02-05-2019 дата публикации
Номер: US20190129307A1
Принадлежит:
A resist underlayer composition and a method of forming patterns, the composition including a solvent; and a polymer that includes a structural unit represented by Chemical Formula 1 and a structural unit represented by Chemical Formula 2, 3. The resist underlayer composition as claimed in claim 1 , wherein in Chemical Formula 1 claim 1 , A is a substituted or unsubstituted C1 to C30 heteroalkylene group claim 1 , a substituted or unsubstituted C2 to C30 heterocycloalkylene group claim 1 , a substituted or unsubstituted C2 to C30 heteroarylene group claim 1 , or a combination thereof.4. The resist underlayer composition as claimed in claim 1 , wherein X of Chemical Formula 1 is a group including an electrophile having claim 1 , at a terminal end thereof an epoxy group claim 1 , a C1 to C6 alkoxy group claim 1 , R—(C═O)— claim 1 , in which R is hydrogen or a C1 to C10 alkyl group claim 1 , R′ O—(C═O)— claim 1 , in which R′ is a C1 to C10 alkyl group claim 1 , or a halogen.5. The resist underlayer composition as claimed in claim 3 , wherein X of Chemical Formula 1 is bonded to at least one of a heteroatom or a carbon atom of A.7. The resist underlayer composition as claimed in claim 1 , wherein X is a group represented by Chemical Formula 1-II:{'br': None, 'sub': 2', 'o', 'p', '2', 'q, 'sup': 'a', '*—(CH)-(Q)-(CH)—R\u2003\u2003[Chemical Formula 1-II]'}wherein, in Chemical Formula 1-II,o, p, and q are each independently an integer of 0 to 10,{'sub': 2', '2, 'Q is —O—, —S—, —(C═O)—, —(C═O)O—, —CHNH—, —CONH—, —NH—, or —(SO)—, and'}{'sup': 'a', 'Ris a group including an electrophile having a C1 to C10 alkyl group, an epoxy group, a C1 to C6 alkoxy group, R—(C═O)—, in which R is hydrogen or a C1 to C10 alkyl group, R′O—(C═O)—, in which R′ is hydrogen or a C1 to C10 alkyl group, or a halogen, or a combination thereof.'}8. The resist underlayer composition as claimed in claim 1 , wherein E includes a hydroxy group (—OH) claim 1 , an amino group (—NH) claim 1 , a carboxyl ...
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