10-12-2008 дата публикации
Номер: CN0101320601A
Автор:
QIAO DAYONG,
YUAN WEIZHENG,
GAO PENG,
YAO XIANWANG,
ZANG BO,
LU XIANGLIAN,
DAYONG QIAO,
WEIZHENG YUAN,
PENG GAO,
XIANWANG YAO,
BO ZANG,
XIANGLIAN LU
Принадлежит:
The invention discloses a silicon carbide schottky junction nuclear battery and a fabrication method thereof and belongs to the field of semiconductors, nuclear physics and micro-energy. The structure successively comprises a nuclide 6, an upper electrode metal layer 5, a metal adhesive coating 4, a barrier metal layer 3, an intrinsic i layer 2, n<+> type SiC layer 1, an ohmic contact layer 7, a metal transition layer 8, a metal barrier layer 9 and a lower electrode metal layer 10, wherein, the n<+> type SiC layer 1 and the barrier metal layer 3 form the schottky junction. Furthermore, the invention also discloses a fabrication method of the structure. Due to the isotopic energy conversion structure provide by the invention is the schottky junction type based on the silicon carbide base, is not the p-n junction or p-i-n junction, therefore the good ohmic contact is formed without the ion implantation, the protection of the p-type SiC surface is not carried out via the high-temperature annealing ...
Подробнее