30-03-2017 дата публикации
Номер: US20170088755A1
Автор:
CHO Sungyong,
CHOI Jaehyuck,
Chung Donghoon,
KIM Ikjun,
KIM Jikang,
KIM Myungjun,
LEE Han-shin,
MIN Jeonghwan,
SEO Kyoungchae,
Yang Jeongsu,
YOO BYUNGCHUL
Принадлежит:
A pellicle including a water-soluble adhesive and a photomask assembly including the pellicle are provided. A pellicle may include a membrane, a pellicle frame, and a water-soluble adhesive disposed on the pellicle frame. The water-soluble adhesive may be prepared by a mixture including a water-soluble acrylic adhesive material in an amount of about 40% to about 55% by weight of the mixture, water or a solution of water and alcohol in an amount of about 40% to about 55% by weight of the mixture, and an additive in an amount of about 1% to about 5% by weight of the mixture. 18.-. (canceled)9. A method of manufacturing a pellicle adhesive , comprising:{'sub': '2', 'copolymerizing an acrylate monomer and a functional monomer, the functional monomer comprising a COOH group or a CONHgroup; and'}{'sub': 2', '3', '1', '3, 'sup': +', '+', '+', '+, 'substituting a hydrogen ion of the COOH group or the CONHgroup with a sodium ion (Na), a potassium ion (K), a calcium ion (Ca), or an ammonium ion (NHR) to form a water-soluble acrylic adhesive material, wherein R is hydrogen or a Cto Calkyl group.'}10. The method of claim 9 , wherein the copolymerizing is initiated by a radical initiator claim 9 , andwherein the radical initiator comprises at least one of azobis iso-butyro nitrile, benzoyl peroxide, di-tert-butyl peroxide, and tert-butyl peroxybenzoate.11. The method of claim 9 , wherein the substituting is performed using at least one salt of KOH claim 9 , NaOH claim 9 , Ca(OH) claim 9 , and NHOH.12. The method of claim 9 , wherein the acrylate monomer comprises at least one of methyl acrylate claim 9 , ethyl acrylate claim 9 , isopropyl acrylate claim 9 , n-butyl acrylate claim 9 , 2-ethylhexyl acrylate claim 9 , n-butyl methacrylate claim 9 , and glycidyl methacrylate.13. The method of claim 9 , wherein the functional monomer comprises an acrylic acid monomer or an amide monomer.14. The method of claim 13 , wherein the acrylic acid monomer comprises at least one of acrylic ...
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