17-04-2014 дата публикации
Номер: US20140102365A1
Принадлежит:
Methods for deposition of elemental metal films on surfaces using metal coordination complexes comprising nitrogen-containing ligands are provided. Also provided are nitrogen-containing ligands useful in the methods of the invention and metal coordination complexes comprising these ligands. 1. A metal coordinating ligand having a formula{'sub': 1', '2', 'x', 'y', '7', '8', '1-6', '2-4', '1', '2', '7', '8', '3', '4', '5', '6, 'a) RRN—(CR)—N—(CR)—NRR, wherein each R is independently hydrogen, Calkyl, acyl, aldehyde, keto or Calkenyl and x and y are independently 2-6, provided that when each of R, R, Rand Ris ethyl, at least one of R, R, Rand Ris not H;'}{'sub': 1', '2', '1', '2', '3', '4', '1-6', '2-4', '1', '2', '1', '2', '3', '4, 'b) RRN—Ar—NH—Ar—NRR, wherein each R is independently hydrogen, Calkyl, acyl, aldehyde, keto or Calkenyl, and Arand Arare aromatic hydrocarbon moieties which may be the same or different, provided that at least one of R, R, Rand Ris not methyl;'}{'sub': 1', '2', '3', '4', 'x', 'Ar', '5', '6', 'y', '7', '8', '1-6', '2-4', 'Ar', '1', '2', '3', '4, 'c) RRN—(CRR)—N—(CRR)—NRR, wherein each R is independently hydrogen, Calkyl, acyl, aldehyde, keto or Calkenyl, and Nis a heterocyclic aromatic moiety wherein the heteroatom is N, provided that at least one of R, R, Rand Ris not methyl, or;'}{'sub': Ar1', '1', '2', 'x', '5', '3', '4', 'y', 'Ar2', '1-6', '2-4', 'Ar1', 'Ar2, 'd) N—(CRR)—NR—(CRR)—N, wherein each R is independently hydrogen, Calkyl, acyl, aldehyde, keto or Calkenyl, and Nand Nmay be the same or different and are heterocyclic aromatic moieties wherein the heteroatom is N.'}3. The metal coordinating ligand of claim 2 , wherein R claim 2 , R claim 2 , Rand Rof formula I are each ethyl (Et) and each of R-Ris independently hydrogen claim 2 , Calkyl claim 2 , acyl claim 2 , aldehyde claim 2 , keto or Calkenyl.4. An apparatus comprising:a deposition chamber; and{'claim-ref': {'@idref': 'CLM-00001', 'claim 1'}, 'the metal coordinating ligand of ...
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