11-07-2013 дата публикации
Номер: US20130177738A1
Принадлежит:
A method of forming a micro-structure () involves forming a multi-layered structure () including i) an oxidizable material layer () on a substrate () and ii) another oxidizable material layer () on the oxidizable material layer (). The oxidizable material layer () is formed of an oxidizable material having an expansion coefficient, during oxidation, that is more than 1. The method further involves forming a template (), including a plurality of pores (), from the other oxidizable material layer (), and growing a nano-pillar () inside each pore (). The nano-pillar () has a predefined length (L) that terminates at an end (). A portion of the template () is selectively removed to form a substantially even plane () that is oriented in a position opposed to the substrate (). A material is deposited on at least a portion of the plane () to form a film layer () thereon, and the remaining portion of the template () is selectively removed to expose the nano-pillars (). 1100100100100. A method of forming a micro-structure ( , ′ , ″ , ′″) , comprising:{'b': 10', '14', '12', '16', '14', '14, 'forming a multi-layered structure () including i) an oxidizable material layer () established on a substrate () and ii) an other oxidizable material layer () established on the oxidizable material layer (), the oxidizable material layer () being formed of an oxidizable material having an expansion coefficient, during oxidation, that is more than 1;'}{'b': 16', '16', '16', '18, 'forming a template (′) from the other oxidizable material layer (), the template (′) including a plurality of pores ();'}{'b': 20', '18', '20', '21, 'growing a nano-pillar () inside each of the plurality of pores (), wherein the nano-pillar () has a predefined length (L) that terminates at an end ();'}{'b': 16', '23', '12, 'selectively removing a portion of the template (′) to form a substantially even plane () that is oriented in a position opposed to the substrate ();'}{'b': 23', '22', '22, 'depositing a material ...
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