METHOD FOR PRODUCING INORGANIC OXIDE IN FORM OF THIN FILM

28-03-2019 дата публикации
Номер:
SG11201901098RA
Принадлежит: Kao Corp
Контакты:
Номер заявки: 01-19-1120098R
Дата заявки: 08-08-2017



K17-103 Provided is a method for producing an inorganic oxide in the form of a thin film, the method including a step of bringing a first liquid and a second liquid with each other, the first liquid containing an inorganic oxide precursor and the second liquid containing a 5 substance reacting with the inorganic oxide precursor of the first liquid to form an inorganic oxide derived from the inorganic oxide precursor. The step is performed by continuous operation. At least one of the first liquid and the second liquid includes an ionic liquid.