OXIDE SINTERED BODY, AND SPUTTERING TARGET

16-08-2012 дата публикации
Номер:
WO2012108504A1
Принадлежит: 株式会社コベルコ科研
Контакты:
Номер заявки: JP29-05-201276
Дата заявки: 09-02-2012



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Provided is an oxide sintered body suitably used for producing an oxide semiconductor film for a display device, the oxide sintered body capable of forming an oxide semiconductor film exerting excellent conductivity, having high relative density, and exhibiting high carrier mobility. This oxide sintered body is obtained by combining and sintering a zinc oxide powder, a tin oxide powder, and an indium oxide powder. The oxide sintered body satisfies the following equation (1) when the oxide sintered body is subjected to X-ray diffraction. Equation (1): 70>[A/(A+B+C+D)]×100≥10. In equation (1), A represents the XRD peak intensity in the vicinity of 2θ=34°, B represents the XRD peak intensity in the vicinity of 2θ=31°, C represents the XRD peak intensity in the vicinity of 2θ=35°, and D represents the XRD peak intensity in the vicinity of 2θ=26.5°.

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