Polishing/grinding method
11-08-1998 дата публикации
Номер:
US0005791972A
Принадлежит: Canon Inc
Контакты:
Номер заявки: 94-13-2882
Дата заявки: 09-08-1994
A method of working a workpiece with an apparatus comprising the steps of holding the workpiece by a holding means, rotating the held workpiece by a rotational means in a direction of a tool to match a rotational axis line of the workpiece with a rotation axis line of the tool, matching a vertical axis of the holding means holding the workpiece with an intersection of a swingable rotation axis line of a means for swingably rotating the tool and the tool rotation axis line, and holding the workpiece above the tool and the working the workpiece by exerting work pressure on the workpiece.