<sup2/>? <sub2/>?x?method for production of lisi <ns1:sub>y</ns1:sub>?o <ns2:sub>z</ns2:sub>?coatings using a single source for li and si and resultant coated products
Номер патента: EP4101017A1
Опубликовано: 14-12-2022
Автор(ы): Dmitry Bravo-Zhivotovskii, Malakhi NOKED, Rosy Sharma, Yitzhak Apeloig, Yosi Kratish
Принадлежит: BAR ILAN UNIVERSITY, Technion Research and Development Foundation Ltd
Опубликовано: 14-12-2022
Автор(ы): Dmitry Bravo-Zhivotovskii, Malakhi NOKED, Rosy Sharma, Yitzhak Apeloig, Yosi Kratish
Принадлежит: BAR ILAN UNIVERSITY, Technion Research and Development Foundation Ltd
Реферат: Some exemplary embodiments of the invention relate to performing atomic layer deposition (ALD) or molecular layer deposition (MLD) of a volatile organo silyl lithium compound and ozone on a substrate. According to various exemplary embodiments of the invention the volatile organo silyl lithium compound includes SiLi2tBuMe and/or tBuMe2SiLi and/or tBuMe2SiNa and/or SiLi3Et and/or Alk3GeLi and/or [(Alk3Si)4AI]Li and/or (NMe2)(tBu)2SiLi and/or tBuMe2SiLi-TMEDA and/or SiLi + TMA2tBuMe. Resultant coated products and their uses are also disclosed.
Method for production of lixsiyoz coatings using a single source for li and si and resultant coated products
Номер патента: WO2021156867A1. Автор: Malakhi NOKED,Yitzhak Apeloig,Yosi Kratish,Dmitry Bravo-Zhivotovskii,Rosy Sharma. Владелец: BAR-ILAN UNIVERSITY. Дата публикации: 2021-08-12.