Procedure for calibrating the XY positioning of a positioning tool, as well as device with a such positioning tool.

[0001] The invention concerns a procedure for calibrating the XY positioning of a positioning tool in accordance with the generic term of requirement 1, a procedure for calibrating a image recognition system-based Positioniersystems in accordance with the generic term of requirement 7, a procedure for placing a construction unit on a substrate in accordance with the generic term of requirement 8.

Such procedures can in particular in connection with “Pick so called and Place” - tools for handling semiconductor components to be used. Semiconductor components, in particular semiconductor chips, on appropriate substrates, are put down and/or bonded which are in a work surface.

The accurate position and adjustment of the construction units with setting off and the tool with approximating to the work surface play thereby an important role so that special measures for the positioning Positionierbzw. Photograph tool are necessary.

A Positioniersystem is moved enclosure mostly a positioning tool, in particular a “Pick and Place” - tool, which usually has several drive axles, in particular over two drive axles, along those it within a work area essentially parallel to the surface of a substrate.

The establishment of a position in or over the substrate surface is called XY positioning. The position of the tool is specified on the basis of coordinates in the control system of the positioning tool, which are called in the following tool coordinates.

The positioning tool takes for example a construction unit out of a fetching station and places this on the substrate.

With an image recognition system Zielmarkierungen present for construction units or “Fiducials so called” can be seized on the substrate. From the seized position the goal position of the positioning tool is computed.

A such XY positioning is called image recognition system-basedly.

If that covers display space of the image recognition system the entire work surface of the positioning tool, then the image recognition system can be attached firmly concerning the work surface. The illustration of Zielmarkierung or another reference mark has a position with coordinates, which become in the following picture coordinates mentioned in the display space of the image recognition system.

Generally the image recognition system however has it over drive axles, along those the substrate is moved. In particular the image recognition system is usually parallel to the substrate surface movable, so that also an XY positioning of the image recognition system is feasible. The position of the image recognition system is specified on the basis of coordinates in the control system of the image recognition system, which are called in the following camera coordinates.

The illustration of the Zielmarkierung marks a position, which consists in the coordinate system of the image recognition system of Kameraund the picture coordinates.

Substrate or another construction unit carrier is brought over a substrate transportation unit into the work area of the positioning tool, and/or the image recognition system.

The exact placement of the construction units can take place only if the coordinate systems of the originally independent system elements, i.e. of substrate transportation unit, are one on the other co-ordinated positioning tool and image recognition system.

This vote between the system elements is called in the following calibration.

With the help of the calibration deviations of the coordinates aimed at by the respective control system from the actual goal coordinates can become balanced. The deviations can be caused here by a multiplicity of causes, for example by Fertigungsund assembly inaccuracies of the system elements, by adjustment lacking of the system elements, due to Orthogonalität or scaling errors lacking of the drive axles, completely generally by not Linearitäten of the drive systems or by fluctuations Umgebungsbzw. System conditions (e.g. temperature).

Since when the assembling of semiconductor chips already deviations from some over to an insufficient electrical contacting and thus to the loss of function can lead, a calibration is compellingly necessary.

From the conditions of the technology calibration procedures are well-known, in which the positioning tool and the image recognition system are aligned separately from each other to a common reference. Typically the drive axles of the positioning tool and the drive axles of the image recognition system, as well as picture coordinate system of the image recognition system, are aligned to the substrate transportation unit, and/or the level, in which the surface of the substrate is. With these potash beer procedures the common adjustment establishes the desired vote of the relevant system elements on the basis the substrate transportation unit.

The image recognition system can be calibrated for example by means of an optical calibration plate. With the optical calibration plate it concerns typically a glass plate, which exhibits markings, e.g. in a certain raster with high accuracy arranged, well dissolvable with the image recognition system.

The optical calibration plate is positioned in place of a substrate on the substrate transportation unit, and the markings are seized with the image recognition system. The actual coordinates of the markings can be brought with the coordinates in the control system of the image recognition system in relationship, whereby a calibration of the image recognition system takes place concerning the substrate surface.

The calibration of the camera coordinates of the image recognition system can be void, if the image recognition system is firmly concerning the substrate or firmly concerning the positioning tool (pointed like for example to EP 1,437,933 a2) appropriate. In this case only one calibration of the picture coordinates is necessary, in order to be able to convert the picture coordinates of target marks into the actual physical dimensions.

The positioning tool can be calibrated for example by means of needle taps on a test substrate, which is likewise positioned in the substrate transportation unit. A needle is started into the Werkzeugaufnahme of the positioning tool strained, certain nominal tool tools and marked with the needle the test substrate.

The points of parting are examined afterwards for example with a microscope. The actual coordinates on the test substrate are measured and thus generally determined concerning the substrate surface. The actual coordinates can be brought then in purchase to the appropriate coordinates in the control system of the positioning tool, whereby the latter is calibrated concerning the substrate surface.

Alternatively points or lines can be seized also concerning the substrate transportation unit of defined situation by the positioning tool electromechanically with a tracer.

In addition well-known, with the positioning tool a test construction unit with markings is to be positioned on a glass plate, which is in place of a substrate in the substrate transportation unit and which likewise exhibits reference marks (pointed like for example to US 5,537,204 A). The distances between the markings and the reference marks serve for calibrating the positioning tool. They can be measured externally or with the image recognition system.

The well-known calibration methods have the disadvantage the fact that for the respective calibration particularly out-arranged test plates, test substrates or glass plates into which substrate transportation unit must be brought, whereby a reproducible positioning cannot be guaranteed. Such procedures require a usually complex re-equipment and can only before start-up or in fixed service distances take place.

All well-known methods require the use of additional teachings and aids, like test plates, test construction units, Nadelhalter, microscope, camera etc., which represents on the one hand even again sources for deviations, on the other hand a not insignificant cost cause. This is valid in particular for the used optical Kalibrieroder test plates, which must cover the complete work surface of the positioning tool and/or image recognition system. Finally these procedures permit a compensation, mostly thermally temporally more variably more conditionally, to deviations of the system components either not at all or only with an interruption of the production enterprise.

It is the task of the invention to present devices and procedures with which the disadvantages from the conditions of the technology are overcome, which avoid the calibration of a positioning tool concerning an external reference and which a precise and regarding costs and expenditure favorable calibration of a Positioniersystems permit. Beyond that it is the task of the invention to examine and/or renew the calibration of a positioning tool also during the production enterprise without conceptual additional expenditure and temporally variable deviations calculation to thus carry.

The tasks solved according to invention by a procedure for calibrating the XY positioning of a positioning tool with the characteristics in requirement 1.

The positioning tool is positionable over a work surface and takes thereby within a control system of the positioning tool tool coordinates. The image recognition system serves in an operating mode for seizing Zielmarkierungen on the work surface. The XY positioning of the positioning tool is calibrated concerning the coordinates of the image recognition system, by in a calibration mode positioning tool on a raster point one positions and the tool coordinates of the raster point are seized. Subsequently, a reference mark with the image recognition system, arranged in defined situation to the positioning tool, is seized, and the coordinates of the reference mark are determined concerning the image recognition system.

In order to become fair any place-dependent relationship between tool coordinates and coordinates in the image recognition system, the collection of tool coordinates and coordinates in the image recognition system in following steps at further raster points can be repeated. Due to nonlinear characteristics of the respective positioning a nonlinear connection between the measured coordinate tuples usually results.

Alternatively or additionally the collection can, also for example for the purpose of an averaging, to which same raster points are repeated. The measurement can take place at the same raster point several times one behind the other, over by means of local fluctuations, for example due to exposure effects, too memo in. That nominal resembles raster point can also several times by the drive systems be headed for. This can serve for it, over fluctuations due to reproductibility lacking of the drive systems too memo in.

Finally the tool coordinates and the coordinates in the image recognition system of the respective raster points are set with one another and/or adjusted in purchase.

By the alignment of data one understands a comparing of the volume of data, in order to seek out and transfer to further data points the connection between them. Usually the actually available connection between the data deviates from a modellgemässen connection, which is entnehmbar for example a construction design.

The image recognition system can be firmly over the work surface arranged. The coordinates of the reference mark in the image recognition system result then from the picture coordinates.

In a preferential and generally applicable execution of the procedure is image recognition system independently of the positioning tool over the work surface in particular in XY direction positionable and takes thereby in the control system of the image recognition system camera coordinates. The image recognition system is adjusted in each case after the positioning of the positioning tool to an appropriate raster point, and the coordinates of the reference mark in the image recognition system are determined by means of the camera coordinates and the picture coordinates of the reference mark.

The raster point coordinates in the control system of the positioning tool and the raster coordinates in the control system of the image recognition system can be assigned by the defined situation and the collection from always the same reference mark with the image recognition system to the reference mark to the positioning tool clearly to each other.

After the allocation and/or the alignment of the seized coordinates it is in reverse possible to bring the positioning tool accurately to a place which was specified before in the coordinates of the image recognition system, for example after seizing a Zielmarkierung on a substrate. The positioning tool is thus calibrated concerning the image recognition system.

Contrary to from the conditions the technology admitted procedures is also based the calibration according to invention thus not on a respective adjustment of the image recognition system and the positioning tool at a reference independent of them, but on a measurement of the XY positioning of the tool and thus concerning the image recognition system.

The procedure is preferentially fully automated accomplished. For example the succession of the raster points and the number of measurements of a raster point can be fixed first.

Using or an exchange of teachings, yardsticks, calibration substrates or - construction units is not necessary.

A succession of raster points can have been specified before the calibration. The data acquisition can take place at raster points, which are evenly over the entire work area of the positioning tool distributed. It can be intended by raster points also in certain selected ranges, at which typically placements are made and Zielmarkierung are arranged, a higher density.

The arrangement and density of the raster points can be freely configurable, so that the calibration procedure at the respective precision demand and applications, for example different substrate sizes, construction unit sizes and/or - would be away, are adaptable.

The calibration can be accomplished without large expenditure practically at any time. Temporally variable fluctuations, mainly thermally caused, can become balanced by so-called Rekalibrierungen. These can be accomplished in the production enterprise occasionally without considerable throughput A BUSEs.

With the Rekalibrierung can the same raster points as during the first calibration be headed for, it can other raster points be selected, or the raster points are adapted to the preferential placement ranges.

A Rekalibrierung can take place after certain before fixed time intervals. The time intervals can be adapted also to the enterprise of the machine. For example can during the warming-up phase, during which larger thermal changes are to be expected, or after an interruption of the production enterprise calibrations in shorter temporal distances than in following continuous operation take place.

The time intervals between the Rekalibrierungen can be specified also as a function of their results, i.e. adaptive. If large deviations between successive measurements are registered, then the next Rekalibrierung takes place in reverse after a shorter time interval and. Unnecessarily frequent and thus the production throughput disparaging Rekalibrierungsmessungen can be avoided in such a way.

By a current comparison of newly edifying data with earlier results show themselves temporally variable deviation and in the production enterprise consider.

Except the position of the reference mark also the adjustment of the reference mark can be seized, which can be localdependent zeitund/or. For each raster point in this way also angle information can be determined, which can play a role in the operating mode for the attitude of the adjustment of the positioning tool. In the operating mode not only the position of a Zielmarkierung, but also the adjustment are then queried and adjusted according to the position and the adjustment of the positioning tool.

The alignment of the seized coordinates can take place in different way. In a preferential variant a turn consulting is provided, with which coordinates from raster points in the control system of the image recognition system, i.e. camera coordinates, in purchase to the coordinates of the raster points in the control system the positioning tool, i.e. tool coordinates, and/or the coordinates of the reference mark at the respective raster points in the coordinate system of the image recognition system, i.e. picture coordinates, are placed. In addition the seized picture coordinates can be averaged over several directly one behind the other implemented measurements and/or be averaged the coordinates of the reference mark over several measurements at each raster point, for which the nominal coordinates of the raster point are headed for repetitive by the positioning tool.

Regarding time-dependent connections between the respective coordinates an adaptive calibration can be made, as the turn tables are stored as well as the times of the measurement and for an evaluation regarding time-dependent processes are used.

In addition into the turn table for each raster point the adjustment of the reference mark can be registered.

On the basis of the coordinates of a target mark in the image recognition system, i.e. on the basis of Kameraund picture coordinates of a target mark, the appropriate place in the control system of the positioning tool from the turn table can be read off. If the desired place does not have of the seized raster coordinates, then the allocation can take place via interpolation from neighbouring, seized raster coordinates.

In principle also a turn table can be provided, which corresponds to the positioning accuracy. In addition with interpolation from seized raster coordinates table entries are generated. The density of the raster points, which to the seized and computed raster coordinates belong, corresponds to the positioning accuracy. This can be adapted to the accuracy, with which the positioning tool and the image recognition system can be steered.

With the interpolation a linear or a not linear interpolation procedure can be used.

The same procedures can be applied also to angle information, which refers to the adjustment of the adjustment of Zielmarkierungen and positioning tool.

The tasks further according to invention solved by a procedure for calibrating a image recognition system-based Positioniersystems, in particular with a “Pick and Place” - tool for placing a construction unit on a substrate with the characteristics in the requirement 7.

This procedure covers the following steps. First a calibration of the picture coordinates of the image recognition system takes place concerning one reference level, i.e. one level, on which the image recognition system is optimized and leads thus to a sharp illustration of Zielmarkierungen. Here it concerns in particular one level, in which the surface of the substrate, also substrate level lies mentioned.

By the calibration of the picture coordinates here an allocation between points in the picture coordinate system and appropriate actual physical dimensions in the reference level is to be understood.

The XY positioning of the positioning tool is calibrated subsequently, concerning the image recognition system, in particular in accordance with one of the procedures described above.

Without a calibration of the positioning tool concerning a separate reference object again one does. The calibration of the positioning tool effected prefers over at least with the positioning tool connected and by the image recognition system a detectable reference mark.

The tasks further according to invention solved by a procedure for placing a construction unit on a substrate, with a positioning tool, in particular a “Pick and Place” - tool, and an image recognition system with the characteristics in requirement 8.

At the beginning a calibration of the picture coordinates of the image recognition system can take place concerning one reference level, in particular the substrate level.

The further procedure covers now the following process steps. First becomes in a first step (i) the XY positioning of the positioning tool concerning the image recognition system calibrates, in particular in accordance with one like procedures descriptive above, afterwards takes place in a second step (ii) the collection of an attached of a Zielmarkierung with the image recognition system, on the substrate, and the determination of the coordinates of the Zielmarkierung in the image recognition system, in a third step (iii) the determination of the tool coordinates of the positioning tool from the coordinates of the Zielmarkierung in the image recognition system using in the step (i) made calibration and in a fourth step (iv) the positioning of the positioning tool. The steps can be repeated starting from the first or second process step.

During the production flow if the procedure is repeated starting from the first step, then it concerns a Rekalibrierung.

The determination of the tool coordinates, thus the coordinates in the control system of the positioning tool, from the coordinates of the Zielmarkierung in the image recognition system, takes place due to the allocations won with the calibration.

During the procedure the positioning tool knows naturally further movements and actions would drive through, for example for the admission, as a check, for treatment and/or for the placing of a construction unit. The procedure can be terminated at any time.

In a favourable procedure a renewed calibration takes place after a firm, a configurable or an adaptive time interval or after a firm, a configurable or an adaptive number of positionings.

Adaptive it means in this connection that the number or the time interval as a function of results of earlier calibrations or external influences, for example by temperature gradients, is made.

The tasks further according to invention solved by a procedure for the Rekalibrieren with the Positonieren of a construction unit on a substrate with a positioning tool, in particular a “Pick and Place” - tool, and an image recognition system, which cover the following process steps. First takes place in a first step (i) a collection of a Zielmarkierung with the image recognition system and determination of the coordinates of the Zielmarkierung in the image recognition system, attached on the substrate. Become following in a second step (ii) the tool coordinates of the positioning tool (1) from the coordinates of the Zielmarkierung in the image recognition system determined. Afterwards takes place in step (iii) the positioning of the positioning tool.

One becomes subsequently, in defined situation the positioning tool in a step (iv) (1) arranged reference mark (14) with the image recognition system (2) seized, and in a step (v) the coordinates of the reference mark (14) are determined concerning the image recognition system. In a further step (vi) a comparison of the determined coordinates with the coordinates of the reference mark and/or the Positioniersystems which can be expected takes place. With the comparison it is determined whether between the determined and the coordinates which can be expected an agreement or a deviation exists. If a deviation is present, which goes beyond a given range of tolerance, for a following determination of the tool coordinates a correction is specified.

For the definition of the correction prefers the size and direction of the deviation at the basis put.

The coordinates of the reference mark which can be expected result from an earlier measuring step, for example on the basis of before coordinates determined with an appropriate Rekalibrierungsverfahren.

Alternatively can which can be expected the coordinates of the reference mark from in step (ii) specified tool tools and the defined situation of the reference mark for the tool to be intended. These are then compared with the determined coordinates.

If the deviation lies outside of a before specified range of tolerance, then it can be used for a correction with the next determination of the tool coordinates regarding a Zielmarkierung.

Alternatively or additionally can be judged from the coordinates of the reference mark determined with the image recognition system the coordinates of the tool back. A comparison can take place then between the headed for tool coordinates and the tool coordinates determined over the reference mark. Also in this case a deviation, which lies outside of a range of tolerance, for a correction can be used with a following determination of the tool coordinates.

The procedure can with the first step (i) to be continued.

In place of a complete calibration procedure it is only punctually examined whether the tool heads for the correct coordinates. The examination takes place at the places, which are given by the Zielmarkierungen.

With a series production substrates are in the following always equipped with the same or at least similar Zielmarkierungen, so that a complete calibration is not necessary concerning the entire substrate surface.

The Rekalibirierung concerning the image recognition system can be made alternatively as complete calibration, in particular in accordance with far procedures descriptive above.

Without a calibration before a first XY positioning can be done, if it can be accepted that the positioning leads with the first passing substrates to deviations between and determined coordinates which can be expected. These deviations decrease due to the corrections taking place via the Rekalibrierungen during the enterprise.

In one after step (iii) taking place step it can be tested additionally whether a Rekalibrierung is at all necessary. If this is not the case, the procedure can with the first step (i) to be continued. In the test unit can be for example queried, whether a certain number of positionings was made, after which a renewed Rekalibrierung to be made is, or whether the actual working time exceeded a certain time interval, after which a renewed Rekalibrierung is to be made. It can be also queried whether outside conditions changed, whether the quality of the positioning is sufficient good or whether substrates are to be equipped with Zielmarkierungen at other places than so far. A Rekalibrierung can be made also as a function of the results of earlier Rekalibriervorgänge.

Also in the process of this procedure the positioning tool knows naturally further movements and actions would drive through, for example for the admission, as a check, for treatment and/or for the placing of a construction unit.

The procedure can be terminated at any time.

The tasks solved in device-moderate regard according to invention by a device with a positioning tool, in particular a “Pick and Place” - tool for placing a construction unit on a substrate, and an image recognition system for seizing Zielmarkierungen located on a substrate.

The device exhibits at least a reference mark detectable of the image recognition system, which possesses a defined and/or firm position concerning the positioning tool at least for calibrating the XY positioning of the positioning tool.

For the determination of the local coordinates of the positioning tool in the image recognition system it is necessary that the reference mark seized by the image recognition system possesses a pre-determined situation concerning the positioning tool. The layer that at least a reference mark can be adjustable, it however only once is preferably furnished and remains firm during the entire enterprise concerning the positioning tool.

The coordinates of the reference mark and thus the positioning tool can be seized in a calibration mode concerning the positioning tool and the image recognition system and be set and/or adjusted with the coordinates of the image recognition system in purchase. In this way the positioning tool is calibrated concerning the image recognition system.

Without an independent calibration of the positioning tool, and/or a comparison with a yardstick, one does. Instead becomes the image recognition system, which determines the goal position of a construction unit in the work surface in the machine enterprise also, when measuring system uses for the calibration. The use of additional calibration plates and measuring instruments for the calibration of the positioning tool is avoided.

In a favourable execution form those is at least one reference mark on a carrier, in particular attached on a carrier connected firmly with the positioning tool. The reference mark is thus on a separate construction unit. The carrier can be brought into the optical field of the image recognition system, favourable-proves is however firmly connected with the positioning tool it, whereby the reference mark has one to the positioning tool defined situation.

The arrangement of the reference mark on a separate construction unit makes the retrofit of the Positioniersystems with a reference mark for calibrating for the XY positioning possible.

The carrier is preferentially so appropriate at the positioning tool that the reference mark is detectable in the entire work area of the image recognition system. It can be intended also several carriers, which define different situations of respective reference marks.

So that the reference mark can be still seized also at the edges of a substrate and/or the work surface, the mark should be not too far far away from the center of the positioning tool. Otherwise the reference mark at the edge of the substrate from the work area of the image recognition system, which is adapted usually to the work area of the positioning tool and the dimensions of the substrate, could do out-rich.

The carrier is preferentially in such a way laid out that the reference mark lies in the display space of the image recognition system, if this is centrically over the positioning tool. Otherwise an appropriate disalignment between the position of the image recognition system and the positioning tool must be considered during the calibration.

A precise positioning can be made only if the Zielmarkierung is illustrated sharply by the image recognition system. Image recognition systems for the collection of Zielmarkierungen on substrates are usually equipped with a firm focal length from there, which is adapted on the distance between the image recognition system and the substrate level. The calibration is, the more precisely the position of the reference mark by the image recognition system is the more exactly determined.

A preferential constructional execution results from there if those is arranged to the substrate at least one reference mark in one level in direct proximity. Thus is the reference mark close on one reference level, usually the substrate level, concerning those the focal length of the image recognition system is optimized, and can be illustrated sharply.

The reference mark can be attached preferentially in such a manner at the positioning tool that it is directly in one level above the construction unit transported by the positioning tool. Thus the reference mark can be advanced near to the substrate level, without colliding with too placing the construction unit.

Further advantages if necessary also independent of that managing described procedures can be achieved by a calibrating equipment for calibrating the XY positioning of a image recognition system-based positioning tool, in particular a “Pick and Place” - tool for placing a construction unit on a substrate, in particular in one like far device descriptive above.

The calibrating equipment exhibits at least an optical system, in particular consisting of at least one lens, which is connectable with a reference mark in such a manner that those is imagable in such a manner at least one reference mark with that at least optical system by the image recognition system that the illustration of those corresponds to a reference mark, which, in particular at same XY position, is appropriate for one level in one reference level, in particular in direct proximity of the substrate, in particular the substrate level, and is illustrated without the optical system.

With the positioning tool it can concern a “Pick and Place” - tool, in addition, around every other tools, for which an accurate XY positioning is necessary, like for example a positioning device for applying adhesives or adhesive films.

According to invention the image recognition system can be used not only for seizing a Zielmarkierung on the substrate, but also for illustrating and seizing a reference mark, which favourable-proves in a defined connection with the positioning tool stands. For a precise calibration procedure the reference mark must be illustrated sharply by the image recognition system like the Zielmarkierung.

The image recognition system is usually equipped with a firm focal length, which is adjusted for seizing the Zielmarkierungen to the distance to one reference level, usually the substrate level. If the reference mark cannot be attached due to structural conditions in the direct proximity of the substrate level, then the optical system of the calibrating equipment ensures for it that the reference mark is illustrated just as sharply nevertheless, as if would lie it in the reference level.

The optical system can be brought to the reference mark to the collection between the reference mark and the image recognition system.

Favourable way is connected the calibrating equipment with the positioning tool, stands in a firm spatial relationship with the tool and is always along-moved, if the positioning tool is induced to Arbeitsoder calibration purposes. An independent mounting plate and a separate drive for the calibrating equipment are not necessary.

The optical system can be firmly connected with the reference mark in a favourable execution, so that reference mark and optical system stand in a firm spatial relationship and no source of error results from a relative positioning of reference mark and optical system. Preferred reference mark and optical system form a structural unit. So can be a reference mark directly into the optical system in an integrated way, for example a lens of the optical system noted, glued on, scratched or etched in be.

The reference mark can be on a carrier and have a lateral distance of the coordinate of the tool which can be determined. The distance should not be to large however. On the one hand the danger exists that the carrier from the work area of the positioning tool stands out, if this is positioned at the edge of the intended work area, whereupon the reference mark is not if necessary no more in the work area of the image recognition system. On the other hand is subject carriers themselves thermal fluctuations, which are the larger, the are larger the expansion of the carrier. The reference mark and/or the calibration system are arranged favourable way from there on the positioning tool.

The positioning tool is mostly equipped with functionalities, which permit more than a pure XY positioning. For example the tool can be able to implement Winkelkorrekturen up to rotations of the construction unit around degrees as well as Tiltkorrekturen. In addition into the tool a heating can be integrated. Additional functionalities can lead to a substantial spatial expansion of the positioning tool. A carrier for a reference mark, which is in one level in direct proximity of the substrate, would have to be perhaps very long from there and for possibly no more in the display space of the image recognition system would be appropriate, if this is centrically arranged over the positioning tool.

Favourable way is a reference mark from there, preferentially centrically, on the positioning tool arranged, which is problem-free possible by means of the descriptive calibrating equipment and the optical system contained in it. This leads besides to a compact structural arrangement. Thermally conditioned changes of the relative situation of positioning tool and the reference mark can be prevented thus as far as possible.

During the calibration it predominantly concerns to set coordinates of a certain point of the positioning tool in purchase to the image recognition system. Suitably for it is for example a central point, by which the lifting axle of a “Pick and Place” - tool runs. On this is for example a nozzle with Vakuumbzw.

Pressure connection for taking up and/or setting from construction units off or a dosing needle for applying adhesive.

In a favourable execution the reference mark on an axle is arranged, which runs parallel to the Z-axis of the image recognition system and by a such central point of the positioning tool, in particular by the nozzle of the “Pick and Place” - tool.

The Z-axis of the picture recognition system runs usually perpendicularly to the substrate level.

The axle, which is defined by the central point and the reference mark, in particular a certain emphasis of the reference mark, coincides with the Z-axis of the image recognition system, if this is centrically arranged over the positioning tool. The reference mark represents the position of the central point in this case during a collection by the optical system.

A new calibration becomes frequent after a re-equipment of a Positioniersystems necessarily. The distances of the individual elements of the system can change thereby. In a favourable arrangement of the invention from there the illustration characteristics of the optical system are adjustable. Thus the optical system can be used for example for calibration with different reference marks in different distances to the reference level or be used for calibration with different positioning tools or different image recognition systems.

For example a spacer adjustment between the lens system and the reference mark can be intended, whereby for example an objective exhibits an external thread and an owner for a reference mark is equipped with an appropriate internal thread.

Favourable way is provided the reference mark with means for lighting or for shining. The reference mark does not have to be illuminated in this case for an optical collection by an external lighting. Beyond that the lighting is then independent of the positioning of the tool and the image recognition system.

Preferred the reference mark marks at least one point and/or at least an adjustment, which are present in particular in form of a cross. With the marking of one point the reference mark permits the determination of an excellent emphasis position, with the marking of an adjustment angle information.

On the basis the reference mark the bending regret can be examined directly, or the reference mark can be used for the calibration of a positioning tool with rotatorischem degree of freedom.

The invention is more near described in the following in remark examples on the basis of designs.

Fig show. 1 a schematic perspective opinion of a image recognition system-based Positioniersystems; Fig. 2 a schematic representation of a calibration procedure; Fig. 3 a schematic side view of a positioning tool; Fig. 4 a second schematic side view of a positioning tool with a device for calibrating; Fig. 5 a schematic perspective opinion of a device for calibrating.

Fig. 1 shows the schematic perspective opinion of a Positioniersystems 200, with an image recognition system 2 and a positioning tool 1, with which it itself around a “Pick and Place” - tool 1 to act can, with which a construction unit 3 on a substrate 4 is placed. The substrate 4 is brought with a substrate transportation unit 5 to the positioning tool 1 and the image recognition system 2.

The positioning tool 1 and the image recognition system 2 have independent not drive axles and control systems represented explicitly in the figure, which permit in each case a movement parallel to the level of the substrate to 4. For taking up and setting from construction units off 3 the positioning tool 1 has in addition a further drive axle, which permits a movement along the z-direction to 12. The lateral ranges of the positioning tool 1 and the image recognition system 2 are limited in each case by the expansion of the appropriate drive axles and determine the work area 27 of the Positioniersystems 200.

The control system of the positioning tool 1 permits its positioning at places with associated nominal tool coordinates (Xw, Yw). Accordingly the control system of the image recognition system 2 positions the image recognition system to places with associated camera coordinates (XK, YK).

On the substrate 4 one or more Zielmarkierungen 6 are arranged. The image recognition system 2 is moved in x-direction 7 and in y-direction 8 over the work surface 23, until at least one Zielmarkierung 6 lies in the display space 9 of the image recognition system 2. With the image recognition system 2 the coordinates of the Zielmarkierung 6 are determined and afterwards the positioning tool 1, across drive axles and along a x-direction and a y-direction 1 1, is likewise led to the appropriate XY position.

The positioning tool 1 is provided with a reference mark 14, which is attached on a carrier 19, which is firmly with the positioning tool 1 connected.

For taking up and/or placing of construction units knows the positioning tool 1 with suppresses and/or Luftoder positive pressure to be subjected. Beyond that the positioning tool 1 can exhibit further functionalities for rotating and a heating of construction units 3.

Fig. a schematic representation of the calibration procedure shows 2. The two parts of the representation show in each case the work area 27 of the Positioniersystems appropriate cutout of the work surface 23. In the top of the representation schematically raster points 24 are shown, which starts the positioning tool in the calibration mode.

Concerning the work surface a nominal regular and right-angled raster can exhibit quite distortions, for example due to Nichtlinearitäten of the drive axles of the positioning tool.

Exemplary the raster point Pj is emphasized, at which the positioning tool has the tool coordinates (Xwi, Ywi). At a further exemplary raster point Pj has the positioning tool the tool coordinates (Xwj, Ywj). The reference mark 14 has in each case concerning the positioning tool a firm position.

In the lower part of the representation the appropriate raster points are shown 24, to which the image recognition system is adjusted in each case, concerning the work surface 23. At the raster point with letter i the image recognition system has the camera coordinates (XKi, Ykì) - the reference mark 14 by the image recognition system is illustrated and has in the picture fig. 21 picture coordinates (XBì, YBì) - at each raster point 24 the tool coordinates, determines, become which camera coordinates and the picture coordinates of the point of reference, so that a tables of classification of the following kind develops.

Raster point tool coordinates camera coordinates picture coordinates (Xwi, Ywi) (XKi, Yki) (Xbi, Yb1) (Xwi” Ywi) (XKi, Yki) (XBi, YBi) j (Xwj) YWj) (XKj, vKj) (XBj, YBj) the layer of the reference mark 14 at a raster point i is on the one hand concerning the work surface 23 over the camera coordinates and picture coordinates, on the other hand concerning the positioning tool and its tool tools clearly fixed.

Accordingly can be closed after the collection of a Zielmarkierung not represented in the figure on the work surface 23 by the picture recognition system over appropriate Kameraund picture coordinates on the tool coordinates of the positioning tool. The coordinates can be inferred from the table either directly, or they can be interpolated out close lying entries.

The picture coordinates are presupposed as calibrated, are called here already it an allocation between points in the picture coordinate system and appropriate actual physical dimensions in the substrate level were accomplished. This calibration has to take place in front in a separate step.

Fig. a schematic side view of a positioning tool 1. the positioning tool 1 shows 3 is provided with a reference mark 14, which is attached on a carrier 19. The carrier 19 is in such a way laid out that the reference mark 14 lies in the display space 9 of the image recognition system 2, if this is centrically over the positioning tool 1. At the same time the reference mark 14 is arranged concerning the positioning tool 1 in one level 20, which is as scarcely as possible above the construction unit 3 transported by the positioning tool. The reference mark 14 leaves itself thus without collision with construction units placed already as near as possible to the substrate level 18 would drive near, on which the image recognition system 2 is optimized for seizing Zielmarkierungen.

The reference mark 14 has 1, in particular to one point PP on the positioning tool 1, which it is valid to position concerning the Zielmarkierung not shown in this figure, concerning the positioning tool a firm situation. The position of the reference mark concerning the picture fig. 21 of the image recognition system 2 is determined by the image recognition system 2.

If the image recognition system 2 cannot be shown, as in the figure, be arranged centrically over the positioning tool 1, in order to seize the reference mark 14, then the disalignment between image recognition system 2 and positioning tool 1 must be considered during the calibration.

If the positioning tool 1 at the edge of the work area is, then if necessary the reference mark 14 by the image recognition system 2 exceeding over it can be seized only then, if its work area is accordingly larger.

A disalignment between image recognition system 2 and positioning tool 1 can be avoided however, if as in Fig. , the positioning tool 1 is shown 4 on the basis a second schematic side view of a positioning tool 1 with a calibrating equipment 100 is equipped and the reference mark 14 on the positioning tool 1 is arranged.

The calibrating equipment 100 covers an optical system 101. The optical system 101, here consisting of a lens, the illustration of the reference mark modifies 14 by the image recognition system 2 in such a manner that the illustration of those corresponds to a reference mark 14, which is arranged in the substrate level 18 and is illustrated without optical system by the image recognition system 2 “sharply”.

Preferred the reference mark 14 on the Z-axis 103 of the optical system 101, which runs parallel to the Z-axis 17 of the image recognition system 2 and by a central point PP of the positioning tool 1, is in particular by the nozzle 22 of the “Pick and Place” - tool. In case shown and the preferential the Z-axis 17, 103 perpendicularly to the substrate level 18 runs. If the image recognition system 2 is centrically arranged over the positioning tool 1, then the reference mark 14 on the Z-axis 17 lies.

Fig. a schematic side view of a possible execution of a calibrating equipment 100 shows 5, whereby the optical system 101 is monolithically developed. The device 100 consists here alone of one been suitable formed lens body 104, at whose even lower surface 105 a reference mark 14, in this case in form of a cross, is attached. The reference mark 14 can be the lens body 104 up-painted, glued on, scratched or etched in.