CHARGED PARTICLE MICROSCOPE WITH A MANIPULATOR DEVICE, AND METHOD OF PREPARING A SPECIMEN WITH SAID CHARGED PARTICLE MICROSCOPE
Номер патента: US20200066482A1. Автор: Engelen Andreas Theodorus, Persoon Johannes A. H. W. G., Schampers Ruud. Владелец: FEI COMPANY. Дата публикации: 27-02-2020.The invention relates to a charged particle microscope (CPM) that at least includes a sample holder, for holding a sample, and a manipulator device arranged for transferring a lamella created in said sample out of said sample, wherein said manipulator device comprises a first elongated manipulator member with a first outer end, and a second elongated manipulator member with a second outer end. The outer ends are movable for mechanically gripping and releasing said lamella. In embodiments, the elongated manipulator members comprise off-set parts that increase manoeuvrability, accessibility, and monitorability of the manipulator device during use. 2. The charged particle microscope according to claim 1 , wherein said first elongated manipulator member comprises a distal part having said first outer end claim 1 , as well as comprising a proximal part connected to said distal part claim 1 , wherein said proximal part extends substantially parallel to said distal part claim 1 , and further comprising an intermediate part that connects said proximal part to said distal part claim 1 , wherein said intermediate part extends substantially non-parallel to said distal part and/or non-parallel to said proximal part.3. The charged particle microscope according to claim 2 , wherein said intermediate part is shaped such that said proximal part is positioned with an off-set with respect to the longitudinal axis of said distal part.4. The charged particle microscope according to claim 3 , wherein said outer ends have gripping surfaces that define a gripping plane claim 3 , and wherein said intermediate part is shaped such that said proximal part is positioned with an off-set in a direction normal to said gripping plane.5. The charged particle microscope according to claim 3 , wherein said outer ends have gripping surfaces that define a gripping plane claim 3 , and wherein said intermediate part is shaped such that said proximal part is positioned with an off-set in a direction ...