07-01-2021 дата публикации
Номер: US20210002755A1
An oxide sintered body containing indium, hafnium, tantalum, and oxygen as constituent elements, in which when indium, hafnium, and tantalum are designated as In, Hf, and Ta, respectively, the atomic ratio of Hf/(In+Hf+Ta) is equal to 0.002 to 0.030, and the atomic ratio of Ta/(In+Hf+Ta) is equal to 0.0002 to 0.013. 1. A transparent conductive oxide film , comprising:an oxide including indium, hafnium, tantalum, and oxygen as constituent elements,wherein the oxide satisfies that an atomic ratio of Hf/(In+Hf+Ta) is equal to 0.002 to 0.030, and that an atomic ratio of Ta/(In+Hf+Ta) is equal to 0.0002 to 0.013, where In, Hf and Ta are indium, hafnium, and tantalum, respectively.2. The transparent conductive oxide film according to claim 1 , wherein the atomic ratio of Hf/(In+Hf+Ta) is equal to 0.005 to 0.025.3. The transparent conductive oxide film according to claim 1 , wherein the atomic ratio of Hf/(In+Hf+Ta) is equal to 0.007 to 0.021.4. The transparent conductive oxide film according to claim 1 , wherein the atomic ratio of Ta/(In+Hf+Ta) is equal to 0.001 to 0.010.5. The transparent conductive oxide film according to claim 1 , wherein the atomic ratio of Ta/(In+Hf+Ta) is equal to 0.003 to 0.010.6. The transparent conductive oxide film according to claim 1 , wherein the atomic ratio of Hf/(In+Hf+Ta) is equal to 0.005 to 0.025 claim 1 , and the atomic ratio of Ta/(In+Hf+Ta) is equal to 0.001 to 0.010. The present application is a divisional of and claims the benefit of priority to U.S. application Ser. No. 16/078,488, filed Aug. 21, 2018, which is the National Stage of the International Patent Application No. PCT/JP2017/006045, filed Feb. 20, 2017, which is based upon and claims the benefit of priority to Japanese Patent Application Nos. 2016-031403, filed Feb. 22, 2016, and 2016-223540, filed Nov. 16, 2016. The entire contents of all of the above applications are incorporated herein by reference.The present invention relates to an oxide sintered body, a sputtering ...
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