TRIANGULAR DEPOSITION CHAMBER FOR A VAPOR DEPOSITION SYSTEM

A process and apparatus for the manufacture of chemical vapor deposited silicon carbide which comprises conveying the reaction gases to a triangular chemical vapor deposition cell where material is deposited by chemical vapor deposition. The triangular cell provides a large surface area for deposition while occupying a minimum amount of the furnace floor surface area. The triangular cell has the added benefit in that deposited silicon carbide is of negligible thickness at the edges thereby permitting easy separation of material with a minimum of post deposition machining.

PROCESS FOR AN IMPROVED LAMINATE OF ZNSE AND ZNS

The surface of a zinc selenide substrate is ground to curve in the opposite direction from that which occurs due to the bimetallic effect when zinc sulfide is deposited on a flat substrate by the chemical vapor deposition process. The bowing of the interface that occurs upon cooling of the hot laminate when the surface of the substrate is flat before deposition is compensated for by the pre-figured bowing. A distortion free window for the transmission of infra-red radiation is provided by this invention.

Method of fabricating a light weight closed-back mirror by CVD

Process for an improved laminate of ZnSe and ZnS

Method and apparatus for producing free-standing silicon carbide articles

CHEMICAL VAPOR DEPOSITION-PRODUCTION SILICON CARBIDE HAVING IMPROVED PROPERTIES

... .beta.-silicon carbide which is optically transmitting in the visible and infrared regions is produced by chemical vapor deposition. Deposition conditions are temperatures within a 1400-1500.degree.C range, pressure 50 torr or less, H2/methyltrichlorosilane molar ratios of 4-30 and a deposition rate of 1 .mu.m or less.

METHOD OF FABRICATING LIGHTWEIGHT HONEYCOMB TYPE STRUCTURE

A process is disclosed for fabricating lightweight honeycomb type structures out of material such as silicon carbide (SiC) and silicon (S). The lightweight structure consists of a core to define the shape and size of the structure. The core is coated with an appropriate deposit such as SiC or Si to give the lightweight structure strength and stiffness and for bonding the lightweight structure to another surface. The core is fabricated from extremely thin ribs of appropriately stiff and strong material such as graphite. First, a graphite core consisting of an outer hexagonal cell with six inner triangular cells is constructed from the graphite ribs. The graphite core may be placed on the back-up side of a SiC faceplate and then coated with SiC to produce a monolithic structure without the use of any bonding agent. Cores and methods for the fabrication thereof in which the six inner triangular cells are further divided into a plurality of cells are also disclosed.

Method and apparatus for forming structures by chemical vapor deposition

Vapor deposition of arsenic-containing films

Chemical-vapor-deposition-produced silicon carbide

Method for preparing laminates of ZnSe and ZnS

Highly polishable, highly thermally conductive silicon carbide, method of preparation and applications thereof

Selective area chemical vapour deposition

Precision replication by chemical vapor deposition

Method of producing free standing articles

Method to prevent backside growth on substrates in a vapor deposition system

Method of fabricating lightweight honeycomb type structure

Process for producing zinc sulfide

Process and apparatus for supplying metal vapor continuously to a chemical vapor deposition

Triangular deposition chamber for a vapor deposition system

A chemical vapor deposition process to replicate the finish and/or figure of preshaped structures