Droplet deposition head

Droplet deposition head and actuator component therefor

An actuator component 101 for a droplet deposition head made up of a number of patterned layers, each layer extending in a plane normal to a layering direction L, with the layers being stacked one upon another in said layering direction. A row of fluid chambers 110a, 110b is formed within the layers, the row extending in a row direction. Each fluid chamber is provided with a nozzle 118 and an actuating element (22, Fig.1D). A row of inlet passageways 112a, 112b is also formed within the layers of the actuator component. In some embodiments, either a row of outlet passageways 116a, 116b or a second row of inlet passageways is additionally formed within the layers; in either case, such row extends in the row direction. Where outlet passageways are present, each is fluidically connected so as to receive fluid from a respective one of said fluid chambers. At least one of the rows of passageways is staggered, whereby at least some of the members of the staggered row in question are offset from ...

FLUID JET HEAD AND FLUID JET DEVICE

INK RADIATION RECORDING HEAD AND THIS CONTAINING INK RADIATION RECORDING DEVICE

Liquid ejecting head, liquid ejecting apparatus, and actuator

The invention provides a liquid ejecting head, a liquid ejecting apparatus and an actuator capable of improving shift characteristics of piezoelectric element to implement high-speed driving and preventing damage of the piezoelectric layer to improve durability. A end face of a piezoelectric layer (70) is composed of inclined planes in a incline mode of end of a lower electrode side is outsider than a upper electrode side. The lower electrode (60) for composing piezoelectric elements has a width smaller than the width of the pressure generating chambers (12). The piezoelectric layer (70) has a larger width than the lower electrode (60) to cover end faces of the lower electrode (60). The vibration plate (50) has a top layer formed of a titanium oxide (TiOx) insulator film (52). The lower electrode has a top layer formed of a lanthanum nickel oxide (LaNiyOx) orientation control layer (62). The piezoelectric layer (70) is formed of columnar crystals, and one part of the piezoelectric layer ...

Ferroelectric thin film formation composition, ferroelectric thin film, and method of fabricating thin film

FERROELECTRIC THIN FILM FORMATION COMPOSITION, FERROELECTRIC THIN FILM AND METHOD OF FABRICATING FERROELECTRIC THIN FILM

DEVICE PACKAGE STRUCTURE, DEVICE PACKAGING METHOD, DROPLET EJECTION HEAD, CONNECTOR, AND SEMICONDUCTOR DEVICE

PIEZOELECTRIC ELEMENT, FABRICATING METHOD THEREOF, LIQUID INJECTION HEAD, FABRICATING METHOD THEREOF AND LIQUID INJECTION APPARATUS TO OBTAIN DESIRABLE ELECTRICAL RESISTANCE AND WITHSTAND VOLTAGE

PURPOSE: A piezoelectric element is provided to form a piezoelectric element having desirable electrical resistance and a withstand voltage while extending a lifetime by doping predetermined dopants. CONSTITUTION: A lower electrode is formed on a substrate. After a piezoelectric precursor film is baked, the piezoelectric precursor film which contains Pb, Zr and Ti wherein a composition ratio of Pb, Zr and Ti is Pb/(Zr+Ti)=1.0-1.3 is formed on the lower electrode. After at least one dopant of a group of Mn, Ni and Sr is doped, the piezoelectric precursor film is baked at a temperature of 650~750 deg.C for an interval of half an hour to 3 hours to form a piezoelectric layer. An upper electrode is formed on the piezoelectric layer. The quantity of the dopants is not greater than 10 mole percent of the piezoelectric layer. © KIPO 2006 ...

Wiring structure, method of manufacturing wiring structure, liquid droplet ejecting head, and liquid droplet ejecting apparatus

A liquid droplet ejecting head includes a vibrating plate on which a first terminal group having first and second terminals and a second terminal group having third and fourth terminals are formed, a reservoir forming substrate which has a first wiring forming portion having first and second inclined surfaces and a second wiring forming portion having third and fourth inclined surfaces, a first wiring which is formed on the first inclined surface and is electrically connected to the first terminal, a second wiring which is formed on the second inclined surface and is electrically connected to the second terminal, a third wiring which is formed on the third inclined surface and is electrically connected to the third terminal, and a fourth wiring which is formed on the fourth inclined surface and is electrically connected to the fourth terminal.

MEMS jetting structure for dense packing

A fluid ejector includes a fluid ejection module having a substrate and a layer separate from the substrate. The substrate includes a plurality of fluid ejection elements arranged in a matrix, each fluid ejection element configured to cause a fluid to be ejected from a nozzle. The layer separate from the substrate includes a plurality of electrical connections, each electrical connection adjacent to a corresponding fluid ejection element.

LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS

A liquid ejecting head includes a passage-forming substrate, a plurality of pressure-generating elements, and an IC chip. The passage-forming substrate has a nozzle opening, and a pressure-generating chamber communicating with the nozzle opening. The plurality of pressure-generating elements are provided on a surface of the passage-forming substrate with a diaphragm interposed therebetween. The pressure-generating elements have electrodes and cause pressure change in the pressure-generating chamber. The IC chip is mounted on the surface of the passage-forming substrate with the pressure-generating elements. In this liquid ejecting head, the electrodes of the pressure-generating elements include individual electrodes, and at least the individual electrodes are electrically connected to the driver circuit via the through electrode.

Liquid jet head and liquid jet apparatus

A liquid jet head includes: a passage-forming substrate provided with at least two rows of pressure generating chambers each communicating with a nozzle orifice; and piezoelectric elements for causing pressure change in the pressure generating chambers. The piezoelectric elements are provided on one side of the passage-forming substrate with a vibration plate interposed therebetween. On a joint plate joined to the piezoelectric element side of the passage-forming substrate, driving ICs for driving the piezoelectric elements are provided in regions facing the respective rows of the pressure generating chambers. For each row of the pressure generating chambers, at least one penetrated hole, in which lead electrodes led from the piezoelectric elements are exposed, is provided in a region of the joint plate, the region corresponding to a region between the rows of the pressure generating chambers. A beam portion is formed between the adjacent penetrated holes.

Liquid Jetting Apparatus

A liquid jetting apparatus includes: a liquid jetting module having drive elements; a wiring member including: a base material having a first surface; wirings formed on the first surface of the base material; and a protective film configured to covers the first surface of the base material and the wirings; and a heat sink. One of the protective film and the base material, of the wiring member, is formed with an opening through which at least some of the wirings are partially exposed, the wirings of the wiring member are electrically connected to terminals of the drive elements, and the heat sink is joined to the at least some of the wirings via the opening of the wiring member.

LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS

A liquid ejecting head includes: a nozzle plate provided with nozzle openings; an actuator unit including a flow channel formation substrate in which pressure generation chambers are provided and piezoelectric actuators that cause a change in the pressure of the liquid within respective pressure generation chambers; a communication substrate in which communication channels that communicate between the pressure generation chambers and corresponding nozzle openings are provided; a first case member that is a frame member affixed to the communication substrate so that the actuator unit is disposed within the first case member and that, along with the actuator unit, forms a manifold that holds the liquid to be supplied to the pressure generation chambers; and a second case member that is affixed to the first case member and in which is formed an introduction channel that sends the liquid from the exterior to the manifold.

Method of manufacturing liquid-jet head and liquid-jet head

Included are the steps of: forming piezoelectric elements on a surface of a passage-forming substrate with a vibration plate in between, and forming a penetrating portion by removing an area in the vibration plate, which area will serve as a communicating portion; forming lead electrodes and sealing up the penetrating portion with an interconnect layer; joining a reservoir forming plate to a surface of a passage-forming substrate; forming liquid passages by wet-etching; forming protection films on inner surfaces of the liquid passages; detaching and removing a protection film on an interconnect layer; and causing a reservoir portion and a communicating portion to communicate with each other by removing a corresponding part of the interconnect layer, and in accordance with the manufacturing method, while the liquid passages are being formed, the communicating portion is formed in a way that an edge of an opening of the vibration plate is located outside an edge of an opening which is close ...

Liquid ejecting head, liquid ejecting apparatus, and method for manufacturing liquid ejecting head

A liquid ejecting head includes a nozzle opening that is formed on one face of a silicon substrate, and ejects liquid, a first concave portion that is provided on the other face of the silicon substrate, and configures a pressure generating chamber which communicates with the nozzle opening, and a second concave portion that is provided on one face of the silicon substrate, and configures a flow path which communicates with the first concave portion and supplies the liquid, in which the first concave portion and the second concave portion overlap each other in an in-plane direction when seen in a direction which is orthogonal to the face of the silicon substrate.

Liquid ejecting head and liquid ejecting apparatus

A liquid ejecting head that includes a first piezoelectric element and a second piezoelectric element, a first wire that extends in a first direction and that electrically couples the first piezoelectric element and a wiring substrate to each other, and a second wire that is adjacent to the first wire in a second direction intersecting the first direction and that extends in the first direction, the second wire electrically coupling the second piezoelectric element and the wiring substrate to each other. A first protrusion is formed on a surface of the first wire in a mounting area to where the wiring substrate is joined, and a second protrusion is formed on a surface of the second wire in the mounting area and at a position different from that of the first protrusion in the first direction.

LIQUID-EJECTING HEAD, LIQUID-EJECTING APPARATUS, AND PIEZOELECTRIC DEVICE

There is provided a piezoelectric device comprising a first electrode, a piezoelectric layer that is formed above the first electrode, a second electrode that is formed above the piezoelectric layer and a coating layer that is formed above the second electrode consisting of tungsten or titanium.

LIQUID EJECTING APPARATUS AND MAINTENANCE METHOD FOR LIQUID EJECTING APPARATUS

A liquid ejecting apparatus includes a liquid supply flow path configured to supply a liquid stored in a liquid supply source to a liquid ejecting portion, a reservoir portion provided in the liquid supply flow path, an on-off valve provided between the liquid supply source and the reservoir portion, a discharge mechanism configured to discharge the liquid in the liquid supply flow path by depressurizing the liquid supply flow path, and a pressure mechanism configured to apply a negative pressure to the interior of the reservoir portion from the exterior. A negative pressure equal to or larger than a negative pressure applied to the interior of the reservoir portion by the discharge mechanism, is applied to the interior of the reservoir portion in a maintenance operation in which the liquid supply flow path is depressurized by the discharge mechanism while the on-off valve is closed. 1. A liquid ejecting apparatus comprising:a liquid ejecting portion configured to eject a liquid through a nozzle;a liquid supply flow path configured to supply the liquid stored in a liquid supply source to the liquid ejecting portion;a reservoir portion provided in the liquid supply flow path and configured to store the liquid;an on-off valve provided on a side of the liquid supply source relative to the reservoir portion in the liquid supply flow path and configured to open and close the liquid supply flow path;a discharge mechanism configured to discharge the liquid in the liquid supply flow path from a side of the liquid ejecting portion relative to the reservoir portion in the liquid supply flow path by depressurizing the liquid supply flow path;a pressure mechanism configured to apply a negative pressure to an interior of the reservoir portion from exterior; anda control portion configured to control the pressure mechanism to apply, to the interior of the reservoir portion, a negative pressure equal to or larger than a negative pressure applied to the interior of the reservoir ...

Liquid discharge head, liquid discharge device, and liquid discharge apparatus

A liquid discharge head includes a nozzle plate, a channel substrate, a common-liquid-chamber substrate, an adhesive, and a sealant. The nozzle plate includes a plurality of nozzles to discharge liquid. The channel substrate includes a plurality of individual liquid chambers communicated with the plurality of nozzles. The common-liquid-chamber substrate includes a common liquid chamber to supply the liquid to the plurality of individual liquid chambers. The adhesive bonds two of the nozzle plate, the channel substrate, and the common-liquid-chamber substrate. The adhesive faces a channel through which the liquid flows. The sealant surrounds the adhesive at an opposite side of the channel relative to the adhesive.

Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and ultrasonic sensor

A liquid ejecting head which includes a piezoelectric element which includes a first electrode, a piezoelectric layer which is provided on the first electrode, and on which a plurality of piezoelectric films are laminated, a second electrode which is provided on the piezoelectric layer, and a plurality of active units which are interposed between the first electrode and the second electrode, and a pressure generating chamber which communicates with nozzle openings which eject liquid, and in which a pressure fluctuation is generated by the piezoelectric element, in which a plurality of grooves with inner faces facing the first electrode side are formed on a side surface of the piezoelectric layer on each interface of each of the piezoelectric films along a first direction and a second direction which cross a third direction which goes from the first electrode to the second electrode.

Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and ultrasonic measuring apparatus

A piezoelectric material is expressed as a mixed crystal including a complex oxide having a perovskite structure and a rhombohedral structure and a complex oxide having a perovskite structure and a tetragonal structure, and the molar ratio of the complex oxide having a rhombohedral structure to the complex oxide having a tetragonal structure (rhombohedral crystal/tetragonal crystal) is 0.54 to less than 1.20.

LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS

A liquid ejecting head which includes a flow passage forming substrate that has pressure generating chambers which communicate with nozzles capable of ejecting a liquid, pressure generating elements which apply pressure to the pressure generating chambers in order to eject the liquid from the nozzles, lead electrodes that supply electric signals to the pressure generating elements, wiring substrates that supply the electric signals to the lead electrodes, and a supporting member that supports the wiring substrates so as to raise the wiring substrates from a surface of the liquid ejecting head having the lead electrodes provided thereon.

Ink-jet recording head and ink-jet recording apparatus

An ink-jet recording head includes a passage-forming substrate and a plurality of piezoelectric elements provided on one side of the passage-forming substrate via an vibration plate, the passage-forming substrate having a plurality of pressure generating chambers formed therein in such a manner as to communicate with corresponding nozzle orifices and as to be separated from one another by means of a plurality of compartment walls, the plurality of piezoelectric elements each including a lower electrode, a piezoelectric layer, and an upper electrode. The vibration plate undergoes tensile stress; the number n of the pressure generating chambers arranged per inch is more than 200 and is related to width w of the pressure generating chamber and thickness d of the compartment wall as represented by (w+d)=1 inch/n; and the thickness d of the compartment wall is more than 10 mum and is related to thickness h of the passage-forming substrate as represented by (dx3)<=h<=(dx6). Thus, the rigidity ...

Liquid Discharging Head

A liquid discharging head, having a plurality of individual flow paths, a common flow path, a damper, a heater pattern, a heat source, and a connecting pattern, is provided. The individual flow paths are arrayed in a first direction. The common flow path extends in the first direction throughout the individual flow paths and is connected with the individual flow paths. The damper extends in the first direction throughout the individual flow paths. A part of the damper forms an inner face that defines an end of the common flow path in a second direction. The heater pattern is provided to the damper. The connecting pattern connects the heater pattern with the heat source. In a range, in which in the first direction the individual flow paths are arranged, the heater pattern extends in the first direction without inclining with respect to the first direction at 45 degrees or larger.

Actuator device, liquid jet head and liquid jet apparatus

Provided are an actuator device, a liquid jet head and a liquid jet apparatus, which can improve reliability by preventing peeling-off of respective films forming a vibration plate. The vibration plate has a first oxide film (elastic film 50 ) formed on the one surface of a passage-forming substrate 10, and a second oxide film (insulation film 55 ) formed on the first oxide film 50 by use of a sputtering method. In only a part of an interface between the first and second oxide films 50 and 55, an altered layer is formed which has a first element that is a constituent element other than oxygen included in the first oxide film 50 and a second element that is a constituent element other than oxygen included in the second oxide film 55, and which is a layer in which a proportion of the first element is lower than that in the first oxide film 50 and a proportion of the second element is lower than that in the second oxide film 55. A proportion of the altered layer in the entire interface between ...

Liquid Ejecting Device

A liquid ejecting device, including: a flow-path defining member having a pressure chamber formed therein; a piezoelectric actuator constituted by a plurality of layers which includes a piezoelectric layer, a common electrode, and an individual electrode, superposed on the flow-path defining member, and having a through-hole communicating with the pressure chamber; an annular conductor disposed on one of opposite surfaces of the piezoelectric actuator remote from the flow-path defining member such that a part of the layers are sandwiched between the annular conductor and the common electrode, the annular conductor surrounding a periphery of the through-hole; and a liquid supply member having a supply path communicating with the through-hole and bonded to the one of the opposite surfaces via the annular conductor, wherein the annular conductor is connected to a terminal configured to be given a predetermined constant potential and is exposed to a flow path defined by the through-hole.

Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus

A piezoelectric element comprises a piezoelectric layer consisting a complex oxide having a perovskite structure containing bismuth and iron and electrodes provided to the piezoelectric layer. The complex oxide further contains a first dopant element that is at least one of magnesium and zinc and a second dopant element that is cerium.

Piezoelectric element and liquid ejecting head

Provided is a piezoelectric element including a first electrode provided above a substrate, a piezoelectric layer including a plurality of crystal grains containing potassium, sodium, and niobium and provided above the first electrode, and a second electrode provided above the piezoelectric layer. An atom concentration NK1(atm %) of potassium contained in grain boundaries of the crystal grains and an atom concentration NK2(atm %) of potassium contained in the crystal grains satisfy a relationship of 1.0 Подробнее

Liquid ejecting head and liquid ejecting apparatus

A liquid ejecting head including a flow path forming substrate in which a pressure chamber in communication with a nozzle is formed, a diaphragm formed on the flow path forming substrate, and a piezoelectric actuator including a first electrode, a piezoelectric layer, and a second electrode that are formed on the diaphragm. In the liquid ejecting head, a center portion of the diaphragm is not provided with an active portion, which is a portion where the piezoelectric layer is interposed between the first electrode and the second electrode, a protective film that covers the diaphragm is formed in the center portion, and compressive stress of the protective film is larger than that of the diaphragm.

Liquid jet head and liquid jet apparatus

Piezoelectric element, method of manufacturing the same, liquid-jet head, method of manufacturing the same, and liquid-jet apparatus

Disclosed are a piezoelectric element, which has a high withstand voltage and a longer durability life, a manufacturing method of the piezoelectric element, a liquid-jet head, a manufacturing method of the liquid-jet head, and a liquid-jet apparatus. The manufacturing method of a piezoelectric element includes the steps of: forming a piezoelectric layer by forming, on the lower electrode, a piezoelectric precursor film in which Pb, Zr and Ti are contained and the composition ratio of Pb, Zr and Ti becomes Pb/(Zr+Ti)=1.0 to 1.3 after the piezoelectric precursor film has been baked, and to which at least any one dopant selected from the group consisting of manganese, nickel and strontium is doped, and by then baking the piezoelectric precursor film for half an hour to three hours at 650 to 750°C; and forming an upper electrode on the piezoelectric layer.

LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS

LIQUID EJECTING HEAD, LIQUID EJECTING HEAD UNIT, AND LIQUID EJECTING APPARATUS

PROBLEM TO BE SOLVED: To provide a liquid ejecting head, a liquid ejecting head unit, and a liquid ejecting apparatus, which suppress cross talk of a piezoelectric element and a partition, also suppress displacement of a landing position by suppressing a voltage drop, and equalizes liquid ejecting characteristics to improve a printing quality. SOLUTION: Piezoelectric body active parts 320 being substantial drive parts of a piezoelectric element 300 defined by first electrodes 60 as individual electrodes and a second electrode 80 as a common electrode, are provided in the opposite region of respective pressure generating chambers 12. In the opposite region of partitions 11 of the piezoelectric element 300, openings 301 where the second electrode 80 and a piezoelectric layer 70 are eliminated, are provided. A wiring electrode provided on a flow path forming substrate 10 and the second electrode 80 are connected by common lead electrodes 91 provided among the respective piezoelectric body ...

液体噴射ヘッド、液体噴射装置および圧電素子

ACTUATOR, DROPLET DISCHARGE HEAD, INK CARTRIDGE, AND IMAGE FORMING APPARATUS

PROBLEM TO BE SOLVED: To provide an actuator achieving reduction in voltage. SOLUTION: The actuator includes a diaphragm A and a piezoelectric element B disposed in tight contact with a diaphragm side electrode 8 mounted on one face of the diaphragm A to be piezoelectrically displaced for displacing and deforming the diaphragm A. The piezoelectric element B includes a plurality of piezoelectric films 9 and 11 between a piezoelectric element side electrode 12 and the diaphragm side electrode 8, and an intermediate electrode 10 consisting of a plurality of adjacent layers laminated alternately with the respective piezoelectric films. Each of the piezoelectric films is displaced by applying a potential between the respective layers constituting the intermediate electrode 10 and the diaphragm side electrode 8 or the piezoelectric element side electrode 12. COPYRIGHT: (C)2010,JPO&INPIT ...

Tintenstrahlaufzeichnungskopf und diesen enthaltendes Tintenstrahlaufzeichnungsgerät

Tintenstrahlaufzeichnungskopf, sein Herstellungsverfahren und Aufzeichnungsvorrichtung

Droplet deposition head

An actuator component for a droplet deposition head 100 includes a plurality of fluid chambers 110 arranged side-by-side in an array, with certain of the fluid chambers being firing chambers, each of which is provided with at least one piezoelectric actuating element 131, 132 for causing droplet ejection from a nozzle for that firing chamber; and a plurality of non-actuable walls (140, Fig.1A), each of which is formed of piezoelectric material and bounds at least one of the firing chambers. Each of the piezoelectric actuating elements is provided with at least a first and a second actuation electrode 151, 152. Each of the non-actuable walls is provided with at least a first and a second isolated electrode 153,154. The first and second isolated electrodes for each non-actuable wall being electrically isolated so that, when fluid within one of the at least one of said firing chambers bounded by that non-actuable wall applies a force Ff to that non-actuable wall, a charge is induced in the ...

Droplet deposition head

FLUID JET HEAD AND FLUID JET DEVICE

INK RADIATION PRINT HEAD AND INK RADIATION RECORDING DEVICE

Device mounting structure, method of mounting device, liquid-jet head, connector, and semiconductor device

The invention provides a device mounting structure, a method of mounting device, a liquid-jet head, a connector, and a semiconductor device. A device package structure includes: a base body having a conductive connection portion and a level difference portion; a device arranged on the base body, having a connection terminal electrically connected to the conductive connection portion via the level difference portion on the base body; and a connector electrically connecting the connection terminal and the conductive connection portion, having substantially the same height as a height of the level difference portion.

Liquid ejecting head, liquid ejecting head unit, liquid ejecting apparatus and method of manufacturing liquid ejecting head

The invention provides a liquid ejecting head in which a circuit board is reliably sealed and adhesion positional deviation between divided holding members and connection displacement of flow passages can be reduced, a liquid ejecting head unit, a liquid ejecting apparatus and a method of manufacturing the liquid ejecting head. The liquid ejecting head comprises: a holding member which has a first holding member holding the head main body and a second holding member mounted on the side of the first holding member opposite to the head main body via an adhesive and a circuit board which is held in a circuit board holding section corresponding to a space between the first and second holding members and to which a driving wiring of the head main body is connected, wherein the circuit board holding section between the first and second holding members is sealed by an adhesive in an area other than an area where a connection wiring is connected to the circuit board, the first and second holding ...

Flow path structure, manufacturing method thereof, liquid ejecting head and liquid ejecting apparatus

Liquid ejecting head, liquid ejecting head unit, and liquid ejecting apparatus

DEVICE PACKAGE STRUCTURE USING ENHANCED CONNECTOR STRUCTURE CAPABLE OF PACKAGING EFFECTIVELY DEVICE WITHOUT DEGRADATION OF ELECTRICAL CONNECTION, DROPLET SPRAYING HEAD, SEMICONDUCTOR DEVICE, CONNECTOR AND DEVICE PACKAGING METHOD

PURPOSE: A device package structure, a droplet spraying head, a semiconductor device, a connector and a device packaging method are provided to improve the yield of a device packaging process without the degradation of an electric connection in spite of a narrow pitch of a connection terminal and a connection portion by using an improved connection structure. CONSTITUTION: A device packaging structure includes a base body, a first conductive connection portion, a device, a second conductive connection portion and a connector. The base body includes a first surface, a stepped portion and a second surface on the first surface via the stepped portion. The first conductive connection portion is formed on the first surface of the base body. The device is arranged on the second surface. The device has a connection terminal(200a) for contacting electrically the first conductive connection portion. The second conductive connection portion is connected to the connection terminal. The connector(350 ...

LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS

A flow path forming substrate has a pressure generation chamber communicating with a nozzle opening; and a communication plate having a supply path communicating with a manifold common to and communicating with the pressure generation chamber. A recess of the manifold opens opposite to the flow path forming substrate. The recess has a first recess, and a second recess deeper than the first recess. Supply paths are open on a bottom surface of the first recess, and are arranged in a first direction between the first and second recesses. An inclined surface inclined toward the bottom surface of the second recess from the bottom surface of the first recess is provided along the first direction. The inclined surface is configured as alternately repeated first and second inclined surfaces with different angles. A pitch of adjacent second inclined surfaces is smaller than a pitch of adjacent supply paths.

ELECTRONIC DEVICE, PIEZOELECTRIC DEVICE, LIQUID EJECTING HEAD, AND MANUFACTRUING METHODS FOR ELECTRONIC DEVICE, PIEZOELECTRIC DEVICE, AND LIQUID EJECTING HEAD

An electronic device includes a capacitor that is configured with a first electrode layer, an insulating layer, and a second electrode layer being formed in the order listed herein. At least one end of the capacitor is defined by an end of the second electrode layer. The insulating layer is provided so as to extend to a non-element region that is on the outside of one end of the capacitor. The insulating layer under the non-element region is formed thinner than the insulating layer under the capacitor. A difference between the thickness of the insulating layer under the non-element region and the thickness of the insulating layer under the capacitor is equal to or less than 50 nm.

Liquid ejecting head and liquid ejecting apparatus

A liquid ejecting head comprises a unit head bonded to a communication substrate. Liquid chamber forming portions are formed in the unit case, along a first direction at positions that are separated by a partition wall. Empty liquid chamber portions and supply-side communication paths are formed in the communication substrate. The supply-side communication paths include a common communication path formed in an opposite side with a thin thickness portion left in the surface side of the communication substrate, and individual communication paths. With a surface of the partition wall and a surface of the thin thickness portion bonded together, the empty liquid chamber forming portions and the empty liquid chamber portions communicate with each other so as to define common liquid chambers.

DEVICE USING A PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING THE SAME

An inkjet printing head includes a piezoelectric element having a lower electrode , a piezoelectric film formed above the lower electrode , and an upper electrode formed above the piezoelectric film , a hydrogen barrier film covering an entirety of a side surface of the upper electrode and the piezoelectric film , and an interlayer insulating film that has an opening at an upper surface center of the upper electrode , is laminated on the hydrogen barrier film , and faces the entirety of the side surface of the upper electrode and the piezoelectric film across the hydrogen barrier film 1. A device using a piezoelectric element comprising:a piezoelectric element having a lower electrode, a piezoelectric film formed above the lower electrode, and an upper electrode formed above the piezoelectric film;a hydrogen barrier film covering an entirety of a side surface of the upper electrode and the piezoelectric film, and;an interlayer insulating film having an opening at an upper surface center of the upper electrode, being laminated on the hydrogen barrier film, and facing the entirety of the side surface of the upper electrode and the piezoelectric film across the hydrogen barrier film.2. The device using the piezoelectric element according to claim 1 , further comprising:a substrate having a cavity; anda movable film held on the substrate so as to face the cavity; andwherein the piezoelectric element is disposed above the movable film.3. The device using the piezoelectric element according to claim 2 , wherein a metal barrier film is interposed between the movable film and the piezoelectric element.4. The device using the piezoelectric element according to claim 3 , wherein the metal barrier film is an AlOfilm.5. The device using the piezoelectric element according to claim 2 , wherein above the piezoelectric element claim 2 , a contact hole claim 2 , exposing a portion of the upper electrode claim 2 , is formed in the interlayer insulating film claim 2 , andabove the ...

Liquid Discharge Head, Liquid Discharge Apparatus, And Wiring Substrate

There is provided a liquid discharge head including a first wiring through which a drive signal is input to a wiring substrate, in which the wiring substrate has a substrate having a first surface and a second surface that opposes the first surface, a second wiring formed on the first surface, a third wiring formed on the second surface, a fourth wiring and a fifth wiring that pass through the substrate and electrically couples the second wiring with the third wiring, and an electrode provided on the second wiring and electrically couples the second wiring with the first wiring, and the electrode is positioned between a first coupling point at which the fourth wiring is electrically coupled to the second wiring and a second coupling point at which the fifth wiring is electrically coupled to the second wiring, in the second wiring.

Piezoelectric print head and piezoelectric ink jet printer

A piezoelectric print head includes a piezoelectric element; a nozzle that ejects liquid when the piezoelectric element is driven; a transmission gate that switches between supply and non-supply of a driving signal for driving the piezoelectric element to the piezoelectric element; a history-information memory that holds history information indicating history of ON or OFF of the transmission gate; and a switch-operation stop controller that stops a switch operation that causes the transmission gate to be turned OFF from ON or to be turned ON from OFF, in accordance with the history information.

Liquid discharge head

There is provided a liquid discharge head, including: a piezoelectric body having a plurality of piezoelectric layers stacked on top of each other in a stacking direction; individual electrodes; and a first common electrode. Each of the individual electrodes has a first portion and a second portion arranged in the first direction at an interval, and a third portion coupling the first portion with the second portion. The first common electrode includes a first extending portion as well as first protrusions and second protrusions protruding from the first extending portion. Portions of the first extending portion overlapping in the stacking direction with the third portions are formed having through holes passing through the first common electrode in the stacking direction.

LIQUID EJECTING HEAD, LINE HEAD, AND LIQUID EJECTING APPARATUS

A liquid ejecting head includes a liquid ejecting portion 32 that ejects ink from a plurality of nozzles N, a fixation plate 38 that includes a first surface Q1 to which the liquid ejecting portion 32 is fixed and a second surface Q2 which is opposite to the first surface Q1 and that is provided with an opening 52 formed thereon which exposes the plurality of nozzles N, and a protrusion 60 that is installed on the fixation plate 38 and protrudes toward the medium side from the second surface Q2.

Liquid jet head and its manufacturing method

A liquid jet head includes: a substrate; a pressure generation chamber provided in the substrate; an elastic plate provided above the substrate; a capacitor structure section provided above the elastic plate, the capacitor structure section including a lower electrode layer, a piezoelectric layer and an upper electrode layer; a porous layer provided above the capacitor structure section; a seal layer provided on the porous layer; and a void section formed between the capacitor structure section and the porous layer.

Liquid ejection apparatus

A liquid ejection apparatus includes: a head including: a nozzle configured to eject liquid; a supply port to which the liquid is continuously supplied; and a recovery port from which the liquid is continuously recovered; a supply flow channel through which the liquid is supplied to the head; and a recovery flow channel through which the liquid is recovered from the head. A flow channel resistance inside the head from the supply port to the nozzle is R_HEAD_IN. A flow channel resistance inside the head from the nozzle to the recovery port is R_HEAD_OUT. A flow channel resistance of the supply flow channel is R_CHANNEL_IN. A flow channel resistance of the recovery flow channel is R_CHANNEL_OUT. The supply and recovery flow channels are laid out so as to satisfy a condition of R_CHANNEL_IN>R_CHANNEL_OUT when R_HEAD_IN>R_HEAD_OUT, or a condition of R_CHANNEL_IN Подробнее

Liquid Discharge Head

There is provided a liquid discharge head including: a plurality of pressure chambers including pressure chambers aligned in a first direction orthogonal to a vertical direction so as to form a first pressure chamber group, and pressure chambers aligned in the first direction so as to form a second pressure chamber group arranged side to side relative to the first pressure chamber group in a second direction; a return channel extending in the first direction; and return connecting channels each connecting the return channel and one of the plurality of pressure chambers to each other, wherein a height of an upper surface of each of the return connecting channels is not less than a height of an upper surface of one of the plurality of pressure chambers which is connected to the return channel by each of the return connecting channels.

LIQUID EJECTING HEAD, METHOD OF PRODUCING THE SAME, AND LIQUID EJECTING APPARATUS

A liquid ejecting head includes a channel-forming substrate that communicates with nozzle orifices for ejecting a liquid and that includes a plurality of pressure-generating chambers separated by a plurality of partition walls and arranged in parallel in a direction in which a short side thereof extends; and pressure-generating elements that are provided on a surface of the channel-forming substrate, with a diaphragm therebetween, and that provide the pressure-generating chambers with a pressure change. In the liquid ejecting head, recesses that open to the side of the pressure-generating chambers are provided on areas of the diaphragm, the areas facing the pressure-generating chambers; opening edges of each of the recesses are disposed at the same positions as corners each defined by an inner surface of the corresponding partition wall, the inner surface defining a side surface of the pressure-generating chamber, and a surface of the partition wall that is joined to the diaphragm; and ...

LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND ACTUATOR DEVICE

A liquid ejecting head including a pressure-generating chamber which communicates with a nozzle opening, and a piezoelectric element including a first electrode, a piezoelectric layer formed above the first electrode and having a perovskite structure represented by the general formula ABO 3 , and a second electrode formed above the piezoelectric layer, wherein the piezoelectric layer, lead, zirconium, and titanium are present at A sites of the perovskite structure, and lead, zirconium, and titanium are present at B sites of the perovskite structure.

LIQUID EJECTION HEAD AND LIQUID EJECTION APPARATUS

A liquid ejection head includes: a pressure chamber communicating with a nozzle, the pressure chamber extending along a first axis; a liquid storage chamber that stores liquid which is supplied to the pressure chamber, the liquid storage chamber partially overlapping the pressure chamber when viewed in a direction of a second axis, which intersects the first axis; and a first communication flow path and a second communication flow path extending in a direction of the second axis and allowing the pressure chamber and the liquid storage chamber to communicate with each other.

LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS

A liquid ejecting head includes first and second individual flow paths arranged side by side along a first direction; a first nozzle communicating with the first individual flow path; a second nozzle communicating with the second individual flow path; and a first common liquid chamber coupled to one ends of the first and second individual flow paths. The first individual flow path includes a first pressure chamber in which an energy generating element is provided, and a first communication path through which the first pressure chamber communicates with the first nozzle. In a plan view toward an opening surface of the nozzle, in the first communication path, an end portion close to the first nozzle and another end portion close to the first pressure chamber are disposed at positions which do not overlap each other.

PIEZOELECTRIC ACTUATOR, AND LIQUID DROPLET DISCHARGING HEAD

PROBLEM TO BE SOLVED: To accurately detect a crack in a region facing a land in a piezoelectric layer. SOLUTION: Independent electrodes 18 for each pressure chamber 16 are formed on an upper surface of a piezoelectric layer 17a. The independent electrode 18 includes a surface electrode 18a facing the pressure chamber 16, a lead-out electrode 18b and a land 18c arranged at a tip of the lead-out electrode 18b. The land 18c is joined to a FPC terminal, and an internal electrode 19 is formed on a lower surface of the piezoelectric layer 17a. The internal electrode 19 includes individual electrodes 19a formed for each pressure chamber 16, detection electrodes 19b formed for each land 18c, extended electrodes 19c connecting the individual electrode 19a to the detection electrode 19b, and spare electrodes 19d arranged in paralleled with the extended electrode 19c. The detection electrode 19b is formed into a shape drawn by a single stroke of the brush which has an outer periphery extending so ...

PIEZOELECTRIC ACTUATOR AND LIQUID EJECTING HEAD

PROBLEM TO BE SOLVED: To solve the following problem: stress concentrates in an area of a substrate outside an area in which a piezoelectric element is disposed, consequently a crack is generated between the end portion of the piezoelectric element and a support portion supporting the substrate. SOLUTION: The piezoelectric actuator includes the piezoelectric element 300 that includes: an insulator film 55 and an elastic film 50 supported by a partition 11 as a support portion and functioning as the substrate; a lower electrode film 60 formed on the substrate and functioning as a lower electrode, and a piezoelectric layer 70 formed on the lower electrode film 60; and upper electrode films 80, 81 and 82 formed on the piezoelectric layer 70 and functioning as an upper electrode. The piezoelectric actuator further includes a drive circuit that applies a voltage to the piezoelectric element 300. The upper electrode film has upper electrode films 81 and 82 positioned on an outer peripheral side ...

Piezoelektrisches Element, Flüssigkeitsstrahlkopf und Flüssigkeitsstrahlvorrichtung

INK RADIATION RECORDING HEAD AND INK RADIATION RECORDING APPARATUS

INK RADIATION RECORDING HEAD, PROCEDURE FOR THE PRODUCTION AND DEVICE FOR THE INK RADIATION NOTING

Liquid ejection head wiring member,liquid ejection head, and liquid ejection device

Liquid ejecting apparatus

The invention provides a piezoelectric element having the piezoelectric material showing an electric field induced phase transition and a liquid ejecting apparatus which is driven at an expected vibration amplitude. The liquid ejecting apparatus comprises a pressure generation chamber which is communicated with a nozzle opening which ejecting the liquid, a piezoelectric element having a first electrode a piezoelectric layer formed on the first electrode and a second electrode formed on the piezoelectric layer, and a driving unit which supplies a driving signal which enables the pressure generation chamber to generate the pressure variation to the piezoelectric element, thus discharging liquid drops. The piezoelectric layer shows electric field induced phase transition and when among voltages at which the piezoelectric layer shows the electric field induced phase transition a voltage having a higher absolute value is defined as VF and a voltage having a lower absolute value is defined as ...

Liquid-repellent member, nozzle plate, liquid-jet head using the same, and liquid-jet apparatus

Liquid ejecting head, liquid ejecting apparatus, and actuator

Piezoelectric element, piezoelectric element application device and method for manufacturing piezoelectric element

Droplet ejection head and droplet ejection apparatus

The present invention provides a droplet ejection head. The droplet ejection head includes pressure generating chambers that are connected to nozzle apertures, an elastic membrane (i.e., a diaphragm)that constitutes a portion of the pressure generating chambers, piezoelectric elements that are placed on a surface of the elastic membrane on the opposite side from the pressure generating chambers,and cause pressure changes to be generated inside the pressure generating chambers, and drive IC (i.e., drive elements) that drive the piezoelectric elements. In this droplet ejection head, the driveIC are flip-chip bonded to terminals that are provided on the piezoelectric elements.

Liquid discharge head, liquid discharge device, of piezoelectric device

DROPLET DISCHARGING HEAD AND A MANUFACTURING METHOD FOR THE SAME, AND A DROPLET DISCHARGING APPARATUS, CAPABLE OF IMPROVING RELIABILITY FOR LIQUID RESISTANCE OF THE DROPLET DISCHARGING HEAD BY COATING SILICON CARBIDE FILMS AS AN INNER SURFACE TREATMENT FILM

PURPOSE: A droplet discharging head and a manufacturing method for the same, and a droplet discharging apparatus are provided to protect each of devices constituting a channel of liquid from the liquid. CONSTITUTION: A droplet discharging apparatus includes a paper supply unit(12), a resister controlling unit(14), a recording head unit(16), a recording unit(20), and a discharging unit(22). The paper supply unit transmits a recording paper(P). The resister controlling unit controls the pose of the recording paper. The recording head unit image-forms on the recording paper by discharging an ink droplet. The recording unit has a maintenance unit(18) performing the maintenance of the recording head unit. The discharging unit discharges the image-formed recording paper from the recording unit. © KIPO 2007 ...

ELECTRONIC DEVICE

The present invention is to provide an electronic device which is capable of suppressing deformation due to a restoring force of a bump electrode. The electronic device includes a pressure chamber forming substrate (29) which is provided with a piezoelectric element (32) causing a driving region (a1) to be deformed on the driving region (a1) capable of being bent and deformed, a sealing plate (33) which is disposed at intervals with respect to the pressure chamber forming substrate (29) in a state of interposing a bump electrode (40) having elasticity therebetween, and an adhesive (43) which bonds the pressure chamber forming substrate (29) and the sealing plate (33) in a state of maintaining the interval, and the adhesive (43) is provided on at least a region between the bump electrode (40) and the driving region (a1).

INK JET HEAD AND INK JET DRAWING DEVICE

The purpose of the present invention is to provide: a highly-reliable ink jet head in which an adhesive force can be strengthened when a head substrate and a wiring board are joined via an adhesive resin layer; and an ink jet drawing device. The ink jet head is provided with: a plurality of pressure chambers that contain ink to be discharged from a nozzle; the head substrate, which has a plurality of actuators that apply pressure to the ink inside the pressure chambers; and the wiring board, which has wiring terminals that are electrically connected to individual electrodes provided to the plurality of actuators, and to a common electrode that is commonly provided to the plurality of actuators. By joining the wiring board from above the head substrate via the adhesive resin layer, the common electrode and the individual electrodes on the top surface of the head substrate are electrically connected to the wiring terminals of the wiring board. The common electrode is laminated on the top ...

INK JET RECORDING HEAD, METHOD FOR MANUFACTURING THE SAME, AND INK JET RECORDER

L'invention concerne une tête d'enregistrement à jet d'encre, dans laquelle la rigidité d'une cloison est augmentée, des chambres de production de pression peuvent être agencées de manière très compacte, et la diaphonie entre ces chambres peut être réduite. L'invention concerne également un procédé de production de cette tête d'enregistrement à jet d'encre, ainsi qu'un enregistreur à jet d'encre. Cette tête comprend un substrat (10) formant des gorges et comprenant une couche de silicium monocristallin dans lequel est définie une chambre de production de pression (15) qui communique avec une ouverture de buse, un élément piézo-électrique (300) étant monté dans une région faisant face à cette chambre (15), par l'intermédiaire d'un diaphragme constituant une partie de la chambre de production de pression (15) et produisant un changement de pression dans cette chambre (15), laquelle comporte une ouverture ménagée dans un côté avant du substrat (10), mais pas à travers ce substrat (10). La ...

Liquid Ejecting Apparatus, Method For Manufacturing Liquid Ejecting Apparatus, And Ink-Jet Printer

An ink-jet head includes a common liquid chamber, a plurality of pressure chambers, a plurality of nozzles which eject ink, a plurality of individual ink channels communicating with the common liquid chamber, the pressure chambers and the nozzles, and a piezoelectric actuator which selectively varies the volume of the plurality of pressure chambers. The common liquid chamber is disposed on the side opposite to the nozzles with respect to the piezoelectric actuator. A through-hole which forms a part of the individual ink channels is formed in the piezoelectric actuator. This structure ensures a large region in which the nozzles can be disposed, and allows the nozzles to be arranged at higher density.

METHOD FOR MANUFACTURING LIQUID JET HEAD

A method for manufacturing a liquid jet head is provided which includes a flow channel board having at least pressure-generating chambers communicating with nozzle holes and a pressure generator above one surface that applies pressure for jetting liquid to the pressure-generating chambers, and a silicon single-crystal reservoir board having at least a reservoir section that communicates with the pressure-generating chambers and that is defined by a through hole passing through the reservoir board and a step with a riser formed so as to open up the through hole at one surface. In the method, a mask pattern having an opening is formed on a reservoir-forming board intended for the reservoir board. The opening has a correction pattern on its wall and a dummy mask pattern is formed in the opening. The correction pattern serves to expose a predetermined crystal plane of the reservoir-firming board to define the riser of the step. The dummy mask pattern has a plurality of separate mask portions ...

Piezoelectric Element And Piezoelectric Element-Applied Device

A piezoelectric element includes a substrate, a first electrode formed on the substrate, a piezoelectric layer, which is a layered structure of a plurality of piezoelectric films each containing potassium, sodium, and niobium, formed on the first electrode, and a second electrode formed on the piezoelectric layer. A sodium concentration in the piezoelectric layer has a Na local maximum value, which is a local maximum value of the sodium concentration, in a first piezoelectric film, which is among the plurality of piezoelectric films, in the vicinity of the first electrode, a sodium concentration gradient decreasing from the Na local maximum value toward the second electrode, and a Na local minimum value, which is a local minimum value of the sodium concentration, near a boundary between the first piezoelectric film and a second piezoelectric film formed immediately above the first piezoelectric film.

Liquid ejecting head, liquid ejecting apparatus, and method for manufacturing liquid ejecting head

A liquid ejecting head is provided which ejects liquid from nozzle openings by driving pressure generating elements, and includes: at least two rows of lead electrodes that supply an electrical signal to the pressure generating elements; and at least two wiring boards for supplying the electrical signal to the lead electrodes, wherein: the wiring boards respectively have individual wires which are electrically connected to the pressure generating elements, respectively, via the lead electrodes, and common wires which are electrically connected in common to a plurality of pressure generating elements via the lead electrodes; and, the wiring boards are formed such that a spacing between the respective common wires of the two opposing wiring boards is narrower than a spacing between the respective individual wires of the two opposing wiring boards.

LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS

A liquid ejecting head comprising: a pressure chamber substrate where pressure chambers that communicates with nozzle holes are provided, and a piezoelectric element including a first conductive layer, a piezoelectric material layer, and a second conductive layer, wherein the piezoelectric element has an overlap area that overlaps the pressure chamber, the first conductive layer, the piezoelectric material layer, and the second conductive layer, wherein the second conductive layers overlap a plurality of the pressure chambers continuously, wherein, the first conductive layer is provided in each of the overlap areas and has an end portion area at one end side of the overlap area in the longitudinal direction, and wherein a width of the end portion area gets narrow in the lateral direction as the end portion area directs to the end of the longitudinal direction.

Liquid ejecting head and liquid ejecting apparatus

A liquid ejecting head in which a flow path substrate having a communication hole communicating with a nozzle and a pressure chamber substrate having a space that is a pressure chamber are at least laminated includes: an actuator having an active section that is interposed between electrodes and applies pressure to the pressure chamber. The pressure chamber substrate has a first space positioned in a region corresponding to the active section and a second space positioned nearer to the nozzle than the first space and communicating with the first space among the spaces. The communication hole does not overlap with the first space and overlaps with at least a part of the second space in a lamination direction.

INKJET PRINT HEAD AND METHOD FOR MANUFACTURING SUCH PRINT HEAD

A print head comprises a pressure chamber in fluid communication with a nozzle and an actuator structure in operative communication with the pressure chamber for generating a pressure wave in the pressure chamber. The actuator structure comprises a membrane, wherein a first surface of the membrane forms a flexible wall of the pressure chamber and a piezo actuator, wherein the piezo actuator is arranged on a second surface of the membrane, the second surface being opposite of the first surface, such that the membrane is deformed at the position of the piezo actuator upon actuation of the piezo actuator. In the print head, the membrane is pivotably clamped between a first structure layer and a second structure layer such that the membrane pivots at the location of clamping upon deformation of the membrane due to actuation of the piezo actuator.

Liquid ejecting head, liquid ejecting head unit, and liquid ejecting apparatus

There is provided a liquid-ejecting head including: a fixing board which can abut against a cap for a liquid-ejecting surface at a ring-shaped abutting area; and a driving element for ejecting liquid via nozzle openings provided on the liquid-ejecting surface. The fixing board has an acute-angle portion and an obtuse-angle portion. The abutting area includes: a pair of first-curved parts corresponding to the acute-angle portion; a pair of second-curved parts corresponding to the obtuse-angle portion; and a plurality of straight-line parts which can connect the two curved parts. On the liquid-ejecting surface, among a first-intersection point on virtual lines extended from each of the two straight-line parts connected the first-curved part and a second-intersection point on virtual lines extended from each of the two straight-line parts connected to the second-curved part, the fixing board has reference holes positioned nearer to the first-intersection point than the second-intersection ...

Liquid ejecting head, liquid ejecting device and piezoelectric element

A liquid ejecting head comprises a pressure generating chamber communicating with a nozzle opening, and a piezoelectric element having a piezoelectric layer and an electrode installed to the piezoelectric layer, wherein the piezoelectric layer comprises a complex oxide having a Perovskite-type structure comprising bismuth and iron and wherein nitrogen is included at some oxygen sites.

LIQUID JET HEAD AND LIQUID JET DEVICE

PIEZOELECTRIC DEVICE

A substrate having a recessed portion, a diaphragm, and a piezoelectric actuator are provided, the diaphragm includes a first layer containing silicon as a constituent element, and a third layer disposed between the first layer and the piezoelectric actuator and containing zirconium as a constituent element, and a laminated side surface of the first layer and the third layer is covered with a moisture-resistant protective film containing at least one selected from the group made of oxide, nitride, metal, and diamond-like carbon.

LIQUID EJECTION HEAD AND LIQUID EJECTION APPARATUS

PROBLEM TO BE SOLVED: To provide a liquid ejection head that includes a temperature sensor which can accurately measure a temperature of discharged liquid in order to discharge the liquid in a proper drive waveform according to the viscosity of the liquid. SOLUTION: The liquid ejection head 20 includes: a nozzle plate 27 on which an nozzle opening 26 for ejecting the liquid is provided; a flow path formation substrate 21 on which a pressure generation chamber 22 communicating with the nozzle opening 26 is provided; a communicating part 23 in which the liquid to be supplied to the pressure generation chamber 22 is stored; and a piezoelectric element 30 which generates a pressure change in the liquid in the pressure generation chamber 22. In the liquid ejection head, a thermistor 52 is arranged on a surface of the flow path formation substrate 21 at an opposite side to the nozzle opening 26 and one lead wiring of the thermistor 52 is connected to a wiring layer 54B which is formed on the ...

A method for the manufacture of a MEMS device

A method for the manufacture of a microelectromechanical systems (MEMS) device comprises: forming a bonding material layer102 on a surface of a first component 100; patterning the bonding material layer 102 and the first component 100 and bonding a second component 114 to the patterned bonding material layer 112’ and first component 100. Wherein forming the bonding material layer 102 comprises partially curing a curable material on a surface of the first component 100 at a first temperature and bonding of the second 114 and first 100 components is carried out at a second temperature that is higher than the first temperature. The patterning is preferably formed by anisotropic etching using a mask.

INK RADIATION RECORDING HEAD AND THIS CONTAINING INK RADIATION RECORDING DEVICE

Method of manufacturing nozzle plate, liquid ejection head and image forming apparatus

The method of manufacturing a nozzle plate which includes a nozzle having a tapered section and a linear section includes the steps of: forming an etching stopper layer for stopping dry etching of a silicon substrate, on a first surface of the silicon substrate; forming a mask layer on a second surface of the silicon substrate reverse to the first surface; performing a first patterning process with respect to the mask layer so that an opening section is formed in the mask layer; carrying out the dry etching of the silicon substrate through the opening section in the mask layer so that the tapered section of the nozzle is formed in the silicon substrate; carrying out dry etching of the etching stopper layer through the opening section in the mask layer so that at least a part of the linear section of the nozzle is formed in the etching stopper layer; and removing the mask layer.

Liquid ejection head and liquid ejection apparatus

A liquid ejection head includes a nozzle plate on which nozzle openings for ejecting liquid are provided, a flow path formation substrate on which pressure generation chambers communicating with the nozzle openings are provided, communicating portions in which the liquid to be supplied to the pressure generation chambers is stored, and piezoelectric elements which generate pressure change in the liquid in the pressure generation chambers. In the liquid ejection head, a thermistor is arranged on a surface of the flow path formation substrate at an opposite side to the nozzle openings and one lead wiring of the thermistor is connected to wiring layers which are formed on the surface of the flow path formation substrate in a state where one side ends of the wiring layers face to the communicating portions.

Liquid ejecting head, liquid ejecting apparatus and piezoelectric element

A piezoelectric element includes a plurality of individual electrodes, a piezoelectric layer formed on each of individual electrodes, and a common electrode which is formed on the piezoelectric layer and is an electrode common to the individual electrodes. Further, a protection film covering a region, which is not covered by the common electrode on the individual electrode, is provided.

Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element

A liquid ejecting head contains a piezoelectric element having a piezoelectric layer and an electrode disposed on the piezoelectric layer, in which the piezoelectric layer contains a complex oxide containing bismuth, iron, barium, and titanium and having a perovskite structure, has a yield stress of 5.66 GPa or more, and has a Young's modulus of 114 GPa or more.

Liquid ejecting head and liquid ejecting apparatus

A liquid ejecting head includes a substrate in which pressure generation chambers that communicate with corresponding nozzle openings are formed, and piezoelectric elements having a piezoelectric material layer, a first electrode formed on the side of the substrate that faces the piezoelectric material layer, and second electrodes formed on the opposite side of the piezoelectric material layer as the side on which the first electrode is formed; the piezoelectric material layer is formed upon the entirety of the first electrode. The second electrodes are formed in correspondence with respective pressure generation chambers, and the second electrodes are formed separated from each other by regions on the piezoelectric material layer formed in a continuous manner.

Method of manufacturing liquid ejecting head, liquid ejecting apparatus, and method of manufacturing piezoelectric element

Provided is a method of manufacturing a liquid ejecting head including a pressure generating chamber communicating with a nozzle opening and a piezoelectric element including a piezoelectric layer and an electrode, the method including: forming a first piezoelectric precursor film containing Bi and Fe, or Ba and Ti; forming a first piezoelectric layer by heating and crystallizing the first piezoelectric precursor film; forming a second piezoelectric precursor film further containing at least one selected from Li, B, and Cu on the first piezoelectric layer, in addition to Bi and Fe, or Ba and Ti contained in the first piezoelectric precursor film; and forming the piezoelectric layer by heating and crystallizing the first piezoelectric layer and the second piezoelectric precursor film.

Piezoelectric thin film element and method of manufacturing the same, droplet discharge head and inkjet recording device using the piezoelectric thin film element

A piezoelectric thin film element includes a vibration plate, a lower electrode provided on the vibration plate and made of a conductive oxide, a piezoelectric thin film provided on the lower electrode and made of a polycrystalline substance, and an upper electrode provided on the piezoelectric thin film, wherein the lower electrode includes a titanium oxide film formed on the vibration plate, a platinum film formed on the titanium oxide film, and a conductive oxide film formed on the platinum film and, the platinum film and the conductive oxide film being a solid film with no holes.

Liquid ejecting head, liquid ejecting apparatus and piezoelectric element

A liquid ejecting head which discharges a liquid from a nozzle opening including a piezoelectric body layer and a piezoelectric element possessing an electrode which is arranged on the piezoelectric body layer, wherein the piezoelectric body layer consists of a complex oxide having a perovskite structure, and when 2θ is fixed within the range of 21.9° to 22.7° to scan in the direction of the χ-axis, the piezoelectric body layer has a peak in the range of 4.75° to 28.3° and when 2θ is fixed within the range of 31.1° to 32.6° to scan in the direction of the χ-axis, the piezoelectric body layer has a peak in the range of 24.8° to 40.75°.

Liquid droplet discharge head, method of manufacturing liquid droplet discharge head, and liquid droplet discharge device

In a liquid droplet discharge head, a first groove-shaped cavity is formed on a cavity plate, a second groove-shaped cavity is formed on a nozzle plate in addition to nozzle holes, when bonding the cavity plate and the nozzle plate to each other, the first groove-shaped cavity and the second groove-shaped cavity overlap to form a pressure chamber.

Liquid droplet ejecting head, printing apparatus and method of manufacturing liquid droplet ejecting head

A liquid droplet ejecting head includes: a base substrate that has a concave portion that is formed to be open toward an upper surface and a wiring pattern; and an IC package that is electrically connected to the wiring pattern. The concave portion has a bottom portion and a pair of first side wall portions which stand obliquely on the bottom portion so as to be opposed to each other. Further, the wiring pattern has a plurality of linear objects, each of which is continuous and is constituted of a first part, a second part, and a third part. In addition, the IC package is formed in a chip shape, has a plurality of terminals which are formed on a front side surface, and is disposed such that the front side surface faces the concave portion, and each terminal is electrically connected to the first part.

Liquid ejecting head and liquid ejecting system

A liquid ejecting head includes a first flow path extending in a first axial direction between a supply port and a discharge port, and a nozzle that is provided to branch from the first flow path and that discharges a liquid along a second axial direction orthogonal to the first axial direction. The nozzle includes a first nozzle portion in which a first opening for discharging the liquid is formed and a second nozzle portion in which a second opening that is a coupling port with the first flow path is formed, and a diameter r2 of the second opening in the first axial direction is larger than a diameter r1 of the first opening in the first axial direction.

LIQUID DISCHARGING APPARATUS AND WIRING MEMBER

A liquid discharging apparatus includes: liquid discharging modules which are arranged in a first direction along a predetermined plane; and a wiring member commonly joined to the liquid discharging modules. The wiring member includes: first parts joined to the liquid discharging modules, respectively, in a state that the first parts are arranged side by side in the first direction along the predetermined plane; second parts; and a sixth part. The second parts include: third parts extending from the first parts, respectively, in a second direction orthogonal to the first direction and along the predetermined plane, fourth parts extending in a third direction away from the predetermined plane, and fifth parts connected to the third parts and the fourth parts, respectively. Width in the first direction of each of the second parts is smaller than width in the first direction of the sixth part. 1. A liquid discharging apparatus comprising:head units arranged in a first direction along a predetermined plane; andflexible wiring boards drawn from the head units respectively toward a second direction orthogonal to the first direction and along the predetermined plane,wherein each of the head units includes an IC,each of the head unit has an outer shape that is a parallelogram and that is not a rectangle,each of the flexible wiring boards is joined to only one side of corresponding one of the head units, in a state of being bent toward a third direction away from the predetermined plane, andeach of the flexible wiring boards is not joined to the other sides of the corresponding one of the head units.2. The liquid discharging apparatus according to claim 1 , wherein each of the flexible wiring boards includes a driving signal wiring through which a driving signal is supplied to the corresponding one of the head units.3. The liquid discharging apparatus according to claim 1 , wherein each of the flexible wiring boards includes a constant potential wiring through which a ...

LIQUID EJECTION APPARATUS

A liquid ejection apparatus, including: first piezoelectric elements arranged on an element-disposed surface in a first direction; a protective cover covering the first piezoelectric elements and including a top wall portion and two side wall portions connected thereto; first wires drawn respectively from the first piezoelectric elements to an outside of the protective cover in a second direction parallel to the element-disposed surface and orthogonal to the first direction and extending on an outer surface of the top wall portion via an outer surface of a corresponding side wall portion; first terminals disposed on the outer surface of the top wall portion and connected respectively to the first wires; and a driver electrically connected to the first terminals, wherein a distance in the first direction between any adjacent two of the first wires on an outer surface of the protective cover is larger than that on the element-disposed surface. 1. A liquid ejection apparatus , comprising:a plurality of first piezoelectric elements disposed on an element-disposed surface of a flow-passage defining member so as to be arranged in a first direction;a protective cover disposed on the element-disposed surface so as to cover the first piezoelectric elements and including a top wall portion opposed to the first piezoelectric elements and two side wall portions connected respectively to opposite end portions of the top wall portion in a second direction parallel to the element-disposed surface and orthogonal to the first direction;a plurality of first wires drawn respectively from first piezoelectric elements to an outside of the protective cover in the second direction and extending on an outer surface of the top wall portion of the protective cover via an outer surface of a corresponding one of the side wall portions;a plurality of first terminals disposed on the outer surface of the top wall portion and connected respectively to the first wires; anda driver electrically ...

FLOW PATH STRUCTURE, LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND MANUFACTURING METHOD OF FLOW PATH STRUCTURE

A flow path structure which forms a flow path of liquid, includes: a light absorbing member (first substrate) having absorbing properties with respect to laser light; a light transmitting member (second substrate) which is joined to the light absorbing member and has transmitting properties with respect to the laser light; a first flow path (flow path) which is surrounded by a welding interface between the light absorbing member and the light transmitting member; and a second flow path which is formed in a flow path pipe (flow path pipe) which protrudes from a front surface opposite of the welding interface in the light transmitting member, and communicates with the first flow path, in which the flow path pipe is included in a region of the first flow path in a plan view from a direction orthogonal to the welding interface. 1. A flow path structure which forms a flow path of liquid , comprising:a first substrate;a second substrate joined to the first substrate; anda first flow path which is surrounded by a fixing surface on which the first substrate and the second substrate are fixed,wherein a second flow path which branches from the first flow path and in which the liquid flows in the direction intersecting with the fixing surface, is formed in one of the first substrate and the second substrate,wherein a projection portion which protrudes toward the second flow path at a branch point of the first flow path and the second flow path is formed in the other one of the first substrate and the second substrate,wherein the projection portion includes a wall surface on the upstream side and a wall surface on the downstream side in the first flow path, andwherein the wall surface on the upstream side of the projection portion has an inclined surface which is inclined so that the height of the projection portion increases toward the downstream side with respect to the direction of the flow in the first flow path.2. The flow path structure according to claim 1 ,wherein the ...

DROPLET DEPOSITION HEAD AND ACTUATOR COMPONENT THEREFOR

actuator component for a droplet deposition head made up of a number of patterned layers, each layer extending in a plane normal to a layering direction, with the layers being stacked one upon another in said layering direction. A row of fluid chambers is formed within the layers, with the row extending in a row direction, which is substantially perpendicular to the layering direction. Each fluid chamber is provided with a respective nozzle and a respective actuating element, which is actuable to cause the ejection of fluid from the chamber in question through the corresponding one of the nozzles. A row of inlet passageways is also formed within the layers of the actuator component, with the row extending in the row direction. Each inlet passageway is fluidically connected so as to supply fluid to a respective one of said fluid chambers. In some embodiments, either a row of outlet passageways or a second row of inlet passageways is additionally formed within the layers; in either case, such row extends in the row direction. Where outlet passageways are present, each is fluidically connected so as to receive fluid from a respective one of said fluid chambers. At least one of the rows of passageways is staggered, whereby at least some of the members of the staggered row in question are offset from their neighbours in an offset direction for the staggered row in question that is perpendicular to the row direction. The row of fluid chambers may also be staggered. 1118-. (canceled)119. An actuator component for a droplet deposition head comprising:a plurality of layers, each layer extending in a plane having a normal in a layering direction, the layers being stacked in the layering direction;fluid chambers formed within the plurality of layers, the fluid chambers arranged in a corresponding row extending in a row direction, which is perpendicular to the layering direction, each fluid chamber being provided with a nozzle and an actuating element, each actuating element ...

LIQUID DISCHARGE HEAD, HEAD MODULE, HEAD DEVICE, LIQUID DISCHARGE DEVICE, AND LIQUID DISCHARGE APPARATUS

A liquid discharge head includes a plurality of nozzles configured to discharge a liquid, a plurality of pressure chambers respectively communicating with the plurality of nozzles, a plurality of common-supply branch channels each communicating with two or more of the plurality of pressure chambers, a common-supply main channel communicating with each of the plurality of common-supply branch channels, a plurality of common-collection branch channels each communicating with two or more of the plurality of pressure chambers, and a common-collection main channel communicating with each of the plurality of common-collection branch channels. The plurality of nozzles is arrayed in a two-dimensional matrix in a first direction and a second direction intersecting with the first direction, the plurality of common-supply branch channels and the plurality of common-collection branch channels are alternately arranged in the second direction. 1. A liquid discharge head comprising:a plurality of nozzles configured to discharge a liquid;a plurality of pressure chambers respectively communicating with the plurality of nozzles;a plurality of common-supply branch channels each communicating with two or more of the plurality of pressure chambers;a common-supply main channel communicating with each of the plurality of common-supply branch channels;a plurality of common-collection branch channels each communicating with two or more of the plurality of pressure chambers; anda common-collection main channel communicating with each of the plurality of common-collection branch channels;wherein the plurality of nozzles is arrayed in a two-dimensional matrix in a first direction and a second direction intersecting with the first direction,the plurality of common-supply branch channels and the plurality of common-collection branch channels are alternately arranged in the second direction, smallest in the second direction;', 'second smallest in the first direction; and', 'third smallest in a ...

Liquid droplet discharge head, image forming apparatus including same, and method of inspecting liquid droplet discharge head

A liquid droplet discharge head includes a nozzle substrate; nozzles, disposed on the nozzle substrate, to discharge a liquid; a pressurized liquid chamber that communicates with the nozzles; a diaphragm forming one wall of the pressurized liquid chamber; an electromechanical transducer element for discharging, disposed on an element mount surface of the diaphragm opposite a side facing the pressurized liquid chamber; and a retainer substrate laminated to the element mount surface of the diaphragm with an adhesive. The subject head is configured to discharge a liquid inside the pressurized liquid chamber from the nozzles while the diaphragm is displaced by a drive voltage applied to the electromechanical transducer element for discharging, and the liquid droplet discharge head further comprising an electromechanical transducer element for inspection that does not perform discharging, disposed on the element mount surface of the diaphragm, to which a voltage is applied so that the diaphragm displaces.

MEMS Jetting Structure For Dense Packing

A fluid ejector includes a fluid ejection module having a substrate and a layer separate from the substrate. The substrate includes a plurality of fluid ejection elements arranged in a matrix, each fluid ejection element configured to cause a fluid to be ejected from a nozzle. The layer separate from the substrate includes a plurality of electrical connections, each electrical connection adjacent to a corresponding fluid ejection element. 1. A fluid ejector , comprising:a fluid ejection module comprising a substrate having a plurality of fluid ejection elements arranged in a matrix, each fluid ejection element configured to cause a fluid to be ejected from a nozzle; anda layer separate from the substrate comprising a plurality of electrical connections, each electrical connection adjacent to a corresponding fluid ejection element.235-. (canceled) This application claims the benefit of priority to U.S. Provisional Application Ser. No. 61/224,847, filed on Jul. 10, 2009, which is incorporated by reference.The present disclosure relates generally to fluid ejection.Microelectromechanical systems, or MEMS-based devices, can be used in a variety of applications, such as accelerometers, gyroscopes, pressure sensors or transducers, displays, optical switches, and fluid ejectors. Typically, one or more individual devices are formed on a single die, such as a die formed of an insulating material, a semiconducting material or a combination of materials. The die can be processed using semiconducting processing techniques, such as photholithography, deposition, and etching.A fluid ejection device can have multiple MEMS devices that are each capable of ejecting fluid droplets from a nozzle onto a medium. In some devices that use a mechanically based actuator to eject the fluid droplets, the nozzles are each fluidically connected to a fluid path that includes a fluid pumping chamber. The fluid pumping chamber is actuated by the actuator, which temporarily modifies the volume of ...

LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS

A liquid ejecting head () includes a pressure chamber substrate () on which pressure chamber spaces () are formed; a flow path substrate () which includes a first face (F) on which the pressure chamber substrate () is provided, and a second face (F) on a side opposite to the first face (F), and on which a space (R), a supply hole () which causes the space (R) and the pressure chamber space () to communicate, and a communicating hole () which communicates with the pressure chamber space () are formed; a nozzle plate () which is provided on the second face (F), and on which nozzles (N) which communicate with the communicating hole () are formed; a housing () which is provided on the first face (F), and in which a space (R) which communicates with the space (R) of the flow path substrate (), and an opening portion () which communicates with the space (R) are formed; a flexible compliance unit () which is provided on the second face (F), and seals the communicating hole () and the space (R); and a flexible compliance unit () which seals the opening portion (). 1. A liquid ejecting head comprising:a pressure chamber substrate on which pressure chamber spaces are formed;a flow path substrate which includes a first face on which the pressure chamber substrate is provided, and a second face on a side opposite to the first face, and on which a first space, a supply hole which causes the first space and the pressure chamber space to communicate, and a communicating hole which communicates with the pressure chamber space are formed;a nozzle plate which is provided on the second face of the flow path substrate, and on which nozzles which communicate with the communicating hole are formed;a housing which is provided on the first face of the flow path substrate, and in which a second space which communicates with the first space of the flow path substrate, and an opening portion which communicates with the second space are formed;a flexible first compliance unit which is provided ...

Droplet discharging head and image forming apparatus

A droplet discharging head includes: a nozzle substrate that includes a nozzle opening to discharge a droplet therethrough; a liquid chamber substrate that includes liquid pressure chambers communicating with the nozzle openings; a vibration plate arranged to face the nozzle substrate with the liquid chamber substrate interposed therebetween; piezoelectric elements that are provided to face the liquid pressure chambers with the vibration plate interposed therebetween and are arranged in a predetermined direction; a driving element provided, in a flip-chip implementation, on a flow path substrate that includes the nozzle substrate, the liquid chamber substrate, the vibration plate, and the piezoelectric elements; and a first reinforcing wire that is disposed to at least one of the flow path substrate and the driving element, has a band shape extending in a direction along a row of the piezoelectric elements, and is connected to a common electrode shared by the piezoelectric elements.

Electronic device, liquid ejecting head, and method of manufacturing electronic device

An electronic device includes a first substrate that has a drive region in a first surface, and a second substrate that has a second surface that is joined to the first surface by a joining resin portion composed of a photosensitive resin. In the electronic device, a space that houses the drive region is defined between the first surface and the second surface by the joining resin portion, and a joining surface of the joining resin portion joined to the first surface is smaller than a joining surface of the joining resin portion joined to the second surface.

INKJET PRINTING HEAD

An inkjet printing head 1 includes an actuator substrate, having an ink flow passage that includes a pressure chamber, a movable film formation layer, including a movable film, disposed on the pressure chamber and defining a top surface portion of the pressure chamber, a piezoelectric element 9, formed on the movable film, and a protective substrate 4, bonded to the actuator substrate so as to cover the piezoelectric element 9, and the protective substrate 4 has an ink supply passage 53 in communication with the ink flow passage, and on a surface of the protective substrate 4 at an opposite side from the actuator substrate, an alignment mark 81 is formed in each of a plurality of small regions set by dividing an entire region of the surface. 1. An inkjet printing head comprising:an actuator substrate, having an ink flow passage that includes a pressure chamber;a movable film formation layer, including a movable film, disposed on the pressure chamber and defining a top surface portion of the pressure chamber;a piezoelectric element, formed on the movable film; anda protective substrate, bonded to the actuator substrate so as to cover the piezoelectric element; andwherein the protective substrate has a housing recess, opening toward the actuator substrate and housing the piezoelectric element, and an ink supply passage in communication with the ink flow passage, andon a surface of the protective substrate at an opposite side from the actuator substrate, an inspection camera positioning alignment mark is formed in each of a plurality of small regions set by dividing an entire region of the surface.2. The inkjet printing head according to claim 1 , wherein the protective substrate has formed therein an electrode pad exposing opening portion that penetrates through the protective substrate in a thickness direction.3. The inkjet printing head according to claim 1 , wherein claim 1 , in a plan view of viewing from a direction normal to a major surface of the movable film ...

Liquid discharging head

A liquid discharging head includes: individual channels each including a nozzle; an inflow channel communicated with the individual channels; an outflow channel communicated with the individual channels; an inflow-side filter provided on the inflow channel and dividing the inflow channel into a lower inflow area and an upper inflow area; an outflow-side filter provided on the outflow channel and dividing the outflow channel into a lower outflow area and an upper outflow area; an inflow port which is provided on the upper inflow area and through which the liquid is supplied to the inflow channel from outside thereof; an outflow port which is provided on the upper outflow area and through which the liquid is discharged from the outflow channel to outside thereof; and a bypass channel connecting the upper inflow area and the upper outflow area.

LIQUID DISCHARGE HEAD, LIQUID DISCHARGE APPARATUS, AND METHOD OF MANUFACTURING LIQUID DISCHARGE HEAD

A liquid discharge head includes a first substrate in which a nozzle is formed, a second substrate disposed above the first substrate, an energy generation element that generates energy for discharging a liquid by a drive signal being applied, and a vibration plate that vibrates by the energy generated by the energy generation element and that is stacked on the second substrate, in which the vibration plate has a first area and a second area positioned at a position different from the first area and having a lower elastic modulus than an elastic modulus of the first area. 1. A liquid discharge head , comprising:a first substrate in which a nozzle is formed;a second substrate disposed above the first substrate;an energy generation element that generates energy for discharging a liquid by a drive signal being applied; anda vibration plate that vibrates by the energy generated by the energy generation element and that is stacked on the second substrate, whereinthe vibration plate has a first area and a second area positioned at a position different from the first area and having a lower elastic modulus than an elastic modulus of the first area.2. The liquid discharge head according to claim 1 , whereinin a space positioned between the first substrate and the vibration plate and formed by a wall surface of the second substrate, the second area is closer to the wall surface than the first area.3. The liquid discharge head according to claim 2 , whereinthe second area overlaps the wall surface in plan view viewed from a thickness direction of the vibration plate, andthe first area does not overlap the wall surface in the plan view.4. The liquid discharge head according to claim 1 , whereinin a space positioned between the first substrate and the vibration plate and formed by a wall surface of the second substrate, the second area is closer to an end of the energy generation element than the first area.5. The liquid discharge head according to claim 4 , whereinthe second ...

LIQUID DISCHARGE HEAD AND LIQUID DISCHARGE APPARATUS

A liquid discharge head includes a pressure chamber substrate provided with a plurality of pressure chambers, a piezoelectric element row in which a plurality of piezoelectric elements that are provided to correspond to the plurality of pressure chambers respectively and that generate a pressure for discharging a liquid are arranged in a predetermined direction, and a protection portion positioned opposite to the plurality of pressure chambers with respect to the piezoelectric element row, and forming a space common to the plurality of piezoelectric elements, in which in regard to a first portion of the protection portion and a second portion of the protection portion having a position different from the first portion in the predetermined direction, a rigidity of the first portion is higher than a rigidity of the second portion. 1. A liquid discharge head comprising:a pressure chamber substrate provided with a plurality of pressure chambers;a piezoelectric element row in which a plurality of piezoelectric elements that are provided to correspond to the plurality of pressure chambers respectively and that generate a pressure for discharging a liquid are arranged in a predetermined direction; anda protection portion positioned opposite to the plurality of pressure chambers with respect to the piezoelectric element row, and forming a space common to the plurality of piezoelectric elements, whereinin regard to a first portion of the protection portion and a second portion of the protection portion having a position different from the first portion in the predetermined direction, a rigidity of the first portion is higher than a rigidity of the second portion.2. The liquid discharge head according to claim 1 , whereinthe second portion has a through hole.3. The liquid discharge head according to claim 1 , whereina groove is provided in the second portion on a side of the plurality of pressure chambers.4. The liquid discharge head according to claim 1 , whereina thickness ...

PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ELEMENT APPLICATION DEVICE, AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT

A piezoelectric element includes a piezoelectric layer formed as a stacked structure of first, second, and third piezoelectric films. The first piezoelectric film is formed on a first electrode. The second piezoelectric film is formed on the first piezoelectric film. The third piezoelectric film is formed on the second piezoelectric film. Each of the first, second, and third piezoelectric films includes potassium, sodium, and niobium. A second electrode is formed on the piezoelectric layer. A concentration of sodium in the first piezoelectric film is greater than a concentration of sodium in the second piezoelectric film. The concentration of sodium in the second piezoelectric film is greater than a concentration of sodium in the third piezoelectric film. 1. A piezoelectric element comprising:a first electrode;a piezoelectric layer formed of a first piezoelectric film formed on the first electrode;a second piezoelectric film formed on the first piezoelectric film, and a third piezoelectric film formed on the second piezoelectric film, each of the first, second, and third piezoelectric films including potassium, sodium, and niobium; anda second electrode formed on the piezoelectric layer,wherein the piezoelectric layer is a stacked structure of the first, second, and third piezoelectric films, anda concentration of sodium in the first piezoelectric film is greater than a concentration of sodium in the second piezoelectric film, and the concentration of sodium in the second piezoelectric film is greater than a concentration of sodium in the third piezoelectric film.2. The piezoelectric element according to claim 1 ,wherein the first piezoelectric film formed on the first electrode is provided without a titanium film interposed therebetween.3. A piezoelectric element application device comprising:{'claim-ref': {'@idref': 'CLM-00001', 'claim 1'}, 'the piezoelectric element according to .'}4. A piezoelectric element application device comprising:{'claim-ref': {'@idref': ...

Liquid ejecting head and liquid ejecting apparatus

A liquid ejecting head includes a liquid discharge unit that has a pressure generating chamber group which communicates with a nozzle disposed on a nozzle surface and is formed from a plurality of pressure generating chambers disposed in a first direction, and a case member which communicates with the pressure generating chamber group and holds a liquid, in which the case member has at least one liquid inlet on the side opposite to the liquid discharge direction and at a position between the pressure generating chambers at both ends in the first direction in a plan view of the pressure generating chamber group from the opposite side, and a first liquid discharge unit and a second liquid discharge unit are arranged at positions where the first directions of the first liquid discharge unit and the second liquid discharge unit are substantially parallel to each other in a second direction that is orthogonal to the first direction, and positions of the liquid inlets of the case member respectively corresponding to the first liquid discharge unit and the second liquid discharge unit do not overlap in the second direction.

LIQUID EJECTION HEAD

A liquid ejection head includes: a plurality of individual passages each having a nozzle; a first supply liquid passage communicating with a first inlet of each of the plurality of individual passages; a second supply liquid passage communicating with a second inlet of each of the plurality of individual passages; a first return liquid passage communicating with a first outlet of each of the plurality of individual passages; and a second return liquid passage communicating with a second outlet of each of the plurality of individual passages. 1. A liquid ejection head , comprising:a plurality of individual passages each comprising a nozzle;a first supply liquid passage communicating with a first inlet of each of the plurality of individual passages;a second supply liquid passage communicating with a second inlet of each of the plurality of individual passages;a first return liquid passage communicating with a first outlet of each of the plurality of individual passages; anda second return liquid passage communicating with a second outlet of each of the plurality of individual passages.2. The liquid ejection head according to claim 1 ,wherein the first supply liquid passage, the second supply liquid passage, the first return liquid passage, and the second return liquid passage extend in an extending direction and are arranged in an arrangement direction intersecting the extending direction, andwherein the plurality of individual passages are arranged in the extending direction.3. The liquid ejection head according to claim 2 , wherein the first supply liquid passage and the second supply liquid passage are located respectively on opposite sides of the plurality of individual passages in the arrangement direction.4. The liquid ejection head according to claim 2 , wherein the first return liquid passage and the second return liquid passage are located respectively on opposite sides of the plurality of individual passages in the arrangement direction.5. The liquid ...

Liquid ejection head

A liquid ejection head includes: individual passages each having a nozzle; supply liquid passages each communicating with an individual inlet of a corresponding one of the individual passages; return liquid passages each communicating with an individual outlet of a corresponding one of the individual passages; a first supply coupling liquid passage coupling the supply liquid passages to each other and communicating with a first inlet of each of the supply liquid passages; and a second supply coupling liquid passage coupling the supply liquid passages to each other and communicating with a second inlet of each of the supply liquid passages. In each of the supply liquid passages, the individual inlet of the corresponding one of the individual passages is located between the first inlet and the second inlet.

LIQUID EJECTION HEAD

A liquid ejection head includes: individual passages; supply liquid passages; return liquid passages; a supply coupling liquid passage; and a return coupling liquid passage. The supply liquid passages and the return liquid passages extend in an extending direction and are arranged in an arrangement direction. The supply coupling liquid passage and the return coupling liquid passage extend in the arrangement direction, are located on one side of the supply liquid passages and the return liquid passages in the extending direction, and include an overlapping portion at which the supply coupling liquid passage and the return coupling liquid passage overlap each other when viewed in an orthogonal direction. A damper film is provided between the supply coupling liquid passage and the return coupling liquid passage in the orthogonal direction at at least a portion of the overlapping portion. 1. A liquid ejection head , comprising:a plurality of individual passages each comprising a nozzle;a plurality of supply liquid passages each communicating with an inlet of a corresponding one of the plurality of individual passages;a plurality of return liquid passages each communicating with an outlet of a corresponding one of the plurality of individual passages;a supply coupling liquid passage coupling the plurality of supply liquid passages to each other and communicating with an inlet of each of the plurality of supply liquid passages; anda return coupling liquid passage coupling the plurality of return liquid passages to each other and communicating with an outlet of each of the plurality of return liquid passages,wherein the plurality of supply liquid passages and the plurality of return liquid passages extend in an extending direction and are arranged in an arrangement direction intersecting the extending direction,wherein the supply coupling liquid passage and the return coupling liquid passage extend in the arrangement direction, are located on one side of the plurality of ...

LIQUID EJECTING APPARATUS

A liquid ejecting apparatus includes a liquid ejecting head and a cap configured to contact on an annular contacting region provided in a fixing plate. The liquid ejecting head includes head chips, each including a nozzle plate, and the fixing plate provided with opening portions for exposing the respective nozzle plates. A first hole and a second hole different from the opening portions are provided in the fixing plate. The fixing plate includes a first surface provided with the contacting region and a second surface to which the head chips are fixed. The opening portions are disposed inside the contacting region in a plan view when viewed in a direction perpendicular to the first surface. Each of the first hole and the second hole is disposed inside the contacting region in the plan view and is blocked by a filler. 1. A liquid ejecting apparatus comprising: head chips, each including a nozzle plate provided with nozzles, and', 'a fixing plate provided with opening portions for exposing the respective nozzle plates of the head chips; and, 'a liquid ejecting head including'}a cap configured to contact on an annular contacting region provided in the fixing plate, whereina first hole and a second hole different from the opening portions are provided in the fixing plate, a first surface provided with the contacting region, and', 'a second surface to which the head chips are fixed, and that is opposite from the first surface,, 'the fixing plate includes'}the opening portions are disposed inside the contacting region in a plan view when viewed in a direction perpendicular to the first surface, andeach of the first hole and the second hole is disposed inside the contacting region in the plan view and is blocked by a filler.2. The liquid ejecting apparatus according to claim 1 , whereinthe first hole is disposed between two opening portions adjacent to each other among the opening portions, andthe second hole is disposed between two opening portions adjacent to each other ...

Liquid Discharging Apparatus

There is provided a liquid discharging apparatus including: a substrate formed with a first pressure chamber and two second pressure chambers; a vibration film; a first piezoelectric element; two second piezoelectric elements; a first wire connected to the first piezoelectric element; two second wires connected to the two second piezoelectric elements, respectively; and three contact sections to which the first wire and the two second wires are connected, respectively. The first wire passes between the two second piezoelectric elements and extends toward one of the three contact sections corresponding thereto; and length in the first direction of second active portions in second piezoelectric portions of the two second piezoelectric elements, is shorter than that of a first active portion in a first piezoelectric portion of the first piezoelectric element; and length in the second direction of the second active portion is longer than that of the first active portion.

ELECTRONIC DEVICE, PIEZOELECTRIC DEVICE, LIQUID EJECTING HEAD, AND MANUFACTURING METHODS FOR ELECTRONIC DEVICE, PIEZOELECTRIC DEVICE, AND LIQUID EJECTING HEAD

An electronic device includes a capacitor that is configured with a first electrode layer, an insulating layer, and a second electrode layer being formed in the order listed herein. At least one end of the capacitor is defined by an end of the second electrode layer. The insulating layer is provided so as to extend to a non-element region that is on the outside of one end of the capacitor. The insulating layer under the non-element region is formed thinner than the insulating layer under the capacitor. A difference between the thickness of the insulating layer under the non-element region and the thickness of the insulating layer under the capacitor is equal to or less than 50 nm. 1. A piezoelectric device comprising:a diaphragm; anda plurality of piezoelectric elements,wherein each one of the plurality of piezoelectric elements is configured with a first electrode layer, a first piezoelectric layer, and a second electrode layer being stacked on the diaphragm in the order listed herein,wherein the piezoelectric element is defined by a region where the first electrode, the piezoelectric layer and the second electrode layer are stacked,wherein the piezoelectric layer is provided so as to extend to a non-element region that is outside of the piezoelectric element,wherein the piezoelectric layer of the non-element region is formed thinner than the piezoelectric layer of the piezoelectric element in a direction intersectional to a direction which the plurality of piezoelectric elements are arranged,wherein the piezoelectric layer is made of dielectric polycrystals.2. The piezoelectric device according to claim 1 , wherein a damaged layer that is formed on a surface of the piezoelectric layer of the non-element region is amorphous.3. The piezoelectric device according to claim 1 , wherein claim 1 , in the direction intersectional to the direction which the plurality of piezoelectric elements are arranged claim 1 , a boundary of the piezoelectric layer of the non-element ...

Flow path component, liquid discharge head, and liquid discharge apparatus

An inclined plane which inclines toward a lower plane of a ceiling portion, that is, the lower plane of a communication substrate from a ceiling plane of a second liquid chamber is formed in the second liquid chamber of the communication substrate. Therefore, an individual communication opening is formed, in a state of penetrating the communication substrate from the inclined plane. One end (lower end) of the individual communication opening communicates with the second liquid chamber by being open onto the inclined plane, and the other end (upper end) of the individual communication opening individually communicates with a pressure chamber of a pressure chamber forming substrate by being open onto an upper plane of the communication substrate. When a thickness of the communication substrate is referred to as T, a length of the individual communication opening is referred to as L, and a substantial depth of the second liquid chamber is referred to as D, the dimensions are configured so as to be L+D>T.

LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS

A liquid ejecting head including a flow path forming substrate in which a pressure chamber in communication with a nozzle is formed, a diaphragm formed on the flow path forming substrate, and a piezoelectric actuator including a first electrode, a piezoelectric layer, and a second electrode that are formed on the diaphragm. In the liquid ejecting head, a center portion of the diaphragm is not provided with an active portion, which is a portion where the piezoelectric layer is interposed between the first electrode and the second electrode, a protective film that covers the diaphragm is formed in the center portion, and compressive stress of the protective film is larger than that of the diaphragm. 1. A liquid ejecting head comprising:a flow path forming substrate in which a pressure chamber in communication with a nozzle is formed;a diaphragm formed on one side of the flow path forming substrate; anda piezoelectric actuator including a first electrode, a piezoelectric layer, and a second electrode that are formed on the diaphragm on a side opposite the flow path forming substrate, whereina center portion of the diaphragm, the center portion being an area opposing the pressure chamber in plan view, is not provided with an active portion, which is a portion where the piezoelectric layer is interposed between the first electrode and the second electrode,a protective film that covers the diaphragm is formed in the center portion, andcompressive stress of the protective film is larger than that of the diaphragm.2. A liquid ejecting head comprising:a flow path forming substrate in which a pressure chamber in communication with a nozzle is formed;a diaphragm formed on one side of the flow path forming substrate; anda piezoelectric actuator including a first electrode, a piezoelectric layer, and a second electrode that are formed on the diaphragm on a side opposite the flow path forming substrate, whereina center portion of the diaphragm, the center portion being an area ...

Liquid ejecting head, liquid ejecting apparatus, and method for setting bias potential in liquid ejecting head

A liquid ejecting head includes a nozzle array composed of nozzles, pressure generating chambers communicating with the nozzles of the nozzle array, and actuators that are positioned to correspond individually to the pressure generating chambers. Each the actuators includes a piezoelectric layer being sandwiched by a first electrode and a second electrode. The first electrode serves as individual electrodes provided individually for the respective actuators. The second electrode serves as a first common electrode that extends over the actuators corresponding to a first region of the nozzle array and a second common electrode that extends over the actuators corresponding to a second region of the nozzle array.

Print head

A print head includes an ejection unit that ejects liquid when a piezoelectric element is driven; a driving IC that includes a circuit element and wiring, and that controls driving of the ejection unit; a relay substrate that transfers a signal for controlling driving of the piezoelectric element; that is physically coupled to the driving IC and the relay substrate, and that electrically couples the driving IC and the relay substrate to each other by using an electrode arranged on a surface of a resin; and that is physically coupled to the driving IC and the relay substrate, and that does not electrically couple the driving IC and the relay substrate to each other by using an electrode arranged on a surface of a resin, wherein the energization bump overlap the circuit element or the wiring, and the inspection bump not overlap the circuit element and the wiring.

LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS

A liquid ejecting head includes an ejecting unit including first and second pressure chambers respectively communicating with first and second nozzles that eject a liquid, a first wall portion separating the first and second pressure chambers, first and second driving elements that respectively vary pressures of the first and second pressure chambers; a protection substrate disposed at the ejecting unit on a side opposite to the first and second nozzles; and a support portion formed to extend from a surface of the protection substrate on a side near the ejecting unit to the ejecting unit. The support portion overlaps the first wall portion in plan view in a direction perpendicular to the protection substrate, and a portion of the support portion that is in contact with a surface of the ejecting unit has a larger width than a width of the first wall portion. 1. A liquid ejecting head comprising: a first pressure chamber communicating with a first nozzle that ejects a liquid,', 'a second pressure chamber communicating with a second nozzle that ejects the liquid,', 'a first wall portion separating the first pressure chamber and the second pressure chamber,', 'a first driving element that varies a pressure of the first pressure chamber, and', 'a second driving element that varies a pressure of the second pressure chamber;, 'an ejecting unit including'}a protection substrate disposed at the ejecting unit on a side opposite to the first nozzle and the second nozzle; anda support portion formed to extend from a surface of the protection substrate on a side near the ejecting unit to the ejecting unit, whereinthe support portion overlaps the first wall portion in plan view in a direction perpendicular to the protection substrate, and a portion of the support portion that is in contact with a surface of the ejecting unit has a larger width than a width of the first wall portion.2. The liquid ejecting head according to claim 1 , whereinthe support portion has a larger Young's ...

LIQUID JETTING APPARATUS AND METHOD OF PRODUCING LIQUID JETTING APPARATUS

There is provided a liquid jetting apparatus, including: a first pressure chamber and a second pressure chamber arranged in a first direction; a first insulating film covering the first and second pressure chambers; a first piezoelectric element arranged to face the first pressure chamber with the first insulating film being intervened therebetween; a second piezoelectric element arranged to face the second pressure chamber with the first insulating film being intervened therebetween; a trace arranged between the first and the second piezoelectric elements adjacent to each other in the first direction; and a second insulating film covering the trace. An end, in the first direction, of a part of the second insulating film covering the trace between the first piezoelectric element and the second piezoelectric element is positioned inside an end of a partition wall partitioning the first pressure chamber and the second pressure chamber. 1. A liquid jetting apparatus , comprising:a first pressure chamber;a second pressure chamber located next to the first pressure chamber in a first direction;a first insulating film covering the first pressure chamber and the second pressure chamber;a first piezoelectric element arranged above the first pressure chamber, the first insulating film being intervened between the first pressure chamber and the first piezoelectric element;a second piezoelectric element arranged above the second pressure chamber, the first insulating film being intervened between the second pressure chamber and the second piezoelectric element;a trace arranged between the first piezoelectric element and the second piezoelectric element in the first direction; anda second insulating film covering the trace,wherein the first piezoelectric element a first electrode intervened between the first insulating film and a piezoelectric film of the first piezoelectric element,wherein the second piezoelectric element a second electrode intervened the first insulating film ...

LIQUID-EJECTING HEAD, LIQUID-EJECTING APPARATUS, AND PIEZOELECTRIC DEVICE

There is provided a piezoelectric device comprising a first electrode, a piezoelectric layer that is formed above the first electrode, a second electrode that is formed above the piezoelectric layer and a coating layer that is formed above the second electrode consisting of tungsten or titanium. 1. A piezoelectric device comprising:a first electrode;a piezoelectric layer that is formed above the first electrode;a second electrode that is formed above the piezoelectric layer;a coating layer that is formed above the second electrode consisting of titanium, anda lead electrode that is formed on the piezoelectric layer so as to be electrically connected to the first electrode, the lead electrode containing nickel and chromium.2. The piezoelectric device according to claim 1 , wherein a material used for the second electrode primarily contains iridium.3. The piezoelectric device according to claim 1 , wherein the first electrode and the second electrode form a rectangular overlap region in which the first electrode overlaps the second electrode in a plan view claim 1 , the first electrode defining a long side of the overlap region and the second electrode defining a short side of the overlap region claim 1 , the overlap region having a pair of first regions and having a second region claim 1 , the pair of the first regions being positioned adjacent to a pair of the short sides claim 1 , and the second region being positioned between the pair of the first regions.4. The piezoelectric device according to claim 3 , wherein the coating layer is formed at least in the first regions so as to avoid the second region of the overlap region.5. A liquid-ejecting apparatus having a piezoelectric device claim 3 , the piezoelectric device comprising:a first electrode;a piezoelectric layer that is formed above the first electrode;a second electrode that is formed above the piezoelectric layer;a coating layer that is formed above the second electrode consisting of titanium, anda lead ...

Droplet jetting device

A droplet jetting device comprising a membrane layer defining a pressure chamber that is in fluid communication with a nozzle, the membrane layer carrying, on a membrane that covers the pressure chamber, an actuator for generating pressure waves in a liquid in the pressure chamber, the device further comprising a distribution layer bonded to the membrane layer on the side of the membrane and defining a supply line for supplying the liquid to the pressure chamber, the supply line being connected to the pressure chamber via a restrictor passage extending through the distribution layer in the thickness direction of that layer, and via a window formed in the membrane, characterized in that the restrictor passage has a uniform cross-section, and the membrane window is delimited by a contour that is inwardly offset from the contour of the restrictor passage on the entire periphery of the restrictor passage.

Liquid Discharge Head

There is provided a liquid discharge head including: a pressure chamber plate including a plurality of pressure chambers and a vibration film, a piezoelectric actuator, and a protective plate covering the plurality of piezoelectric elements. The plurality of piezoelectric elements include a piezoelectric layer that is common to the plurality of pressure chambers. A circular recess and an island-like piezoelectric layer residual part enclosed by the circular recess are provided in a portion of the piezoelectric layer overlapping with partition walls of the pressure chamber plate. A residual overlapping part of the protective plate overlaps in a thickness direction with the island-like residual part, and is pressed on the island-like residual part of the piezoelectric actuator. 1. A liquid discharge head comprising:a pressure chamber plate including a plurality of pressure chambers aligned in one direction, and a vibration film located at one side in a thickness direction orthogonal to the one direction and covering the plurality of pressure chambers;a piezoelectric actuator located on a surface of the vibration film at the one side in the thickness direction, and including a plurality of piezoelectric elements overlapping with the plurality of pressure chambers in the thickness direction; anda protective plate located on a surface of the piezoelectric actuator at the one side in the thickness direction, and covering the plurality of piezoelectric elements,wherein the plurality of piezoelectric elements includes a piezoelectric layer extending in the one direction, the piezoelectric layer being common to the plurality of pressure chambers,wherein the piezoelectric layer includes a circular recess and an island-like residual part which are located in a portion of the piezoelectric layer overlapping with partition walls in the thickness direction, each of the partition walls being located between the pressure chambers in the pressure chamber plate,wherein the circular ...

LIQUID JETTING APPARATUS AND METHOD OF PRODUCING LIQUID JETTING APPARATUS

There is provided a liquid jetting apparatus, including: a first pressure chamber and a second pressure chamber arranged in a first direction; a first insulating film covering the first and second pressure chambers; a first piezoelectric element arranged to face the first pressure chamber with the first insulating film being intervened therebetween; a second piezoelectric element arranged to face the second pressure chamber with the first insulating film being intervened therebetween; a trace arranged between the first and the second piezoelectric elements adjacent to each other in the first direction; and a second insulating film covering the trace. An end, in the first direction, of a part of the second insulating film covering the trace between the first piezoelectric element and the second piezoelectric element is positioned inside an end of a partition wall partitioning the first pressure chamber and the second pressure chamber. 1. A liquid jetting apparatus , comprising:a first pressure chamber;a second pressure chamber located next to the first pressure chamber in a first direction;a first insulating film covering the first pressure chamber and the second pressure chamber;a first piezoelectric element arranged above the first pressure chamber, the first insulating film being intervened between the first pressure chamber and the first piezoelectric element;a second piezoelectric element arranged above the second pressure chamber, the first insulating film being intervened between the second pressure chamber and the second piezoelectric element;a trace arranged between the first piezoelectric element and the second piezoelectric element in the first direction; anda second insulating film arranged between the trace and a partition wall, the partition wall partitioning the first pressure chamber and the second pressure chamber in the first direction,wherein two ends of the second insulating film in the first direction are located between two ends of the partition ...

Liquid ejecting apparatus

Provided is a liquid ejecting apparatus capable of suppressing ink from remaining on a nozzle surface. A liquid ejecting apparatus includes a head unit 16 capable of ejecting a liquid from a nozzle 27 provided in a nozzle surface 22 a of a nozzle plate 22 , an anchoring plate 17 in which the head unit 16 is anchored and that is provided with an opening region 17 a that exposes the nozzle surface 22 , and a wiper member 12 that wipes an anchoring plate exposed-surface 17 b located on the opposite side of the head unit 16 of the anchoring plate 17 and the nozzle surface 22 a . When an angle of contact between the nozzle surface 22 a and the liquid is taken as θn, an angle of contact between the anchoring plate exposed-surface 17 b and the liquid is taken as θs, and an angle of contact between the wiper member 12 and the liquid is taken as θw, the relationship θn>θs>θw>90° is fulfilled.

Liquid Ejecting Apparatus

Provided is a liquid ejecting apparatus including: a head configured to reciprocate and having a nozzle surface provided with a nozzle for discharging a liquid; a lock configured to regulate reciprocation of the head; and a liquid saucer configured to receive the liquid, in which the nozzle surface of the head faces the liquid saucer and is separated from the liquid saucer in a state where reciprocation is regulated by the lock.

LIQUID DISCHARGE HEAD

There is provided a liquid discharge head, including: a piezoelectric body having a plurality of piezoelectric layers stacked on top of each other in a stacking direction; individual electrodes; and a first common electrode. Each of the individual electrodes has a first portion and a second portion arranged in the first direction at an interval, and a third portion coupling the first portion with the second portion. The first common electrode includes a first extending portion as well as first protrusions and second protrusions protruding from the first extending portion. Portions of the first extending portion overlapping in the stacking direction with the third portions are formed having through holes passing through the first common electrode in the stacking direction. 1. A liquid discharge head , comprising:a piezoelectric body including a plurality of piezoelectric layers stacked stacked in a stacking direction, the piezoelectric body having a first end and a second end which are away from each other in a first direction orthogonal to the stacking direction of the piezoelectric layers,a plurality of individual electrodes located on a first surface that is orthogonal to the stacking direction, anda first common electrode located on a second surface that is orthogonal to the stacking direction, the first common electrode being different in a position in the stacking direction from the first surface,wherein each of the individual electrodes includes a first portion and a second portion arranged in the first direction at an interval, and a third portion connecting the first portion and the second portion, the first portion being positioned between the first end and the third portion in the first direction, the third portion being positioned between the first portion and the second portion in the first direction, the second portion being positioned between the third portion and the second end in the first direction,the first portions, the second portions, and the ...

LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS

A liquid ejecting head includes nozzles configured to eject liquid, pressure chambers communicating with the nozzles, the pressure chambers being configured to generate pressure for ejecting the liquid, a first liquid chamber configured to store the liquid to be supplied to the pressure chambers, a second liquid chamber configured to store the liquid that passed through the pressure chambers, first communication paths communicating with the pressure chambers from the first liquid chamber, second communication paths respectively communicating with the second liquid chamber from between the pressure chambers and the nozzles in which flow path resistance in the first communication paths is higher than flow path resistance in the second communication paths. 1. A liquid ejecting head comprising:nozzles configured to eject liquid;pressure chambers communicating with the nozzles, the pressure chambers being configured to generate pressure for ejecting the liquid;a first liquid chamber that is a common liquid chamber communicating with the pressure chambers;a second liquid chamber that is a common liquid chamber communicating with the pressure chambers;first communication paths communicating with the pressure chambers from the first liquid chamber;second communication paths respectively communicating with the second liquid chamber from between the pressure chambers and the nozzles, whereinflow path resistance in the first communication path is higher than flow path resistance in the second communication path.2. A liquid ejecting head comprising:nozzles configured to eject liquid;pressure chambers communicating with the nozzles, the pressure chambers being configured to generate pressure for ejecting the liquid;a first liquid chamber configured to store the liquid to be supplied to the pressure chambers;a second liquid chamber configured to store the liquid that passed through the pressure chambers;first communication paths communicating with the pressure chambers from the ...

LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS

A liquid ejecting head that includes a first piezoelectric element and a second piezoelectric element, a first wire that extends in a first direction and that electrically couples the first piezoelectric element and a wiring substrate to each other, and a second wire that is adjacent to the first wire in a second direction intersecting the first direction and that extends in the first direction, the second wire electrically coupling the second piezoelectric element and the wiring substrate to each other. A first protrusion is formed on a surface of the first wire in a mounting area to where the wiring substrate is joined, and a second protrusion is formed on a surface of the second wire in the mounting area and at a position different from that of the first protrusion in the first direction. 1. A liquid ejecting head comprising:a first piezoelectric element that ejects a liquid inside a first pressure chamber from a nozzle;a second piezoelectric element that ejects a liquid inside a second pressure chamber from a nozzle;a first wire that extends in a first direction and that electrically couples the first piezoelectric element and a wiring substrate to each other; anda second wire that is adjacent to the first wire in a second direction intersecting the first direction and that extends in the first direction, the second wire electrically coupling the second piezoelectric element and the wiring substrate to each other, whereina first protrusion is formed on a surface of the first wire in a mounting area to where the wiring substrate is joined, anda second protrusion is formed on a surface of the second wire in the mounting area and at a position different from that of the first protrusion in the first direction.2. The liquid ejecting head according to claim 1 , whereina first base and a second base are formed in the mounting area at positions different from each other in the first direction,the first protrusion is a portion of the first wire positioned on a surface ...

METHOD FOR MANUFACTURING A FLUID-EJECTION DEVICE WITH IMPROVED RESONANCE FREQUENCY AND FLUID EJECTION VELOCITY, AND FLUID-EJECTION DEVICE

A method for manufacturing a device for ejecting a fluid, including the steps of: forming, in a first semiconductor wafer that houses a nozzle of the ejection device, a first structural layer; removing selective portions of the first structural layer to form a first portion of a chamber for containing the fluid; removing, in a second semiconductor wafer that houses an actuator of the ejection device, selective portions of a second structural layer to form a second portion of the chamber; and coupling together the first and second semiconductor wafers so that the first portion directly faces the second portion, thus forming the chamber. The first portion defines a part of volume of the chamber that is larger than a respective part of volume of the chamber defined by the second portion. 1. A method , comprising:forming a first structural layer at a first side of a first semiconductor wafer;forming a first portion of a chamber in the first structural layer by removing selective portions of the first structural layer and, at the same time, fluidically coupling a nozzle of the first semiconductor wafer with the first portion;forming a second portion of the chamber in a second structural layer at a second side of a second semiconductor wafer by removing selective portions of a second structural layer of the second semiconductor wafer; andforming the chamber configured to contain the fluid by coupling together the first and second semiconductor wafers with the first portion facing the second portion, the first portion defining a first volume of a total volume of the chamber, the second portion defining a second volume of the total volume, the first volume being larger than the second volume.2. The method according to claim 1 , wherein:forming the first structural layer includes forming the first structural layer on a nozzle layer of the first semiconductor wafer, the nozzle layer being on a substrate of the first semiconductor wafer and including the nozzle; andforming the ...

Piezoelectric device, liquid ejecting head, liquid ejecting apparatus and manufacturing method of piezoelectric device

A piezoelectric device comprising a substrate having two surface sides; a vibration plate on one of the two surface side, a piezoelectric element including a first electrode provided on the vibration plate, a piezoelectric body layer provided on the first electrode, the piezoelectric body layer having a groove section on a side surface, the groove section including a first surface facing to the vibration plate, and a second electrode provided on the piezoelectric body layer, and a stress application film having tensile stress and provided on an inner surface of the groove section.

Liquid Discharge Head And Method Of Producing Liquid Discharge Head

There is provided a liquid discharge head including a substrate having a pressure chamber, an actuator, and a channel member. The actuator has a first film arranged on the substrate and a second film arranged on a surface of the first film. The substrate and the channel member are attached to each other with an adhesive. A first through hole is formed in a part of the first film, and a second through hole is formed in a part of the second film. An edge of the first through hole is positioned further inward of the second through hole than an edge of the second through hole. The adhesive is applied to a part of the surface of the first film overlapping with the second through hole, so as to cover a boundary part between the first and second films. 1. A liquid discharge head comprising:a substrate including a pressure chamber;an actuator including a driving element configured to apply pressure to liquid in the pressure chamber; anda channel member including a supply channel configured to supply the liquid to the pressure chamber, a first film arranged on the substrate to cover the pressure chamber; and', 'a second film arranged on an opposite surface of the first film, the opposite surface being opposite to the substrate,, 'wherein the actuator includeswherein the substrate and the channel member are attached to each other with an adhesive in a state that the first film and the second film are sandwiched between the substrate and the channel member,wherein a first through hole is located in a part of the first film at which the pressure chamber and the supply channel are overlapped in a stacking direction of the first film and the second film,wherein a second through hole is located in a part of the second film at which the first through hole is overlapped in the stacking direction,wherein an edge of the first through hole is positioned further inward of the second through hole than an edge of the second through hole, andwherein the first film is thicker than the ...

LIQUID DISCHARGE HEAD

There is provided a liquid discharge head including: a first plate formed with an individual channel which includes a pressure chamber; a second plate; a vibration plate; and a piezoelectric element. The second plate has a pair of communicating channels arranged to sandwich an accommodating space, which accommodates the piezoelectric element, therebetween. A spacing distance between mutually close parts in a pair of inner circumferential surfaces of the pair of communicating channels, respectively, is greater on a side of one ends in the stacking direction of the pair of communicating channels than on a side of the other ends in the stacking direction of the pair of communicating channels, the one ends being close to the individual channel in the stacking direction. 1. A liquid discharge head comprising:a first plate including an individual channel communicating with a nozzle and including a pressure chamber;a second plate stacked, in a stacking direction, on the first plate on a side opposite to the nozzle;a vibration plate stacked between the first and second plates in the stacking direction; anda piezoelectric element which is arranged in the vibration plate at a position overlapping, as seen from the stacking direction, with the pressure chamber of the individual channel,wherein the second plate includes:an accommodating space accommodating the piezoelectric element, anda pair of communicating channels arranged to sandwich the accommodating space therebetween, each of the pair of communicating channels extending in the stacking direction, and communicating with the individual channel; anda spacing distance between mutually close parts in a pair of inner circumferential surfaces of the pair of communicating channels, respectively, is greater on a side of one ends in the stacking direction of the pair of communicating channels than on a side of the other ends in the stacking direction of the pair of communicating channels, the one ends being close to the ...

Method for manufacturing liquid ejecting head and liquid ejecting head

Provided is a method for manufacturing a liquid ejecting head which includes a plurality of chips, each of which includes a plurality of segments, each segment including a pressure generating chamber communicating with a nozzle opening through which liquid is discharged, a diaphragm which is a portion of the pressure generating chamber, and a pressure generating unit causing a pressure change in the pressure generating chamber through the diaphragm, the method including measuring natural frequencies of the plurality of segments included in each of the chips, classifying the chips into ranks using the maximum value of the natural frequencies of the chips as a reference, and manufacturing the liquid ejecting head which includes the chips selected based on the ranks.

DROPLET EJECTING HEAD AND DROPLET EJECTING APPARATUS

A droplet ejecting head includes a board, a pressure chamber, a nozzle, and an actuator configured to cause a pressure change in the pressure chamber in response to an electrical signal supplied from a drive circuit. The drive circuit is configured to set the electrical signal at a first voltage level, change the electrical signal to a second voltage level, set the electrical signal to a third voltage level during a time period after changing the electrical signal from the first voltage level to the second voltage level, the time period being equal to a primary natural oscillation period of the actuator when the pressure chamber and the nozzle are filled with solution, and set the electrical signal to the first voltage level after the time period has elapsed. The third voltage level is between the first and second voltage levels or equal to the second voltage level. 1. A droplet ejecting head , comprising:a board having a first surface and a second surface;a pressure chamber in the board and having an opening on a first surface side of the board through which a solution can be supplied to the pressure chamber;a nozzle through which solution supplied from the pressure chamber can be ejected, the nozzle being disposed on a second surface side of the board opposite the first surface side;an actuator configured to cause a pressure change in the pressure chamber in response to an electrical signal supplied from a drive circuit by changing a volume of the pressure chamber; anda solution holding container on the first surface side of the board, the solution holding container having a solution inlet for receiving solution and a solution outlet for supplying solution to the pressure chamber via the opening, wherein set the electrical signal at a first voltage level at a start of a droplet ejection process for ejecting solution through the nozzle,', 'change the electrical signal from the first voltage level to a second voltage level during the droplet ejection process,', 'set ...

Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus

A piezoelectric element includes a first electrode layer which is stacked on the vibrating plate; a second electrode layer which is stacked on a side opposite to the vibrating plate with respect to the first electrode layer; a piezoelectric layer which is interposed between the first electrode layer and the second electrode layer; and a conductive layer which electrically connects the first electrode layer to external wiring, in which a point of contact between the conductive layer and the first electrode layer is in a vibrating region of the vibrating plate.

Liquid Ejection Apparatus

A liquid ejection apparatus includes: channel rows each including individual channels; piezoelectric elements each constituted by an individual electrode, a common electrode, and a piezoelectric layer; and individual wires respectively extending from the individual electrodes to an outside connecting region, connectable to an external circuit board, and each having a contact connectable to an individual terminal of the external circuit board. A portion of each of the channel rows has an intra-row void between adjacent two of the individual channels. Each of the individual wires extends to a portion of the outside connecting region which corresponds to one of the individual channels. A first common wire extending from the common electrode and connectable to a common terminal of the external circuit board is provided at a portion of the outside connecting region which corresponds to the intra-row void. 1. A liquid ejection apparatus , comprising:a plurality of channel rows each comprising a plurality of individual channels to which liquid is to be supplied, the plurality of individual channels being arranged in an arrangement pitch in an arrangement direction;a plurality of piezoelectric elements each constituted by an individual electrode, a common electrode, and a piezoelectric layer interposed between the individual electrode and the common electrode, the plurality of piezoelectric elements each provided for a corresponding one of the plurality of individual channels; anda plurality of individual wires respectively extending from a plurality of individual electrodes, each as the individual electrode, to an outside connecting region located adjacent to the plurality of channel rows, the plurality of individual wires being to be connected to an external circuit board, the plurality of individual wires each comprising a contact to be connected to an individual terminal of the external circuit board,wherein a portion of each of the plurality of channel rows in the ...

Substrate plate for mems devices

A substrate plate is provided for at least one MEMS device to be mounted thereon. The MEMS device has a certain footprint on the substrate plate, and the substrate plate has a pattern of electrically conductive leads to be connected to electric components of the MEMS device. The pattern forms contact pads within the footprint of the MEMS device and includes at least one lead structure that extends on the substrate plate outside of the footprint of the MEMS device and connects a number of the contact pads to an extra contact pad. The lead structure is a shunt bar that interconnects a plurality of contact pads of the MEMS device and is arranged to be removed by means of a dicing cut separating the substrate plate into a plurality of chip-sized units. At least a major part of the extra contact pad is formed within the footprint of one of the MEMS devices.

LIQUID DISCHARGING APPARATUS AND WIRING MEMBER

A liquid discharging apparatus includes: liquid discharging modules which are arranged in a first direction along a predetermined plane; and a wiring member commonly joined to the liquid discharging modules. The wiring member includes: first parts joined to the liquid discharging modules, respectively, in a state that the first parts are arranged side by side in the first direction along the predetermined plane; second parts; and a sixth part. The second parts include: third parts extending from the first parts, respectively, in a second direction orthogonal to the first direction and along the predetermined plane, fourth parts extending in a third direction away from the predetermined plane, and fifth parts connected to the third parts and the fourth parts, respectively. Width in the first direction of each of the second parts is smaller than width in the first direction of the sixth part. 1. A liquid discharging apparatus comprising:liquid discharging modules which are arranged in a first direction along a predetermined plane; anda wiring member commonly joined to the liquid discharging modules, first parts joined to the liquid discharging modules, respectively, in a state that the first parts are arranged side by side in the first direction along the predetermined plane; and', third parts extending from the first parts, respectively, in a second direction orthogonal to the first direction and along the predetermined plane,', 'fourth parts extending in a third direction away from the predetermined plane, and', 'fifth parts connected to first ends of the third parts and second ends of the fourth parts, respectively, the first ends being located on a side opposite to the first parts in the second direction, the second ends being located on a side close to the predetermined plane in the third direction; and, 'second parts including, 'a sixth part commonly connected to third ends of the fourth parts, the third ends being located on a side far from the predetermined ...

LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS

A liquid ejecting head including a plurality of pressure chambers in communication with nozzles that eject a liquid, a diaphragm that includes layers including a first layer and a second layer and that constitutes wall surfaces of the plurality of pressure chambers, a plurality of piezoelectric elements formed on a first region of the diaphragm, the piezoelectric elements each being formed to correspond to a corresponding one of the pressure chambers, and a barrier layer that is in contact with an interface between the first layer and the second layer in a second region of the diaphragm, the second region surrounding the first region. 1. A liquid ejecting head comprising:a plurality of pressure chambers in communication with nozzles that eject a liquid;a diaphragm that includes layers including a first layer and a second layer and that constitutes wall surfaces of the plurality of pressure chambers;a plurality of piezoelectric elements formed on a first region of the diaphragm in plan view of the diaphragm, the piezoelectric elements each being formed to correspond to a corresponding one of the pressure chambers; anda barrier layer that covers an interface between the first layer and the second layer in a second region of the diaphragm, the second region surrounding the first region.2. The liquid ejecting head according to claim 1 , whereinthe barrier layer is formed in an annular shape formed along a periphery of the first region.3. The liquid ejecting head according to claim 1 , whereinan opening that exposes the first layer is formed in the second region of the second layer, anda portion of the barrier layer located inside the opening is in contact with an inner wall surface of the opening and a surface of the first layer.4. The liquid ejecting head according to claim 3 , whereinthe second layer includes a first portion that overlaps the plurality of pressure chambers, and a second portion that surrounds the first portion, andthe opening is a space between the ...

Liquid ejecting head and liquid ejecting apparatus

A liquid ejecting head including a first substrate in which a drive element that ejects a liquid from a nozzle, and a first wire electrically coupled to the drive element are formed, a second substrate in which an opposing surface that opposes the first substrate is adhered to the first substrate with an adhesive agent, a second wire being formed in the second substrate, and a protrusion configured to elastically deform, the protrusion being formed between the first substrate and the second substrate and electrically coupling the first wire and the second wire to each other. In the liquid ejecting head, a swelling ratio of the protrusion is larger than a swelling ratio of the adhesive agent.

Liquid discharge head, liquid discharge device, and liquid discharge apparatus

A liquid discharge head includes an actuator substrate, a holding substrate, a common-liquid-chamber substrate, and a vibration absorber. The actuator substrate includes a plurality of individual liquid chambers and a plurality of pressure generating elements. The individual liquid chambers are communicated with a plurality of nozzles to discharge liquid. The pressure generating elements are arrayed to pressurize liquid in the individual liquid chambers. The holding substrate includes a recessed portion to accommodate the pressure generating elements. The common-liquid-chamber substrate includes a common liquid chamber to supply the liquid to the individual liquid chambers. The common-liquid-chamber substrate is bonded to the holding substrate. The vibration absorber is disposed at at least a part of a bonded portion of the common-liquid-chamber substrate and the holding substrate, to absorb vibration. The holding substrate has an opening as a channel communicating the individual liquid chambers with the common liquid chamber.

Liquid jetting apparatus

A liquid jetting apparatus includes: a pressure chamber formation member having first pressure chambers arranged in a first direction, and an insulation film covering the first pressure chambers; a cover which is joined to the pressure chamber formation member and has a first convex portion and a second convex portion; and a wiring member joined to the pressure chamber formation member. Each of the first convex portion and the second convex portion has a bonding surface to the pressure chamber formation member and extends in the first direction.

COMPOSITE SUBSTRATE INCLUDING FIRST SUBSTRATE HAVING FIRST SURFACE, SECOND SUBSTRATE HAVING SECOND SURFACE FACING FIRST SURFACE, AND FIRST AND SECOND BUMPS PROVIDED AT FIRST SURFACE

A composite substrate includes: a first substrate; a second substrate; an electric contact; a first bump; and a second bump. The first substrate has a first surface. The first substrate has a thickness defining a thickness direction. The second substrate has a second surface. The second surface faces the first surface with a predetermined gap therebetween in the thickness direction. The electric contact is positioned at the second surface. The first bump includes: a core; and a conducting film. The core is provided at the first surface and has a convex shape protruding in the thickness direction. The conducting film covers a part of the core and is in contact with the electric contact. The second bump is provided at the first surface and has a convex shape protruding in the thickness direction. The second bump has a dimension in the thickness direction smaller than that of the first bump. 1. A composite substrate comprising:a first substrate having a first surface, the first substrate having a thickness defining a thickness direction;a second substrate having a second surface facing the first surface with a predetermined gap therebetween in the thickness direction;an electric contact positioned at the second surface; a core provided at the first surface and having a convex shape protruding in the thickness direction; and', 'a conducting film covering a part of the core and in contact with the electric contact; and, 'a first bump comprisinga second bump provided at the first surface and having a convex shape protruding in the thickness direction, the second bump having a dimension in the thickness direction smaller than that of the first bump.2. The composite substrate according to claim 1 , wherein the second bump is a dummy bump electrically insulated from the electric contact.3. The composite substrate according to claim 1 , wherein the dimension of the second bump in the thickness direction is smaller than the predetermined gap.4. The composite substrate ...

LIQUID JETTING APPARATUS AND METHOD FOR MANUFACTURING LIQUID JETTING APPARATUS

A liquid jetting apparatus includes: a channel substrate having a pressure chamber which is long in a first direction; an insulating film provided on the channel substrate to cover the pressure chamber; a piezoelectric film overlapping with the insulating film and having first and second portions, the first portion overlapping with a central portion of the pressure chamber in the first direction, the second portion extending from the first portion in the first direction beyond the pressure chamber, the first portion having a width in a second direction which is smaller than a width of the pressure chamber in the second direction; a first electrode arranged between the insulating film and the piezoelectric film; and a second electrode facing the first electrode with the piezoelectric film being sandwiched therebetween. The insulating film has a thin-walled portion formed at a portion overlapping with the second portion of the piezoelectric film. 1. A liquid jetting apparatus comprising:a channel substrate in which a pressure chamber is formed, the pressure chamber having a shape which is long in a first direction;an insulating film provided on the channel substrate to cover the pressure chamber;a piezoelectric film overlapping with the insulating film and having a first portion and a second portion, the first portion overlapping with a central portion of the pressure chamber in the first direction, the second portion extending from the first portion in the first direction beyond the pressure chamber, the first portion having a width in a second direction orthogonal to the first direction which is smaller than a width of the pressure chamber in the second direction;a first electrode arranged between the insulating film and the piezoelectric film, the first electrode extending in the first direction across a boundary between the first portion and the second portion of the piezoelectric film; anda second electrode facing the first electrode with the piezoelectric film ...

Liquid discharging head and ink-jet apparatus

A liquid discharging head and an ink-jet apparatus that can achieve stable discharging over time by suppressing clogging of a nozzle due to particles and the like contained in liquid, and by suppressing adhesion of particles to a channel and a diaphragm surface. A liquid discharging head includes a nozzle configured to discharge liquid; a pressure chamber communicated with the nozzle; an individual channel communicated with the pressure chamber through a narrow part; a common channel communicated with the individual channel; an energy generation element configured to generate energy; and a diaphragm configured to convey the energy to the pressure chamber, wherein a monomolecular film is formed at inner walls of the nozzle, the pressure chamber, the narrow part, the diaphragm, and the individual channel, the monomolecular film being lyophilic to the liquid.

LIQUID DISCHARGE HEAD AND LIQUID DISCHARGE APPARATUS

A liquid discharge head includes: individual channels respectively including nozzles; a supply channel allowing an outlet of a storage chamber storing a liquid to communicate with an inlet of each of the individual channels; a return channel allowing an outlet of each of the individual channels to communicate with an inlet of the storage chamber; a return filter provided in the return channel; and a return branching channel branching off from a return upstream portion of the return channel. The return upstream portion is positioned upstream of the return filter. 1. A liquid discharge head , comprising:a plurality of individual channels respectively including a plurality of nozzles;a supply channel allowing an outlet of a storage chamber storing a liquid to communicate with an inlet of each of the individual channels;a return channel allowing an outlet of each of the individual channels to communicate with an inlet of the storage chamber;a return filter provided in the return channel; anda return branching channel branching off from a return upstream portion of the return channel, the return upstream portion being positioned upstream of the return filter.2. The liquid discharge head according to claim 1 , further comprising a supply filter provided in the supply channel.3. The liquid discharge head according to claim 2 , further comprising a supply branching channel branching off from a supply upstream portion of the supply channel claim 2 , the supply upstream portion being positioned upstream of the supply filter.4. The liquid discharge head according to claim 3 , wherein the supply upstream portion extends in a first direction claim 3 ,a first end in the first direction of the supply upstream portion is connected to the outlet of the storage chamber, anda second end in the first direction of the supply upstream portion is connected to the supply branching channel.5. The liquid discharge head according to claim 4 , wherein the return upstream portion extends in the ...

Liquid Ejecting Apparatus And Driving Circuit

A liquid ejecting apparatus includes a liquid discharging head having a nozzle and a piezoelectric element, a driving signal generating circuit, a reference voltage signal generating circuit, a substrate on which the driving signal generating circuit and the reference voltage signal generating circuit are provided, a first wire, a second wire, and a coil, in which the driving signal generating circuit generates a driving signal, the reference voltage signal generating circuit generates a reference voltage signal, the piezoelectric element is driven based on the driving signal supplied to one end of the piezoelectric element and the reference voltage signal supplied to the other end of the piezoelectric element, the first wire propagates the driving signal to the one end, and the second wire propagates the reference voltage signal to the other end through the coil. 1. A liquid ejecting apparatus comprising:a liquid discharging head having a nozzle and a piezoelectric element;a driving signal generating circuit;a reference voltage signal generating circuit;a substrate on which the driving signal generating circuit and the reference voltage signal generating circuit are provided;a first wire;a second wire; anda coil, whereinthe driving signal generating circuit generates a driving signal,the reference voltage signal generating circuit generates a reference voltage signal,the piezoelectric element is driven based on the driving signal supplied to one end of the piezoelectric element and the reference voltage signal supplied to the other end of the piezoelectric element, to discharge liquid from the nozzle,the first wire is electrically coupled to the driving signal generating circuit, and propagates the driving signal to the one end, andthe second wire is electrically coupled to the reference voltage signal generating circuit, and propagates the reference voltage signal to the other end through the coil.2. The liquid ejecting apparatus according to claim 1 , further ...

Liquid ejecting head and liquid ejecting system

A head includes a first flow path forming member in which a first flow path communicating with a nozzle opening is formed, a sealing member which seals an opening of the first flow path, and a second flow path forming member which has a second flow path to supply a liquid to the first flow path. A communication portion of the first flow path communicates with a communication portion of the second flow path via a communication port of the sealing member interposed therebetween. The sealing member includes a diaphragm layer which forms one surface of the first flow path and a resin layer laminated on the diaphragm layer, and at least a part of an inside wall of the communication port is covered with a resin cover layer formed from a second resin different from a first resin which forms the resin layer.

LIQUID EJECTING APPARATUS, AND METHOD OF CONTROLLING LIQUID EJECTING APPARATUS

A liquid ejecting apparatus includes: a liquid ejecting head including a plurality of nozzles for discharging liquid and a supply passage through which the liquid to be supplied to the plurality of nozzles flows. The nozzles are arranged in a line; one of the nozzles at a first end of the line being a first end nozzle, whereas one of the nozzles at a second end of the line being a second end nozzle. A height of the first end nozzle is set to be greater than a height of the second end nozzle. The liquid flows through the supply passage in a direction from the first end nozzle to the second end nozzle. 1. A liquid ejecting apparatus comprising:a liquid ejecting head including a plurality of nozzles for discharging liquid and a supply passage through which the liquid to be supplied to the plurality of nozzles flows,the nozzles being arranged in a line, one of the nozzles at a first end of the line being a first end nozzle, one of the nozzles at a second end of the line being a second end nozzle, a height of the first end nozzle being set to be greater than a height of the second end nozzle,the liquid flowing through the supply passage in a direction from the first end nozzle to the second end nozzle.2. The liquid ejecting apparatus according to claim 1 ,the liquid ejecting head including a nozzle forming surface on which the plurality of nozzles are formed, andthe nozzle forming surface being inclined to differently set the heights of the first end nozzle and the second end nozzle.3. The liquid ejecting apparatus according to claim 2 , whereinthe nozzle forming surface is inclined to uniformly set a distance between the plurality of nozzles and a print material on which the liquid discharged from the nozzles.4. The liquid ejecting apparatus according to claim 1 , whereinthe supply passage includes an inflow portion into which the liquid to be supplied to the plurality of nozzles flows and an outflow portion from which the liquid flows out, the inflow portion being ...

LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND PIEZOELECTRIC DEVICE

A liquid ejecting head includes a flow channel forming substrate that is provided with a space constituting a pressure generating chamber which communicates with nozzle openings, a vibration plate that is stacked on one surface of the flow channel forming substrate and seals the space, and a piezoelectric element that includes a first electrode, a piezoelectric layer, and a second electrode sequentially stacked on a surface of the vibration plate opposite to the flow channel forming substrate, in which the first electrode is formed, in which at least a width of a first direction along the opposite surface is narrower than the space in a region corresponding to the space, the piezoelectric layer is stacked so as to overlap the first electrode and at least a part of the vibration plate in the region corresponding to the space, the second electrode is stacked so as to overlap the piezoelectric layer in the region corresponding to the space, and as a thickness of a stacked direction of the piezoelectric element is a thickness of the piezoelectric layer, a first thickness (D) of the piezoelectric layer of a part positioned on the first electrode and a second thickness (D) of the piezoelectric layer of a part positioned on the vibration plate satisfy a relationship of the first thickness (D)>the second thickness (D). 1. A liquid ejecting head comprising:a plurality of chambers arranged in a first direction;a nozzle opening;a vibration plate positioned on at least one chamber of the plurality of chambers; anda piezoelectric element positioned on the vibration plate, the piezoelectric element having a first electrode, a piezoelectric layer, and a second electrode in a stacked direction,wherein the first electrode has a width in the first direction which is narrower than a width of the chamber in the first direction, the first electrode has a side surface intersecting the first direction and an upper surface,wherein the piezoelectric layer is positioned on the first ...

Liquid ejecting head, liquid ejecting head unit, and liquid ejecting apparatus

A liquid ejecting head includes a first nozzle row in which nozzles which eject a liquid are juxtaposed along a first direction, first drive elements which cause the liquid to be ejected from each nozzle of the first nozzle row, a plurality of first individual wirings which are connected to the first drive elements, a first common wiring which is connected in common to the first drive elements, a second nozzle row in which nozzles are juxtaposed along the first direction, second drive elements which cause the liquid to be ejected from each nozzle of the second nozzle row, a plurality of second individual wirings which are connected to the second drive elements, and a second common wiring which is connected in common to the second drive elements and is not connected to the first common wiring. The plurality of first individual wirings, the first common wiring, the second individual wirings, and the second common wiring are connected to a common flexible cable.

LIQUID JETTING APPARATUS

A liquid jetting apparatus comprises a flow passage member which has a pressure chamber communicated with a nozzle and a liquid supply port communicated with the pressure chamber; a piezoelectric element with which the flow passage member is provided so that the piezoelectric element is overlapped with the pressure chamber; a protective member which is arranged on the flow passage member so that the piezoelectric element is covered therewith; and a supply member which is formed with a supply flow passage communicated with the liquid supply port of the flow passage member and which is adhered to extend over the flow passage member and the protective member; wherein a layer of a first adhesive to adhere the protective member and the supply member is thicker than a layer of a second adhesive to adhere the flow passage member and the supply member. 1. A liquid jetting apparatus comprising:a flow passage member having a pressure chamber communicated with a nozzle and a liquid supply port communicated with the pressure chamber;a piezoelectric element provided on the flow passage member to overlap with the pressure chamber;a protective member arranged on the flow passage member to cover the piezoelectric element; anda supply member formed with a supply flow passage communicated with the liquid supply port of the flow passage member, and adhered to the flow passage member and the protective member to extend over the flow passage member and the protective member,wherein a thickness of a layer of a first adhesive adhering the protective member and the supply member is different from a thickness of a layer of a second adhesive adhering the flow passage member and the supply member, anda viscosity before curing of the first adhesive is different from a viscosity before curing of the second adhesive.2. The liquid jetting apparatus according to claim 1 , wherein the viscosity before curing of the first adhesive is greater than the viscosity before curing of the second adhesive.3. ...

Retaining structure of wiring member, liquid discharge head, liquid discharge device, and liquid discharge apparatus

A retaining structure of a flexible wiring member includes a flexible wiring member; and a retaining member. The flexible wiring member includes a front side wiring electrode formed on a front side the flexible wiring member and a rear side wiring electrode formed on a rear side thereof, and the flexible wiring member is bonded to the retaining member via the rear side wiring electrode. A liquid discharge head includes nozzles to discharge a liquid; an individual liquid chamber to hold the liquid; a pressure generator to press the liquid inside the individual liquid chamber; an actuator substrate, including an electrode, in which a wiring and the pressure generator are disposed. The electrode of the actuator and that of the flexible wiring member are connected; and the flexible wiring member is retained to the actuator or a member joined to the actuator via the retaining structure of the wiring member.

DEVICE USING A PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING THE SAME

An inkjet printing head includes an actuator substrate having pressure chambers (cavities) , a movable film formation layer including movable films A disposed above the pressure chambers and defining top surface portions of the pressure chambers , and piezoelectric elements formed above the movable films A. Each piezoelectric element includes a lower electrode formed above a movable film A, a piezoelectric film formed above the lower electrode , and an upper electrode formed above the piezoelectric film . The piezoelectric film includes an active portion A with an upper surface in contact with a lower surface of an upper electrode and an inactive portion B led out in a direction along a front surface of the movable film formation layer from an entire periphery of a side portion of the active portion A and having a thickness thinner than that of the active portion A. 1. A device using a piezoelectric element comprising:a cavity;a movable film formation layer including a movable film disposed above the cavity and defining a top surface portion of the cavity: anda piezoelectric element formed to contact a front surface of the movable film at an opposite side from the cavity and having a peripheral edge receded further toward an interior of the cavity than the movable film in plan view, andwherein the piezoelectric element includes a lower electrode formed on a front surface of the movable film formation layer at the opposite side from the cavity, an upper electrode disposed at an opposite side from the movable film formation layer with respect to the lower electrode, and a piezoelectric film provided between the upper electrode and the lower electrode,the lower electrode includes a main electrode portion constituting the piezoelectric element and an extension portion led out from the main electrode portion in a direction along the front surface of the movable film formation layer and extending across a top surface portion peripheral edge of the cavity to outside the ...

Liquid discharge head

A liquid discharge head includes a first electrical contact and a second electrical contact disposed apart from each other, a flexible wire connecting the first electrical contact and the second electrical contact to each other, and a drive element configured to generate a driving force for discharging liquid from nozzles in accordance with an electrical signal supplied via the first electrical contact, the flexible wire, and the second electrical contact. The flexible wire has a folded portion being folded when viewed in the width direction of the flexible wire.

Liquid Jetting Apparatus and Wiring Member

A liquid jetting apparatus includes: a head unit including a first driving element, a second driving element, a first contact portion connected to the first driving element, and a second contact portion connected to the second driving element; and a wiring member including a flexible substrate, a first driving IC provided on the flexible substrate, a second driving IC provided on the flexible substrate, a first wire formed in the flexible substrate and connecting the first driving IC and the first contact portion, and a second wire formed in the flexible substrate and connecting the second driving IC and the second contact portion. A conductive part different from the first wire and the second wire is disposed in an area of the flexible substrate between the first driving IC and the second driving IC. 1. A head , comprising:a head unit including a first piezoelectric element, a second piezoelectric element, a first contact portion connected to the first piezoelectric element, and a second contact portion connected to the second piezoelectric element; anda wiring film including a flexible substrate, a first driving IC provided on the flexible substrate, a second driving IC provided on the flexible substrate, a first wire formed in the flexible substrate and connecting the first driving IC and the first contact portion, a second wire formed in the flexible substrate and connecting the second driving IC and the second contact portion, and a third wire formed in an area of the flexible substrate between the first driving IC and the second driving IC and connecting the first driving IC and the second driving IC.2. The head according to claim 1 ,wherein the head unit further includes a vibration film, andeach of the first piezoelectric element and the second piezoelectric element includes a common electrode, a piezoelectric layer, and an individual electrode stacked on the vibration film in this order.3. The head according to claim 2 , wherein the head unit further ...

Method for evaluating piezoelectric film, piezoelectric element, liquid ejecting head, and liquid ejecting apparatus

A method for evaluating a piezoelectric film containing a perovskite oxide containing a lead atom, a zirconium atom, and a titanium atom, and the method includes a process of irradiating the piezoelectric film with X-rays to acquire an extended X-ray absorption fine structure (EXAFS) spectrum at the L3 absorption edge of the lead atom, a process of Fourier-transforming the extended X-ray absorption fine structure (EXAFS) spectrum to acquire a radial distribution function, and a process of acquiring the intensity of a first peak having a distance from the lead atom of 1.4±0.2 Å, the intensity of a second peak having a distance from the lead atom of 2.0±0.2 Å, and the intensity of a third peak having a distance from the lead atom of 2.6±0.2 Å from the radial distribution function, and then evaluating the film quality of the piezoelectric film from a value obtained by dividing the intensity of the first peak by the intensity of the second peak and a value obtained by dividing the intensity of the first peak by the intensity of the third peak.

LIQUID EJECTION APPARATUS AND METHOD FOR MANUFACTURING LIQUID EJECTION APPARATUS

A liquid ejection apparatus and method of manufacture are disclosed. One apparatus includes a piezoelectric element corresponding to a pressure chamber in a channel substrate, a trace corresponding to the piezoelectric element. The piezoelectric element includes a piezoelectric layer, a first electrode, a second electrode disposed on a surface of the piezoelectric layer on a side opposite the channel substrate, and a protective film covering the piezoelectric layer and the second electrode. The second electrode includes a lead-out portion that extends to an area over the channel substrate where the piezoelectric layer is not disposed, and a contact portion that is provided in the lead-out portion and that is exposed from the protective film in the area. The trace is connected to the second electrode at the exposed contact portion. 1. A liquid ejection apparatus , comprising:a piezoelectric element corresponding to a pressure chamber in a channel substrate;a trace corresponding to the piezoelectric element; a piezoelectric layer,', 'a first electrode disposed on a surface of the piezoelectric layer on a channel substrate side,', 'a second electrode disposed on a surface of the piezoelectric layer on a side opposite the channel substrate, and', 'a protective film covering the piezoelectric layer and the second electrode;, 'the piezoelectric element including a lead-out portion that extends from the surface of the piezoelectric layer on the side opposite the channel substrate, along a lateral surface of the piezoelectric layer, and to an area over the channel substrate where the piezoelectric layer is not disposed, and', 'a contact portion that is provided in the lead-out portion and that is exposed from the protective film in the area over the channel substrate where the piezoelectric layer is not disposed; and, 'the second electrode includingthe trace being connected to the second electrode at the exposed contact portion.2. The liquid ejection apparatus according to ...

LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS

the first nozzle channel includes a first portion including an end of the first nozzle channel and a second portion including another end of the first nozzle channel, and a width of the second portion in the second direction is larger than a width of the first portion in the second direction. 1. A liquid ejecting head comprising:a first pressure chamber that extends in a first direction and that applies pressure to liquid;a first nozzle channel that extends in the first direction and that communicates a first nozzle that ejects the liquid; anda first communication channel that extends in a second direction intersecting the first direction and that communicates between the first pressure chamber and the first nozzle channel; whereinthe first nozzle channel includes a first portion including an end of the first nozzle channel and a second portion including another end of the first nozzle channel, anda width of the second portion in the second direction is larger than a width of the first portion in the second direction.2. The liquid ejecting head according to claim 1 , further comprising:a second pressure chamber that extends in the first direction and that applies pressure to the liquid;a second nozzle channel that extends in the first direction and that communicates a second nozzle that ejects the liquid; anda second communication channel that extends in the second direction and that communicates between the second pressure chamber and the second nozzle channel; whereinthe second nozzle channel includes a third portion including an end of the second nozzle channel and a fourth portion including another end of the second nozzle channel, anda width of the fourth portion in the second direction is smaller than a width of the third portion in the second direction.3. The liquid ejecting head according to claim 2 , wherein the first nozzle and the second nozzle are at a same position in the first direction.4. The liquid ejecting head according to claim 2 , wherein the ...

LIQUID EJECTING APPARATUS

Provided is a liquid ejecting apparatus capable of suppressing ink from remaining on a nozzle surface. 1. (canceled)2. A recording head , comprising:a plate comprising a first surface and a second surface; a pressure chamber formation plate provided with a plurality of pressure chambers;', 'first flow paths of the liquid in communication with the pressure chambers;', 'piezoelectric elements for ejecting liquid of the pressure chambers; and', 'a protective plate covering the piezoelectric elements in a plan view seen from a first axis direction; and, 'a head unit connected to the first surface, the head unit comprising a third surface connected to the first surface; and', 'a cavity recessed in the third surface and defined by a first wall and second wall, the first wall surrounding the protective plate in the plan view, the second wall defining a second flow path of the liquid in communication with the first flow path, and the second wall overlapping the protective plate in the plan view., 'a case comprising3. The recording head according to claim 2 , wherein the protective plate further comprises a through-cavity for containing a driving IC.4. The recording head according to claim 2 , wherein the head unit further comprises a common chamber between the first flow paths and the second flow path.5. The recording head according to claim 3 , wherein the head unit further comprises a common chamber between the first flow paths and the second flow path.6. The recording head according to claim 3 , wherein the protective plate comprises a relief cavity covering the piezoelectric elements.7. The recording head according to claim 2 , wherein the protective plate comprises a silicon single-crystal substrate.8. The recording head according to claim 2 , wherein the first electrode is provided on an insulating film.9. The recording head according to claim 2 , wherein the first electrode is provided on zirconium oxide.10. The recording head according to claim 2 , wherein the ...

NOZZLE SUBSTRATE, INK-JET PRINT HEAD, AND METHOD FOR PRODUCING NOZZLE SUBSTRATE

There is provided a nozzle substrate including a nozzle hole penetrating in a thickness direction. The nozzle substrate includes a main substrate including a first surface and a second surface, an adhesion layer formed on the second surface of the main substrate, and a water repellent film formed on a surface at an opposite side to the main substrate side of the adhesion layer. The nozzle hole includes a recessed part formed on the first surface of the main substrate, and an ink ejecting path formed on a bottom surface of the recessed part and penetrating a bottom wall of the recessed part. The ink ejecting path includes a first ink ejecting path, a second ink ejecting path, and a third ink ejecting path. An inner circumference surface of the third ink ejecting path is approximately perpendicular to the second surface of the main substrate. 1. A nozzle substrate including a nozzle hole penetrating in a thickness direction , the nozzle substrate comprising:a main substrate including a first surface and a second surface;an adhesion layer formed on the second surface of the main substrate; anda water repellent film formed on a surface at an opposite side to the main substrate side of the adhesion layer,wherein the nozzle hole includes a recessed part formed on the first surface of the main substrate, and an ink ejecting path formed on a bottom surface of the recessed part and penetrating a bottom wall of the recessed part,the ink ejecting path includes a first ink ejecting path penetrating the bottom wall of the recessed part of the main substrate, a second ink ejecting path connected to the first ink ejecting path and penetrating the adhesion layer, and a third ink ejecting path connected to the second ink ejecting path and penetrating the water repellent film, anda transverse sectional area of the third ink ejecting path is approximately equal to a transverse sectional area of the first ink ejecting path, and an inner circumference surface of the third ink ejecting ...

Liquid Discharge Head

There is provided a liquid discharge head including: a communication plate having a plurality of descenders in respective communication with a plurality of nozzles, a pressure chamber plate being stacked on the communication plate and having a plurality of pressure chambers, a piezoelectric element arranged in a position overlapping with the pressure chambers in a stacking direction, and a discharge common channel extending in an array direction and being in communication with the plurality of pressure chambers. The discharge common channel includes: a first discharge portion formed in the communication plate; and a second discharge portion formed in the pressure chamber plate and in communication with the first discharge portion, the second discharge portion reaching as high as to a surface of the pressure chambers at the side of the piezoelectric element along the stacking direction. 1. A liquid discharge head comprising:a communication plate including a plurality of descenders in respective communication with a plurality of nozzles;a pressure chamber plate stacked on the communication plate and including a plurality of pressure chambers in respective communication with the plurality of descenders;a piezoelectric element arranged at a position overlapping with the pressure chambers in a stacking direction in which the communication plate and the pressure chamber plate are stacked;a common channel extending in an array direction in which the plurality of pressure chambers is aligned and being in communication with the plurality of descenders commonly; anda plate stacked on the pressure chamber plate, a first portion formed in the communication plate;', 'a second portion formed in the pressure chamber plate and in communication with the first portion; and', 'a third portion formed in the plate and in communication with the second portion., 'wherein the common channel includes2. The liquid discharge head according to claim 1 , wherein the second portion is equal in ...

MEMS Jetting Structure For Dense Packing

A fluid ejector includes a fluid ejection module having a substrate and a layer separate from the substrate. The substrate includes a plurality of fluid ejection elements arranged in a matrix, each fluid ejection element configured to cause a fluid to be ejected from a nozzle. The layer separate from the substrate includes a plurality of electrical connections, each electrical connection adjacent to a corresponding fluid ejection element.

Liquid Ejecting Head And Liquid Ejecting Apparatus

A liquid ejecting head including a flow path forming substrate in which a pressure chamber in communication with a nozzle is formed, a diaphragm formed on the flow path forming substrate, and a piezoelectric actuator including a first electrode, a piezoelectric layer, and a second electrode that are formed on the diaphragm. In the liquid ejecting head, a center portion of the diaphragm is not provided with an active portion, which is a portion where the piezoelectric layer is interposed between the first electrode and the second electrode, a protective film that covers the diaphragm is formed in the center portion, and compressive stress of the protective film is larger than that of the diaphragm. 1. A liquid ejecting head comprising:a flow path forming substrate in which a pressure chamber in communication with a nozzle is formed;a diaphragm formed on one side of the flow path forming substrate; anda piezoelectric actuator including a first electrode, a piezoelectric layer, and a second electrode that are formed on the diaphragm on a side opposite the flow path forming substrate, whereina center portion of the diaphragm is not provided with an active portion,the center portion is an area opposing the pressure chamber in plan view,the active portion is a portion where the piezoelectric layer is interposed between the first electrode and the second electrode,a protective film that covers the diaphragm is formed in the center portion, anda tensile stress of the protective film is larger than that of the diaphragm.2. The liquid ejecting head according to claim 1 , wherein the diaphragm is flexed so as to protrude towards the pressure chamber.3. The liquid ejecting head according to claim 1 , wherein the protective film covers the piezoelectric layer or the second electrode.4. The liquid ejecting head according to claim 1 , wherein the active portion is provided to an outside of the pressure chamber in plan view.5. The liquid ejecting head according to claim 1 , wherein ...

MICROFLUIDIC MEMS PRINTING DEVICE WITH PIEZOELECTRIC ACTUATION

A microfluidic device, having a containment body accommodating a plurality of ejecting elements arranged adjacent to each other. Each ejecting element has a liquid inlet, a containment chamber, a piezoelectric actuator and an ejection nozzle. The piezoelectric actuators of each ejecting element are connected to a control unit configured to generate actuation signals and to be integrated in the containment body. 1. A microfluidic device , comprising:a containment body;a plurality of ejecting elements arranged adjacent to each other and accommodated in the containment body, each ejecting element including a liquid inlet, a containment chamber, a piezoelectric actuator, and an ejection nozzle; and a driving stage that comprises a plurality of driver switches coupled to the piezoelectric actuators, respectively, each driver switch having a control input;', 'a decoding stage coupled to the control input of each driver switch., 'a control circuit configured to generate actuation signals that actuate the piezoelectric actuators, wherein the control circuit is integrated in the containment body, the control circuit including2. The microfluidic device according to claim 1 , wherein the containment body comprises a distribution region claim 1 , an actuation region and a nozzle region claim 1 , wherein the distribution region accommodates the liquid inlets claim 1 , the actuation region carries the piezoelectric actuators claim 1 , and the nozzle region forms the ejection nozzles of the ejecting elements claim 1 , the control circuit being integrated into the actuation region.3. The microfluidic device according to claim 2 , wherein the distribution region claim 2 , the actuation region and the nozzle region include separate claim 2 , mutually bonded plates.4. The microfluidic device according to claim 2 , wherein the actuation region has a first width and at least one of the distribution region and the nozzle region has a second width smaller than the first width.5. The ...

Method for Manufacturing Liquid Discharge Apparatus and Liquid Discharge Apparatus

There is provided a method for manufacturing a liquid discharge apparatus including: forming a photoresist film made of a photoresist on a silicon substrate; exposing the photoresist film; forming a nozzle in the photoresist film by exposing the photoresist film and then developing the photoresist film; forming a channel hole in communication with the nozzle by carrying out an etching process from a surface of the substrate on the opposite side from the photoresist film after forming the nozzle; and joining a channel member to the surface of the substrate on the opposite side from the photoresist film, the channel member including a pressure chamber in communication with the channel hole and a piezoelectric element formed as a film to correspond to the pressure chamber. 1. (canceled)2. A liquid discharge apparatus comprising:a substrate being formed with a channel hole in communication with a pressure chamber;a first film arranged on the substrate; anda second film made of a photoresist and arranged on the first film, the second film being formed with a nozzle in communication with the channel hole.3. The liquid discharge apparatus according to claim 2 , wherein an outer edge of the second film is arranged 10 to 20 μm inside of an outer edge of the substrate.4. The liquid discharge apparatus according to claim 2 , wherein the substrate is a silicon substrate.5. The liquid discharge apparatus according to claim 2 , wherein the first film contains an inorganic compound.6. The liquid discharge apparatus according to claim 2 , wherein the first film has a thickness of 1 μm or less.7. A liquid discharge apparatus comprising:a substrate being formed with a channel hole in communication with a pressure chamber; anda film made of a photoresist and arranged on the substrate, the film being formed with a nozzle in communication with the channel hole,wherein an outer edge of the film is arranged 10 to 20 μm inside of an outer edge of the substrate.8. The liquid discharge ...

Piezoelectric element and piezoelectric element device

A piezoelectric element includes a first electrode formed on a substrate, a piezoelectric layer formed on the first electrode and composed of a complex oxide having a perovskite structure containing potassium (K), sodium (Na), niobium (Nb), and manganese (Mn), and a second electrode formed on the piezoelectric layer. The manganese includes divalent manganese (Mn 2+ ), trivalent manganese (Mn 3+ ), and tetravalent manganese (Mn 4+ ), a molar ratio of the divalent manganese to a sum of the trivalent manganese and the tetravalent manganese ((Mn 2+ /(Mn 3+ +Mn 4+ )) is 1 or more and 10 or less, and a molar ratio of the potassium to the sodium (K/Na) is 1.1 or less.

MEMS Jetting Structure For Dense Packing

A fluid ejector includes a fluid ejection module having a substrate and a layer separate from the substrate. The substrate includes a plurality of fluid ejection elements arranged in a matrix, each fluid ejection element configured to cause a fluid to be ejected from a nozzle. The layer separate from the substrate includes a plurality of electrical connections, each electrical connection adjacent to a corresponding fluid ejection element.

Vibrating plate structure and piezoelectric element application device

A vibrating plate is provided between a substrate and a piezoelectric element formed of electrodes and a piezoelectric layer and includes a first layer which is formed of a silicon oxide and a second layer which is formed of a ceramic having a Young's modulus larger than that of the silicon oxide. Under the condition in which the following expression (1) has a constant value, where in the expression (1), E v1 , d v1 , E v2 , and d v2 represent Young's modulus of the first layer, the thickness thereof, Young's modulus of the second layer, and the thickness thereof, E v1 ×d v1 2 +E v2 ×d v2 2   (1) when the combination of d v1 and d v2 which sets the value of the following expression (2) in a range of from the minimum value to +2% thereof is represented by (D v1 , D v2 ), E v1 ×d v1 3 +E v2 ×d v2 3   (2) the thickness of the first layer and the thickness of the second layer are represented by D v1 and D v2 .

PIEZOELECTRIC ACTUATOR AND A MANUFACTURE METHOD OF THE PIEZOELECTRIC ACTUATOR

A piezoelectric actuator comprises a vibration plate, a first electrode, a first piezoelectric layer, a second electrode, a second piezoelectric layer and a third electrode. With respect to a top-bottom direction orthogonal to a surface of the vibration plate, the vibration plate, the first electrode, the first piezoelectric layer, the second electrode, the second piezoelectric layer and the third electrode are stacked in this order. The second piezoelectric layer is narrower than the first piezoelectric layer in a first direction parallel to the surface of the vibration plate. The third electrode extends in the first direction and covers both side surfaces of both of the first piezoelectric layer and the second piezoelectric layer in the first direction. 1. A piezoelectric actuator comprising:a vibration plate;a first electrode;a first piezoelectric layer;a second electrode;a second piezoelectric layer; anda third electrode, with respect to a top-bottom direction orthogonal to a surface of the vibration plate, the vibration plate, the first electrode, the first piezoelectric layer, the second electrode, the second piezoelectric layer and the third electrode are stacked in this order,', 'the second piezoelectric layer is narrower than the first piezoelectric layer in a first direction parallel to the surface of the vibration plate, and', 'the third electrode extends in the first direction and covers both side surfaces of both of the first piezoelectric layer and the second piezoelectric layer in the first direction., 'wherein'}2. The piezoelectric actuator according to claim 1 ,wherein both the first piezoelectric layer and the second piezoelectric layer in a second direction, the second direction orthogonal to the top-bottom direction and the second direction orthogonal to the first direction, are each longer than the first piezoelectric layer and the second piezoelectric layer in the first direction, respectively,wherein the second electrode extends a distance in ...

Piezoelectric element and liquid ejection head

A piezoelectric element includes: a first electrode containing crystal grains; a piezoelectric layer which contains potassium, sodium, and niobium and which is provided above the first electrode; and a second electrode provided above the piezoelectric layer, and the average grain diameter of the crystal grains is less than 550 nm.

PZT-FILM LAMINATED STRUCTURE, LIQUID DISCHARGE HEAD, LIQUID DISCHARGE DEVICE, LIQUID DISCHARGE APPARATUS, AND METHOD OF MAKING PZT-FILM LAMINATED STRUCTURE

A PZT-film laminated structure includes a substrate, a lower electrode on the substrate, an orientation control layer on the lower electrode, a PZT layer on the orientation control layer, and an upper electrode on the PZT layer. The PZT layer has a (100) or (001) main orientation in which a peak intensity of PZT (100) or (001) is 90% or greater relative to a peak intensity of all PZT peaks in an X-ray diffraction measurement. A ratio of a total value of a secondary ion intensity of Cl relative to a total value of a secondary ion intensity of Ti in the PZT layer is equal to or smaller than 0.03 when the secondary ion intensity of Cl and the secondary ion intensity of Ti in the PZT layer are measured in a direction of thickness of the PZT layer with a magnetic-field secondary ion mass spectrometry. 1. A PZT-film laminated structure , comprising:a substrate;a lower electrode disposed on the substrate;an orientation control layer disposed on the lower electrode;a PZT layer disposed on the orientation control layer; andan upper electrode disposed on the PZT layer,the PZT layer having a (100) or (001) main orientation in which a peak intensity of PZT (100) or (001) is 90% or greater relative to a peak intensity of all PZT peaks in an X-ray diffraction measurement, anda ratio of a total value of a secondary ion intensity of Cl relative to a total value of a secondary ion intensity of Ti in the PZT layer being equal to or smaller than 0.03 when the secondary ion intensity of Cl and the secondary ion intensity of Ti in the PZT layer are measured in a direction of thickness of the PZT layer with a magnetic-field secondary ion mass spectrometry.2. The PZT-film laminated structure according to claim 1 ,wherein the orientation control layer includes titanium oxide or lead titanate.3. A liquid discharge head comprising:a nozzle substrate having a nozzle orifice to discharge liquid;a channel forming substrate including a pressurization chamber communicated with the nozzle orifice; ...

Liquid ejecting head and liquid ejecting apparatus

A liquid ejecting head includes a plurality of driving elements that causes an ejection of a liquid from a nozzle by causing a fluctuation in a pressure, a sealing body that seals a first space for accommodating the plurality of driving elements, a case member that forms a second space for surrounding the sealing body, an atmosphere vent that is formed in the case member and through which the second space communicates with the air, a communication hole that is formed in the sealing body and through which the first space communicates with the second space, and a moisture absorbent disposed in the second space.

PIEZOELECTRIC DEVICE, LIQUID DISCHARGE HEAD, AND LIQUID DISCHARGE APPARATUS

A piezoelectric device includes a pressure chamber forming substrate in which a pressure chamber empty portion is formed, a vibrating plate that is formed on the pressure chamber forming substrate, corresponding to the pressure chamber empty portion, and a piezoelectric element that is formed on the vibrating plate, corresponding to the pressure chamber empty portion, in which the vibrating plate is provided with a concave portion having a bottom portion which is overlapped with the pressure chamber empty portion, and is larger than the pressure chamber empty portion in a planar view, and a wall portion which surrounds the bottom portion, on the pressure chamber empty portion side, the wall portion has a curved surface that is inclined to widen in a direction toward the pressure chamber empty portion from the bottom portion, and a curvature radius of the curved surface is 60 nm to 1000 nm. 1. A piezoelectric device comprising:a substrate in which a space is formed;an elastic layer that is formed on the substrate, corresponding to the space; anda piezoelectric element that is formed on the elastic layer, corresponding to the space,wherein the elastic layer is provided with a concave portion having a bottom portion which is overlapped with the space, and is larger than the space in a planar view, and a wall portion which surrounds the bottom portion, on the space side,the wall portion has a curved surface that is inclined to widen in a direction toward the space from the bottom portion, anda curvature radius of the curved surface is 60 nm to 1000 nm.2. The piezoelectric device according to claim 1 ,wherein a portion of the curved surface is covered with a resin.3. The piezoelectric device according to claim 1 ,wherein the substrate is formed with a plurality of the spaces side by side, andthe number of the spaces per one inch is 300 or more and 600 or less.4. A liquid discharge head comprising:{'claim-ref': {'@idref': 'CLM-00001', 'claim 1'}, 'the piezoelectric device ...

Head

A head includes a plurality of individual channels, a first common channel, and a second common channel. The plurality of individual channels are arranged in a first row in a first direction. The plurality of individual channels are arranged in a second row in a second direction. The first direction and the second direction intersect each other. The first common channel extends in the first direction and is fluidly communicated the plurality of individual channels. The second common channel extends in the first direction. The second common channel is fluidly communicated the plurality of individual channels and overlaps the first common channel in a third direction. The third direction is orthogonal to both the first direction and the second direction.