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Небесная энциклопедия

Космические корабли и станции, автоматические КА и методы их проектирования, бортовые комплексы управления, системы и средства жизнеобеспечения, особенности технологии производства ракетно-космических систем

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Мониторинг СМИ

Мониторинг СМИ и социальных сетей. Сканирование интернета, новостных сайтов, специализированных контентных площадок на базе мессенджеров. Гибкие настройки фильтров и первоначальных источников.

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Поддерживает ввод нескольких поисковых фраз (по одной на строку). При поиске обеспечивает поддержку морфологии русского и английского языка
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Применить Всего найдено 9. Отображено 9.
12-04-2016 дата публикации

Wafer carrier

Номер: US0009312157B2
Автор: Michael S. Adams, Barry Gregerson, Matthew A. Fuller, ADAMS MICHAEL S, GREGERSON BARRY, FULLER MATTHEW A, ADAMS MICHAEL S., FULLER MATTHEW A.
Принадлежит: ENTEGRIS, INC., ADAMS MICHAEL S, GREGERSON BARRY, FULLER MATTHEW A, ENTEGRIS INC, ADAMS MICHAEL S., FULLER MATTHEW A.

A front opening wafer container suitable for large wafers such as 450 mm utilizes componentry with separate fasteners to lock the componentry together in an expedient manner providing robust connections and cost efficiencies. A container portion has an open front and receives on a bottom surface a base plate secured by twist lock connectors that also provide recesses for purge grommets. Kinematic coupling components readily and robustly lock onto the base plate. Interior wafer support components latch onto brackets on the side walls utilizing a separate locking insert with holding tabs and locking detents. A wafer retainer provides support and counters enhanced wafer sag associated with 450 mm wafers when the door is installed and seated.

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Номер записи: 1
09-06-2015 дата публикации

Porous barrier for evenly distributed purge gas in a microenvironment

Номер: US0009054144B2
Автор: John Burns, Mark V. Smith, Matthew A. Fuller, BURNS JOHN, SMITH MARK V, FULLER MATTHEW A, SMITH MARK V., FULLER MATTHEW A.
Принадлежит: Entegris, Inc., BURNS JOHN, SMITH MARK V, FULLER MATTHEW A, ENTEGRIS INC, SMITH MARK V., FULLER MATTHEW A., ENTEGRIS, INC.

An improved system and method for purging a microenvironment to desired levels of relative humidity, oxygen, or particulates through the implementation of a purge gas delivery apparatus and method that provides even distribution of the purging gas within the microenvironment. A substrate container has a tower therein with a fluid flow passageway extending the length of the tower. Apertures with porous media between the aperture and fluid flow passageway regulate the volume and pressure of air discharging at each aperture. Alternatively, the tower may be formed of a porous tubular polymeric material. A sleeve may direct the discharge purge gas in the interior.

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Номер записи: 2
22-07-2014 дата публикации

Wafer container with tubular environmental control components

Номер: US8783463B2
Автор: WATSON JAMES A, BURNS JOHN, FORBES MARTIN L, FULLER MATTHEW A, SMITH MARK V, WATSON JAMES A., FORBES MARTIN L., FULLER MATTHEW A., SMITH MARK V.
Принадлежит: WATSON JAMES A, BURNS JOHN, FORBES MARTIN L, FULLER MATTHEW A, SMITH MARK V, ENTEGRIS INC, WATSON JAMES A., FORBES MARTIN L., FULLER MATTHEW A., SMITH MARK V., ENTEGRIS, INC.

A wafer container utilizes a rigid polymer tubular tower with slots and a getter therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300 mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position ...

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Номер записи: 3
30-03-2006 дата публикации

Substrate carrier

Номер: WO2005041267A3
Автор: Jeffery J King, John Burns, Mark V Smith, Martin L Forbes, Matthew A Fuller, Michael Zabka
Принадлежит: Entegris Inc, Jeffery J King, John Burns, Mark V Smith, Martin L Forbes, Matthew A Fuller, Michael Zabka

A carrier for transporting silicon semiconductor wafers during semiconductor wafer processing operations including an enclosure, a door and a flange structured to interface with a machine so that the carrier can be lifted by the machine. A lift saddle connects the flange to the container so that the load on the flange is transferred to a part of the enclosure other than the top of the enclosure to prevent distortion of the enclosure to maintaining seal integrity between the enclosure and the door.

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Номер записи: 4
08-05-2008 дата публикации

Wafer cassette

Номер: WO2008008270A3
Автор: John Burns, Matthew A Fuller
Принадлежит: Entegris Inc, John Burns, Matthew A Fuller

A front opening wafer container including an enclosure portion and a door. A wafer support system is provided including a pair of spaced apart cantilever wafer shelves, each wafer shelf including a pair of opposing inclined ramp portions. The ramp portions are cooperatively positioned and configured so that when the wafer is received on the shelves, the wafer is supported on the ramps at a lower peripheral corner of the wafer, all other portions of the wafer being free from contact with the wafer support system. Each wafer shelf may have a generally concave upper surface and the incline of the ramps is continuous with the concave upper surfaces of the wafer shelves.

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Номер записи: 5
12-07-2007 дата публикации

Wafer container and door with vibration dampening latching mechanism

Номер: WO2005047726A3
Автор: Jeffrey J King, John Burns, Mark V Smith, Martin L Forbes, Matthew A Fuller
Принадлежит: Entegris Inc, Jeffrey J King, John Burns, Mark V Smith, Martin L Forbes, Matthew A Fuller

A container for holding a plurality of wafers in an axially aligned, generally parallel spaced apart arrangement includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front. At least one wafer support is provided in the enclosure along with a kinematic coupling on the bottom of the enclosure. The container has a door for sealingly closing the open front which includes a chassis and an operable latching mechanism on the chassis. The latching mechanism includes a cam selectively rotatable to shift the latching mechanism between a first favored position and a second favored position and at least one vibration dampener for dampening vibrations generated when the latching mechanism is shifted between the first and second favored positions.

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Номер записи: 6
28-07-2005 дата публикации

Wafer container with door actuated wafer restraint

Номер: WO2005055279A9
Автор: Jeffery J King, John Burns, Mark V Smith, Martin L Forbes, Matthew A Fuller
Принадлежит: Entegris Inc, Jeffery J King, John Burns, Mark V Smith, Martin L Forbes, Matthew A Fuller

A container for holding a wafer includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame. A door is sealingly engagable in the door frame to close the open front. The container further includes wafer restraint means in the enclosure including fixed wafer restraint means and operable wafer restraint means. The operable wafer restraint means is selectively positionable by engaging and disengaging the door from the door frame, and is positioned so to enable insertion or removal of a wafer from the container when the door is disengaged from the door frame and positioned so as to cooperate with the fixed wafer restraint means to restrain the wafer in the container when the door is engaged in the door frame.

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Номер записи: 7
22-11-2007 дата публикации

Kinematic coupling with textured contact surfaces

Номер: WO2007087284A3
Автор: Jeffrey J King, John Burns, Mark V Smith, Martin L Forbes, Matthew A Fuller
Принадлежит: Entegris Inc, Jeffrey J King, John Burns, Mark V Smith, Martin L Forbes, Matthew A Fuller

A substrate kinematic coupling or guide plate for a substrate carrier having textured or patterned surfaces at the points of contact to reduce frictional forces generated between automated processing equipment and the kinematic coupling. The textured surface reduces the contact area between the processing equipment and the contact portion of the kinematic coupling, thereby reducing the resultant frictional force. By reducing the frictional force, the substrate carrier more readily settles on the mounting pins of the processing equipment, thus avoiding intolerable height and angular deviations during automated access to the substrates. Textures include, but are not limited to, a knurl pattern, ridges running laterally along the contact portions, and ridges running longitudinally along the contact portions. The textures may be formed by a blow molding, injection molding or in an overmolding process, or by a machining or imprinting process.

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Номер записи: 8
30-06-2005 дата публикации

Photochromic substrate container

Номер: WO2005040011B1
Автор: Jeffrey J King, John Burns, Mark V Smith, Martin L Forbes, Matthew A Fuller
Принадлежит: Entegris Inc, Jeffrey J King, John Burns, Mark V Smith, Martin L Forbes, Matthew A Fuller

A semiconductor wafer, substrate, or reticle storage or shipping container (10, 24) that includes a photochromic indicator of exposure to undesired electromagnetic radiation. A photochromic material is incorporated into the plastic used to fabricate at least a portion of the container. The photochromic material may change color or darkness in response to exposure to a selected range of wavelengths of light.

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Номер записи: 9