11-02-2016 дата публикации
Номер: US20160044396A1
Принадлежит:
A microphone device includes a carrier board, a micro electro-mechanical system unit, an integrated circuit and an upper cover. The micro electro-mechanical system unit includes a substrate, a cap and a capacitive microphone. The cap is installed on the substrate, and is composed of electrically conductive material. The capacitive microphone is positioned between the cap and the carrier board, wherein the capacitive microphone and the cap form a resonant cavity. The integrated circuit is installed on the carrier board, and arranged to control the capacitive microphone. The upper cover is connected to the carrier board, wherein the micro-electro mechanical system unit and the integrated circuit are both positioned inside a space formed by the carrier board and the upper cover. 1. A microphone device , comprising:a carrier board; a substrate;', 'a cap, installed on the substrate, and composed of electrically conductive material; and', 'a capacitive microphone, positioned between the cap and the carrier board, wherein the capacitive microphone and the cap form a resonant cavity;, 'a micro electro-mechanical system (MEMS) unit, comprisingan integrated circuit (IC), installed on the carrier board, and arranged to control the capacitive microphone; andan upper cover, connected to the carrier board, wherein the MEMS unit and the integrated circuit are both positioned inside a space formed by the carrier board and the upper cover.2. The microphone device of claim 1 , wherein the cap has an opening.3. The microphone device of claim 2 , wherein the upper cover has an opening claim 2 , and the opening of the upper cover is not directly over the opening of the cap.4. The microphone device of claim 1 , wherein the carrier board has an opening claim 1 , the substrate of the MEMS unit is configured on the carrier board claim 1 , and the capacitive microphone is directly over the opening of the carrier board.5. The microphone device of claim 1 , wherein the substrate of the MEMS ...
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