Oscillator-amplifier drive laser with seed protection for an EUV light source

11-06-2013 дата публикации

Номер:

US8462425B2

Автор: Daniel J. W. Brown, Igor V. Fomenkov, Kai-Chung Hou, Richard L. Sandstrom, William N. Partlo

Принадлежит: Cymer Inc

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01S H01S3 H01S3/H01S3/0 H01S3/00 H01S3/005 H01S3/0057 H01S3/006 H01S3/0064 H01S3/02 H01S3/07 H01S3/076 H01S3/08 H01S3/081 H01S3/0812 H01S3/1 H01S3/11 H01S3/117 H01S3/2 H01S3/22 H01S3/223 H01S3/2232 H01S3/23 H01S3/238 H01S3/2383 H05 H05G H05G2 H05G2/H05G2/0 H05G2/00 H05G2/005 H05G2/008

IPC - классификация

H H0 H01 H01S H01S3 H01S3/H01S3/1 H01S3/11 H01S3/117 H01S3/12 H01S3/127 H05 H05G H05G2 H05G2/H05G2/0 H05G2/00 H05G2/008

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