INFRARED DETECTOR FORMING METHOD AND ASSOCIATED INFRARED DETECTOR

A method of forming an infrared detector includes defining an optical window in a cover substrate. Defining the optical window includes forming a multilayer interference filter or a periodic diffraction grating on an upper surface of the optical window and a periodic diffraction grating on the lower surface of the optical window. The method also includes performing anodic bonding of a spacer onto the cover substrate, transferring the cover substrate provided onto a base substrate, and hermetically bonding the spacer onto the base substrate.

CIGARETTE TEMPERATURE DETECTION DEVICE AND METHOD

A cigarette temperature detection device including multiple cylindrical convex lenses is provided, wherein each of the cylindrical convex lenses has a thicker central wall between two thinner end walls formed by rotating a parallel line at a predetermined distance around a long axis of an elliptical-like section resulting from cutting the circular convex lens by a plane perpendicular to a centerline. The disclosed cigarette temperature detection device allows accurate and reliable detection of a temperature of an entire circumferential surface of a cigarette on site.

SURFACE SENSITIZATION FOR HIGH-RESOLUTION THERMAL IMAGING

A structured product, comprising: at least two layers comprising a first layer and a second layer; wherein: the first layer comprises at least one material having a temperature-dependent (e.g., a positive temperature-dependent or a negative temperature-dependent) wavelength-integrated emissivity (ε); the second layer comprises at least one reflective material that is reflective to light in an 8-14 μm wavelength range; and the structured product has a positive temperature-dependent wavelength-integrated emissivity. The structured product is useful in a method for thermal image sensitizing, the method comprising imaging, in an infrared spectrum, the structured product.

Cigarette temperature detection device and method

A cigarette temperature detection device including multiple cylindrical convex lenses is provided, wherein each of the cylindrical convex lenses has a thicker central wall between two thinner end walls formed by rotating a parallel line at a predetermined distance around a long axis of an elliptical-like section resulting from cutting the circular convex lens by a plane perpendicular to a centerline. The disclosed cigarette temperature detection device allows accurate and reliable detection of a temperature of an entire circumferential surface of a cigarette on site.

CURVED PRISM ARRAY APPLIED TO AN INFRARED SENSOR

A curved prism array applied to an infrared sensor wherein: the infrared sensor comprises at least an infrared sensing element which is used in detecting infrared signals within a solid-angled FOV and installed inside the curved prism array; the curved prism array has an incident focal plane and a plurality of emergent focal planes, both of which are not parallel with each other, such that infrared signals beyond the solid-angled FOV are received by the incident focal plane, refracted through one of the emergent focal planes and guided toward the infrared sensing element for expansion of the solid-angled FOV of the infrared sensing element.

INFRARED DETECTOR AND INFRARED IMAGE SENSOR INCLUDING THE SAME

An infrared detector includes a substrate in which a void is formed, a micro-resonator suspended over the void, an infrared absorber on an upper surface of the micro-resonator, a thermal isolation bridge supporting the micro-resonator, a first waveguide optically coupled with the micro-resonator, a second waveguide intersecting the first waveguide and optically coupled with the micro-resonator, a light source optically coupled with the first waveguide, and a photodetector optically coupled with the second waveguide.

Method for measuring temperature of furnace wall in coke carbonizing chamber

(57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。

Infrared image pickup device

MEASURING AND HEATING PROBE FOR THE HEAT TREATMENT OF METAL CONDUITS, ESPECIALLY HEAT EXCHANGER TUBES

Optical probe

An optical probe is particularly for use as part of the viewing system of a radiation pyrometer, e.g. for measurement of temperatures of turbine blades in a gas turbine aeroengine. Although the objective end of the probe lies flush with the outer wall of the turbine gas passage in order to avoid disturbance of the gas flow and is angled away from the blade by virtue of its conformity with the geometry of the outer wall of the gas passage, the probe's field of view nevertheless includes locations on the turbine blades which are considerably axially upstream from the probe's position. This is achieved by providing the probe with an objective prism whose front and rear faces are inclined with respect to each other, so that, for rays of a preselected wavelength, the prism refracts into the probe and along the internal optical path of the probe only those rays from a preselected location on the blade. Since the blade radiates at a number of wavelengths, a filter is included in the viewing system so that the pyrometer is presented with radiation at a single wavelength, and therefore with a single image from the single preselected location on the blade. The probe also includes an image centralizing prism in order to centralize the optical path within the probe, and glare stops in order to collimate the rays after they have passed through the objective prism and the image centralizing prism. The objective prism may be made of sapphire in order to withstand the heat of the turbine gases.

Coatings

Light detector of wave length conversion type

SEARCHER HEAD OPERATING IN THREE WAVES

Buluş, üç dalga boyunda çalışan ve kompakt bir yapıya sahip olan yapı içeren bir arayıcı başlık ile ilgilidir. Buluş özellikle, üç farklı dalga boyunun (SWIR, MWIR ve LWIR) seçici geçirgen kaplamaya sahip beşgen tarafından üç farklı detektöre ayrıştırılması sağlanarak arayıcı başlığın kızılötesi bantların hepsinde aynı anda çalışması sağlayan bir arayıcı başlık ile ilgilidir. The invention relates to a seeker head with structure operating at three wavelengths and having a compact structure. In particular, the invention relates to a seeker head that allows three different wavelengths (SWIR, MWIR and LWIR) to be separated into three different detectors by the pentagon with selectively permeable coating, enabling the seeker to operate simultaneously in all infrared bands.

Pyranometer and method of assembling pyranometer

【課題】日射計および日射計の組み立て方法を提供する。【解決手段】日射計１００は、日射計ハウジング４と、少なくとも１つの放射センサー２と、を含み、少なくとも１つの放射センサーは、日射計ハウジングから電気的に絶縁され、かつ、少なくとも１つの支持要素４２によって日射計ハウジングに熱的に結合され、支持要素は、日射計ハウジングに接続される、とともに、少なくとも１つの放射センサーを支持するように構成される。【選択図】図１

Seeker working in three wavelengths

The invention relates to a seeker working in three wavelengths and comprising a compact structure. In particular, the invention relates to seeker that enables the seeker to work in all infra-red bands simultaneously by separating three different wavelengths (SWIR, MWIR and LWIR) into three different detectors by means of the pentagon having a selectively permeable coating.

Pyrometer background elimination

본 명세서에 개시된 실시예들은 기판을 처리하기 위한 RTP 시스템을 제공한다. RTP 챔버는 처리 용적 내에 배치된 기판에 복사를 전달하도록 구성된 복사 소스를 갖는다. 하나 이상의 고온계가 복사 소스에 대향하여 챔버 바디에 연결된다. 일례에서, 복사 소스는 기판 아래에 배치되고, 고온계들은 기판 위에 배치된다. 다른 예에서, 복사 소스는 기판 위에 배치되고, 고온계들은 기판 아래에 배치된다. 기판은 기판 지지체와 기판 사이의 물리적 접촉을 감소시키도록 구성된 다양한 방식으로 지지될 수 있다. 에지 링 및 쉴드가 처리 용적 내에 배치되고, 배경 복사가 고온계들과 간섭하는 것을 감소시키거나 제거하도록 구성된다. 부가적으로, 배경 복사 간섭을 추가로 감소시키기 위해 흡수성 표면이 챔버 바디에 연결될 수 있다.

Device for temperature measurement

Device for detecting excessively heated components or locations in moving objects

In a device for detecting excessively heated components or locations in moving objects, in particular in moving rail vehicles, such as bearings, brakes and/or wheel rims, having at least one infrared beam detector (7) and optical devices for representing the image of the measuring point on the infrared beam detector (7), a separate lens (1, 2) is aimed toward each measuring point, which focuses the image of the measuring point on different points (4, 5) of an image-correcting system (3), and a scanning device (9), which periodically picks up the measuring beams, is disposed between the image-correcting system (3) and the detector (7) and focuses the measuring beams onto the detector (7) which is common to all measuring points.

Optical probe

Temperature measuring system and optical switch used therein

가스 터빈 엔진(10)내에서 터빈 버킷 온도를 측정하기 위한 장치(14)는 고온계(20) 및 분광계(18)와 같은 다수의 광학 검출기(18, 20)는, 방사선을 공통의 시선을 따라서 터빈 엔진 사이트 글래스(12)로부터 광학 검출기(18, 20)중 어느 하나로 선택적으로 배향시키기 위한 광학 스위치(22)를 구비한다. 광학 스위치(22)는 제 1 및 제 2 블록(32, 34)을 구비하며, 광학 검출기(18, 20)는 제 2 블록(34)내에 배치되는 것이 바람직하다. 로터(31)는 회전축을 중심으로 회전가능한 제 1 블록(32)과 제 2 블록(34) 사이에 장착되며, 광섬유 케이블(76)은 회전축상에 배치된 제 1 단부 및 회전축으로부터 오프셋된 제 2 단부를 구비한다. 로터(31)의 회전은 광학 검출기(18, 20)의 어느 하나에 인접한 광섬유 케이블(76)의 제 2 단부에 선택적으로 위치설정된다.

Pyroelectric type infrared sensor

An object of the invention is to provide a pyroelectric type infrared sensor without external lens, made in a compact size, and having an improved sensibility. A pyroelectric element for detecting infrared rays is provided in a sealed tube (sealed body) having an opening, at said opening is provided an incident infrared ray filter. A diffraction optical lens (diffraction optical element) for focusing or imaging infrared rays is provided on the front or back surface of said incident infrared ray filter.

Temperature measuring system

Pyroelectric infrared sensor

Infrared sensor module and forehead thermometer

An infrared sensor module and a forehead thermometer are provided. The infrared sensor module includes a light guide structure and an infrared sensor element. An annular hollow space is formed inside the light guide structure and passes therethrough. A first and second opening is formed on two opposite sides of the light guide structure, respectively. A diameter of the first opening is greater than a diameter of the second opening. The annular hollow space includes a matte and reflective area, the matte area has serration portions, and each of the serration portions extends from the first opening to the second opening and is arranged parallel to each other. The reflective area is formed between the second opening and the matte area. The infrared sensor element is disposed at the second opening. The forehead thermometer includes a casing, a circuit board, the infrared sensor module, and an operating switch.

광학 디바이스

광학 디바이스가 제공된다. 광학 디바이스는 비행 시간(TOF: time-of-flight) 센서 어레이, 광자 변환 박막 및 광원을 포함한다. 광자 변환 박막은 비행 시간 센서 어레이 위에 배치된다. 광원은 비행 시간 센서 어레이에 의해 수신된 제2 파장을 갖는 광으로 변환될, 제1 파장을 갖는 광을 광자 변환 박막을 향해 방출한다. 제2 파장은 제1 파장보다 더 길다.

Infrared detector forming method and associated infrared detector

Optical devices

An optical device is provided. The optical device includes a time-of-flight (TOF) sensor array, a photon conversion thin film, and a light source. The photon conversion thin film is disposed above the time-of-flight sensor array. The light source emits light with a first wavelength towards the photon conversion thin film to be converted into light with a second wavelength received by the time-of-flight sensor array. The second wavelength is longer than the first wavelength.

Pyranometer and method of assembling a pyranometer

One embodiment provides a pyranometer, including: a pyranometer housing; and at least one radiation sensor; wherein the at least one radiation sensor is electrically isolated from the pyranometer housing and thermally coupled to the pyranometer housing by at least one supporting element, wherein the supporting element is connected to the pyranometer housing and is configured to support the at least one radiation sensor. Other aspects are described and claimed.

Method for manufacturing near-infrared sensor cover

A method for manufacturing a near-infrared sensor cover includes arranging a mask in a region of an undercoating layer formed on a rear surface of a base, the region being different from a heater formation region in which a heater is to be formed and different from a belt-shaped separation region extending along an edge of the heater formation region, forming a heat-generating film on the mask and the undercoating layer, the heat-generating film being made of the conductive heat-generating material, peeling, using a laser, the heat-generating film formed in the separation region, and removing the mask and the heat-generating film formed on the mask. The separation region has a width that is set to be smaller than a beam diameter of each of near-infrared rays transmitted from the transmitting portion.

高温计的背景消除

在此揭示的多个具体实施方式提供了一种用于处理基板的快速热处理(RTP)系统。RTP腔室具有辐射源，所述辐射源经配置以供应辐射至安置于处理空间中的基板。一个或多个高温计耦接至所述腔室主体，与所述辐射源相对。在一个范例中，所述辐射源安置于所述基板下方，并且所述高温计安置于所述基板上方。在另一个范例中，所述辐射源安置于所述基板上方并且所述高温计安置于所述基板下方。所述基板可以以各种方式支撑，所述方式经配置以减少所述基板支座与所述基板之间的物理接触。边缘环与屏蔽件安置于所述处理空间之中，并经配置以降低或消除背景辐射对所述高温计的干扰。此外，吸收表面可以耦接至所述腔室主体，以进一步降低背景辐射干扰。

红外探测器形成方法及相关联的红外探测器

本发明涉及一种形成红外探测器(10a)的方法，包括以下步骤：‑在覆盖基板(12)中限定光学窗口(11)；光学窗口(11)的所述限定包括在所述光学窗口(11)的上表面(17)上形成多层干涉滤光器(20)或周期性衍射光栅(21)，以及在所述光学窗口(11)的下表面(16)上形成周期性衍射光栅(21)；‑将间隔件(14a)阳极结合(13)到所述覆盖基板上；‑将设置的所述覆盖基板转移到底部基板(18)上；以及‑将所述间隔件(14a)气密结合到所述底部基板(18)上。

Einrichtung zum erkennen unzulässig erwärmter bauteile bzw. stellen an bewegten objekten

无分立像元光学读出的量子阱红外焦平面芯片

本发明提供了一种无分立象元光学读出的量子阱红外焦平面芯片的设计。它可以把在芯片上的红外图像直接转换成可见光图象,从而把红外探测技术转换到可见光探测技术,使对红外目标成像的芯片在空间分辨上达到可见光成像的水平。还介绍了该芯片的结构。包括量子阱材料具体结构设计、掺杂条件、芯片的电极设计、偏置电压条件及与可见光探测系统的相互结合。

System and method for multi-channel pyrometer allowing non-contact temperature measurements down to 800 K on the microsecond scale

The present disclosure relates to a system for sensing temperature changes on a microsecond scale. The system uses a multi-channel pyrometer that works in the NIR spectrum to receive thermal radiation. Each channel includes an interference filter tuned to pass thermal radiation within a specified wavelength range, and a detector. Each detector detects thermal radiation focused on it. Each channel further includes an interference filter which reflects thermal radiation which does not pass through it to a subsequent downstream interference filter of a subsequent channel. Each subsequent interference filter is oriented to reflect the thermal radiation not passing through it to a next downstream one of the subsequent interference filters. A subsystem is included for receiving the output from the detectors and determining sensed temperature data therefrom, allowing measurement of temperatures down to 800 K.

近赤外線センサカバーの製造方法

タバコロッド温度測定装置及びタバコロッド温度測定方法

本願発明は、タバコロッド温度測定装置であって、複数の円筒状凸レンズを備え、円筒状凸レンズの構造は、円形凸レンズ面の垂直中心線の近似楕円断面が、この近似楕円断面の長軸の所定距離離れた平行線を中心軸として一周することで形成された、中間部が最も厚く両端部が最も薄い筒状体である、タバコロッド温度測定装置を開示している。本願発明のタバコロッド温度測定装置は、製造現場で製造されるタバコロッドの周面全体の温度の測定を実現するものであり、測定結果が正確で信頼できる。【選択図】図１

Infrared detector and infrared image sensor including the same

An infrared detector includes a substrate in which a void is formed, a micro-resonator suspended over the void, an infrared absorber on an upper surface of the micro-resonator, a thermal isolation bridge supporting the micro-resonator, a first waveguide optically coupled with the micro-resonator, a second waveguide intersecting the first waveguide and optically coupled with the micro-resonator, a light source optically coupled with the first waveguide, and a photodetector optically coupled with the second waveguide.

멜트풀 모니터링장치 및 모니터링방법

보다 빠르고 정확한 멜트풀 모니터링이 가능한 멜트풀 모니터링장치 및 모니터링방법이 제안된다. 본 발명에 따른 멜트풀 모니터링장치는 멜트풀 모니터링장치는 3D 프린터의 멜트풀에 발광광을 조사하는 발광부; 멜트풀에 의해 반사된 수광광을 수광하는 수광부; 및 발광광 및 수광광의 광량차이에 기초하여 멜트풀을 모니터링하는 제어부;를 포함한다.

Infrared detector forming method and associated infrared detector

タバコロッド温度測定装置及びタバコロッド温度測定方法

멜트풀 모니터링장치 및 모니터링방법

보다 빠르고 정확한 멜트풀 모니터링이 가능한 멜트풀 모니터링장치 및 모니터링방법이 제안된다. 본 발명에 따른 멜트풀 모니터링장치는 멜트풀 모니터링장치는 3D 프린터의 멜트풀에 발광광을 조사하는 발광부; 멜트풀에 의해 반사된 수광광을 수광하는 수광부; 및 발광광 및 수광광의 광량차이에 기초하여 멜트풀을 모니터링하는 제어부;를 포함한다.

光学温度传感器芯片封装方法、光学温度传感器芯片及测温设备

本申请公开光学温度传感器芯片封装方法、光学温度传感器芯片及测温设备，该方法包括制作光学透镜单元，光学透镜单元包括相互贴合的光学透镜及保护胶层；采用塑封料对基板、红外测温裸片及光学透镜单元塑封成型获得第一光学温度传感器芯片中间产品；对第一光学温度传感器芯片中间产品的远离基板的一侧表面进行研磨获得第二光学温度传感器芯片中间产品，其包括裸露的剩余保护胶层；采用预设溶剂去除剩余保护胶层以裸露光学透镜，获得光学温度传感器芯片；本申请通过预先在光学透镜表面设置保护胶层并在封装的最后将其去除以实现保护该光学温度传感器芯片光学窗口，有效避免填充材料对光学窗口的污染，提高光学温度传感器的良品率。

Optisches Pyrometer mit lichtempfindlicher Zelle

Method for measuring by thermography a heating surface, in particular an electric heating plate

A method for measuring by thermography a heating surface such as a metal surface, a ceramic surface in particular an electric heating plate includes a homogeneous layer with constant thickness of a coating material is deposited onto the surface to be measured, the surface is heated to a determined temperature; and a thermal image of the surface coated with the layer of coating material, heated, is captured using a thermal measurement apparatus, the coating material having an emissivity detectable at the determined temperature in the spectral range of the thermal measurement apparatus, the coating material having an emissivity higher than that of the surface in the spectral range of the thermal measurement apparatus.

一种烟条温度检测装置及烟条温度检测方法

本发明公开了一种烟条温度检测装置，其包括多个筒状凸透镜，所述筒状凸透镜的结构为：圆形凸透镜片垂直中心线的近似椭圆剖面，围绕该近似椭圆剖面长轴的一定距离的平行线为中心轴旋转一周，形成的中间壁最厚两头壁最薄的筒状体。本发明的烟条温度检测装置实现了现场生产烟条的全圆周表面温度的检测，检测结果准确可信。

Cigarette stick temperature detection device and cigarette stick temperature detection method

The present disclosure provides a cigarette temperature detection device. The cigarette temperature detection device includes multiple cylindrical convex lenses, where each of the cylindrical convex lenses has a thicker central wall between two thinner end walls formed by rotating a parallel line at a predetermined distance around a long axis of an elliptical-like section resulting from cutting the circular convex lens by a plane perpendicular to a centerline. The present disclosure realizes accurate and reliable detection of the temperature of an entire circumferential surface of a cigarette on site.

一种烟条温度检测装置及烟条温度检测方法

一种烟条温度检测装置，其包括多个筒状凸透镜，筒状凸透镜的结构为：圆形凸透镜片垂直中心线的近似椭圆剖面，围绕近似椭圆剖面长轴的一定距离的平行线为中心轴旋转一周，形成的中间壁最厚两头壁最薄的筒状体。烟条温度检测装置实现了现场生产烟条的全圆周表面温度的检测，检测结果准确可信。

Einrichtung zur Strahlungsschwaechung bei Strahlungsmessern und Pyrometern

红外热探测器和红外探测焦平面阵列

本发明提供了一种红外热探测器和红外探测焦平面阵列。红外热探测器包括红外吸收器、荧光感温膜和光电收集器。红外吸收器用于吸收红外线；荧光感温膜与红外吸收器连接，用于激发出荧光信号，所述荧光信号的强度随所述红外吸收器的吸收的热量强弱变化；光电收集器与荧光感温膜连接，用于收集荧光感温膜发出的荧光信号并形成电信号。本发明提供的热红外探测器和红外探测焦平面阵列可以实现选择性单一或多波段红外波长吸收。利用荧光感温膜发出的荧光光强与热量的相关性读出红外线数据，突破了相关技术中非接触式红外热探测产品对红外波段收集的限制，并且对昂贵材料进行了替代，降低了成本。同时，采用光学读出方式可以很好地避免环境电磁噪声的影响，实现高灵敏度测量。

Cigarette stick temperature detection device and cigarette stick temperature detection method

光學裝置

本發明提供一種光學裝置。該光學裝置包括飛時測距感測器陣列、光轉換薄膜以及光源。該光轉換薄膜設置於該飛時測距感測器陣列上。該光源朝該光轉換薄膜發射具有第一波長的光，經該光轉換薄膜轉換為具有第二波長的光，並由該飛時測距感測器陣列接收。該第二波長大於該第一波長。

光学装置

本发明提供一种光学装置。该光学装置包括飞时测距感测器阵列、光转换薄膜以及光源。该光转换薄膜设置于该飞时测距感测器阵列上。该光源朝该光转换薄膜发射具有第一波长的光，经该光转换薄膜转换为具有第二波长的光，并由该飞时测距感测器阵列接收。该第二波长大于该第一波长。

光学装置

【課題】 少なくとも飛行時間センサ、光子変換薄膜、および光源によって統合された光学装置を提供する。【解決手段】 光源装置は、飛行時間（ＴＯＦ）センサアレイ、光子変換薄膜、および光源を含む。光子変換薄膜は、飛行時間センサアレイの上方に配置される。光源は、飛行時間センサアレイにより受光され第２の波長の光に変換される第１の波長の光を光子変換膜に放出する。第２の波長は第１の波長より長い。【選択図】 図３

Optisches Pyrometer mit lichtempfindlicher Zelle

Pyranometer

A pyranometer comprises a thermoelectric sensor 504, perhaps a Peltier device, and an energy-reducing element to reduce solar energy reaching the sensor so as to lower power consumption requirements. The energy-reducing element may be an optic, perhaps prism 502, which splits the light into beams having different energies which strike different areas of the sensor. The energy-reducing element may be a solar-penetrable cover (402, Fig. 7), which may be moveably spaced apart from the sensor to control the amount of radiation reaching the detector. The energy-reducing element may be a diffraction grating (802, Fig. 8), which may be configured to manipulate light by beam steering, perhaps using power from solar cells. The pyranometer may comprise a layer of phase change material, or a desiccant. An error signal indicative of dust or a fault may be generated. A moving device may provide relative movement of the energy-reducing element and the sensor.

Procédé de mesure par thermographie d’une surface chauffante, en particulier une plaque chauffante électrique.

L’invention concerne un procédé de mesure par thermographie d’une surface chauffante telle qu’une surface métallique, une surface en céramique en particulier une plaque chauffante électrique (2). L’invention consiste en ce que : on dépose sur la surface à mesurer, une couche homogène et d’épaisseur constante d’un matériau de revêtement, on chauffe la surface à une température déterminée ; et on capture une image thermique de ladite surface revêtue de ladite couche de matériau de revêtement, chauffée, à l’aide d’un appareil de mesure thermique, le matériau de revêtement présentant une émissivité détectable à la température déterminée dans la gamme spectrale de l’appareil de mesure thermique (5).le matériau de revêtement présentant une émissivité supérieure à celle de la surface dans la gamme spectrale de l’appareil de mesure thermique (5). Figure 1.

Cigarette stick temperature detection device and cigarette stick temperature detection method

光学装置

Optical devices and method for operating the same

An optical device is provided. The optical device includes a time-of-flight (TOF) sensor array, a photon conversion thin film, and a light source. The photon conversion thin film is disposed above the time-of-flight sensor array. The light source emits light with a first wavelength towards the photon conversion thin film to be converted into light with a second wavelength received by the time-of-flight sensor array. The second wavelength is longer than the first wavelength.

Apparatus, system, and method for measuring the temperature of a substrate

A temperature measuring apparatus for measuring a temperature of a substrate is described. A light emitting source that emits light signals such as laser pulses are applied to the substrate. A detector on the other side of the light emitting source receives the reflected laser pulses. The detector further receives emission signals associated with temperature or energy density that is radiated from the surface of the substrate. The temperature measuring apparatus determines the temperature of the substrate during a thermal process using the received laser pulses and the emission signals. To improve the signal to noise ratio of the reflected laser pulses, a polarizer may be used to polarize the laser pulses to have a S polarization. The angle in which the polarized laser pulses are applied towards the substrate may also be controlled to enhance the signal to noise ratio at the detector's end.

Method and System for Non-Contact Temperature Measurement of Spot on Target Object

A method, which is applied for non-contact temperature measurement of a spot on a target object, includes the following steps: image a thermal image of a target area on the target object and projecting the thermal image to an image plane; select an image spot in the image plane corresponding to the spot to allow corresponding light rays to pass through, while blocking all the rest of the light rays; measure a thermal radiation strength of the corresponding to light rays; and determine a temperature from the measured thermal radiation strength according to a calibration relation. A system of performing the above method is also provided.

Numerical aperture limiter

Optical numerical aperture limiter

红外热探测器和红外探测焦平面阵列

本发明提供了一种红外热探测器和红外探测焦平面阵列。红外热探测器包括红外吸收器、荧光感温膜和光电收集器。红外吸收器用于吸收红外线；荧光感温膜与红外吸收器连接，用于激发出荧光信号，所述荧光信号的强度随所述红外吸收器的吸收的热量强弱变化；光电收集器与荧光感温膜连接，用于收集荧光感温膜发出的荧光信号并形成电信号。本发明提供的热红外探测器和红外探测焦平面阵列可以实现选择性单一或多波段红外波长吸收。利用荧光感温膜发出的荧光光强与热量的相关性读出红外线数据，突破了相关技术中非接触式红外热探测产品对红外波段收集的限制，并且对昂贵材料进行了替代，降低了成本。同时，采用光学读出方式可以很好地避免环境电磁噪声的影响，实现高灵敏度测量。

红外探测器形成方法及相关联的红外探测器

本发明涉及一种形成红外探测器(10a)的方法，包括以下步骤：‑在覆盖基板(12)中限定光学窗口(11)；光学窗口(11)的所述限定包括在所述光学窗口(11)的上表面(17)上形成多层干涉滤光器(20)或周期性衍射光栅(21)，以及在所述光学窗口(11)的下表面(16)上形成周期性衍射光栅(21)；‑将间隔件(14a)阳极结合(13)到所述覆盖基板上；‑将设置的所述覆盖基板转移到底部基板(18)上；以及‑将所述间隔件(14a)气密结合到所述底部基板(18)上。

光学装置

本发明提供一种光学装置。该光学装置包括飞时测距感测器阵列、光转换薄膜以及光源。该光转换薄膜设置于该飞时测距感测器阵列上。该光源朝该光转换薄膜发射具有第一波长的光，经该光转换薄膜转换为具有第二波长的光，并由该飞时测距感测器阵列接收。该第二波长大于该第一波长。

量测基板温度的设备、系统及方法

一种量测基板温度的设备、系统及方法。将发射例如激光脉冲的光信号的发光源施加至基板上。发光源另一侧上的侦测器接收反射激光脉冲。侦测器亦接收与从基板的表面辐射的温度或能量密度相关联的发射信号。温度量测系统使用所接收的激光脉冲及发射信号来确定热制程期间基板的温度。为了提高反射激光脉冲的讯杂比，可以使用偏振器来偏振激光脉冲以具有S偏振。也可以控制偏振激光脉冲朝向基板施加的角度，以提高侦测器端的讯杂比。

量測基板溫度的系統

一種量測基板溫度的溫度量測設備。將發射例如雷射脈衝的光訊號的發光源施加至基板上。發光源另一側上的偵測器接收反射雷射脈衝。偵測器亦接收與從基板的表面輻射的溫度或能量密度相關聯的發射訊號。溫度量測設備使用所接收的雷射脈衝及發射訊號來確定熱製程期間基板的溫度。為了提高反射雷射脈衝的訊雜比，可以使用偏振器來偏振雷射脈衝以具有S偏振。也可以控制偏振雷射脈衝朝向基板施加的角度，以提高偵測器端的訊雜比。

辐照测量计和组装辐照测量计的方法

本发明涉及一种辐照测量计和一种组装辐照测量计的方法。所述辐照测量计包括辐照测量计壳体(4)和至少一个辐射传感器(2)；其中，所述至少一个辐射传感器(2)与所述辐照测量计壳体(4)电隔离并且通过至少一个支撑元件(42)热联接到所述辐照测量计壳体(4)，其中，所述支撑元件(42)连接到所述辐照测量计壳体(4)并且被配置为支撑所述至少一个辐射传感器(2)。

非接触式的目标物点式测温方法和系统

一种非接触式的目标物点式测温方法，包括以下步骤：对目标物上的一目标区域进行一热成像的成像，并投射该热成像到一成像平面；在该成像平面中选择对应至该目标物上一点的一成像点，允许对应的光线通过，同时阻挡所有其他光线；测量与对应光线相对应的一热辐射强度；并根据一校准关系，从所测得的该热辐射强度判断一温度。本发明还提供了执行上述方法的系统。

光学温度传感器芯片封装方法、光学温度传感器芯片及测温设备

本申请公开光学温度传感器芯片封装方法、光学温度传感器芯片及测温设备，该方法包括制作光学透镜单元，光学透镜单元包括相互贴合的光学透镜及保护胶层；采用塑封料对基板、红外测温裸片及光学透镜单元塑封成型获得第一光学温度传感器芯片中间产品；对第一光学温度传感器芯片中间产品的远离基板的一侧表面进行研磨获得第二光学温度传感器芯片中间产品，其包括裸露的剩余保护胶层；采用预设溶剂去除剩余保护胶层以裸露光学透镜，获得光学温度传感器芯片；本申请通过预先在光学透镜表面设置保护胶层并在封装的最后将其去除以实现保护该光学温度传感器芯片光学窗口，有效避免填充材料对光学窗口的污染，提高光学温度传感器的良品率。

Numerical aperture limiter

Numerisk aperturbegrenser

En numerisk aperturbegrenser (NAL) for et optisk termografisystem omfatter i det minste et par kilelignende prismer (2, 4) fremstilt fra et transparent material som har kjent bryt- ningsindeks. Prismene i paret er anordnet nær hverandre og med motsatt orientering hvor den smale ende av ett av prismene befinner seg inntil den brede ende av et annet og hvor de prismeoverflater som vender mot hverandre i et par prismer er skilt fra hver- andre med en avstand (a) som minst er lik bølgelengden av det lys som brukes av det billeddannende system. Spissvinkelen (a) for hvert prisme er en funksjon av den ønskede numeriske apertur og brytningsindeksen. Det er også angitt en numerisk aperturbegrenser for et optisk termografisystem, som omfatter i det minste en gruppe på tre kilelignende prismer (2, 8, 18) fremstilt fra et transparent material som har kjent brytningsindeks. Prismene i gruppen er anordnet nær inntil hverandre og med motsatt orientering hvor de smale ender av det første og tredje prisme (2, 8) i gruppen befinner seg inntil den brede ende av det andre (18). De prismeoverflater som vender mot hverandre i gruppen av prismer er skilt fra hverandre med en avstand minst lik bølge- lengden av det lys som brukes av det billeddannende system. Spissvinkelen for det første og tredje prisme (2, 8) i gruppen er lik a mens Spissvinkelen for det andre prisme (18) i gruppen er lik 2a, hvor a er en funksjon av den ønskede numeriske apertur og brytningsindeksen.

量测基板温度的设备、系统及方法

一种量测基板温度的设备、系统及方法。将发射例如激光脉冲的光信号的发光源施加至基板上。发光源另一侧上的侦测器接收反射激光脉冲。侦测器亦接收与从基板的表面辐射的温度或能量密度相关联的发射信号。温度量测系统使用所接收的激光脉冲及发射信号来确定热制程期间基板的温度。为了提高反射激光脉冲的讯杂比，可以使用偏振器来偏振激光脉冲以具有S偏振。也可以控制偏振激光脉冲朝向基板施加的角度，以提高侦测器端的讯杂比。

赤外線画像化デバイス

【解決手段】本明細書は、赤外線カメラ(210) を備えている赤外線画像化デバイス(200) に関する。赤外線カメラは、光軸(A) を有し、スペクトル領域の赤外線を通す透明要素(132) を通過するスペクトル領域の赤外線を検出するように構成されている。透明要素は、画像取込方向(C) に対して０°より大きく90°より小さいか又は０°より小さく－90°より大きい傾斜角（α）分、傾いている。赤外線画像化デバイスは、スペクトル領域の赤外線を通して透明要素及び赤外線カメラ間に配置され得る屈折要素(230) を更に備えている。屈折要素は、屈折要素のトンネル図における屈折要素の出口ファセット(234) に対応する仮想出口ファセットを有しており、仮想出口ファセットは、屈折要素の入口ファセット(232) と実質的に平行である。

一种烟条温度检测装置及烟条温度检测方法

本发明公开了一种烟条温度检测装置，其包括多个筒状凸透镜，所述筒状凸透镜的结构为：圆形凸透镜片垂直中心线的近似椭圆剖面，围绕该近似椭圆剖面长轴的一定距离的平行线为中心轴旋转一周，形成的中间壁最厚两头壁最薄的筒状体。本发明的烟条温度检测装置实现了现场生产烟条的全圆周表面温度的检测，检测结果准确可信。

Systems, apparatus, and methods for monitoring plate temperature for semiconductor manufacturing

The present disclosure relates to systems, apparatus, and methods for monitoring plate temperature for semiconductor manufacturing. In one or more embodiments, a system for processing substrates and applicable for semiconductor manufacturing includes a chamber body including one or more sidewalls. The system includes a lid and a window, the one or more sidewalls, the window, and the lid at least partially defining an internal volume. The system includes one or more heat sources configured to heat the internal volume, a substrate support disposed in the internal volume, and a first optical sensor configured to detect energy having a first wavelength that is less than 4.0 microns. The system includes a second optical sensor configured to detect energy having a second wavelength that is less than the first wavelength.

Infrared imaging device

The present description concerns an infrared imaging device (200) comprising an infrared camera (210) having an optical axis (A), said camera being intended to detect an infrared radiation in a spectral range through an element (132) transparent to said infrared radiation, the transparent element being inclined by an angle of inclination (a) greater than 0° and smaller than 90° or smaller than 0° and greater than −90° relative to an image capture direction (C);the device further comprising a refractor element (230) transparent to the infrared radiation in the spectral range and adapted to be positioned between the transparent element and the infrared camera, said refractor element comprising a virtual exit facet of the refractor element, corresponding to an exit facet (234) of the refractor element in a tunnel diagram of said refractor element, said virtual exit facet being substantially parallel to an entry facet (232) of the refractor element.

高温计的背景消除

在此揭示的多个具体实施方式提供了一种用于处理基板的快速热处理(RTP)系统。RTP腔室具有辐射源，所述辐射源经配置以供应辐射至安置于处理空间中的基板。一个或多个高温计耦接至所述腔室主体，与所述辐射源相对。在一个范例中，所述辐射源安置于所述基板下方，并且所述高温计安置于所述基板上方。在另一个范例中，所述辐射源安置于所述基板上方并且所述高温计安置于所述基板下方。所述基板可以以各种方式支撑，所述方式经配置以减少所述基板支座与所述基板之间的物理接触。边缘环与屏蔽件安置于所述处理空间之中，并经配置以降低或消除背景辐射对所述高温计的干扰。此外，吸收表面可以耦接至所述腔室主体，以进一步降低背景辐射干扰。

Systems, apparatus, and methods for monitoring plate temperature for semiconductor manufacturing

The present disclosure relates to systems, apparatus, and methods for monitoring plate temperature for semiconductor manufacturing. In one or more embodiments, a system for processing substrates and applicable for semiconductor manufacturing includes a chamber body including one or more sidewalls. The system includes a lid and a window, the one or more sidewalls, the window, and the lid at least partially defining an internal volume. The system includes one or more heat sources configured to heat the internal volume, a substrate support disposed in the internal volume, and a first optical sensor configured to detect energy having a first wavelength that is less than 4.0 microns. The system includes a second optical sensor configured to detect energy having a second wavelength that is less than the first wavelength.

Pyrometer background elimination

Embodiments disclosed herein provide an RTP system for processing a substrate. An RTP chamber has a radiation source configured to deliver radiation to a substrate disposed within a processing volume. One or more pyrometers are coupled to the chamber body opposite the radiation source. In one example, the radiation source is disposed below the substrate and the pyrometers are disposed above the substrate. In another example, the radiation source is disposed above the substrate and the pyrometers are disposed below the substrate. The substrate may be supported in varying manners configured to reduce physical contact between the substrate support and the substrate. An edge ring and shield are disposed within the processing volume and are configured to reduce or eliminate background radiation from interfering with the pyrometers. Additionally, an absorbing surface may be coupled to the chamber body to further reduce background radiation interference.