02-03-2017 дата публикации
Номер: US20170060143A1
Methods, systems, and apparatus for pressure-based flow measurement are provided. A processor receives, from the pressure-based mass flow controller (MFC), an upstream pressure value P. The processor computes, for the pressure-based mass flow controller (MFC), a downstream pressure value Pbased on the received upstream pressure value P. The processor computes, for the pressure-based mass flow controller (MFC), a flow rate Q based on the received upstream pressure value Pand the computed downstream pressure value P. The processor controls a flow through the pressure-based mass flow controller (MFC) based on the computed flow rate Q. The methods, systems, and apparatus can be used for flow measurement in non-critical or un-choked flow conditions. 1. A system for pressure-based flow measurement of a fluid flow , the system comprising:a pressure-based mass flow controller (MFC) including a flow control valve, a flow restrictor, and a pressure sensor upstream of the flow restrictor, wherein the flow control valve, flow restrictor and pressure sensor are disposed along a flow stream;one or more processors coupled with the pressure-based mass flow controller (MFC); andmemory coupled to the one or more processors, the memory including instructions which, when executed by the one or more processors, cause the one or more processors to{'sub': 'u', '(i) receive, from the pressure-based mass flow controller (MFC), an upstream pressure value P;'}{'sub': d', 'u, '(ii) calculate, for the pressure-based mass flow controller (MFC), a downstream pressure value Pbased on the received upstream pressure value P;'}{'sub': u', 'd, '(iii) calculate, for the pressure-based mass flow controller (MFC), a flow rate Q based on the received upstream pressure value Pand the calculated downstream pressure value P; and'}(iv) control a flow through the pressure-based mass flow controller (MFC) based on the calculated flow rate Q.2. The system of claim 1 , wherein the flow restrictor comprises a flow ...
Подробнее