SYSTEM AND METHOD FOR USING FIRST-PRINCIPLES SIMULATION TO ANALYZE A PROCESS PERFORMED BY A SEMICONDUCTOR PROCESSING TOOL
14-04-2005 дата публикации
Номер:
WO2005034182A2
Автор: STRANG, Eric, J.
Принадлежит: TOKYO ELECTRON LIMITED
Контакты:
Номер заявки: US88-02-200405
Дата заявки: 22-09-2004
A method, system and computer readable medium for analyzing a process performed by a semiconductor processing tool. The method includes inputting data relating to a process performed by the semiconductor processing tool, and inputting a first principles physical model relating to the semiconductor processing tool. First principles simulation is performed using the input data and the physical model to provide a first principles simulation result; and the first principles simulation result is used to determined a fault in the process performed by the semiconductor processing tool.[1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35][36][37]
