14-03-2013 дата публикации
Номер: US20130065742A1
Принадлежит:
A substrate support () includes a drum (), a first surface () carried by the drum (), and a second surface () carried by the drum () opposite and oblique to the first surface () and a wedging member (). The wedging member () is sandwiched between the first surface () and the second surface () and is resiliently biased in a wedging direction. 1. An apparatus comprising:{'b': 20', '120, 'a substrate support (, ) comprising{'b': 24', '124', '28', '128, 'a drum (, ) rotatable about an axis (, );'}{'b': 40', '42', '24', '124, 'a first surface (, ) carried by the drum (, );'}{'b': 40', '42', '140', '142', '24', '124', '40', '42', '140', '142, 'a second surface (, , , ) carried by the drum (, ) opposite and oblique to the first surface (, , , ); and'}{'b': 44', '144, 'a wedging member (, ) movably supported and sandwiched between the first surface and the second surface and resiliently biased in a wedging direction.'}2144. The apparatus of claim 1 , wherein the wedging member () is rotatable.3144. The apparatus of claim 2 , wherein the wedging member () comprises a roller.4441444414440421401424042140142. The apparatus of comprising a plurality of axially spaced wedging members ( claim 1 , ) claim 1 , including the wedging member ( claim 1 , ) claim 1 , sandwiched between the first surface ( claim 1 , claim 1 , claim 1 , ) and the second surface ( claim 1 , claim 1 , claim 1 , ) and resiliently biased in the wedging direction.54814844144. The apparatus of further comprising a release mechanism ( claim 1 , ) configured to move the wedging member ( claim 1 , ) away from the wedging direction.6. The apparatus of claim 5 , wherein the release mechanism comprises:{'b': '280', 'a rotatable rod ();'}{'b': 282', '280', '44', '144, 'a pusher () extending from the rod () into contact with the wedging member (, ); and'}{'b': 284', '280', '284', '280', '282', '44', '144, 'a lever () coupled to the rod () such that movement of the lever () rotates the rod () to move the pusher () ...
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