Large-displacement electrostatic drive micro-gripper based on arc-shaped comb teeth

Which belongs to a field:

The invention relates to a large displacement of the comb teeth based on an electrostatic driving micro-holder, used for micro-operation system, micro-robot, micro assembly, micro-welding and the relocation of the micro-object operation, which belongs to the field of micro-electro-mechanical system.

Background Art:

Micro-electro-mechanical system (MEMS) can be made in batches, the micro-bodies, micro-sensors, micro-actuator and signal processing and control circuit, until the interface, communications and power is equal to a whole of the micro device or system. Micro-holder is a crucial part of the micro-electro-mechanical system, the world macroscopic and microscopic is connected to the basic tool. In precision instruments, bio-medical, aerospace and military field have broad application prospect. Micro-holder in accordance with the driving mode can be divided into the divided piezoelectric drive, thermal drive, electrostatic driving type.

Electrostatically driven micro-clamping device process compatible with the IC manufacturing process, it is easy to realize miniaturization and integrated, the speed of response is fast, convenient control, the structure is simple, and the like, so the widely applied to the field of micro-electro-mechanical system. See Figure 2, in the open number CN1410346A Patent document of "electrostatic actuating micro-holder" in, proposed using linear electrostatic comb driving the micro-holder, the comb of the clamping device, are fixed on the comb teeth are respectively exerting different drive voltage, under the driving of the electrostatic comb drives the micro-holding arm swing the opening and closing actions of the micro gripper. By adopting the linear electrostatic comb drive of the micro gripper to obtain adequate electrostatic driving force, with the fixed comb on the spacing between the comb teeth is relatively small, the larger the generated when the opening and closing angle and the displacement of the, with the fixed comb comb lateral pull will take place, resulting in failure of the micro-clamp. Thereby, by adopting the linear electrostatic comb drive to close and open micro gripper angle is small and the displacement is small and the like.

Content of the invention:

The purpose of this invention is to: directly overcoming the prior art linear electrostatic comb driving the micro-holder to close and open and the small angle of displacement is small, the invention provides a large displacement of the comb teeth based on an electrostatic driving micro-holder, the arc of the micro gripper movable comb teeth, are fixed on the comb teeth are respectively exerting different drive voltage, under the driving of the electrostatic comb drives the micro-holding arm swing the opening and closing actions of the micro gripper. The electrostatic comb drive of the micro-clamp can realize greater angle and the displacement of the opening and the closing of the.

The invention for solving the technical problems, the invention adopts the technical scheme is: see Figure 1, a large displacement of the comb teeth based on an electrostatic driving micro-holder, comprises a left clamping arm part 1 and the right clamping arm part 21 ; the left clamping arm part 1 including open driving the arc-shaped fixed comb assembly I   2, closed drive the arc-shaped fixed comb assembly I   3 and movable clamping arm assembly; the driving arc fixed comb assembly I   2 comprises a set of fixed on the beam I   5 I of the arc-shaped fixed comb teeth on   6, beam I   5 I two end is fixed in anchor point   4 is; the closed drive the arc-shaped fixed comb assembly I   3 comprises a group II is fixed on the beam   14 of the arc-shaped fixed comb teeth II on   12, beam II   14 is fixed to the anchor point II the two ends of the   13 upper; two groups of arc-shaped movable comb I   7 I are respectively and the arc-shaped fixed comb teeth   6 and the arc-shaped fixed comb II   12 form two groups of arc-shaped comb drive; said two groups of arc-shaped movable comb I   7 is located in the holding arm I   9 on, holding arm I   9 is fixed to the anchor point III one end of   8 the upper, the other end of the clamping arm is connected with one end of I   10;

The right clamping arm part 21 and left clamping arm part 1 has a symmetrical structure, the right clamping arm part 21 includes opening II driving the arc-shaped fixed comb assembly   22, closed drive the arc-shaped fixed comb assembly II   23 and movable clamping arm assembly; the driving arc fixed comb assembly II   22 includes a set of fixed on the beam III   25 on III of the arc-shaped fixed comb teeth   26, beam III   25 IV two end is fixed in anchor point   24 on; the closed drive the arc-shaped fixed comb assembly II   23 comprises a group IV is fixed on the beam   34 on the IV of the arc-shaped fixed comb assembly   32, beam IV   34 is fixed to the anchor point V the two ends   33 on; two groups of arc-shaped movable comb II   27 III respectively connected with the arc-shaped fixed comb teeth   26 and the arc-shaped fixed comb IV   32 form two groups of arc-shaped comb drive; said two groups of arc-shaped movable comb II   27 is located in the holding arm II   29 is, the holding arm II   29 is fixed to the anchor point VI one end of   28 the upper, the other end is connected with the holding arm II   30;

The left clamping arm part 1 I on the end of the holding arm   10 and the right clamping arm part 21 II of the clamping arm end   30 of one of the clamping arms can be opened and closed.

[...] holder and to the contact area between the small object, II clamping arm end   30 I and clamping arm end   10 are in opposite directions to the inner side.

The beneficial effect of the invention is:in the working process, micro-holder produced when the larger opening and closing angle and the displacement of the, arc-shaped movable comb teeth and the fixed comb teeth produce circumferential relative movement between the, comb spacing almost does not change, the lateral pull is not easy to occur. Therefore, the electrostatic comb drive of the micro-clamp can realize greater angle and the displacement of the opening and the closing of the.

With the embodiment of the Figures and further explanation of the present invention.

Description of drawings (Figure the letter references in the statement)

Figure 1 of the present invention arc-based large displacement of the comb teeth of an electrostatic driving micro-holder structure schematic;

Figure 2 is the electrostatic actuation in the prior art micro-holder structure schematic;

In the Figure, 1-the left clamping arm member, 2-open driving the arc-shaped fixed comb assembly I, 3-closed driving the arc-shaped fixed comb assembly I, 4 the anchor point I, 5-beam I, 6 I arc-shaped fixed comb, 7-arc-shaped movable comb I, 8-anchor point III, 9-through the clamping arms, 10-clamping arm end I, 12-the arc-shaped fixed comb teeth II, 13-the anchor point II; 14-beam II, 21-the right clamping arm member, 22-opening II driving the arc-shaped fixed comb assembly   22, 23-closed driving the arc-shaped fixed comb assembly II, 24-the anchor point IV; 25-beam III, 26-the arc-shaped fixed comb teeth III, 27-arc-shaped movable comb teeth II, 28-anchor point VI, 29-holding arm II, 30-clamping arm end II, 32 the arc-shaped fixed comb assembly IV, 33-anchor point V, 34-beam IV.

Mode of execution:

Refer to Figure 1, the embodiment based on arc in the large displacement of the comb teeth of an electrostatic driving micro-holder, comprises a left clamping arm part 1 and the right clamping arm part 21 ; the left clamping arm part 1 including open driving the arc-shaped fixed comb assembly I   2, closed drive the arc-shaped fixed comb assembly I   3 and movable clamping arm assembly; the driving arc fixed comb assembly I   2 comprises a set of fixed on the beam I   5 I of the arc-shaped fixed comb teeth on   6, beam I   5 I two end is fixed in anchor point   4 is; the closed drive the arc-shaped fixed comb assembly I   3 comprises a group II is fixed on the beam   14 of the arc-shaped fixed comb teeth II on   12, beam II   14 is fixed to the anchor point II the two ends of the   13 upper; two groups of arc-shaped movable comb I   7 I are respectively and the arc-shaped fixed comb teeth   6 and the arc-shaped fixed comb II   12 form two groups of arc-shaped comb drive; said two groups of arc-shaped movable comb I   7 is located in the holding arm I   9 on, holding arm I   9 is fixed to the anchor point III one end of   8 the upper, the other end of the clamping arm is connected with one end of I   10;

The right clamping arm part 21 and left clamping arm part 1 has a symmetrical structure, the right clamping arm part 21 includes opening II driving the arc-shaped fixed comb assembly   22, closed drive the arc-shaped fixed comb assembly II   23 and movable clamping arm assembly; the driving arc fixed comb assembly II   22 includes a set of fixed on the beam III   25 on III of the arc-shaped fixed comb teeth   26, beam III   25 IV two end is fixed in anchor point   24 on: the closed drive the arc-shaped fixed comb assembly II   23 comprises a group IV is fixed on the beam   34 on the IV of the arc-shaped fixed comb assembly   32, beam IV   34 is fixed to the anchor point V the two ends   33 on; two groups of arc-shaped movable comb II   27 III respectively connected with the arc-shaped fixed comb teeth   26 and the arc-shaped fixed comb IV   32 form two groups of arc-shaped comb drive; said two groups of arc-shaped movable comb II   27 is located in the holding arm II   29 is, the holding arm II   29 is fixed to the anchor point VI one end of   28 the upper, the other end is connected with the holding arm II   30;

The left clamping arm part 1 I on the end of the holding arm   10 and the right clamping arm part 21 II of the clamping arm end   30 of one of the clamping arms can be opened and closed.

[...] holder and to the contact area between the small object, II clamping arm end   30 I and clamping arm end   10 are in opposite directions to the inner side.

When the arc-shaped-based large displacement of the comb teeth is electrostatically driven micro-holder, in accordance with the clamping arm member form of the opening and closing movement, can be divided into : (1) the left clamping arm part 1 is closed, the right clamping arm part 21 closed ; (2) the left clamping arm part 1 open, right clamping arm members 21 open ; (3) the left clamping arm part 1 open, right clamping arm part 21 closed ; (4) the left clamping arm part 1 is closed, the right clamping arm members 21 open.

(1) the left clamping arm part 1 is closed, the right clamping arm part 21 closed: the anchor point I   4 and anchor point III   8 ground, the anchor point II 13 applied voltage, movable clamping arm assembly I in the arc-shaped movable comb teeth   7 II and arc-shaped movable comb teeth   12 under the effect of the electrostatic driving force, the left clamping arm part 1 inwardly closed; the anchor point IV   24 and anchor point VI   28 ground, the anchor point V   33 applied voltage, movable clamping arm assembly II in the arc-shaped movable comb teeth   27 and arc-shaped movable comb IV   32 under the action of the electrostatic driving force, the right clamping arm members 21 inwardly closed.

(2) left clamping arm part 1 open, right clamping arm members 21 open: the anchor point II   13 and anchor point III   8 ground, the anchor point I   4 applied voltage, movable clamping arm assembly I in the arc-shaped movable comb teeth   7 and the arc-shaped fixed comb teeth I   6 under the action of the electrostatic driving force, the left clamping arm part 1 flared outwardly; V the anchor points   33 and anchor point VI   28 ground, the anchor point IV   24 applied voltage, movable clamping arm assembly II in the arc-shaped movable comb teeth   27 and the arc-shaped fixed comb teeth III   26 under the action of the electrostatic driving force, the right clamping arm members 21 open to the outside.

(3) the left clamping arm part 1 open, right clamping arm part 21 closed: the anchor point II   13 and anchor point III   8 ground, the anchor point I   4 applied voltage, movable clamping arm assembly I in the arc-shaped movable comb teeth   7 and the arc-shaped fixed comb teeth I   6 under the action of the electrostatic driving force, the left clamping arm part 1 to the outer opening; IV the anchor point   24 and anchor point VI   28 ground, the anchor point V   33 applied voltage, movable clamping arm assembly II in the arc-shaped movable comb teeth   27 and arc-shaped movable comb IV   32 under the action of the electrostatic driving force, the right clamping arm members 21 inwardly closed.

(4) the left clamping arm part 1 is closed, the right clamping arm members 21 open: the anchor point I   4 and anchor point III   8 ground, the anchor point II 13 applied voltage, movable clamping arm assembly I in the arc-shaped movable comb teeth   7 II and arc-shaped movable comb teeth   12 under the effect of the electrostatic driving force, the left clamping arm part 1 inwardly closed; V the anchor points   33 and anchor point VI   28 ground, the anchor point IV   24 applied voltage, movable clamping arm assembly II in the arc-shaped movable comb teeth   27 and the arc-shaped fixed comb teeth III   26 under the action of the electrostatic driving force, the right clamping arm members 21 open to the outside.

Furthermore, the device can independently control the one of the clamping arms of the opening and closing movement of the part, another clamping arm member remains stationary.

In the working process, micro-holder produced when the larger opening and closing angle and the displacement of the, arc-shaped movable comb teeth and the fixed comb teeth produce circumferential relative movement between the, comb spacing almost does not change, the lateral pull is not easy to occur. Therefore, the electrostatic comb drive of the micro-clamp can realize greater angle and the displacement of the opening and the closing of the.