20-06-2013 дата публикации
Номер: US20130153553A1
Apparatus for interference patterning of a planar sample including a laser and a focusing arrangement positioned in a beam path of the laser so that the laser beam is imaged in a first spatial direction in a focused manner into a sample volume in which the planar sample is positioned. An expanding and splitting arrangement is positioned downstream of the focusing arrangement for the laser beam, whilst maintaining the focused imaging in a first spatial direction which can be expanded in a second spatial direction, and which can be split into two partial beams. These two partial beams can be directed onto the sample volume. 1. Apparatus for the interference patterning of a planar sample (P) comprising{'b': '1', 'a laser (),'}{'b': 2', '1', '3, 'a focusing arrangement () positioned in the beam path of the laser (), by means of which focusing arrangement the laser beam (L) can be imaged in a first spatial direction (y) in a focused manner into a sample volume () in which the planar sample (P) can be positioned or is positioned,'}{'b': 4', '2', '3, 'claim-text': can be expanded in a second spatial direction (x, w), which is not parallel to the first spatial direction (y), and is preferably orthogonal to the first spatial direction (y),', {'b': 1', '2, 'can be split into two partial beams (L, L)'}], 'an expanding and splitting arrangement () positioned downstream of the focusing arrangement () in the beam path, by means of which expanding and splitting arrangement the laser beam (L), whilst maintaining the focused imaging into the sample volume () in the first spatial direction (y)'} {'b': 1', '2', '3', '1', '2', '3', '5, 'in the form of these two partial beams (L, L) can be directed onto the sample volume () such that the two partial beams (L, L) interfere within the sample volume () in an interference region ().'}, 'and'}2. Apparatus according to claim 1 ,characterized in that{'b': 2', '9', '3, 'the focusing arrangement () is a beam-cross-section-altering focusing ...
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