27-02-2018 дата публикации
Номер: KR101832755B1
A detachable automatic gas purification system of the present invention comprises: a supply line unit which sequentially supplies feed gases to be purified according to a plurality of purification steps; a gas purification unit which places a plurality of gas purification modules respectively in the plurality of purification steps, wherein the gas purification modules, where an injecting line is connected to the supply line unit, and a discharge line is able to examine a concentration of impurities in purified gases, and a gas inlet and a gas outlet are continuously connected, purify the feed gases step by step according to impurities; and a plurality of valve units which are installed respectively on the discharge line of the gas purification modules to switch flow paths by selectively opening and closing a gas flow path for connecting the supply line unit to the gas purification modules and a gas flow path for connecting the gas purification modules. The feed gases are supplied in any ...
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