Macros model establishing method of micro-electromechanical system

The method comprises: creating the physical model of MEMS system; dividing the physical model of the MEMS system into the simple parts and complex parts; using analytic method to create the macro model of simple parts; using the numerical method to create the macro model of the complex parts; interconnecting the topology relation between the macro model of each simple part and the macro model of each complex part to create the isomerous macro model.

Silicon micro resonance type pressure sensor and its manufacture method

The invention provides a new silicon micro resonance pressure sensor and the production method. It can get over the lack of stress collection in the silicon island foot and the shape size limit of resonance structure. The invention uses the four symmetry square silicon islands which is set on the diagonal of square pressure sensing film. The resonance structure is set on the film surface through the square silicon island. The resonance structure is made up of four supporting girders, four oscillating vanes and a central connecting end. The four supporting girders and four oscillating vanes are set around of the central connecting end; the other end of four supporting girders is set on top surface of four square silicon islands and four oscillating vanes is on the suspending state. The invention avoids the stress collection of silicon island foot in the sensing film deform process and decreases the limit of the resonance structure, but increase the structure area, improves the detection ...

Capacitive micro machinery gyroscope

Reusable parameter module model building method for space continuous deformation MEMS

Optical fiber F-P cavity MEMS sensor with dynamically adjustable performance and preparation method thereof

The invention discloses an optical fiber F-P cavity MEMS sensor with dynamically adjustable performance and a preparation method thereof, and belongs to the technical field of optical fiber sensors, the optical fiber F-P cavity MEMS sensor comprises a sapphire sensitive structure, a sapphire substrate structure, an optical fiber sleeve, a guided-mode resonance grating, an F-P cavity, an optical fiber and a high refractive index dielectric layer, according to the invention, the guided-mode resonance grating is introduced to the surface of the sapphire to optimize the reflection spectrum of the sapphire interface, so that the spectrum fineness of the F-P interference tool can be designed and regulated according to different demodulation methods to regulate the performance of the sensor. Compared with a traditional mode of plating a metal reflecting film with fixed reflectivity on the surface of the sensitive structure of the F-P cavity sensor, the method has the advantages that the interface ...

Method for modeling variable section beam in micro-electronic-mechanical system (MEMS) level design

The invention discloses a method for modeling a variable section beam in micro-electronic-mechanical system (MEMS) level design, which belongs to the field of design of MEMSs. The method comprises thefollowing main processes: firstly, establishing a local coordinate system of a variable section beam; then respectively deducting a rigidity matrix, a damping matrix and a quality matrix of the variable section beam in the local coordinate system according to a structural mechanics and structural matrix analyzing theory and establishing a second order kinetic equation of the variable section beamby the matrixes; and finally coding the second order kinetic equation by a hardware description language and realizing the modeling of a parameterized system level assembly of the variable section beam. The method for modeling the variable section beam of which the width is linearly changed along with the length direction in the system level solves the problem that the system level simulation design ...

MEMS design optimizing method

The invention discloses a novel MEMS design and optimization method and belongs to the technology field of MEMS CAD. The method comprises the following steps: constructing a system model of a new MEMSdevice based on a cell library under the condition that the MEMS device structure, the performance index and the optimized variable thereof to be tested are given; conducting a computer simulation experiment for the system model on the basis of the experimental design; conducting the analysis of regression for simulation experiment results to build the functional relationship between the performance index and the optimized variable; writing mathematical expression of an optimized target and constraint conditions; and optimizing by selecting optimization algorithm and obtaining the optimized result. Compared with the MEME design and optimization method based on the cell library and the genetic algorithm, the method maintains the advantage of realizing quick modeling for the MEMS device, and ...

Micro piezoresistive device for measuring wall shear stress and manufacturing method thereof

The invention discloses a micro piezoresistive device capable of carrying out non-destructive measurement on wall shear stress of a flow field and a manufacturing method thereof, belonging to the technical field of sensors. The device comprises a sensing part 1, an elastic deformation part 2, a base 6, as well as a piezoresistor, a wire and a pad which are arranged on the elastic deformation part2; wherein the device is arranged and fixed on a structure 7 to be measured by virtue of the base 6, and the upper surface of the sensing part 1 flushes with the surface to be measured of the structure 7 to be measured. The micro piezoresistive device for measuring wall shear stress provided by the invention can achieve better comprehensive performances: (1) high sensitivity is realized, and the bending stiffness of the elastic deformation part 2 can be greatly reduced so that the device achieves higher measuring sensitivity; (2) manufacturing steps and process are simple; only a conventionalmicro-processing ...

Replication transfer preparation method of flexible concave angle hydrophobic microstructure array

The invention discloses a replica transfer preparation method of a flexible concave angle hydrophobic microstructure array, and belongs to the field of micro-nano manufacturing. According to the method, on the basis that a silicon template of a concave angle microstructure array is obtained through processing, PDMS mixed liquid is poured, then redundant PDMS on the surface is scraped off in a scraping mode of a soft knife and a hard mold, meanwhile, a modified PET transfer layer is attached to the silicon template and then subjected to high-temperature curing, and then microstructure layer demolding is conducted. After the substrate layer is prepared, the microstructure layer is transferred. According to the method, deformation control of the flexible microstructure is completed based on the'soft knife hard die ', the microstructure is successfully replicated on the premise that the removal efficiency of the redundant PDMS layer on the surface of the silicon wafer is guaranteed and the ...

Closed-loop driving circuit for micromechanical resonance structure

The invention discloses a closed-loop driving circuit for a micromechanical resonance structure, which is an alternating-current automatic gain control closed-loop self-excited driving circuit mainly comprising an amplitude limiting circuit 7, a band-pass filter 8, an automatic gain control loop 9 and a phase compensating circuit 12. The automatic gain control loop 9 adjusts the gain of a loop and the phase compensating circuit 12 adjusts the phase of the loop so as to separate the gain adjustment and the phase adjustment, avoid the coupling influence between the gain adjustment and the phaseadjustment and facilitate the debugging of the circuit; and the introduction of the amplitude limiting circuit 7 and the band-pass filter 8 enlarges the linear working range of the circuit, even if an I/V converter 5 detects high output signals, the signals are limited in a certain amplitude through the amplitude limiting circuit 7, and the noise signals are filtered through the band-pass filter 8 so ...

Micro-laser gyro based on photoelectric effect

The invention discloses a micro-laser gyro based on a photoelectric effect, belonging to the field of guide or control devices utilizing a Coriolis effect. The micro-laser gyro comprises a structural layer, a substrate for supporting the structural layer, a light source and a photoresistor, wherein the structural layer and the substrate are connected together through micro assembly and generate relative motions through outside angular speed input, and a column on the structural layer rotates around a central upright post of the substrate to calculate the times that the photoresistor receives monochromatic light signals coming from the light source, thereby obtaining the angular displacement of a moving object. The micro-laser gyro has the advantages that (1) the angular displacement of the moving object is directly measured so as to avoid integration and be beneficial to the improvement of system precision; (2) because the structure does not need to be in a vibration state all the time, ...

Method, device and equipment for detecting wing type icing area in icing wind tunnel and storage medium

The invention relates to the technical field of icing detection, in particular to a method, device and equipment for detecting an airfoil icing area in an icing wind tunnel and a storage medium. The method comprises the following steps: firstly, shooting an experimental airfoil profile at an icing wind tunnel test section, obtaining an original image, and processing the original image to obtain training and test image samples in an icing detection model training data set; using the training data set to train a semantic segmentation network for icing area detection; starting an icing wind tunnel, obtaining an icing image of the airfoil in a test section in real time, inputting the icing image into the trained icing region detection model after processing, outputting position coordinates of a plurality of icing regions in a target image, finally judging an actual icing region, obtaining the icing regions on the airfoil, and calculating the sum of the areas of the icing regions on the airfoil ...

Core kernel modeling method for micro inertial sensor device and core kernel base

Order reduction modeling method of micro electro-mechanical system containing considerable input ports

The invention discloses a deflation modeling method of a micro-electronic-mechanical-system (MEMS) which contains a plurality of input ports. A three-dimension solid model of the structure is established according to the parameters of structure design, modal analysis is carried out by using a finite element method, the quality and the rigidity matrix of the structure is extracted from analysis results, and a second order dynamics action equation of the structure is converted into a first order state equation after being established; an input matrix B is uniformly splitted into k blocks by rows to obtain the state equation of the structure after splitting; deflation is carried out to the application subblock of the (i)th sub-system to obtain the macro model state equation of the (i)th sub-system; the integral macro model of the original system can be obtained after the macro models of all the sub-systems are superposed according to output. The method speeds up the MEMS system level modeling ...

Three-axis high-temperature vibration sensor based on optical fiber F-P cavity and preparation method thereof

The invention discloses a three-axis high-temperature vibration sensor based on an optical fiber F-P cavity and a preparation method of the three-axis high-temperature vibration sensor, and belongs to the technical field of micro electro mechanical systems. The three-axis high-temperature vibration sensor based on the optical fiber F-P cavity specifically comprises top-layer silicon and substrate silicon, a three-axis vibration sensitive structure is arranged between the top-layer silicon and the substrate silicon, three clamped beam-mass block systems are integrated on an outer shell to form the three-axis vibration sensitive structure, each clamped beam-mass block system is in central symmetry, and the three clamped beam-mass block systems are integrated on the outer shell to form the three-axis vibration sensitive structure. An x-axis measuring optical fiber and a y-axis measuring optical fiber are correspondingly arranged on the front side and the left side of the three-axis vibration ...

SOI mini-type Pirani gage and manufacturing method thereof

The invention discloses an SOI mini-type Pirani gage, and belongs to the field of vacuum degree detecting of a micro electro mechanical system packaging. A silicon structure of the Pirani gage is manufactured on a device layer 8, and mainly comprises a heating structure and a heat dissipating structure. The heating structure is composed of two heating bodies 5 periodically bending in a trapezoid mode. The heat dissipating structure is composed of two symmetrical side heat dissipating body comb teeth 2 on side faces and a middle heat dissipating body comb tooth 3, and the two side heat dissipating body comb teeth 2 and the middle heat dissipating comb tooth 3 are respectively meshed with the heating bodies 5. The SOI mini-type Pirani gage has the advantages that the heating bodies and anchoring points have four connecting points, and compared with a heating body with the same length, the mechanical strength of the SOI mini-type Pirani gage is enhanced; the technologies such as bonding and ...

High precision silicon micro resonant pressure transducer interface circuit

The invention relates to a high precision silicon micro resonant pressure transducer interface circuit and belongs to the micro mechanical sensor field. High-frequency modulation signals u(t) which are outputted by trans-impedance amplifiers 6 of the circuit comprise useful signals, low frequency coupling signals are eliminated through a high pass filter 7, output signals v (t) which are acquired through a demodulator 8, a low pass filter 9 and an instrument amplifier 10 only comprise low frequency useful signals with a high signal-to-noise ratio; high frequency carrier waves vi are added to a micro resonator 4 by a carrier wave generator 1, driving signals vd which are simultaneously generated by a driving signal generator 2 are added to a resonator driving end 3 to drive the micro resonator 4 to vibrate, low frequency difference useful signals generated through vibration are modulated to high frequency signals, two difference alternation current signals outputted at detection ends 5 are ...

Electromagnetism-static electricity hybrid driven two-dimensional micro scanning mirror and manufacturing method

The invention discloses an electromagnetism-static electricity hybrid driven two-dimensional micro scanning mirror and a manufacturing method, and belongs to the field of micro optical electronic mechanical system (MOEMS) devices. The electromagnetism-static electricity hybrid driven two-dimensional micro scanning mirror is mainly composed of a center mirror surface 1, a supporting mirror surface outer frame 2, a static electricity driving assembly 3 and an electromagnetism driving assembly 4. Electromagnetic drive based on lorentz force is adopted for the center mirror face, and static electricity drive based on perpendicular comb teeth is adopted for the supporting mirror surface outer frame. The electromagnetism-static electricity hybrid driven two-dimensional micro scanning mirror has the advantages that a coil for electromagnetic drive can be obtained through etching, stripping, electroplating and other technologies, and is compatible with the IC technology; static electricity drive ...

Silicon resonation type pressure sensor based on synovial membrane differential structure and manufacturing method thereof

The invention discloses a silicon resonation type pressure sensor based on a synovial membrane differential structure and a manufacturing method thereof, belonging to the technical field of sensors. The silicon resonation type pressure sensor mainly comprises a resonator 2, a strut 1, a pressure sensing membrane 3 and a frame 4, wherein the upper part of the frame 4 is connected with four sides of the pressure sensing membrane 3, and the lower part is provided with a cavity at the place corresponding to the pressure sensing membrane 3 so that tested air gets into contact with the pressure sensing membrane 3 after passing through the cavity. The strut 1 is arranged on the upper surface of the pressure sensing membrane 3, while the resonator 2 is suspended on the upper surface of the pressure sensing membrane 3 through the strut 1and the frame 4. The silicon resonation type pressure sensor simplifies the manufacturing process and the layout and reduces the influence of air leakage during ...

SiC Schottky junction type Alpha radioactive isotope battery and manufacturing method thereof

The invention discloses a SiC Schottky junction type Alpha radioactive isotope battery and a manufacturing method thereof, belonging to the fields of micro energy source, semiconductor and nuclear physics. The battery sequentially comprises an Alpha nuclide 6, an upper electrode 5, a Schottky metal layer 4, a SiO2 passivation layer 3, an n type SiC layer 2, an n type SiC layer 1, an ohmic contact layer 7 and a lower electrode 8; wherein the n type SiC layer 2 and the Schottky metal layer 4 form a Schottky junction, the SiO2 passivation layer 3 is arranged in periphery ring-shaped region of the Schottky metal layer 4 above the n type SiC layer 2, and the Alpha nuclide 6 is Alpha radioactive isotope. The battery disclosed by the invention utilizes SiC semiconductor material with strong radiation resistance on one hand, so that the efficiency of the Alpha radioactive isotope battery is higher and the service life thereof is longer; on the other hand Schottky structure is used, neither ion ...

Temperature parameterized reduced-order modeling method for micro-electromechanical system

The invention discloses a temperature parameterized reduced-order modeling method for a micro-electromechanical system, and belongs to the field of micro-electromechanical system design and model order reduction. The method comprises the following steps: extracting quality, rigidity and temperature stress rigidity matrixes, and establishing a two-order dynamical equation related to temperature; constructing an orthogonal mapping matrix V; and projecting the primary two-order dynamical equation to a subspace in which the orthogonal mapping matrix V is positioned so as to acquire a temperature parameterized low-order model. The reduced-order method can greatly reduce the freedom scale of the primary model through an order reduction algorithm so as to improve the system-level modeling and simulating speed based on the reduced-order model. Simultaneously, by adopting the matrix matching principle, transfer functions of the reduced-order model and the primary model can be approximate better ...

Gyroscope virtual implementation method

The invention relates to a gyroscopic virtual implement method, in particular to a virtual implement method which can be suitable for the improvement of the micro mechanical gyro precision under a dynamic environment. A plurality of micro mechanical gyros are applied to form a gyro arrangement, redundancy detection is performed to the same angular speed. In order to overcome the problem in the prior invention that the input angular speed is difficult to be tracked, a differential processing is performed to the detection values; and the effect on unknown actual angular speed to a measuring value is eliminated. The method of an indirect estimation is adopted to perform the estimation to micro mechanical gyro speed rate random walk to correct the gyro output, thereby avoiding a problem that actual angular speed is directly taken as a status to be difficult to obtain a random walk driving noise variance. Each equation parameter is discretized, a disperse-type Kalman filter equation is obtained ...

Single mass plate triaxial micro-mechanical accelerometer

The invention discloses a simple mass flat triaxiality tiny machine accelerometer, the mass flat is supported on the fundus by four groups of inner girder and four groups of outer girder, and four groups of comb is protruded on four directions, which cross to four groups of terminal comb on the fundusby to produce four couples of comb capacitor---capacitor C40a, capacitor C40b, capacitor C42a, and capacitor C42b, capacitor C42b and the capacitor C42b is equal to capacitor Cx which is along X direction, the capacitor C40a and the capacitor C40b are equal to capacitor Cy which is along to direction Y, its character is: it also includes a junior board which is under the mass flat, and composes a clinograph capacitor Cz with the mass flat, and the Cz, the Cx and the Cy compose the triaxiality accelerometer. The four groups of comb on the mass flat and the four groups of comb on the funduusby and the junior board are machining on one chip. The excellence of the invention is a mass flat can get ...

Silicon-based MEMS array propeller and preparation method thereof

The invention discloses a silicon-based MEMS array propeller and a preparation method thereof, and belongs to the technical field of micro propulsion. The propeller mainly comprises a nozzle array part and a circuit part respectively positioned on the upper and lower surfaces of a silicon slice, wherein the nozzle array consists of cavity arrays inwards recessed in the upper surface of the silicon slice; all the nozzles are filled with oil fuel; the circuit part consists of ignition resistor 2 arrays formed on the lower surface of the silicon slice through sputtering, ignition leads 3 and welding pads 4; and all ignition resistors 2 are corresponding to all the nozzles 1 in position. The invention further discloses a non-bonding process for preparing the silicon-based MEMS array propeller. The silicon-based MEMS array propeller has the following benefits: the nozzles and the ignition resistors are integrated on the upper and lower surfaces of a silicon material so that such procedures as ...

Acceleration measurement apparatus and method by using optical grating detection technology

The invention discloses a novel device and a novel method for utilizing optical grating detection technology to measure acceleration, and belongs to the field of sensing detection. The device senses the acceleration through a mass block 1, wherein one end of the mass block 1 is connected to an anchor point 4 through an elastic beam 7, while the other end is connected with a movable grating strip 2 which forms an optical grating pair with a fixed grating strip 5. During work, incident light 6 irradiates on the optical grating pair, and the emergent light 3 of the incident light 6 is split intodifferent diffraction levels. Under the action of the acceleration, the mass block 1 drives the movable grating strip 2 to generate certain displacement x so as to change the relative position between the movable grating strip 2 and the fixed grating strip 5, and cause the light intensity on different diffraction levels in the emergent light 3 to change correspondingly. Therefore, aiming at specific ...

Digital image detection and analysis system for micro mechanical structure

The invention relates to a micromachine construction digital picture detection and analysis system, which belongs to optical electromechanical integration field.The characteristics of this system are as follows: light source supplies brightness needed by the detected object; CCD lens ingests visual signal of the detected object picture information through microscope 2; picture gathering card transforming digital signal D/A; then picture digital signal entering detection and analysis system. The said detection and analysis system comprises three-dimensional physical dimension measurement modular, surface defects measurement modular and surface roughness, skewness degree and flattening measurement modular.

Static micro-actuator with limiting locking function

The invention discloses a static micro-actuator with a limiting locking function, belonging to the field of MEMSs (micro electro mechanical systems). The micro-actuator is provided with four limiting locking assemblies distributed at two sides of a drive assembly; the drive assembly is connected with an anchor point by an elastic supporting beam; the limiting locking assemblies are connected with the anchor point by the elastic supporting beam; and limiting locking ratchets are engaged with drive ratchets at the two sides of the drive assembly so as to realize the limiting locking function of the static micro-actuator. The static micro-actuator with the limiting locking function overcomes the defect that a static actuator does not have the limiting locking function and can not work in a blackout offline state in the prior art; the static micro-actuator with the limiting locking function can realize limiting locking when preset output displacement is reached, thus the static micro-actuator ...

Temperature parameterized reduced-order modeling method for micro-electromechanical system

The invention discloses a temperature parameterized reduced-order modeling method for a micro-electromechanical system, and belongs to the field of micro-electromechanical system design and model order reduction. The method comprises the following steps: extracting quality, rigidity and temperature stress rigidity matrixes, and establishing a two-order dynamical equation related to temperature; constructing an orthogonal mapping matrix V; and projecting the primary two-order dynamical equation to a subspace in which the orthogonal mapping matrix V is positioned so as to acquire a temperature parameterized low-order model. The reduced-order method can greatly reduce the freedom scale of the primary model through an order reduction algorithm so as to improve the system-level modeling and simulating speed based on the reduced-order model. Simultaneously, by adopting the matrix matching principle, transfer functions of the reduced-order model and the primary model can be approximate betterso ...

Ridge-imitating graded resistance-reducing double-layer micro-rib structure

The invention discloses a dune-like graded resistance reduction double-layer micro-rib structure, and relates to the technical field of hydrodynamic surface resistance reduction. The invention provides a ridging-imitating graded resistance-reducing double-layer micro-rib structure. The ridging-imitating graded resistance-reducing double-layer micro-rib structure comprises a primary resistance-reducing micro-rib structure and a secondary resistance-reducing micro-rib structure which are sequentially arranged in an array mode. The primary resistance reduction micro-rib structures are arranged on the material substrate layer, the secondary resistance reduction micro-rib structures are arranged among the primary resistance reduction micro-rib structures, and a pair of secondary resistance reduction micro-rib structures is arranged between each pair of primary resistance reduction micro-rib structures. The size of the turbulence boundary layer inner vortex structure changes continuously, many ...

Optical fiber F-P cavity high-temperature MEMS pressure sensor of E-type membrane structure and manufacturing method

The invention discloses an optical fiber F-P cavity high-temperature MEMS pressure sensor of an E-type membrane structure and a manufacturing method thereof, and belongs to the technical field of sensors. The high-temperature MEMS pressure sensor is made of silicon carbide or sapphire materials and mainly comprises lightening holes, a boss, a pressure sensitive diaphragm, an upper frame, a middle layer, a substrate layer and an F-P air cavity. Wherein the edge of the pressure-sensitive diaphragm is connected with the upper frame, the upper surface of the center of the pressure-sensitive diaphragm is connected with the boss, the pressure-sensitive diaphragm, the upper frame and the boss jointly form an E-shaped diaphragm pressure-sensitive structure, and lightening holes are formed in the upper surface of the boss. Compared with a traditional flat film structure, the sensor is good in linearity, high in precision, large in measuring range design range, good in optical reflection surface ...

Sealed air flow channel testing device for resistance reduction performance of sample surface with precisely adjustable flow direction angle

The invention belongs to the field of surface drag reduction performance testing, and particularly relates to a closed air flow channel testing device for the surface drag reduction performance of a sample with a precisely adjustable flow direction angle. The device is additionally provided with a high-precision rotary fine-tuning platform for precisely fine-tuning an angle and placing a sample on a rotary circular table. The flow direction angle can be precisely adjusted while the air tightness and the plane flush degree in the flow channel are guaranteed, and the defect that the surface drag reduction performance under the multi-angle flow direction speed cannot be conveniently and accurately measured through other traditional flow channel devices is overcome. A research means is provided for the internal flow problem that the surfaces of different samples in a closed flow channel influence the flowing state under different flow direction angles, the resistance reduction performance test ...

Air medium dynamic calibration system for fluid wall shear stress sensor

The invention provides a fluid wall shear stress sensor air medium dynamic calibration system, and relates to the technical field of fluid mechanics, the system comprises a high pressure air supply device, a rectification device, a plane sound wave generation device, a flat rectangular channel, a silencing channel and an on-way pressure measurement device; the high-pressure air supply device is communicated with the rectifying device through a high-pressure air pipe; the rectifying device, the flat rectangular channel and the silencing channel are sequentially arranged in the air circulation direction, the rectifying device is connected with the flat rectangular channel through a flange, and the flat rectangular channel is connected with the silencing channel through a flange. And the flat rectangular channel and the on-way pressure measuring device are arranged along the air circulation direction and are communicated through a plurality of groups of hoses. The system can overcome the problems ...

Modeling method of isosceles trapezoid shaped section beam in design of micro electro mechanical system (MEMS)

The invention discloses a modeling method of an isosceles trapezoid shaped section beam in the design of a micro electro mechanical system (MEMS), belonging to the field of design of MEMS. The method comprises the following main steps: firstly, creating a local coordinate system of the isosceles trapezoid shaped section beam; and then deriving the rigidity matrix, the damping matrix and the quality matrix of the isosceles trapezoid shaped section beam under the local coordinate system according to the structural mechanics and structure matrix analysis theory; and creating a second-order kinetic equation of the isosceles trapezoid shaped section beam by utilizing the matrixes; and finally coding the second-order kinetic equation by utilizing a hardware description language to realize parametric system level assembly modeling of the isosceles trapezoid shaped section beam. The method solves the problem that a system level can not precisely emulate a micro beam structure when a machining error ...

Inter-time scale simulation method of micro electromechanical system (MEMS)

The invention discloses an inter-time scale simulation method of micro electromechanical system (MEMS) and belongs to the modeling and simulation field of the MEMS. The method comprises the steps of dividing the components in the model of the MEMS into a high-frequency group and a low-frequency group, using the low-frequency group as a simulation object in the first simulation, simulating a time domain by relatively big step length, using the simulation result of the low-frequency group and the high-frequency components in the high-frequency group as the simulation objects in the second simulation, simulating the time domain by relatively small step length, and interpolating value for the simulation results obtained in the first simulation when the signal values of the components in the low-frequency group are necessarily used. When the method is used for simulation, the low-frequency group is singly simulated without considering the influence of the high-frequency group in the processof ...

Large-displacement electrostatic drive micro-gripper based on arc-shaped comb teeth

The invention discloses a large-displacement electrostatic drive micro-gripper based on arc-shaped comb teeth, which is used for moving operations of a micro operating system, a micro robot, micro assembly, micro welding and tiny objects and belongs to the field of micro electro mechanical systems. In the invention, different driving voltages are respectively applied to arc-shaped movable comb teeth and fixed comb teeth of the micro-gripper, and the movable comb teeth drive micro-gripping arms to swing under the driving of electrostatic force to realize the opening and closing actions of the micro-gripper. In the working process, when the micro-gripper generates larger opening and closing angles and displacements, circumferential and opposite motion is generated between the arc-shaped movable comb teeth and the fixed comb teeth, the space widths among the comb teeth are not changed so that the lateral attraction is not easy to generate, and therefore the micro-gripper driven by the arc-shaped ...

Manufacturing method for realizing dune-like pneumatic drag reduction fractal micro-nano structure based on triple photoetching of three-layer mixed mask

The invention discloses a manufacturing method for realizing a dune-like pneumatic drag reduction fractal micro-nano structure based on triple photoetching of a three-layer mixed mask. According to the method, a special photoetching sequence is designed by selecting three layers of mask materials of which the chemical activities are sequentially reduced, and a mixed mask sequence combination of metal and non-metal materials of silicon oxide, aluminum and photoresist is selected as an etching mask of the sand ridge-imitating pneumatic resistance-reducing fractal micro-nano structure. The selection of the mask material comprehensively considers the compatibility of the metal mask in the inductively coupled plasma etching process, the controllability and accuracy of the process effect, the complexity of the process and the cost of the process. Different from the thought of one-time photoetching and one-time etching in the traditional process, the three-layer composite micro-nano structure ...

Super-hydrophobic silicon micron-nano composite structure and preparation method thereof

The invention discloses a super-hydrophobic silicon micron-nano composite structure and a preparation method thereof, which belong to the nano material preparation field. The structure is a micron-nano composite structure composed of square column array micron structures on the surface of silicon and columnar nano structures on each micron structure. The preparation method is relatively low is cost, can realize the controllable preparation of the periodic array silicon micron-nano composite structure, and is compatible with micro-electronic and micro-electro-mechanical technologies, thereby providing an effective means for the deep research on the influence of geometrical morphology on wettability; and the preparation method omits surface modification, and the super-hydrophobic property can be obtained by simply changing the structural topography of the surface, thereby laying the foundation for the application of the surface of the super-hydrophobic silicon micron-nano composite structure ...

Rotary micro screen structure for cell sorting

The invention discloses a rotary micro screen structure for cell sorting, and belongs to the field of microfluidic chips. The structure comprises at least two layers of sorting films on which a plurality of sorting holes are distributed, wherein at least one layer of sorting film is connected with a driving device. During use, the overlapped area of the corresponding sorting holes of the sorting films of the adjacent two layers is adjusted through the driving device so as to realize gradual sorting of all cells to the sorted or sorting of cells of specific sizes. Large sorting range and high sorting precision are realized by rotation, the structure of the driving device is greatly simplified, and the control difficulty is reduced at the same time. The structure for the cell sorting has the advantages of high sorting efficiency, high precision, continuous and adjustable aperture, large sorting range, channel blockage prevention, no need of knowing the size distribution condition of the cells ...

Schottky concretionary battery with protection ring structure and manufacture method thereof

The invention discloses a Schottky concretionary battery with a protection ring structure and a manufacture method thereof, and belongs to the field of semiconductor, nuclear physics and micro power. The protection ring 6 of the battery is positioned at the peripheral annular region of a potential barrier metal layer 7 above an intrinsic i layer 4. Electronic signals are led out of an interface of a passivation layer 5 and the potential barrier metal layer 7 through a top electrode metal layer 8. All regions except the potential barrier metal layer 7 and the protection ring 6 above the intrinsic i layer 4 are covered by the passivation layer 5. Isotope 9 is covered above the potential barrier metal layer 7. An n<+>-type semiconductor 3, an Ohmic contact layer 2 and a bottom electrode metal layer 1 with the same shape and size are arranged under the intrinsic i layer 4 in order. In addition, the invention further discloses the manufacture method for the atomic battery. The micro concretionary ...

Silicon resonation type pressure sensor based on synovial membrane differential structure and manufacturing method thereof

The invention discloses a silicon resonation type pressure sensor based on a synovial membrane differential structure and a manufacturing method thereof, belonging to the technical field of sensors. The silicon resonation type pressure sensor mainly comprises a resonator 2, a strut 1, a pressure sensing membrane 3 and a frame 4, wherein the upper part of the frame 4 is connected with four sides of the pressure sensing membrane 3, and the lower part is provided with a cavity at the place corresponding to the pressure sensing membrane 3 so that tested air gets into contact with the pressure sensing membrane 3 after passing through the cavity. The strut 1 is arranged on the upper surface of the pressure sensing membrane 3, while the resonator 2 is suspended on the upper surface of the pressure sensing membrane 3 through the strut 1and the frame 4. The silicon resonation type pressure sensor simplifies the manufacturing process and the layout and reduces the influence of air leakage during ...

Closed-loop driving circuit for micromechanical resonance structure

The invention discloses a closed-loop driving circuit for a micromechanical resonance structure, which is an alternating-current automatic gain control closed-loop self-excited driving circuit mainly comprising an amplitude limiting circuit 7, a band-pass filter 8, an automatic gain control loop 9 and a phase compensating circuit 12. The automatic gain control loop 9 adjusts the gain of a loop and the phase compensating circuit 12 adjusts the phase of the loop so as to separate the gain adjustment and the phase adjustment, avoid the coupling influence between the gain adjustment and the phase adjustment and facilitate the debugging of the circuit; and the introduction of the amplitude limiting circuit 7 and the band-pass filter 8 enlarges the linear working range of the circuit, even if an I/V converter 5 detects high output signals, the signals are limited in a certain amplitude through the amplitude limiting circuit 7, and the noise signals are filtered through the band-pass filter 8 ...

Micro nuclear battery with protection ring structure and manufacturing method thereof

The invention discloses a PN junction or PIN junction type micro nuclear battery and a manufacturing method thereof, belonging to the fields of semiconductor, nuclear physics and micro energy source. The battery is provided with a protection ring 6 in the periphery ring-shaped region of a p+ type semiconductor layer 5 on the basis of traditional PN junction or PIN junction type micro nuclear battery; meanwhile a protection ring contact electrode 8 is arranged above the protection ring 6 for leading an electrical signal out; in addition, the manufacturing method of the nuclear battery is also disclosed. In the micro nuclear battery disclosed by the invention, the added protection ring inhibits surface leakage and influence of interface state current on radiation induced current, indirectly increases open circuit voltage, and also improves sensibility of elements on low-energy radioactive source, thus improving energy conversion efficiency of elements.

Method for converting standard process layout to system-level mode in micro-electromechanical system

Preparation method of continuous diaphragm type micro deformable mirror based on SOI

The invention discloses a continuous diaphragm type micro deformable mirror based on SOI and a preparation method thereof. A basal layer, an insulating layer and a device layer constitute a three-layer structure of an SOI silicon chip; the basal layer is arranged at the topmost part of the structure, and the insulating layer and the device layer are arranged in sequence from top to bottom; residual bulk Si diaphragm after pickling the device layer works as the mirror surface of the micro mirror; pickling grooves formed on the SOI silicon chip is linked with a glass base to form a cavity from the mirror surface to drive electrodes; the basal layer and the insulating layer above the mirror surface penetrate pickling with the same shape and position as the pickling grooves, so that the mirror surface is exposed; and the drive electrodes distributed in the cavity from the mirror surface to the drive electrodes are made of metal which is sputtered on the glass base and received pickling. The ...

Digital image detection and analysis system for micro mechanical structure

MEMS design optimizing method

The invention discloses a novel MEMS design and optimization method and belongs to the technology field of MEMS CAD. The method comprises the following steps: constructing a system model of a new MEMS device based on a cell library under the condition that the MEMS device structure, the performance index and the optimized variable thereof to be tested are given; conducting a computer simulation experiment for the system model on the basis of the experimental design; conducting the analysis of regression for simulation experiment results to build the functional relationship between the performance index and the optimized variable; writing mathematical expression of an optimized target and constraint conditions; and optimizing by selecting optimization algorithm and obtaining the optimized result. Compared with the MEME design and optimization method based on the cell library and the genetic algorithm, the method maintains the advantage of realizing quick modeling for the MEMS device, and ...

Silicon carbide Schottky junction type nuclear cell and preparation thereof

The invention discloses a silicon carbide schottky junction nuclear battery and a fabrication method thereof and belongs to the field of semiconductors, nuclear physics and micro-energy. The structure successively comprises a nuclide 6, an upper electrode metal layer 5, a metal adhesive coating 4, a barrier metal layer 3, an intrinsic i layer 2, n<+> type SiC layer 1, an ohmic contact layer 7, a metal transition layer 8, a metal barrier layer 9 and a lower electrode metal layer 10, wherein, the n<+> type SiC layer 1 and the barrier metal layer 3 form the schottky junction. Furthermore, the invention also discloses a fabrication method of the structure. Due to the isotopic energy conversion structure provide by the invention is the schottky junction type based on the silicon carbide base, is not the p-n junction or p-i-n junction, therefore the good ohmic contact is formed without the ion implantation, the protection of the p-type SiC surface is not carried out via the high-temperature annealing ...

High-efficiency and miniaturized maximum power tracking circuit chip system

The invention discloses a high-efficiency and miniaturized maximum power tracking circuit chip system which comprises a solar photovoltaic array, a power monitoring circuit, a main controller circuit, a driving circuit and a DC-DC conversion circuit. The solar photovoltaic array is used for collecting ambient light energy and converting the ambient light energy into electric energy; the power monitoring circuit is used for collecting a voltage value and a current value converted by the solar photovoltaic array in real time and sending the data to the main controller; the main controller circuit is used for collecting real-time voltage and current values and analyzing and processing the real-time voltage and current values so as to realize a maximum power tracking control algorithm (perturbation and observation method) and generate adjustable PWM (Pulse-Width Modulation) pulses; and the driving circuit is used for improving the PWM pulse amplitude generated by the main controller and transmitting ...

Touch sensor and its manufacture method

Electrolyte for electrochemical forming of amorphous alloy material and preparation method

The invention discloses an electrolyte for electrochemical forming of an amorphous alloy material and a preparation method of the electrolyte. The electrolyte is prepared from 5%-15% of ferric chloride, 5%-10% of nickel chloride, 5%-15% of hydrogen peroxide, 2%-10% of graphene quantum dots, 8%-22% of ethylene glycol and 26%-74% of ethyl alcohol. The method is suitable for electrochemical forming machining of most common amorphous alloy materials (such as amorphous alloys of Ni, Fe, Cu, Zr, Mg, Al, Zn and the like), the precision control and machining efficiency is high, the yield is high, the machined surface roughness is low, the surface quality is good, the problem that an existing electrolyte with pure water, acid, alkali and salt as main components cannot achieve high-quality and high-efficiency forming of the amorphous alloy materials is solved, and the method is suitable for large-scale industrial production. And in the traditional electrolyte, the processing products in the electrochemical ...

Reflective oblique moire fringe displacement detection-based micro-machined gyroscope and realization method thereof

The invention discloses a reflective oblique moire fringe displacement detection-based micro-machined gyroscope and a realization method thereof and belongs to the field of optical detection. A mechanism consists of a structural layer and a substrate, wherein sensitive movable comb teeth on the structural layer and sensitive fixed comb teeth on the substrate form a measuring optical grating pair; geometrical interference is produced under the irradiation of a light source so as to form moire fringes; the sensitive movable comb teeth move under the action of Coriolis force; the moire fringes move correspondingly in proportion; and the number of moving moire fringes can be read through a subsequent signal processing module and is used for evaluating an angular speed input from outside. The method has the advantages of no damage to a measured surface due to the adoption of non-contact measurement, high measuring speed, high detection accuracy, capability of detecting displacement under the ...

MEMS magnetoelectric coupling antenna and low-temperature packaging method thereof

The invention relates to an MEMS magnetoelectric coupling antenna and a low-temperature packaging method thereof. The MEMS magnetoelectric coupling antenna comprises a first glass sheet and a second glass sheet, a high-resistance silicon wafer is bonded between the second glass sheet and the first glass sheet, a cavity is formed in the upper surface of the first glass sheet, a channel is formed in the high-resistance silicon wafer in a penetrating mode, an MEMS resonant structure is arranged at the lower end of the channel, and the MEMS resonant structure is connected with the cavity. And the MEMS resonant structure is suspended in the cavity. According to the MEMS magnetoelectric coupling antenna and the low-temperature packaging method thereof, glass-silicon-glass bonding is adopted from top to bottom, the bonding temperature is low, and the problem that a magnetic material is easily influenced by the packaging temperature is solved.

Integrated microfluidic chip interface, interface mould, and interface manufacturing and using methods

The invention discloses an integrated microfluidic chip interface, which belongs to the field of microfluidic chips. The interface comprises a horizontal substrate 1 and a plurality of lug bosses 2, wherein the horizontal substrate 1 is arranged above the microfluidic chip 4 in a sealing connection way; the plurality of lug bosses 2 are positioned on the horizontal substrate 1; and connecting pipelines 3 are arranged in the lug bosses 2, and communicate microchannels on the microfluidic chip 4 with the outside. In addition, the invention also discloses a method for manufacturing the interfacebased on a mould and an interface using method. The integrated microfluidic chip interface provided by the invention can realize connection between an external microscopic system and a microfluidic chip system without using an adhesive, achieves a good sealing effect and does not cause the blockage of the microchannels. In the method for manufacturing the interface, the batch machining of the integrated ...

Silicon micro resonance type pressure sensor and its manufacture method

Electrostatic driving micro gripper capable of being limited and locked

The invention discloses an electrostatic driving micro gripper capable of being limited and locked, which is used for micro operating systems, micro robots, micro assembly, micro soldering and operations for moving micro objects, and belongs to the field of micro electro mechanical systems. For solving the defects of having no limiting and locking function, being incapable of working in off-line state and the like of the electrostatic driving micro gripper in the prior art, different driving voltages are applied respectively on moving comb teeth and fixed comb teeth in the electrostatic driving micro gripper capable of being limited and locked, the moving comb teeth are driven by an electrostatic force to drive a micro gripping arm to swing so as to implement opening and closing of the micro gripper, and when the micro gripper finishes the gripping action, the micro gripper can be limited and locked, therefore, the electrostatic driving micro gripper can work in off-line state when a power ...

Inter-time scale simulation method of micro electromechanical system (MEMS)

The invention discloses an inter-time scale simulation method of micro electromechanical system (MEMS) and belongs to the modeling and simulation field of the MEMS. The method comprises the steps of dividing the components in the model of the MEMS into a high-frequency group and a low-frequency group, using the low-frequency group as a simulation object in the first simulation, simulating a time domain by relatively big step length, using the simulation result of the low-frequency group and the high-frequency components in the high-frequency group as the simulation objects in the second simulation, simulating the time domain by relatively small step length, and interpolating value for the simulation results obtained in the first simulation when the signal values of the components in the low-frequency group are necessarily used. When the method is used for simulation, the low-frequency group is singly simulated without considering the influence of the high-frequency group in the process ...

MEMS sensor based on optical fiber F-P cavity and packaging method thereof

The invention discloses an MEMS sensor based on an optical fiber F-P cavity and a packaging method of the MEMS sensor, and belongs to the technical field of optical fiber sensors. The MEMS sensor comprises a packaging shell used for packaging a sensitive chip, and the end, away from the sensitive chip, of the packaging shell is in threaded connection with a threaded collimator; a collimator outer limiting block is fixedly arranged at the end, located outside the packaging shell, of the threaded collimator, a threaded fixing device is arranged between the end, away from the sensitive chip, of the packaging shell and the collimator outer limiting block, and the threaded fixing device is arranged outside the threaded collimator in a sleeving mode. A collimator inner limiting block is fixedly arranged on the inner side wall of the packaging shell, and an optical fiber is arranged in the center of the threaded collimator in a penetrating mode. The packaging shell, the threaded fixator and the ...

Irreversible bonding method using polydimethylsiloxane as substrate material

The invention discloses an irreversible bonding method using polydimethylsiloxane (PDMS) as a substrate material, belonging to the field of microfluidic chips. The method comprises the following steps of: ultrasonically cleaning PDMS bonding assembly in acetone and isopropanol sequentially, and cleaning a substrate assembly in alcohol and deionized water; after the PDMS bonding assembly and the substrate assembly are dried in a drying oven, respectively treating the faying surfaces of the PDMS bonding assembly and the substrate assembly by using a corona discharger, and directly faying the PDMS bonding assembly and the substrate assembly immediately to complete bonding. In order to enhance faying strength, a cover plate assembly can be also added during faying and is clamped by using a clamp. The invention has the advantages of no need of expensive equipment such as oxygen plasma treatment equipment and the like, low bonding cost, simple machining process, high yield, high cost performance ...

Continuous diaphragm type micro deformable mirror based on SOI and preparation method thereof

The invention discloses a continuous diaphragm type micro deformable mirror based on SOI and a preparation method thereof. A basal layer, an insulating layer and a device layer constitute a three-layer structure of an SOI silicon chip; the basal layer is arranged at the topmost part of the structure, and the insulating layer and the device layer are arranged in sequence from top to bottom; residual bulk Si diaphragm after pickling the device layer works as the mirror surface of the micro mirror; pickling grooves formed on the SOI silicon chip is linked with a glass base to form a cavity from the mirror surface to drive electrodes; the basal layer and the insulating layer above the mirror surface penetrate pickling with the same shape and position as the pickling grooves, so that the mirror surface is exposed; and the drive electrodes distributed in the cavity from the mirror surface to the drive electrodes are made of metal which is sputtered on the glass base and received pickling. The ...

Aluminum surface micro-groove preparation method

The invention discloses a new aluminum surface micro-groove preparation method, and belongs to the technical field of mechanical preparation. A silicon micro-structure is prepared by photo-etching and wet etching, and an aluminum surface is embossed through the silicon micro-structure to obtain a micro-groove so as to realize controllable preparation of the aluminum surface micro-groove. The photo-etching can control the shape and period of the silicon micro-structure, has good precision, and can prepare the silicon micro-structure in batch so as to greatly improve the efficiency and overcome the defects of uncontrollability or low precision and low efficiency of the conventional method. The method can be used for drag reduction of ships and underwater vehicles.

Micro-laser gyro based on photoelectric effect

The invention discloses a micro-laser gyro based on a photoelectric effect, belonging to the field of guide or control devices utilizing a Coriolis effect. The micro-laser gyro comprises a structural layer, a substrate for supporting the structural layer, a light source and a photoresistor, wherein the structural layer and the substrate are connected together through micro assembly and generate relative motions through outside angular speed input, and a column on the structural layer rotates around a central upright post of the substrate to calculate the times that the photoresistor receives monochromatic light signals coming from the light source, thereby obtaining the angular displacement of a moving object. The micro-laser gyro has the advantages that (1) the angular displacement of the moving object is directly measured so as to avoid integration and be beneficial to the improvement of system precision; (2) because the structure does not need to be in a vibration state all the time, ...

Vibration single gimbal microcontrol moment gyro

The invention discloses a vibration single gimbal microcontrol moment gyro and belongs to the fields of guidance or control devices by using Coriolis effect. The mechanism consists of a single structure layer and a glass substrate which supports the structure layer. In the structure layer, a rotor is driven by an arc comb and is connected to a gimbal through a supporting beam; the gimbal is driven by an electrode on the glass substrate and transfers the motion to the rotor; and the motion of the comb and the frame generates an output moment through the Coriolis effect finally. The vibration single gimbal microcontrol moment gyro has the advantages that: 1) the comb on the structure layer and an outer gimbal level can be controlled respectively; 2) the structure is simple, the rotor and the gimbal are positioned on the same layer, and the processing technology is simple; 3) large displacement drive is realized by adopting a folded beam structure, the structural nonlinear effect is reduced ...

Angle parameterization macro modeling method of micro electromechanical system (MEMS)

The invention discloses an angle parameterization macro modeling method of a micro electromechanical system (MEMS) and belongs to the field of MEMS design and model reduction. The method comprises the steps of firstly, optionally selecting one of microstructures with the same geometrical shape as a reference microstructure, extracting the macro model thereof by a numerical value reduction method; and then, establishing a transformation equation between the force and the displacement of microstructures of other azimuths with respect to the reference microstructure by a matrix coordinate transformation method according to the relationship between the azimuths of the microstructure; and finally, substituting the transformation equation between the force and the displacement in the behavior equation of the macro model to realize the angle parameterization macro modeling of the MEMS. The invention realizes the angle parameterization macro modeling by a matrix coordinate transformation method ...

High-sensitivity micro-vibration detecting method

The invention discloses a high depth-to-width ratio nano array based micro-vibration detecting method, and belongs to the field of micro-vibration detecting. The method comprises the following steps that firstly, after beam shaping is carried out on a laser, the laser is introduced into a high depth-to-width ratio nano array, and alternately dark and bright diffraction stripes are formed on the other side; when the high depth-to-width ratio nano array feels the vibration from the outside, the synchronous shaking vibration occurs, so that the diffraction stripes are changed; a +/-1-level motion track of diffraction stripes is read, a changing angle theta of the diffraction stripes is obtained, according to related knowledge of theoretical mechanics and material mechanics, the relation between an external load p and the angle theta is deduced, and by detecting the changing angle theta of the diffraction stripes, the effect of detecting of an external micro-vibration load is achieved. The ...

Film residual stress measuring method

A measurement device of residual stress on film is prepared for hanging arbitrary form test plate on substrate through arbitrary form and position support anchor point, packing scarification layer between test plate and substrate, setting thickness of test plate and height of support anchor point to be all consistence with that of component to be measured. Its measuring method is also disclosed.

Electronic music production method

The invention discloses a novel electronic music generation method, belonging to the technical field of electronic music. The method determines the order signal according to the acceleration or angle speed generated from the check of the instruction, and reads the corresponding authentic music instrument data and makes voices from the pre-stored authentic music instrument sound database accordingto the order signal and the preset corresponding relationship, thus triggering electronic music with the acceleration or angle speed signals. As a novel electronic music generation method, the invention is novel and interesting. The invention can be used in electronic music instruments and electronic tools.

Electronic music production method

The invention discloses a novel electronic music generation method, belonging to the technical field of electronic music. The method determines the order signal according to the acceleration or angle speed generated from the check of the instruction, and reads the corresponding authentic music instrument data and makes voices from the pre-stored authentic music instrument sound database according to the order signal and the preset corresponding relationship, thus triggering electronic music with the acceleration or angle speed signals. As a novel electronic music generation method, the invention is novel and interesting. The invention can be used in electronic music instruments and electronic tools.

Closed-loop control circuit of silicon resonant pressure sensor and realization method thereof

The invention provides a closed-loop control circuit of a silicon resonant pressure sensor and a realization method thereof. Capacitance variation signals are generated by vibration of a resonator (1) and then divided into two paths; one path of capacitance variation signals pass through a first digital module (4), a second digital module (5), a subtracter module (6), a reference digital signal (7) and a digital proportional controller (8) to form an amplified negative feedback error control quantity; the other path of capacitance variation signals pass through an alternating current extraction module (9) and a digital operation unit (10), and then offset processing and overflow detection are completed; a D/A converter (11) converts the processed digital quantity into an analog signal to drive the resonator to vibrate. A digital algorithm is adopted to replace an analog circuit, so that time consumed in analog rectification and filtering is shortened, and the dynamic performance of a system ...

Device and method for measuring adhesive force between objects

The invention discloses a device and a method for measuring an adhesive force between objects, and belongs to the field of mechanical measuring instruments. The invention comprises an installing and fixing device of samples needing to be measured, a balancing weight installing and fixing device, a rotary speed measuring device and a video processing module. An adhesive force between samples needing to be measured is equal to a centrifugal force which is produced when the samples are separated by an effect of a centrifugal force generated by high-speed rotation. Samples adhered together are putted into an incubator and a constant temperature environment is maintained during an adhesive force measurement. Through a high-speed camera, a dynamic process that samples needing to be measured getrid of an adhesive force by an effect of a centrifugal force and separate with each other is realized.

Schottky concretionary battery with protection ring structure and manufacture method thereof

The invention discloses a Schottky concretionary battery with a protection ring structure and a manufacture method thereof, and belongs to the field of semiconductor, nuclear physics and micro power. The protection ring 6 of the battery is positioned at the peripheral annular region of a potential barrier metal layer 7 above an intrinsic i layer 4. Electronic signals are led out of an interface of a passivation layer 5 and the potential barrier metal layer 7 through a top electrode metal layer 8. All regions except the potential barrier metal layer 7 and the protection ring 6 above the intrinsic i layer 4 are covered by the passivation layer 5. Isotope 9 is covered above the potential barrier metal layer 7. An n<+>-type semiconductor 3, an Ohmic contact layer 2 and a bottom electrode metal layer 1 with the same shape and size are arranged under the intrinsic i layer 4 in order. In addition, the invention further discloses the manufacture method for the atomic battery. The micro concretionary ...

Period-adjustable micro-mechanical grating and making technique thereof

The invention discloses a micro-mechanical grating with tunable period and a preparation process thereof, belonging to the field of MOEMS devices. The grating is characterized in that a substrate is made of insulated transparent material such as glass, sapphire and the like. The preparation process comprises the steps as follows: a layer of metal film is deposited on the surface of the substrate;one side of the structural material is etched as an anchor point with a certain height; the substrate and the structural material are bonded to each other by the anchor point; furthermore, the structural material is thinned to the required thickness; and the structural material is etched and the formed structural layer part is released, thus forming the grating. As the substrate of the grating iscompletely transparent, when the incident light radiates on the grating, part of the incident light is reflected to generate a reflection-typed diffraction spectrum and the other part thereof reachesthe ...

Micro nuclear battery with protection ring structure and manufacturing method thereof

The invention discloses a PN junction or PIN junction type micro nuclear battery and a manufacturing method thereof, belonging to the fields of semiconductor, nuclear physics and micro energy source. The battery is provided with a protection ring 6 in the periphery ring-shaped region of a p+ type semiconductor layer 5 on the basis of traditional PN junction or PIN junction type micro nuclear battery; meanwhile a protection ring contact electrode 8 is arranged above the protection ring 6 for leading an electrical signal out; in addition, the manufacturing method of the nuclear battery is also disclosed. In the micro nuclear battery disclosed by the invention, the added protection ring inhibits surface leakage and influence of interface state current on radiation induced current, indirectlyincreases open circuit voltage, and also improves sensibility of elements on low-energy radioactive source, thus improving energy conversion efficiency of elements.

Silicon carbide Schottky junction type nuclear cell and preparation thereof

The present invention discloses a silicon carbide schottky junction nuclear battery and a fabrication method thereof and belongs to the field of semiconductors, nuclear physics and micro-energy. The structure successively comprises a nuclide 6, an upper electrode metal layer 5, a metal adhesive coating 4, a barrier metal layer 3, an intrinsic i layer 2, n<+> type SiC layer 1, an ohmic contact layer 7, a metal transition layer 8, a metal barrier layer 9 and a lower electrode metal layer 10, wherein, the n<+> type SiC layer 1 and the barrier metal layer 3 form the schottky junction. Furthermore, the invention also discloses a fabrication method of the structure. Due to the isotopic energy conversion structure provide by the invention is the schottky junction type based on the silicon carbide base, is not the p-n junction or p-i-n junction, therefore the good ohmic contact is formed without the ion implantation, the protection of the p-type SiC surface is not carried out via the high-temperature ...

Micro piezoresistive device for measuring wall shear stress and manufacturing method thereof

The invention discloses a micro piezoresistive device capable of carrying out non-destructive measurement on wall shear stress of a flow field and a manufacturing method thereof, belonging to the technical field of sensors. The device comprises a sensing part 1, an elastic deformation part 2, a base 6, as well as a piezoresistor, a wire and a pad which are arranged on the elastic deformation part 2; wherein the device is arranged and fixed on a structure 7 to be measured by virtue of the base 6, and the upper surface of the sensing part 1 flushes with the surface to be measured of the structure 7 to be measured. The micro piezoresistive device for measuring wall shear stress provided by the invention can achieve better comprehensive performances: (1) high sensitivity is realized, and the bending stiffness of the elastic deformation part 2 can be greatly reduced so that the device achieves higher measuring sensitivity; (2) manufacturing steps and process are simple; only a conventional micro-processing ...

Vibration single gimbal microcontrol moment gyro

The invention discloses a vibration single gimbal microcontrol moment gyro and belongs to the fields of guidance or control devices by using Coriolis effect. The mechanism consists of a single structure layer and a glass substrate which supports the structure layer. In the structure layer, a rotor is driven by an arc comb and is connected to a gimbal through a supporting beam; the gimbal is driven by an electrode on the glass substrate and transfers the motion to the rotor; and the motion of the comb and the frame generates an output moment through the Coriolis effect finally. The vibration single gimbal microcontrol moment gyro has the advantages that: 1) the comb on the structure layer and an outer gimbal level can be controlled respectively; 2) the structure is simple, the rotor and the gimbal are positioned on the same layer, and the processing technology is simple; 3) large displacement drive is realized by adopting a folded beam structure, the structural nonlinear effect is reduced ...

Optical fiber F-P cavity sensor auto-collimation system and auto-collimation packaging method thereof

The invention discloses an optical fiber F-P cavity sensor auto-collimation system and an auto-collimation packaging method thereof, and belongs to the technical field of MEMS sensors, the optical fiber F-P cavity sensor auto-collimation system comprises an MCU and three stepping motors, and the three stepping motors are used for controlling a collimator to move in the X-axis direction, the Y-axis direction and the Z-axis direction respectively; a PID (Proportion Integration Differentiation) control module is embedded in the MCU; and the PID control module and the three stepping motors are controlled through PWM (Pulse Width Modulation). According to the optical fiber F-P cavity sensor auto-collimation system, through the thought of collecting real-time light intensity and comparing the real-time light intensity with theoretical light intensity, the accurate theoretical light intensity is provided through the extreme value algorithm, the PID control system is accurately positioned and accurately ...

Defogging method for icing wind tunnel test image

The invention relates to a defogging method for an icing wind tunnel image. The defogging method comprises the following steps: 1) acquiring a fog-containing test image through an icing wind tunnel test section monitoring camera; 2) estimating atmospheric light intensity A by using a dark channel; 3) acquiring a scene depth map d corresponding to the image captured by the camera at the current moment; 4) establishing a linear regression model between the beta and the LWC, and performing fitting by using a data set to obtain a prediction model M; 5) predicting a beta value under the current test condition by using the regression model M; and 6) solving the defogged image J through an atmospheric scattering model. According to the method for estimating the parameter beta in the atmospheric scattering model through the wind tunnel test parameters, compared with random value obtaining, fixed value obtaining and other methods in the prior art, the scattering rate beta estimation better conforming ...

Synthetic jet device based on electromagnetic drive

The invention discloses a synthetic jet device based on electromagnetic drive. The synthetic jet device mainly comprises an electromagnet (1), an assembling shell (2) and a synthetic jet device body (3). The electromagnet (1) adjusts and controls the distance between the electromagnet (1) and an elastic vibration film (3-2) through threads. Current in sinusoidal variation is fed into the electromagnet (1) to generate an alternating magnetic field so as to generate alternating electromagnetic force for a permanent magnet film (3-1). The permanent magnet film (3-1) drives the elastic vibration film (3-2) to vibrate, the pressure of a gas cavity formed by the elastic vibration film (3-2) and a cavity body (3-3) varies, and synthetic jet flow is generated through a jet opening (3-4). The synthetic jet device is low in working voltage, large in non-contact drive force, large in air outlet amount, reasonable in design, simple in structure, and capable of realizing active flow control.

Microwave flexible array sensor for icing detection

The invention discloses a microwave flexible array sensor for icing detection, and belongs to the field of sensors. The sensor mainly comprises a flexible substrate layer 4 in the center, an upper flexible dielectric layer 3 and a lower flexible dielectric layer 6 which are tightly attached to the two sides of the flexible substrate layer 4, a sensitive array element 1 and a metal microstrip line 5 structure which are attached to the upper flexible dielectric layer 3, and a metal reference ground 2 attached to the lower flexible dielectric layer 6. According to the invention, the outer resonant ring 33 and the inner resonant ring 34 form a complementary sub-ring resonator (CSRR), and the implementation of the CSRR provides a narrow insertion loss bandwidth, so that the capacitance of the CSRR is very sensitive to an object placed on the sensitive vibration element 1; the notch frequency is very sensitive to the change of the dielectric constant of the ice layer, so that the sensor is superior ...

Micromechanical transformer and manufacturing method thereof

The invention discloses a micromechanical transformer and a manufacturing method thereof, belonging to the field of intelligent miniature devices. A third conductor 3 of the micromechanical transformer is positioned on a substrate 4 and connected with the outside; a first conductor 1 and a second conductor 2 are both suspended on the substrate 4 through an anchor point 6, wherein the first conductor 1 inputs the voltage Vin and the second conductor 2 outputs the induced voltage Vinduc; and the conductors form flat capacitors pairwise. In addition, the micromechanical transformer also can obtain a multi-stage transformer through more suspending conductor forms. The micromechanical transformer can be manufactured through the following processes: growing a film on the substrate, etching, etching the anchor point on a structural material, linking, reducing and etching the structural material. The novel micromechanical transformer has the advantages of simple structural design, mature process ...

Period-adjustable micro-mechanical grating and making technique thereof

The invention discloses a micro-mechanical grating with tunable period and a preparation process thereof, belonging to the field of MOEMS devices. The grating is characterized in that a substrate is made of insulated transparent material such as glass, sapphire and the like. The preparation process comprises the steps as follows: a layer of metal film is deposited on the surface of the substrate; one side of the structural material is etched as an anchor point with a certain height; the substrate and the structural material are bonded to each other by the anchor point; furthermore, the structural material is thinned to the required thickness; and the structural material is etched and the formed structural layer part is released, thus forming the grating. As the substrate of the grating is completely transparent, when the incident light radiates on the grating, part of the incident light is reflected to generate a reflection-typed diffraction spectrum and the other part thereof reaches the ...

Multifunctional electronic float and implementation method thereof

The invention discloses a novel multifunctional electronic float and an implementation method thereof, belonging to the field of the electron. The float comprises a float body 1 and a control box 2, wherein the interior of the float body 1 integrates a microbattery module 3, a microsensor module 4, a first signal acquiring and processing module 5, a first wireless communication module 6 and a first indicator light module 7; and the control box 2 consists of a battery module 8, a sound module 9, a second signal acquiring and processing module 10, a second wireless communication module 11, a second indicator light module 12 and a vibration module 13. The multifunctional electronic float adopts the microsensor to acquire the acceleration, the pressure and the temperature signals of the float in water, utilizes advanced information technology to process and transmit the signals and finally finishes prompting and alarming through sound, light and vibration signals. The multifunctional electronic ...

Acceleration measurement apparatus and method by using optical grating detection technology

The invention discloses a novel device and a novel method for utilizing optical grating detection technology to measure acceleration, and belongs to the field of sensing detection. The device senses the acceleration through a mass block 1, wherein one end of the mass block 1 is connected to an anchor point 4 through an elastic beam 7, while the other end is connected with a movable grating strip 2 which forms an optical grating pair with a fixed grating strip 5. During work, incident light 6 irradiates on the optical grating pair, and the emergent light 3 of the incident light 6 is split into different diffraction levels. Under the action of the acceleration, the mass block 1 drives the movable grating strip 2 to generate certain displacement x so as to change the relative position between the movable grating strip 2 and the fixed grating strip 5, and cause the light intensity on different diffraction levels in the emergent light 3 to change correspondingly. Therefore, aiming at specific ...

Low-frequency miniaturized electromagnetic-acoustic radiator and preparation method thereof

The invention discloses a low-frequency miniaturized electromagnetic-acoustic radiator and a preparation method thereof, and belongs to the technical field of communication, and the electromagnetic-acoustic radiator sequentially comprises an upper magnet, an upper magnetostriction sheet, an upper electrode, a C-axis polarized piezoelectric layer, a lower electrode, a lower magnetostriction sheet and a lower magnet from top to bottom, and different layers are bonded by epoxy resin glue. The upper-layer electrode and the lower-layer electrode are interdigital electrodes, and the upper-layer magnet and the lower-layer magnet are used for clamping the magnetostriction sheet-piezoelectric layer composite layer so as to improve the stress transfer coefficient. An excitation signal is input from the interdigital electrode, the piezoelectric layer is excited to vibrate, sound wave radiation is generated, meanwhile, vibration of the piezoelectric layer is transmitted to the magnetostriction piece ...

Angle parametrized macro modelling method of micro-electro-mechanism system

The invention discloses an angle parametrized macro modelling method of micro-electro-mechanism system, belonging to a field of micro-electro-mechanism system design and model order reduction. The method comprises: firstly, randomly selecting one from microstructure with same geometric shape as a reference microstructure, extracting macro model thereof by the numerical value order reduction method; then establishing conversion equations between force and displacement of other orientation microstructures relative to reference microstructure by employing a matrix coordinate transform method, andfinally, substituting the conversion equations between force and displacement into a behavior equation of the macro model, and implementing angle parametrized macro modeling of MEMS. The method of the invention implements angle parametrized macro modeling by the matrix coordinate transform method, and by setting relative angle parameters, avoids identity of structure and repeat macro modeling process ...

Time-space same-point measurement method for temperature and wall shear stress

The invention provides a time-space same-point measurement method for temperature and wall shear stress, and relates to the technical field of intelligent sensing measurement, and the method comprises the steps: S1, calibrating the resistance temperature coefficient of a multi-layer composite hot film sensor, and respectively obtaining the resistance temperature coefficients of an upper-layer thermosensitive temperature measurement unit and a lower-layer wall shear stress thermosensitive unit; s2, placing a multi-layer composite hot film sensor in the flat channel; s3, working resistance and working voltage are measured through a preset process, and testing is carried out; and S4, by adjusting the temperature and the wall shear stress of the fluid in the flat channel, obtaining data information of the fluid temperature, the wall shear stress, the measurement temperature of the upper-layer thermosensitive temperature measurement unit and the output voltage of the lower-layer wall shear stress ...

Method for preparing silver nano material on surfaces of silicon wafers

The invention discloses a method for preparing silver nano material on the surfaces of silicon wafers, which belongs to the field of nano material preparation. The surface of a silicon wafer is firstly cleaned, the silicon wafer is then put into the mixed solution of hydrofluoric acid and silver nitrate, and is processed for 1 to 2 minutes in room temperature, the silicon wafer is taken out, washed by deionized water and then naturally aired, and thereby the silver nano material growing on the surface of the silicon wafer can be obtained. The condition of the preparation method is simple, high temperature is not needed, the outfield auxiliary equipment is not needed, stabilizer, surfactant and organic solvent do not need to be added, a template is not needed, the reaction time is short, and the cost is low.

Core kernel modeling method for micro inertial sensor device and core kernel base

The micro inertial sensor kernel mold establishing method and kernel library belongs to the field of design technology of micro electromechanical system. Technologically, the present invention features that electromechanical micro structure behavior mold is first established by means of combined mechanical behavior mold establishing method and force coupling behavior mold establishing method and reusable kernel for micro inertial sensor is then formed according to kernel mold establishing method. The present invention also includes kernel library established based on the said method, the establishment of parameter kernel molds for typical functional structural parts of MEMS inertial devices in 3D space, and kernel library as the integration of kernel molds. The present invention has universal theoretical significance and may provide technological support for research and development of micro gyro, micro accelerometer, etc.

Capacitance type micro-mechanical accelerometer provided with post-assembled comb teeth

The invention discloses a capacitance type micro-mechanical accelerometer provided with post-assembled comb teeth, belonging to the technical field of inertial sensors in a micro electro mechanical system. As for the accelerometer, fixed comb teeth 22 are connected to a movable rigid beam 30, the rigid beam 30 is also connected with an assembling and positioning structure 32 and a movable end 34 of an assembling and self-locking structure, the movable end 34 of the assembling and self-locking structure and a fixed end 36 of the assembling and self-locking structure form the assembling and self-locking structure, and the movable end 34 of the assembling and self-locking structure translates in the fixed end 36 of the assembling and self-locking structure under the action of static force of the comb teeth. By adopting a post-assembling method, the limit to the capacitance spacing caused by the minimum linewidth in a processing technology of the micro electro mechanical system is effectively ...

Subdivision method for polygon with inner hole in image treatment process

Transfer method from three-dimensional solid to standard technical layout in microelectromechanical system

Microlongitudinal driver

Gyroscope virtual implementation method

The invention relates to a gyroscopic virtual implement method, in particular to a virtual implement method which can be suitable for the improvement of the micro mechanical gyro precision under a dynamic environment. A plurality of micro mechanical gyros are applied to form a gyro arrangement, redundancy detection is performed to the same angular speed. In order to overcome the problem in the prior invention that the input angular speed is difficult to be tracked, a differential processing is performed to the detection values; and the effect on unknown actual angular speed to a measuring value is eliminated. The method of an indirect estimation is adopted to perform the estimation to micro mechanical gyro speed rate random walk to correct the gyro output, thereby avoiding a problem that actual angular speed is directly taken as a status to be difficult to obtain a random walk driving noise variance. Each equation parameter is discretized, a disperse-type Kalman filter equation is obtained ...

Modeling method of isosceles trapezoid shaped section beam in design of micro electro mechanical system (MEMS)

The invention discloses a modeling method of an isosceles trapezoid shaped section beam in the design of a micro electro mechanical system (MEMS), belonging to the field of design of MEMS. The method comprises the following main steps: firstly, creating a local coordinate system of the isosceles trapezoid shaped section beam; and then deriving the rigidity matrix, the damping matrix and the quality matrix of the isosceles trapezoid shaped section beam under the local coordinate system according to the structural mechanics and structure matrix analysis theory; and creating a second-order kinetic equation of the isosceles trapezoid shaped section beam by utilizing the matrixes; and finally coding the second-order kinetic equation by utilizing a hardware description language to realize parametric system level assembly modeling of the isosceles trapezoid shaped section beam. The method solves the problem that a system level can not precisely emulate a micro beam structure when a machiningerror ...

Micro sound pressure sensor with bionic cricket cilia structure and manufacturing method thereof

The invention discloses a micro sound pressure sensor with a bionic cricket cilia structure and a manufacturing method thereof, belonging to the field of microelectromechanical systems (MEMS). The cricket cilia structure 1 of the sensor is positioned above a sensitive membrane 2 connected to an annular fixed structure 4 through a supporting beam 3; and the sensitive membrane 2 and two detection electrodes 5 on a glass substrate 6 form a flat type capacitor structure. When a foreign sound excites, the bionic cricket cilia structure 1 bends and deforms to drive the sensitive membrane 2 to move up and down, so that the capacitance between the sensitive membrane 2 and the two detection electrodes 5 changes, so as to detect the size of the sound pressure generated under the exciting of the foreign sound. The cilia structure 1 of the sensor disclosed by the invention has the advantages of high strength and large depth-to-width ratio and overcomes the defects of insufficient cilia stiffness and ...

Optical fiber F-P cavity MEMS temperature-pressure composite sensor and preparation method thereof

The invention discloses an optical fiber F-P (Fabry-Perot) cavity MEMS (Micro Electro Mechanical System) temperature-pressure composite sensor. The sensor mainly comprises a temperature-pressure composite sensitive chip, a multimode quartz optical fiber, an optical fiber protection sleeve and a silica gel ball head, wherein the temperature-pressure composite sensitive chip is of a silicon glass optical fiber double F-P cavity blind hole structure which is provided with a built-in micro-channel and is manufactured based on the MEMS technology, the end face of a multimode quartz optical fiber is beveled by 45 degrees and is plated with a multi-layer medium reflection increasing film to form an optical path steering prism, the optical fiber protection sleeve is of a side hole opening structure, and the top end of the optical fiber protection sleeve is sealed through a silica gel ball head. The sensor adopts a side opening packaging structure based on a micro-channel, and cutting and damage ...

Micromechanical transformer and manufacturing method thereof

The invention discloses a micromechanical transformer and a manufacturing method thereof, belonging to the field of intelligent miniature devices. A third conductor 3 of the micromechanical transformer is positioned on a substrate 4 and connected with the outside; a first conductor 1 and a second conductor 2 are both suspended on the substrate 4 through an anchor point 6, wherein the first conductor 1 inputs the voltage Vin and the second conductor 2 outputs the induced voltage Vinduc; and the conductors form flat capacitors pairwise. In addition, the micromechanical transformer also can obtain a multi-stage transformer through more suspending conductor forms. The micromechanical transformer can be manufactured through the following processes: growing a film on the substrate, etching, etching the anchor point on a structural material, linking, reducing and etching the structural material. The novel micromechanical transformer has the advantages of simple structural design, mature process ...

Method for converting standard process layout to system-level mode in micro-electromechanical system

The invention discloses a method for converting standard technical drawing into system modules in microcomputer systems. The invention first reads standard drawing documents from the standard technical drawing document, and then judges and reconstructs the structural information in the read component record information to identify various components, reads their connection relationship, calculates the screen coordinate of system components, and eventually generates the system document. In the process of judging and reconstructing structural information from the read component record information, the invention differentiates and handles the overlapping part of components, so as to convert actual rather than ideal technical drawing documents into system module documents, thus realizing the automatic transmission of data from technique to system.

Angle parametrized macro modelling method of micro-electro-mechanism system

The invention discloses an angle parametrized macro modelling method of micro-electro-mechanism system, belonging to a field of micro-electro-mechanism system design and model order reduction. The method comprises: firstly, randomly selecting one from microstructure with same geometric shape as a reference microstructure, extracting macro model thereof by the numerical value order reduction method; then establishing conversion equations between force and displacement of other orientation microstructures relative to reference microstructure by employing a matrix coordinate transform method, and finally, substituting the conversion equations between force and displacement into a behavior equation of the macro model, and implementing angle parametrized macro modeling of MEMS. The method of the invention implements angle parametrized macro modeling by the matrix coordinate transform method, and by setting relative angle parameters, avoids identity of structure and repeat macro modeling process ...

Manufacturing method of super-high depth-to-width ratio nano-structure arrays based on SOI

The invention discloses a manufacturing method of super-high depth-to-width ratio nano-structure arrays based on SOI, belongs to the technical field of a micro-electro-mechanical system (MEMS), and particularly relates to preparation technology of super-high depth-to-width ratio nano-structure arrays in MEMS technology. The super-high depth-to-width ratio nano-structure arrays with different array numbers are manufactured through methods of alternating depositing and etching of polysilicon and silicon nitride, and intervals of the super-high depth-to-width ratio nano-structure arrays can be adjusted through changing the thickness of a silica layer. According to the invention, the technological progress is simple and is easy to realize; the production cost is reduced; and the problem of manufacturing the super-high depth-to-width ratio nano-structure arrays in the MEMS technology is solved. Through the method, under a condition that the strength of a structural material is certain, the depth-to-width ...