18-05-2017 дата публикации
Номер: US20170138790A1
Принадлежит:
A method for determining spectral calibration data (λ(S), S(λ)) of a Fabry-Perot interferometer () comprises: 1. A method for determining spectral calibration data (λ(S) , S(λ)) of a Fabry-Perot interferometer , the method comprising:{'sub': 1', '2', '1', '1', '2', '1, 'b': '1', 'forming a plurality of filtered spectral peaks (P′, P′) by filtering input light (LB) with a Fabry-Perot etalon such that a first filtered peak (P′) corresponds to a first transmittance peak (P) of the etalon, and such that a second filtered peak (P′) corresponds to a second transmittance peak (P) of the etalon,'}{'sub': d', '1', '2', 'd', 'FP', 'd', 'FP, 'using the Fabry-Perot interferometer for measuring a spectral intensity distribution (M(S)) of the filtered spectral peaks (P′, P′), wherein the spectral intensity distribution (M(S)) is measured by varying the mirror gap (d) of the Fabry-Perot interferometer and by providing a control signal (S) indicative of the mirror gap (d), and'}{'sub': cal', 'd', 'd,cal', 'd', 'E, 'determining the spectral calibration data (λ(S), S(λ)) by matching the measured spectral intensity distribution (M(S)) with the spectral transmittance (T(λ)) of the etalon'}2. The method of claim 1 , wherein the spectral calibration data (λ(S) claim 1 , S(λ)) determines a relation for obtaining spectral positions (λ) from values of the control signal (S).3. The method of claim 1 , wherein the minimum spectral transmittance (T) of the etalon is lower than or equal to 90% of the maximum spectral transmittance (T) of the etalon.4111. The method according to claim 1 , wherein first spectral calibration data (λ(S) claim 1 , S(λ)) is determined by using input light (LB) obtained from an object (OBJ) claim 1 , and a calibrated spectrum (I(λ)) of an object (OBJ) is determined from a measured spectral intensity distribution M(S) by using said first spectral calibration data (λ(S).51. The method according to claim 1 , further comprising monitoring the temperature of the etalon ...
Подробнее