18-07-2019 дата публикации
Номер: US20190218131A1
Принадлежит:
The present invention relates to a method for separating solid-body slices () from a donor substrate (). The method comprises the steps of: producing modifications () within the donor substrate () by means of laser beams (), wherein a detachment region is predefined by the modifications (), along which detachment region the solid-body layer () is separated from the donor substrate (), and removing material from the donor substrate (), starting from a surface () extending in the peripheral direction of the donor substrate (), in the direction of the centre (Z) of the donor substrate (), in particular in order to produce a peripheral indentation (). 112. A method for separating at least one solid-body layer , in particular a solid-body slice () , from a donor substrate () , said method comprising at least the following steps:{'b': '2', 'providing a donor substrate (),'}{'b': 10', '2', '12', '10', '1', '2, 'firstly, producing modifications () within the donor substrate () by means of LASER beams (), wherein a detachment region is predefined by the modifications (), along which detachment region the solid-body layer () is separated from the donor substrate (),'}{'b': 2', '4', '2', '2', '6, 'then removing material from the donor substrate () starting from a surface () extending in the peripheral direction of the donor substrate () in the direction of the centre (Z) of the donor substrate (), in particular in order to produce a peripheral asymmetrical indentation (),'}wherein the detachment region is exposed by the material removal,separating the solid-body layer from the donor substrate,{'b': 1', '2', '14', '16', '2', '2', '14', '20', '1', '10, 'wherein the donor substrate is weakened in the detachment region by the modifications in such a way that the solid-body slice () detaches from the donor substrate () as a result of the material removal or a stress-inducing layer () is produced or arranged on a surface () of the donor substrate (), in particular a planar surface, ...
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