03-09-2020 дата публикации
Номер: US20200278607A1
Принадлежит:
A negative-tone resist composition is provided that contains a free photoacid generator and a multifunctional polymer covalently bound to a photoacid-generating moiety, where the composition is substantially free of cross-linking agents. Multifunctional polymers useful in conjunction with the resist composition are also provided, as is a process for generating a resist image on a substrate using the present compositions and polymers. 115-. (canceled)16. A polymer comprising:(a) about 50 mol % to about 80 mol % first recurring units providing the polymer with aqueous base solubility and comprising an aqueous base soluble functionality selected from phenols, fluoroalcohols, and sulfonamides;(b) about 10 mol % to about 40 mol % second recurring units containing a polarity switching functionality that converts from a polar group to a nonpolar group in the presence of a polymer-bound acid generated upon exposure of the polymer to radiation;(c) about 1 mol % to about 10 mol % third recurring units that are covalently bound to a photoacid-generating group that generates the polymer-bound acid upon exposure of the polymer to radiation; and(d) optionally, fourth recurring units derived from an aromatic ring bearing cyclic olefin monomer.1720-. (canceled)21. The polymer of claim 16 , having a weight average molecular weight of 1 claim 16 ,000 to 50 claim 16 ,000.22. The polymer of claim 16 , having a weight average molecular weight of 1 claim 16 ,000 to 20 claim 16 ,000.23. The polymer of claim 16 , having a Polydispersity Index in the range of 1.0 to 3.0.24. The polymer of claim 23 , having a Polydispersity Index in the range of 1.0 to 2.5.25. The polymer of claim 22 , having a Polydispersity Index in the range of 1.0 to 2.5.27. The polymer of claim 26 , wherein:{'sup': '1', 'Ris H, m is zero (such that the unit derives from 4-hydroxystyrene);'}{'sup': 1', '2, 'Ris H, m is 1, and Ris o-methyl;'}{'sup': 1', '2, 'Ris H, m is 1, and Ris m-methyl;'}{'sup': 1', '2, 'Ris H, m is 2 ...
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