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  • Improved configuration of three-dimensional features in optical recording structures

Improved configuration of three-dimensional features in optical recording structures

Реферат: DISCLOSED ARE IMPROVEMENTS IN THE TRANSVERSE SECTIONAL SHAPE OF THREE-DIMENSIONAL FEATURES DISPLAYED IN OPTICAL RECORDING STRUCTURES-DISCS, CYLINDERS, CARDS, MULTI-LAYERED DEVICES AND STRUCTURES REPLICATED FROM THEM-TO INCREASE OF MERIT. THE CROSS-SECTIONAL SHAPE IMPROVEMENTS INCLUDE REDUCTIONS IN BERM (70A AND 70B) HEIGHT AND WIDTH, DUAL LEVEL DATA MARKS AND TRACKING GUIDES, AND LAND AREAS PROJECTING ABOVE OR INTO THE SURFACE OF THE RECORDING STRUCTURE. DISCLOSED METHODS INCLUDE DUAL AND/OR DITHERED BEAM WRITING (120 AND 121) ONTO THE STRUCTURE AND IMPROVED COMPOSITION OF THE ACTIVE LAYER OF THE STRUCTURE. ALSO DISCLOSED ARE APPARATUS FOR PRODUCING SUCH IMPROVED FEATURES ON OPTICAL RECORDING STRUCTURES, ACCORDING TO ONE OR MORE OF THE DISCLOSED METHODS. 7