Process for producing large-size, self-supporting plates of silicon

26-12-1978 дата публикации

Номер:

US4131659A

Автор: Bernhard Authier, Erhard Sirtl, Franz Koppl, Heinz-Jorg Rath, Rudolf Griesshammer, Winfried Lang

Принадлежит: Wacker Siltronic AG

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/0 C23C16/01 C3 C30 C30B C30B1 C30B13 C30B13/C30B13/0 C30B13/00 C30B13/005 C30B13/06 C30B2 C30B29 C30B29/C30B29/6 C30B29/60 Y Y1 Y10 Y10S Y10S1 Y10S11 Y10S117 Y10S117/Y10S117/9 Y10S117/91 Y10S117/914 Y10S117/915 Y10S4 Y10S43 Y10S438 Y10S438/Y10S438/9 Y10S438/90 Y10S438/907

IPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/0 C23C16/01 C3 C30 C30B C30B1 C30B13 C30B13/C30B13/0 C30B13/00 C30B13/06

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