публикации
Номер: US20180186699A1
Provided are a Mn—Zn—W—O sputtering target having excellent crack resistance and a production method therefor. The Mn—Zn—W—O sputtering target has a chemical composition containing Mn, Zn, W, and O. From an X-ray diffraction pattern of the Mn—Zn—W—O sputtering target, a ratio P/Pof a maximum peak intensity Pof a peak due to a manganese oxide composed only of Mn and O to a maximum peak intensity Pof a peak due to W is 0.027 or less. 1. A Mn—Zn—W—O sputtering target comprising a chemical composition containing Mn , Zn , W , and O , wherein{'sub': MnO', 'W', 'MnO', 'W, 'from an X-ray diffraction pattern of the Mn—Zn—W—O sputtering target, a ratio P/Pof a maximum peak intensity Pof a peak due to a manganese oxide composed only of Mn and O to a maximum peak intensity Pof a peak due to W is 0.027 or less.'}2. The Mn—Zn—W—O sputtering target according to claim 1 , wherein{'sub': '4', 'from the X-ray diffraction pattern of the Mn—Zn—W—O sputtering target, a peak due to a WMnOcrystalline phase is observed.'}3. The Mn—Zn—W—O sputtering target according to claim 1 , wherein{'sub': WMnO', 'W', 'WMnO', '4', 'W, 'from the X-ray diffraction pattern of the Mn—Zn—W—O sputtering target, a ratio P/Pof a maximum peak intensity Pof a peak due to a WMnOcrystalline phase to the maximum peak intensity Pis 0.024 or more.'}4. The Mn—Zn—W—O sputtering target according to claim 1 , whereinthe chemical composition contains 4 at % to 40 at % of Mn, 15 at % to 60 at % of Zn, and 5 at % to 40 at % of W relative to 100 at %, in total, of Mn, Zn, and W.5. The Mn—Zn—W—O sputtering target according to claim 1 , whereinthe chemical composition further includes a single one or two or more elements selected from the group consisting of Cu, Mg, Ag, Ru, Ni, Zr, Mo, Sn, Bi, Ge, Co, Al, In, Pd, Ga, Te, V, Si, Ta, Cr, and Tb.6. The Mn—Zn—W—O sputtering target according to claim 5 , whereinthe single one or two or more elements has a content of 8 at % to 70 at % relative to 100 at %, in total, of constituent ...
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