03-01-2019 дата публикации
Номер: US20190006311A1
Принадлежит:
A method for producing an electric device with a multi-layer contact is disclosed. In an embodiment, a method includes providing a carrier, the carrier having a metallic layer disposed on its surface, providing a semiconductor substrate, forming a layer stack on the semiconductor substrate and attaching the layer stack of the semiconductor substrate to the metallic layer of the carrier so that an intermetallic phase is formed between the metallic layer and the solder layer. 1. A method for fabricating an electronic device , the method comprising:providing a carrier, the carrier having a metallic layer disposed on its surface, wherein the metallic layer comprises Ni or NiNiP;providing a semiconductor substrate; directly depositing an electrical contact layer on the semiconductor substrate, the electrical contact layer being a single elemental Al layer;', 'directly depositing a functional layer on the electrical contact layer, the functional layer comprising Ti or an alloy containing Ti;', 'directly depositing an adhesion layer on the functional layer, the adhesion layer comprising Ni or NiV;', 'directly depositing a solder layer on the adhesion layer, the solder layer being a single element Sn layer or a noble metal free alloy layer containing Sn; and', 'directly depositing a protective layer on the solder layer, the protection layer being an Ag layer; and, 'forming a layer stack on the semiconductor substrate bybonding the layer stack of the semiconductor substrate to the metallic layer of the carrier so that an intermetallic phase is formed between the metallic layer and the solder layer, the intermetallic phase comprising a binary alloy of Ni/Sn.2. The method according to claim 1 , wherein the electrical contact layer has a thickness in a range from 100 nm to 1 μm.3.The method according to claim 2 , wherein the functional layer has a thickness in a range from 50 nm to 200 nm.4382. The method according to claim claim 2 , wherein the solder layer has a thickness in ...
Подробнее