ПРОВЕРКА ДРАГОЦЕННЫХ КАМНЕЙ

Изобретение относится к средствам для исследования драгоценных камней. Описаны аппарат и способ исследования и, в качестве опции, сортировки драгоценных камней. Аппарат содержит вакуумное сопло для извлечения драгоценных камней из подаваемого множества драгоценных камней; транспортирующий механизм для транспортирования сопла и удерживаемого им драгоценного камня к одному или более мест измерения; измерительную систему, содержащую множество измерительных устройств, установленных вблизи одного или более мест измерения и сконфигурированных для измерения одного или более свойств драгоценного камня. По меньшей мере одно из множества измерительных устройств расположено вблизи по меньшей мере одного из указанных мест измерения с возможностью измерять по меньшей мере одно из указанных свойств драгоценного камня, удерживаемого соплом. Транспортирующий механизм сконфигурирован с возможностью последовательной доставки драгоценного камня, удерживаемого соплом, к множеству измерительных устройств, принимающих ...

СПОСОБ ФРАКТАЛЬНОГО КОНТРОЛЯ ШЕРОХОВАТОСТИ ПОВЕРХНОСТИ

Изобретение относится к средствам контроля микронеровностей поверхностей, полученных в результате воздействия машиностроительных технологических операций на шероховатую поверхность, например, поверхность пера лопатки ГТД на заключительных стадиях обработки. Заявленный способ фрактального контроля шероховатости поверхности заключается в том, что исследуемую поверхность очищают плазмохимическим травлением в среде инертного газа при режимах, не допускающих распыление материала исследуемой поверхности, сразу после очистки на исследуемую поверхность наносят каплю жидкости известной вязкости и фиксированного объема, затем посредством скоростной цифровой видеокамеры регистрируют время растекания капли жидкости известной вязкости и фиксированного объема по исследуемой поверхности и определяют шероховатость исследуемой поверхности. Для этого предварительно посредством скоростной цифровой видеокамеры регистрируют момент окончания растекания капли жидкости известной вязкости и фиксированного объема ...

СПОСОБ ОБНАРУЖЕНИЯ СТРУКТУРНЫХ ДЕФЕКТОВ В КРИСТАЛЛИЧЕСКИХ МАТЕРИАЛАХ

Изобретение относится к области дефектоскопии кристаллических материалов и может применяться для обнаружения структурных дефектов в кристаллических материалах, в том числе полупроводниковых. При реализации способа обнаружения структурных дефектов в кристаллических материалах из исследуемого кристаллического материала изготавливают образец. Далее освещают образец светом, состоящим из фотонов с энергиями, лежащими в пределах от 0.9 до 1.0 значения энергии, равной ширине запрещенной зоны кристаллического материала образца. В прошедшем сквозь образец, и/или отраженном, и/или рассеянном материалом образца свете оптическими методами формируют контрастное оптическое или фотоэлектрическое изображение структурных дефектов. Технический результат изобретения заключается в увеличении контраста изображения структурных дефектов. 1 з.п. ф-лы, 4 ил.

СПОСОБ КОНТРОЛЯ СВАРНЫХ ШВОВ ПРИ УЛЬТРАЗВУКОВОЙ СВАРКЕ

Изобретение может быть использовано для контроля сварных швов между двумя термопластическими деталями, соединенными посредством ультразвуковой сварки, в частности, на линиях сборки пластиковых деталей автотранспортных средств. Соединенные детали контролируемого образца разъединяют путем растяжения до разрыва их соединения в зоне сцепления сварных швов. На одну из деталей накладывают маску с отверстием таким образом, чтобы отверстие окружало зону разрыва соединения. Осуществляют фотосъемку в контролируемой световой окружающей среде. Полученное изображение подвергают цифровой обработке для определения поверхности сцепления сварного шва, которая является деформированной поверхностью. Вычисляют соотношение между поверхностью сцепления сварного шва и внутренней поверхностью маски. Полученные результаты вычислений сравнивают с минимально допустимой поверхностью сцепления, определенной по результатам механических испытаний сварных швов деталей на растяжение. Способ обеспечивает точный и объективный ...

СПОСОБ И УСТРОЙСТВО ДЛЯ КОНТРОЛЯ ШИН НА ЛИНИИ ДЛЯ ПРОИЗВОДСТВА ШИН

Изобретение относится к автомобильной промышленности. Способ и соответствующее устройство (100) для контроля шин на производственной линии обеспечивают предварительное размещение шины (200), подлежащей контролю, упругое деформирование участка боковины шины посредством приложения сжимающего усилия к внешней контактной поверхности участка боковины, при этом сжимающее усилие имеет осевое направление и ориентацию, направленную к диаметральной плоскости, освещение внутренней и/или внешней поверхности участка боковины и детектирование изображения освещенной поверхности, генерирование контрольного сигнала, соответствующего детектируемому изображению, и анализ контрольного сигнала для детектирования возможного наличия дефектов на участке боковины. Технический результат – повышение качества контроля шин. 3 н. и 33 з.п. ф-лы, 7 ил.

УСТРОЙСТВО ДЛЯ ОБНАРУЖЕНИЯ НЕОДНОРОДНОСТЕЙ НА ПЛОСКИХ ГРАНЯХ ПОТОКА ОДНОТИПНЫХ ПРОВОДЯЩИХ ИЗДЕЛИЙ В ИНФРАКРАСНОМ ИЗЛУЧЕНИИ

Полезная модель относится к оптическим методам контроля качества поверхности металлов и полупроводников, а именно - к инфракрасной (ИК) амплитудной рефлектометрии. Устройство содержит источник р-поляризованного монохроматического излучения, два элемента преобразования излучения в ПЭВ, приемник излучения, размещенный в окружающей среде в плоскости падения, и измерительный прибор, регистрирующий поступающие от приемника электрические сигналы. Причем оба элемента преобразования выполнены в виде сегментов цилиндров, оси которых ориентированы перпендикулярно плоскости падения, а выпуклые поверхности способны направлять ПЭВ и имеют длину дуги в поперечном сечении меньше длины распространения ПЭВ. Для последовательного перемещения изделий перпендикулярно плоскости падения устройство имеет лентопротяжный механизм. Техническим результатом является уменьшение продолжительности измерений. 2 ил.

МОБИЛЬНОЕ УСТРОЙСТВО ВИЗУАЛЬНОГО ОБНАРУЖЕНИЯ ДЕФЕКТОВ РЕЛЬСОВОГО ПУТИ

Использование: для контроля рельсового пути. Сущность полезной модели заключается в том, что мобильное устройство визуального обнаружения дефектов рельсового пути содержит размещенные на несущей раме (1) транспортного средства узел видеонаблюдения и узел освещения, связанные с размещенным в транспортном средстве блоком управления. Узел видеонаблюдения выполнен в виде электронных оптических блоков (4), расположенных вдоль перпендикулярной рельсовому пути оси. Узел освещения подключен к блоку управления через первый контактор и выполнен в виде двух линейных осветителей (6), каждый из которых расположен по одну из сторон электронных оптических блоков (4) параллельно этой оси. Количество электронных оптических блоков (4), угол их наклона к рельсовому пути и длина линейных осветителей выбраны из условия обеспечения возможности полного перекрытия зоны видеообзора рельсошпальной решетки. В мобильное устройство введены связанный с блоком управления синхронизатор, связанный с электронными оптическими ...

ПРОМЫШЛЕННЫЙ НЕГАТОСКОП

Полезная модель относится к области баллирования и расшифровки рентгенограмм сварных швов. Промышленный негатоскоп содержит корпус из жесткого светонепроницаемого материала, экран, расположенный внутри корпуса осветитель просмотрового экрана, расположенный на корпусе регулятор уровня освещения просмотрового экран. Просмотровый экран выполнен размером 150×60 мм. В качестве осветителя просмотрового экрана используются светодиоды холодного свечения с температурой свечения 4500-6000 К и с мощностью светового потока 9000-10000 люмен. Регулятор уровня освещения выполнен с функцией плавной регулировки уровня освещения. Технический результат заключается в повышении вероятности обнаружения дефектов. 2 ил.

Способ оптического контроля качества преформы

Изобретение относится к производству упаковочных материалов, а именно к способу контроля качества преформы, используемой в дальнейшем для производства бесцветных и окрашенных пластиковых бутылок. Cпособ оптического контроля качества преформы включает просвечивание отформованной преформы источником оптического излучения. Прием прошедшего через преформу оптического излучения, которое затем сравнивают с эталонным оптическим излучением, прошедшим через годное изделие, после чего делают вывод о годности изготовленной преформы. Просвечивание стенок преформы осуществляют плоским круговым веерным пучком оптического излучения, плоскость которого перпендикулярна продольной оси преформы, для чего внутри преформы размещают источник оптического излучения, а снаружи - размещают приемник оптического излучения с плоской круговой зоной приема излучения. Сам процесс оптического контроля проводят путем одновременного синхронного перемещения относительно преформы источника и приемника оптического излучения ...

Устройство для автоматического мониторинга состояния асбестоцементных сбросных трубопроводов закрытой оросительной системы

Изобретение относится к эксплуатационному мониторингу технического состояния сооружений оросительных систем в гидротехническом строительстве. В устройстве, содержащем перемещаемое относительно обследуемого трубопровода с помощью приводных колес устройство со средствами сканирования, получения изображений поверхности трубопровода, регистратор и передачи данных на компьютер для формирования трехмерной модели трубопровода с помощью блока программного обеспечения, согласно изобретению, в качестве средств для формирования трехмерной модели трубопровода с прилегающим к нему объемом грунта, получения изображений внутренней поверхности трубопровода и регистрации использованы соответственно: сканер в виде георадарной антенны на телескопической штанге, цифровой фотоаппарат или видеокамера с подсветкой и регистратор в виде маркера, сообщенного через магистраль с емкостью для красящего вещества, при этом для обеспечения возможности их циклического вращения по внутренней поверхности трубопровода и перемещения ...

СПОСОБ АВТОМАТИЗИРОВАННОЙ ДЕФЕКТОСКОПИИ СОЕДИНЕНИЯ МАТЕРИАЛОВ

... 1. Способ автоматизированного бесконтактного и неразрушающего контроля соединения материалов (4) по меньшей мере из двух сопрягаемых частей (2, 3), включающий ! а. соединение материалов (4), представляющее собой соединение из двух зон: ! i. расплавленной зоны (5) и ! ii. нерасплавленной зоны (6), окружающей указанную расплавленную зону (5), ! b. исследование этого соединения материалов, осуществляемое с помощью инфракрасных изображений, при этом ! i. по меньшей мере одним источником возбуждения (8) возбуждают испытуемый образец (1), ! ii. по меньшей мере одним детектором инфракрасного излучения (9) осуществляют регистрацию образующегося теплового потока в виде последовательного ряда термоизображений, ! iii. из последовательного ряда термоизображений генерируют результирующие изображения, и ! iv. термоизображения и результирующие изображения подвергают исследованию, ! характеризующийся тем, что ! с. расплавленную зону (5) локализуют на результирующем изображении, представляющем динамику ...

СПОСОБ РАСПОЗНАВАНИЯ ТРЕЩИН В РАЗВЕРТЫВАЕМОМ ИЗОБРАЖЕНИИ КОЛОНКОВОЙ ТРУБЫ БУРОВОГО КЕРНА

Изобретение относится к области измерительной техники и касается способа распознавания трещин в развертываемом изображении колонковой трубы бурового керна. Способ включает в себя получение изображения с помощью промышленных камер и преобразование импортированного исходного изображения из формата RGB в цветовое пространство HSV, распознавание характеристик трещин и их извлечение, преобразование изображения в формат RGB и обработку изображений регулируемой яркости, удаление из изображения идентификационной этикетки керна, локальную бинаризацию на основе блока изображения и морфологическую обработку изображений. Технический результат заключается в повышении точности и эффективности распознавания трещин на сложных фонах. 6 з.п. ф-лы, 7 ил.

СПОСОБ КОНТРОЛЯ ШИН

СПОСОБ КОНТРОЛЯ СВАРНЫХ ШВОВ ПРИ УЛЬТРАЗВУКОВОЙ СВАРКЕ

ОБСЛЕДОВАНИЕ ЛОПАСТЕЙ ВИНТА

... 1. Способ оптического обследования ветроэнергетической установки (1) или ее части, в частности лопасти (6) винта, включающий в себя этапы:- выравнивания камеры (32) на обследуемую область,- проведения съемки фотографии обследуемой области камерой (32),- регистрации положения сфотографированной области и- сопоставления выявленного положения со сфотографированной областью.2. Способ по п.1, отличающийся тем, что используют камеру (32) с телескопической оптикой, а обследуемая область для проведения съемки фотографии оптически увеличивается при помощи телескопической оптики.3. Способ по п.1, отличающийся тем, что обследуют лопасть (6) винта, имеющую основание (20) лопасти винта и конец (12) лопасти винта, и что лопасть (6) винта и камера (32) выравниваются по отношению к друг другу таким образом, что между камерой (32) и основанием (14) лопасти винта с одной стороны и между камерой (32) и концом (12) лопасти винта с другой стороны устанавливается одинаковое расстояние, и/или что продольная ось ...

СПОСОБ РАСПОЗНАВАНИЯ ПОВЕРХНОСТНЫХ ПРИЗНАКОВ МЕТАЛЛУРГИЧЕСКИХ ИЗДЕЛИЙ, В ЧАСТНОСТИ ЗАГОТОВОК, ПОЛУЧЕННЫХ НЕПРЕРЫВНОЙ РАЗЛИВКОЙ, И ПРОКАТНЫХ ИЗДЕЛИЙ, А ТАКЖЕ УСТРОЙСТВО ДЛЯ ОСУЩЕСТВЛЕНИЯ СПОСОБА

... 1. Способ распознавания поверхностных признаков металлургических изделий, в частности заготовок, полученных непрерывной заливкой, или прокатных изделий, при котором изделие или изделия облучают по меньшей мере двумя источниками (21, 22, 23) излучения различной длины волны с разных направлений, а облученный фрагмент поверхности фиксируют с помощью оптоэлектроники, предпочтительно с помощью по меньшей мере одной камеры, отличающийся тем, что поверхность (12, 12′) изделия, предназначенная для обнаружения и распознавания, представляет собой специально определенный участок, причем этот участок перед оптоэлектронной фиксацией снабжают маркировкой такой формы, что происходит ее взаимодействие с источниками света, образованными источниками излучения (21, 22, 23). ! 2. Способ по п.1, отличающийся тем, что используются три источника излучения, выполненные в виде источников (21, 22, 23) видимого света. ! 3. Способ по п.1, отличающийся тем, что для оптоэлектронного обнаружения используют датчик (25 ...

Solar generator for e.g. spacecraft, has light source and light sensors connected to evaluation unit to determine disorder of total reflection properties of internal reflection layer due to collision with space object

The generator (100) has a solar panel with a solar cell layer (102) having solar cells for converting an incident electromagnetic radiation into an electric current. A light source is coupled to a total internal light reflection layer (101) arranged on the solar cell layer. Light sensors are arranged at the periphery of the reflection layer to detect the intensity of light reflected in the reflection layer. The light source and the light sensors are connected to an evaluation unit to determine disorder of total reflection properties of the reflection layer due to collision with a space object.

VERFAHREN UND VORRICHTUNG ZUM OPTISCHEN UEBERPRUEFEN DES AUSSEHENS CHIPARTIGER BAUTEILE UND ZUM SORTIEREN DER CHIPARTIGEN BAUTEILE

INSPEKTIONSUNTERSTÜTZUNGSVORRICHTUNG, INSPEKTIONSUNTERSTÜTZUNGSVERFAHREN UND PROGRAMM

Inspektionsunterstützungsvorrichtung (100), aufweisend:einen Schadenszeichnungseingabeteil (130), der konfiguriert ist, um eine Schadenszeichnung (L111) korrespondierend zu einer Zeichnung, die einen Schaden eines Zielteils darstellt, einzugeben;eine Anzeige (120), die konfiguriert ist, um die Schadenszeichnung (L111) und eine Zielfigur (P11, P12), die den Zielteil darstellt, einander überlagert anzuzeigen; undeinen Speicher (180), der konfiguriert ist, um die Schadenszeichnung (L111) getrennt von der Zielfigur (P11, P12) mit Bezug zu der Zielfigur zu speichern.

MESSVORRICHTUNG UND VERFAHREN ZUR BERUEHRUNGSLOSEN PRUEFUNG DER GEOMETRIE UND OBERFLAECHENBESCHAFFENHEIT VON KOERPERN, INSBESONDERE FEINKERAMISCHE ERZEUGNISSE

Verfahren zur Qualitätssicherung des Auftrags eines Mediums auf ein Objekt

Sonde für eine Sublanze mit Entfernungsmesser

Sonde für eine eine Lanzenachse (5) aufweisende Sublanze (2) eines Konvertergefäßes (3), wobei die Sonde mit der Sublanze (2) verbindbar ist, insbesondere auf die Sublanze (2) aufsteckbar ist, dadurch gekennzeichnet, dass die Sonde einen Entfernungsmesser (8) aufweist, mittels dessen bei mit der Sublanze (2) verbundener Sonde zumindest die Entfernung (S, S') zu einem Ort (P, P') erfassbar ist, der sich in Richtung der Lanzenachse (5) gesehen vor der Sublanze (2) befindet.

Eine Vorrichtung zur Überprüfung einer Konformität eines mechanischen Teils eines Fahrzeugs

Eine Installation, die eine Konformitätsprüfung eines mechanischen Teils eines Fahrzeugs ermöglichen soll, weist zumindest eine Magnetisierungsvorrichtung und zumindest eine Vorrichtung zum Aufsprühen eines aufdeckenden Produkts auf, dadurch gekennzeichnet, dass die Installation auch zumindest eine Vorrichtung zum Erzeugen zumindest eines Bildes mittels zumindest einer Bilderfassungsvorrichtung und zumindest einer Vorrichtung zum Übertragen des zumindest einen Bildes zu einer Analyseeinheit aufweist.

Einrichtung zur Beobachtung bewegter Oberflaechen

Detecting small foreign bodies in fibre flock

A method for detecting small, fibre-like foreign particles in a fibre flock flow contg. seed bodies which may be disregarded. The process uses a fine optical sensor and a computer-controlled removal process is only undertaken under specific circumstances, more adjacent points features a colour deviation from the standard flock than would be the case when seed grains are the cause of deviation.

Vorrichtung zur Prüfung von Klebe- oder Schweißverbindungen

Meßvorrichtung zur kontaktlosen Meßanalyse von Körpern oder Oberflächen

System und Verfahren zur Überwachung der Fertigungsgenauigkeit bei der additiven Herstellung dreidimensionaler Bauteile

System zur Überwachung der Fertigungsgenauigkeit bei der additiven Herstellung dreidimensionaler Bauteile durch Detektion von Werkstoffparametern, bei demein kombiniertes Beleuchtungs- und Detektionselement (12), das mit einem zweidimensionalen Detektorarray (1) und mindestens einer Laserstrahlungsquelle (4), mit der elektromagnetische Strahlung auf einen Bereich eines pulverförmigen oder in pastöser Form vorliegenden Werkstoffs, mit dem zumindest ein Bereich eines dreidimensionalen Bauteils infolge eines lokal definierten Energieeintrags hergestellt wird, gerichtet ist unddas Detektorarray (1) so angeordnet und ausgebildet ist, dass in/an der von der Laserstrahlungsquelle (4) bestrahlten Oberfläche auftretende Speckle ortsaufgelöst detektierbar sind; wobeidie mit dem Detektorarray (1) ortsaufgelöst erfassten Speckle-Signale einer elektronischen Auswerte- und Steuerschaltung (3) zuführbar sind unddie elektronische Auswerte- und Steuerschaltung (3) an eine elektronische Steuer- und Regeleinrichtung ...

Verfahren und Vorrichtung zum Messen der Höhe eines Gegenstands

VORRICHTUNG ZUR OPTISCHEN PRÜFUNG VON ELEKTRONISCHEN BAUTEILEN

Apparatus and method for inspecting contact lenses

Surface inspection using the ratio of intensities of S-and P- polarized light components of a laser beam

Surface inspection device

A surface inspection device for determining contamination of a surface independent of surface roughness or determining surface roughness. The surface 2 is irradiated by a focused laser beam and scanned two dimensionally. The reflected beam passes through Glan-Thompson prism 10 to detectors 13a and 13b which detect the intensities of the s- and p-polarized components. The ratio of these components is then used to determine the presence of contaminants. The distribution of the ratios may be compared to that of a clean sample, or comparison made with a theoretical Fresnel value. The thickness of the contaminant may be determined. Single or multiple contaminants may be distinguished, as may organic and inorganic contaminants. The sample may be scanned in regions. Alternatively, at least one of the s- and p- components may be used to determine surface roughness.

A shadow-creating apparatus

An apparatus (12) or accurately locating a micro-electronic chip (9) in a chip-holding cavity (28) for visual testing, the chip (9) having at least a front wall and a pair of opposed, spaced-apart side walls, wherein the front wall meets with each of the side walls to form opposed, spaced-apart first and second front edges, comprising a cavity side wall formed to juxtapositionally about at least one of the side walls of the chip, the cavity side wall having formed therein a depression creating a shadow projecting forward from the depression, wherein the first front edge of the chip (9) forms a border of the shadow to form an objectively measurable contrast in grayness between the shadow and the chip (9).

Infrared NDI device for shallow defect detection

Monitoring system

Apparatus for evaluating parts

METHOD AND APPARATUS FOR DETECTING PARTICLES ON A MATERIAL

METHOD OF DETECTING DEFECTS IN TRANSPARENT MATERIALS

Detecting defects in transparent materials

A method of detecting defects present at the surface and/or internally in transparent materials, particularly of detecting included foreign bodies or bubbles in glass, is disclosed. The test material is scanned with an electromagnetic radiation of a single wavelength which is set to the penetration depth in the test material. The intensity reflected by the defects is picked up and analyzed. By this method only defects located up to a specified depth in the material are detected. Visible light as well as UV- or IR radiation may be applied. The associated test rig comprises a tunable Laser (2), a conveyor belt (6) carrying the test material (5), a fast rotating mirror-wheel (3) which directs the light beam (4) at high speed over the test material (5), and an optical sensor (7) connected with an analyzer unit (8).

Object inspection apparatus

Apparatus comprises e.g. a television camera 1 for inspecting an object with a non-flat surface, such as a curved surface 13. The apparatus includes optical means 10 capable of transforming an image of the object in such a way as to increase its apparent depth of field. Portions of a curved surface otherwise out of focus can then be simultaneously focused on the target screen of the camera. Convex lenses 10 may be used each having one surface where the curvature either decreases, or increases from the optical axis to its periphery. …… ...

Automated postflight troubleshooting sensor array

Measurement of reinforcement volume fraction

A method is provided for measuring the volume fraction of reinforcement 5 in a composite material 4 in which a translucent polymer matrix is reinforced by the reinforcement (carbon or glass fibre).. The method includes providing a measuring device having a light emitter 1 and an adjacent light detector 2, both adapted for placement at a surface 3 of the composite material 4. The method further includes emitting light of a predetermined intensity from the light emitter into the surface, and, with the light detector, detecting an intensity of the portion of the emitted light returned by diffusion or backscattering to the surface. The method further includes determining a ratio of the intensity of the detected light relative to the predetermined intensity. The method further includes measuring the volume fraction of reinforcement at the surface of the composite material by comparing the determined intensity ratio to a calibration scale which relates volume fraction of reinforcement at the ...

A system for machining a surface

An automated system comprising; a machining tool, e.g. a milling spindle 600 and a rotary cutter 610, for machining a surface; a robotic arm 400 for manipulating the machining tool; an imaging system 700 for determining the geometry of the surface to be machined. The system may be temporarily mounted to the damaged surface using mount 500. The system may determine the desired geometry of the surface, and direct the machining tool to reshape the surface as such; this may include machining recesses for prefabricated modules to be inserted, such that they reshape the surface to the desired geometry. The desired geometry may be determined by a CAD (computer aided design) model. The embodiment is directed towards a portable system for machining the damaged surfaces of wind turbine blades, aircraft wings, fuselages, or boat hulls, prior to their repair.

Method and apparatus for determining powder condition

Determining the condition of a powder 8, such as metal powder for use in an additive manufacturing process, involving measuring a surface property of the powder. This may be achieved by taking an image of the powder and processing the image to measure the surface property of the powder, such as colour or texture. The proportion of powder whose measured surface property falls outside a predetermined range is determined and can be used to decide whether or not the powder is suitable for re-use. Powder condition may also be assessed by observing colour and determining if it falls inside or outside a predetermined range. The method may comprise resolving individual powder particles and measuring the surface property of each individual particle. A microscope 3 may be used and the measuring device may comprise a spectrophotometer.

A method for detecting degree of development of asphalt pavement fracture based on infrared thermal image analysis

Automated fault isolation of flight control surfaces and damage detection of aircraft through non-contact measurement

A system 100, for automating fault isolation and damage detection of aircraft 400, has a processor 102 used to monitor aircraft wing flight control surfaces 402,404,406,408 using one or more sensors S1-S7 at vantage points providing full coverage of the wing. The condition of the wing is assessed by the sensors, which may utilise a machine vision component 108; leaks are also detected by monitoring airflow for traces of fuel or hydraulic fluid, which may utilise a spectrographic component 110. The machine vision component may classify the type of damage, identify its cause, and determine its location; a notification component 202 may then alert the flight or cabin crew, and the machine vision component may transmit assessment data into a cloud to enhance learning capabilities. The sensors may include sound signature monitoring acoustic sensors and/or infrared cameras for vision analysis in low visibility; the sensors may be either electromechanical or digital and may utilise lidar, radar ...

Optical-interference analysis

Inspection device

An inspection device is disclosed which includes a color sensor which has a plurality of photoelectric conversion elements each being responsive to respective different wave lengths of light from an object to be inspected and producing an electrical signal, a zero balance setter which processes the output signal from the color sensor and then takes a zero balance, a tolerance range setter which receives the output of the zero balance setter and produces an abnormal signal in conjunction to a tolerance range of the object to be inspected, a detector which produces an electrical signal to notify when the object arrives at a predetermined location; and a detection location timing section which passes the output of the tolerance range setter by the output signal from the detector.

DEFECT INSPECTION SYSTEM

Parallel digital signal processing

Processing of information obtained at a high rate is carried out in parallel to enable presentation of such information substantially in real time. Digital electronic circuit means is adapted to receive and process information from a linear array of photo diodes scanning a succession of objects and producing a raster of given width but of indefinitely extended length. The information is fed to the processor serially by a multiplexer 32 and likewise is output serially by a demultiplexer 62. Processing of information derived from any given scan, or by comparison of scans stored in a memory, is carried out in a parallel manner by interconnected circuits 40/1 to 40/n in order to provide speed of operation. Principal uses are in the inspection of objects carried past a said array of diodes; and in processing satellite photographs, and images resulting from medical X-ray and ultrasound scans. ...

Method of sorting objects

... 1,091,958. Photo-electric flow detection. GUNSON'S SORTEX Ltd. July 15, 1966 [July 16, 1965], No. 30393/65. Heading G1A. To sort imperfect objects having flaws in their otherwise impermeable surfaces from perfect ones, liquid penetrant is applied to all objects and is retained in the flaws upon its subsequent removal from the unflawed parts of the objects' surface: a photo-electric device by being responsive to light having a characteristic particular to that reflected by the penetrant then detects the flawed objects as it views each one in turn. The penetrant may be coloured with a fluorescent dye and be viewed under ultraviolet light, or the penetrant may have a colour readily distinguishable from the surface colour of the objects. The objects, which may be ball-bearings, are fed on to the upper run (2) of a conveyer by a loading device (3) comprising a pair of discs (4, 5) having peripheral holes. The bearings are de-greased by sprays (8) and the penetrant is supplied by sprays (6, 7 ...

Monitoring system

Distributed optical fiber identification system and method for seepage conditions of hydraulic structure and base thereof

Optical chemical analyser

System for detecting a status of a vehicle

The invention relates to a system (2) for detecting a status of a vehicle (1) for, for example, dirt or damage. The system (2) comprises at least one camera (3) and an image processing unit (4). The at least one camera (3) is adapted for being mounted on the vehicle (1) such that the at least one camera (3) can capture an image of the outer body (5) of the vehicle (1). The image processing unit (4) is adapted for determining a status of the vehicle (1) by analysing the image of the outer body (5) of the vehicle (1).

A method for leakage detection of underground corridor based on static infrared thermal image processing

Method of inspecting a workpiece surface

IMPROVEMENTS RELATING TO CONTROL SYSTEMS FOR CONTROLLING THE POSITION OF A MEMBER RELATIVE TO A FEED PATH OF WORKPIECES

... 1,224,466. Controlling electrically. G. K. N. GROUP SERVICES Ltd. June 10, 1968 [June 8, 1967], No. 26343/67. Heading G1N. To control the movement of a tool or flawtesting head 13 from a retracted to an operative position at the approach of a workpiece, a sensing station 18 detects the arrival of the leading edge of the workpiece and, after a time delay which is inversely proportional to the speed of the workpiece less an amount to compensate for the approach time of the tool or head 13, produces a control signal to initiate movement of the tool or head to its operative position. As shown, when the leading edge of a billet passes a photo-cell 16 contacts 16a, 16b are closed energizing relay A/3 to change switches A 1 , A 2 , A 3 . A timing capacitor C 1 is then charged from a D.C. source via resistors R 8 , R 9 and transistor T 1 , at a rate dependent on the output of a tachogenerator T operatively connected to the conveyor for the billets. The capacitor C1 is connected via amplifying transistors ...

Detecting flaws on metal surfaces

A method of detecting minute flaws on the surface of a metal material is provided, which is constituted by the steps of directing a laser beam onto the surface of the metal material, reflecting a component of the beam directly reflected by the surface of the material by a reflector having a rough surface, and measuring the change in the quantity of light in the beam reflected by said reflector. Alternatively, a component of the laser beam directly reflected by the surface of the material and a component of the laser beam scattered by the metal surface are passed through a semitransparent filter having a rough surface, and the change in the quantity of light in the beam passed through the filter is measured.

Amorphous pharmaceutical compositions

Automated method of investigating discoloration on a component of a gas turbine engine

ELECTRONIC APPARATUS FOR CHECKING THE MICROPOROSITY OF PHIALS FILLED WITH LIQUID

System and method for monitoring manufacturing precision in the additive manufacturing of three-dimensional components

The invention relates to a system for monitoring manufacturing precision in the additive manufacturing of three-dimensional components, in which a combined illumination and detection element (12) is provided, which is equipped with a two-dimensional detector array (1) and at least one laser radiation source (4), with which electromagnetic radiation is directed onto a region of a material in powder or paste form, with which at least one region of a three-dimensional component is produced as a result of a locally defined energy input. The detector array (1) is arranged and designed such that speckle arising in/on the surface irradiated by the laser radiation source (4) can be detected in a spatially resolved manner. The speckle signals sensed in a spatially resolved manner using the detector array can be fed to an electronic evaluation and control circuit (3). The electronic evaluation and control circuit (3) is connected to an electronic open- and closed-loop control device which is designed ...

A method for detecting degree of crack development of asphalt pavement

A method for detecting crack development degree index of asphalt pavement

A method for detecting crack development degree index of asphalt pavement based on infrared thermal image analysis, comprising; establishing a model for crack development degree detection; collecting IR thermal images of a fracture zone of pavement and recording ambient temperature; processing the IR images and obtaining measured temperature difference data between crack samples in said fracture zone and pavement surface; obtaining reference temperature difference data by introducing the ambient temperature into said model; and obtaining crack development degree index by introducing said reference temperature difference data and said measured temperature difference data into said model.

VERFAHREN ZUM ERKENNEN EINES ÜBERZUGES UND EINE EINRICHTUNG ZUR DURCHFÜHRUNG DESSELBEN

OPTICAL INSPECTION OF TEST SURFACES

PROCEDURE AND DEVICE FOR THE INSPECTION UNDER WATER

PROCEDURE AND ARRANGEMENT FOR THE DETECTION OF PARTICLES ON SEMICONDUCTORS

SYSTEM AND PROCEDURE FOR THE IDENTIFICATION OF A CHARACTERISTIC OF A WORK PIECE

VORRICHTUNG ZUM STRECKEN VON TIERHAUT

Vorrichtung (1) zum Strecken von Tierhaut (2), mit einer Auflagefläche (3) zur Auflage der Tierhaut (2), einem ersten Paar (4), und einem zweiten Paar (5) an im Wesentlichen an gegenüberliegenden Randbereichen der Tierhaut (2) befestigbaren Zugmitteln (6), wobei die Zugmittel (6) mit einer Spannvorrichtung (8) zum Beaufschlagen der Zugmittel (6) mit einer Zugspannung verbunden sind, und jedes Paar (4, 5) an Zugmitteln (6) bei einer Beaufschlagung mit der Zugspannung eine Zugspannungslinie (9) in der Tierhaut (2) bildet, wobei die Zugspannungslinie (9) des ersten Paares (4) mit der Zugspannungslinie (9) des zweiten Paares (5) einen stumpfen und/oder spitzen Winkel einschließt.

PROBE FOR A SUBLANCE WITH RANGEFINDER

Eine Sonde (1) für eine eine Lanzenachse (5) aufweisende Sublanze (2) eines Konvertergefäßes (3) ist in Richtung der Lanzenachse (5) auf die Sublanze (2) aufgesteckt. Die Sonde (1) weist einen Entfernungsmesser (8) auf, mittels dessen bei mit der Sublanze (2) verbundener Sonde zumindest die Entfernung (S, S’) zu einem Ort (P, P’) erfassbar ist, der sich in Richtung der Lanzenachse (5) gesehen vor der Sublanze (2) befindet. Ein Auswertesystem wird dazu verwendet, dass die Sublanze dafür herangezogen werden kann, je nach aufgesteckter Sonde, die Temperatur oder die Entfernung zu ermitteln oder aus zuwerten. Beim Aufstecken der Sonde (1) auf die Sublanze (2) erfolgt zusätzlich zur mechanischen Verbindung mit der Sublanze (2) auch eine elektrische Kontaktierung der Sonde (1) mit der Sublanze (2).

PROCEDURE AND DEVICE FOR THE DETERMINATION AND SIZE REGULATION OF INCLUSIONS IN NOBLE STONES

DEVICE FOR SUPERVISING A GRANULATES PRODUCT

PROCEDURE AND MECHANISM FOR THE INSPECTION

VERFAHREN, SENSOREINHEIT UND MASCHINE ZUM DETEKTIEREN VON ''ZUCKERSPITZEN''-DEFEKTEN IN KARTOFFELN

PROCEDURE FOR MEASURING THE MEAT TEXTURE.

PROCEDURE AND DEVICE FOR THE COLLECTION OF SURFACE CHARACTERISTICS OF TRANSPARENT ARTICLES

DEVICE FOR EXAMINING CONSTRUCTION UNITS AUD TRANSPARENT MATERIAL FOR SURFACE DEFECTS AND INCLUSIONS.

MECHANISM FOR THE TREATMENT AND INVESTIGATION OF A SURFACE.

DEVICE FOR JUDGING THE WELDING SEAM IN BELT LAYERS FUER RADIAL ONE PNEUMATIC TIRES.

DEVICE FOR THE EXAMINATION OF PRODUCTS

Procedure for the quality inspection of textile commodity

DEVICE FOR THE VISUAL INSPECTION OF THE SURFACE FINISH OF PAYING OFF SURFACES OF LARGER DIMENSION

Device for arranging, classifying od.dgl. articles moved along a promotion course, in particular fruit or vegetable

Method for identifying surface characteristics of metallurgical products, especially continuously cast and rolled products, and a device for carrying out said method

INSPECTION SYSTEM FOR LIMITED ACCESS SPACES

PROCESS AND APPARATUS FOR EXAMINING OPTICAL COMPONENTS, ESPECIALLY OPTICAL COMPONENTS FOR THE EYE AND DEVICE FOR ILLUMINATING CLEAR-TRANSPARENT TEST-OBJECTS

Optical metrology of single features

OBJECT INSPECTION DEVICE

Apparatus and method for monitoring preparation of a food product

An apparatus and a method for monitoring preparation of a food product are disclosed. The apparatus may include an imager and a controller. The controller may be configured to execute a method having the following steps: receiving order related data; receiving an image of the food product from the imager; analyzing the received image based on pre stored data, received from a database, in order to extract prepared product data; comparing the extracted prepared product data to the order related data; and determining a compliance of the food product with a required quality level based on comparing the extracted prepared product data to the order related data. DATABASE PROCESSOR USER INTERFACE OPERATING 105 10 114 - SYSTEM 116 MEMORY 107 THERMOMETER SPECTROMETER FIG. 1A COMMUNICATION 109 a J1o5 ...

OBJECT INSPECTION SYSTEM

METHODS AND APPARATUS FOR OPTICAL PRODUCT INSPECTION

Products having optically detectable straight lime segments are inspected for acceptability by forming one or more one-dimensional images of the product in which properly aligned straight line segments are respectively focused to points in the image. Such parameters as the location and image intensity of these one-dimensional image points are used to determine whether or not the product is acceptable. An optical Hough transform underlies these product inspection techniques.

SURFACE INSPECTION SCANNING SYSTEM

METHOD FOR DETERMINING RESIDUAL FUEL AND INSOLUBLES CONTAMINATION IN USED MARINE ENGINE LUBRICANTS USING UV-VISIBLE SPECTROSCOPY AND CHEMOMETRICS

A method for determining contamination in marine diesel lubricating oils, particularly residual fuel and insolubles, comprising developing a calibration model on the basis of chemometric analysis of UV-visible raw spectral data of reference lubricating oil samples with known properties and concentrations of residual fuel and insolubles, and applying this model to analysis of UV- visible raw spectral data of samples with unknown concentrations of residual fuel and insolubles in order to determine these unknown concentrations, as represented on Figure 1. The actual values of concentrations of residual fuel and insolubles in the reference spectra are obtained by conventional analytical methods.

DEFECT INSPECTION SYSTEM

DEFECT INSPECTION APPARATUS

METHODS FOR HANDLING A MOBILE PLATFORM IN A TANK CONTAINING NON-CONDUCTIVE HAZARDOUS SUBSTANCES

A mobile platform uses a charge accumulation control system to control a charge accumulation while the mobile platform is in the tank. Alternatively or additionally, the mobile platform includes a retrieval system having a buoyant body, a primary tether, and a secondary tether. Alternatively or additionally, an electrical cable is used to reduce a voltage difference between the mobile platform and the tank or other structure by electrically connecting to an electrically conductive member on the mobile platform.

Methods, Systems and Apparatus for Defect Detection and Classification

Aspects of the present invention are related to systems, methods and apparatus for image-based automatic detection of a defective area in a flat panel display and classification of the defect type and the cause of the detected defect.

Method for recognizing a structure to be applied to a substrate, with the aid of several cameras and device therefore

A method and apparatus are provided for automatic application and monitoring of a structure to be applied onto substrate. A plurality of cameras positioned around an application facility are utilized to monitor the automatic application of a structure on a substrate by means of a stereometry procedure. Three-dimensional recognition of a reference contour position results in the overlapping area to be used for gross adjustment of the application facility prior to applying the structure.

Optical surface defect inspection apparatus and optical surface defect inspection method

The present invention is to provide an optical surface defect inspection apparatus or an optical surface defect inspection method that can improve a signal-to-noise ratio according to a multi-segmented cell method without performing autofocus operations, and can implement highly sensitive inspection. The present invention is an optical surface defect inspection apparatus or an optical surface defect inspection method in which an inspection beam is applied onto a test subject, an image of a scattered light from the surface of the test subject is formed on a photo-detector, and a defect on the surface of the test subject is inspected based on an output from the photo-detector. The photo-detector has an optical fiber bundle. One end thereof forms a circular light receiving surface to receive the scattered light. The other end thereof is connected to a plurality of light receiving devices. The optical fiber bundle is divided into a plurality of fan-shaped cells in the light receiving surface, and connected to the light emitting devices in units of the cells for performing the inspection based on the outputs of the plurality of cells.

Automated wafer defect inspection system and a process of performing such inspection

An automated defect inspection system has been invented and is used on patterned wafers, whole wafers, broken wafers, partial wafers, sawn wafers such as on film frames, JEDEC trays, Auer boats, die in gel or waffle packs, MCMs, etc., and is specifically intended and designed for second optical wafer inspection for such defects as metalization defects (such as scratches, voids, corrosion, and bridging), diffusion defects, passivation layer defects, scribing defects, glassivation defects, chips and cracks from sawing, solder bump defects, and bond pad area defects.

Light emitting diode projector

The invention relates to a light emitting diode (LED) light source comprising an LED die, or a closely packed die array or matrix of die arrays, substantially and efficiently coupled to non-imaging collection optics. The non-imaging collection optics operate to provide a homogenized LED output having a near field whose intensity is highly uniform and a reduced far field extent substantially preserving the étendue (area, solid angle, index squared product) of the LED output. The near field, in turn, is imaged by a downstream relay lens to an illumination plane a specific distance away.

Camera chip, camera and method for image recording

The invention relates to a camera chip (C) for image acquisition. It is characterized in that pixel groups (P 1, P 2, . . . ) may be exposed at different times with the aid of shutter signals (S 1, S 2, . . . ).

Inspection apparatus and method using pattern recognition

Inspection apparatus comprises a feed system for delivering a stream of articles to an imaging zone. A camera generates image data from the stream at the imaging zone for processing by a computer. The computer comprises a pattern recognition system for identifying defects in areas from the image data, and for ranking identified defects. The pattern recognition system is programmed to operate according to multiple defect criteria. The computer is also coupled to a graphical user interface to display the areas identified from the image data as thumbnails on the interface arranged according to rank of the identified defects in the areas, in each of at least two defect criteria. The areas from the generated image data will normally be defined around each identified defect with the defect central therein. These areas, or thumbnails, can overlap.

Machine Tool - Based, Optical Coordinate Measuring Machine Calibration Device

A calibration artifact for an inspection system is provided. The calibration artifact comprises a base adapted for placement within a holding fixture of an inspection system during calibration, a sphere operatively connected to the base, and a light source operatively connected to the base. The base, the sphere, and the light source are removable from the inspection system after calibration.

Apparatus And Method For Establishing Standards For Visual Residue Limits

Embodiments of the present invention are directed to apparatus and methods for establishing standards for visual residue limits, training individuals to visually observe and recognize surfaces exceeding or complying with residue limits, and certifying individuals for such detection limits The invention features a kit comprising an assembly of coupons with predetermined loads.

Illumination system with illumination shield

An apparatus for an illumination system including a concentric light source providing a quantity of light; a diffusion shield to diffuse the light and produce a diffused illumination where the diffused illumination is provided to a component positioned in an interior portion of the diffusion shield; a support structure where the diffusion shield is mechanically coupled with the support structure at a first base portion of the diffusion shield and where the concentric light sources are mechanically coupled with the support structure and positioned radially outward from the first base portion of the diffusion shield; and a harvesting shield where the harvesting shield is mechanically coupled with the support structure and positioned radially outward from the concentric light sources and where the harvesting shield redirects at least a portion of the quantity of light from the concentric light sources towards the diffusion shield.

Capturing method for images with different view-angles and capturing system using the same

A capturing method for a plurality of images with different view-angles and a capturing system using the same are provided. The capturing method for the images with different view-angles includes the following steps. An appearance image of an object is captured by an image capturing unit at a capturing angle. A light reflection area of the appearance image is detected by a detecting unit, and a dimension characteristic of the light reflection area is analyzed by the same. Whether the dimension characteristic of the light reflection area is larger than a first predetermined value is determined. If the dimension characteristic of the light reflection area is larger than the first predetermined value, then the capturing angle is adjusted within a first adjusting range. After the step of adjusting the capturing angle within a first adjusting range is performed, the step of capturing the appearance image is performed again.

Defect inspection device using catadioptric objective lens

A defect inspection device comprises an inspection optical system including a light source, a half mirror for reflecting illumination light emitted from the light source, a catadioptric objective lens for collecting reflected light from the sample by illumination light reflected by the half mirror, an imaging lens for focusing the reflected light transmitted through the catadioptric objective lens, a relay lens having a blocking member provided at a position at which specularly reflected light from the sample is focused by the imaging lens, and a detector for defecting the reflected light of the specularly deflected light blocked by the blocking member; and a computation processing unit for detecting defects of the sample on the basis of the signals detected by the detector.

Method and device for inspecting a traveling wire cable

A wire cable is exposed to flashes and the exposed image is detected on at least one lay length or a multiple of the lay length and monitored for changes in the image. Preferably, the respective repetition of the same outer stranded wire of the traveling wire cable is detected in the same location and every repetition or every other repetition or every third repetition is used for triggering the flash. In another embodiment, a picture is taken of a large portion of the wire cable using a specialized camera and the image is split up, into recurring units of length that correspond to the size of a lay length or a multiple of the lay length and the successive units of length are compared and inspected for changes in the image.

Conveying apparatus with an imaging backing surface

A conveying apparatus for conveying an object, the object having at least a non-opaque portion, including a light source, an optical detector and a backing measurement apparatus, the light source for illuminating the object, the optical detector for acquiring information at least relating to at least one chromatic characteristic of the non-opaque portion, the backing measurement apparatus including a backing material, a backing support and a plurality of rollers, the backing material exhibiting at least one of determined chromatic characteristics and determined optical characteristics, the backing support for supporting the backing material, the plurality of rollers for rolling the backing material over the backing support, wherein light emitted by the light source optically interacts with the backing material consistently through the non-opaque portion.

Die inspection method

A method is disclosed for inspecting a mold which has a porous alumina layer over its surface. The method includes providing, based on a relationship between a first parameter indicative of a thickness of the porous alumina layer and a color parameter indicative of a color of reflected light from the porous alumina layer, first color information which represents a tolerance of the first parameter of a porous alumina layer which has an uneven structure that is within a tolerance; providing a mold which is an inspection subject, the mold having a porous alumina layer over its surface; obtaining a color parameter which is indicative of a color of reflected light from the porous alumina layer of the inspection subject mold; and determining a suitability of the first parameter of the inspection subject mold based on the obtained color parameter and the first color information.

OIL DETECTION PROCESS AND APPARATUS

A process for detecting oil or lubricant contamination in a manufactured product, the process comprising adding a fluorescent taggant to oils or lubricants contained in processing machinery for said product, conveying said product past an infrared detection apparatus, irradiating said product with infrared radiation from said detection apparatus as it passes the detection apparatus, and detecting infrared radiation emitted from said irradiated product. 1. A process for detecting oil or lubricant contamination in a manufactured product , the process comprising:adding a fluorescent taggant to oils or lubricants contained in processing machinery for said product;conveying said product past an infrared detection apparatus;irradiating said product with infrared radiation from said detection apparatus as it passes the detection apparatus; anddetecting infrared radiation emitted from said irradiated product.2. The process of claim 1 , wherein said taggant is a Stokes-shifting taggant claim 1 , which absorbs infrared radiation at a first wavelength and fluoresces at a second wavelength claim 1 , different from said first wavelength.3. The process of claim 2 , wherein said first wavelength is about 805 nanometers and said second wavelength is about 840 nanometers.4. The process of claim 1 , wherein said product is a cigarette rod which is wrapped in paper.5. The process of claim 1 , wherein said product is a food product.6. The process of claim 1 , wherein the taggant is oil soluble.7. The process of claim 6 , wherein the taggant is an Indocyanine Green complex.8. The process of claim 1 , wherein the taggant is added to said oils or lubricants at a concentration of between about 10 ppm and 100 ppm.9. The process of claim 6 , wherein the taggant is added to said oils or lubricants at a concentration of about 50 ppm.10. The process of claim 1 , wherein said detection step is conducted at a speed of about 2 claim 1 ,000 feet per minute or more.11. The process of claim 10 , ...

High Throughput Thin Film Characterization And Defect Detection

Methods and systems for determining band structure characteristics of high-k dielectric films deposited over a substrate based on spectral response data are presented. High throughput spectrometers are utilized to quickly measure semiconductor wafers early in the manufacturing process. Optical dispersion metrics are determined based on the spectral data. Band structure characteristics such as band gap, band edge, and defects are determined based on optical dispersion metric values. In some embodiments a band structure characteristic is determined by curve fitting and interpolation of dispersion metric values. In some other embodiments, band structure characteristics are determined by regression of a selected dispersion model. In some examples, band structure characteristics indicative of band broadening of high-k dielectric films are also determined. The electrical performance of finished wafers is estimated based on the band structure characteristics identified early in the manufacturing process.

OPTICAL EQUIPMENT AND REGISTRATION METHOD

An optical equipment for inspecting and addressing a specimen is disclosed. The optical equipment comprises an optical device and a processing module. The optical device comprises a light source, a sample inspecting device and an address detecting device. The sample inspecting device comprises a first objective lens and a first detector. A beam is focused on a sample placed in an inspected site of a specimen by the first objective lens. The address detecting device comprises a second objective lens and a second detector. A beam is focused on the address coding site by the second objective lens. The processing module controls the beam to be focused on the sampling points of the inspected site to generate first optical signals, and simultaneously controls the beam of the light source to be focused on the corresponding address codes of the address coding site to generate second optical signals. 1. An optical equipment used for inspecting and addressing a sample placed on an inspected site of a specimen having the inspected site and an address coding site , wherein the optical equipment comprises: a light source;', 'a sample inspecting device comprising a first objective lens and a first detector, wherein a beam of the light source is focused on the sample placed on the inspected site by the first objective lens; and', 'an address detecting device comprising a second objective lens and a second detector, wherein a beam of the light source is focused on the address coding site by the second objective lens; and, 'an optical device comprisinga processing module used for controlling the beam of the light source to be focused on a plurality of sampling points of the inspected site to generate a plurality of first optical signals, and controlling the beam of the light source to be focused on a plurality of address codes of the address coding site to generate a plurality of second optical signals, and wherein all of relative positions between each sampling point and its ...

Back Quartersphere Scattered Light Analysis

An optical collection system for use in a surface inspection system for inspecting a surface of a workpiece. The surface inspection system has an incident beam projected through a back quartersphere and toward a location on the surface of the workpiece to impinge on the surface. This forms a reflected beam that extends along a light channel axis in a front quartersphere, and forms scattered light having a haze scatter portion. The incident beam and the light channel axis form an incident plane. The optical collection system includes back collectors that are positioned in the back quartersphere for collecting the scattered light, where each of the back collectors is disposed in the back quartersphere outside the incident plane, and at a relative minimum in the Rayleigh scatter. 1. An optical collection system for use in a surface inspection system for inspecting a surface of a workpiece , the surface inspection system having an incident beam projected through a back quartersphere and toward a location on the surface of the workpiece to impinge on the surface to form a reflected beam that extends along a light channel axis in a front quartersphere and to form scattered light , having a haze scatter portion , the incident beam and the light channel axis forming an incident plane , the optical collection system comprising: a plurality of back collectors positioned in the back quartersphere for collecting the scattered light , each of the back collectors being disposed in the back quartersphere , outside the incident plane , and at a relative minimum in the Rayleigh scatter.2. A method for inspecting a surface of a workpiece , the method comprising: scanning an incident beam on the surface of the workpiece so that the incident beam impinges thereon to form a reflected beam extending along a light channel axis in a front quartersphere , and to form scattered light , the incident beam and the light channel axis defining an incident plane , collecting the scattered light at ...

Inspection apparatus and inspection method

The invention is directed to find a false defect from defect candidates and obtain a threshold with which the false defect can be eliminated by the smallest number of review times. Defect candidates are reviewed and selected as a defect or a false defect. By deleting a defect candidate having a characteristic quantity equal to or less than that of the false defect from a map or displaying it in another sign, the false defect can be determined visually. Since the defect candidate having the characteristic quantity equal to or less than that of the selected false defect is deleted from the map or displayed in another sign, the defect candidates unnecessary to set a threshold are not reviewed. The number of defect candidates to be reviewed can be largely reduced as compared with that in the conventional technique. Further, by repeating the above work, the threshold is automatically calculated, and an inspection result map with the threshold is displayed, so that a re-inspection is unnecessary.

DEFECT INSPECTION METHOD AND DEVICE THEREFOR

Disclosed is a defect inspection method which makes it possible to scan the entire surface of a sample and detect minute defects without causing thermal damage to the sample. A defect inspection method in which a pulse laser emitted from a light source is subjected to pulse division and irradiated on the surface of a sample which moves in one direction while the divided-pulse pulse laser is rotated, reflection light from the sample irradiated by the divided-pulse pulse laser is detected, the signal of the detected reflection light is processed to detect defects on the sample, and information regarding a detected defect is output to a display screen, wherein the barycentric position of the light intensity of the divided-pulse pulse laser is monitored and adjusted. 1. A defect inspection device comprising:a table unit on which a sample is placed, the table unit being rotatable;a light source unit configured to emit a pulse laser;an illumination optical unit configured to divide a pulse of the pulse laser emitted from the light source unit to apply the divided-pulse pulse laser to the sample placed on the table unit;a detection optical unit configured to detect light reflected off the sample to which the divided-pulse pulse laser is applied by the illumination optical unit;a signal processing unit configured to process an output signal from the detection optical unit detecting the reflected light to detect a defect on the sample; andan output unit configured to output a result processed at the signal processing unit on a display screen,wherein the illumination optical unit includes:a pulse dividing unit configured to divide a pulse of the pulse laser emitted from the light source unit;a first beam monitor unit configured to monitor a barycentric position of light intensity of the divided-pulse pulse laser emitted from the pulse dividing unit; anda light intensity barycentric position adjusting unit configured to adjust the barycentric position of the light intensity of ...

Machine vision system editing environment for a part program in which a continuous stream of image acquisition operations are performed during a run mode

A machine vision system editing environment is provided for a part program in which a continuous stream of image acquisition operations are performed during a run mode. In one embodiment, a new common syntax and representations are utilized wherein continuous image acquisition operations are recorded in the same way as regular operations, with the running of the part program being performed in two stages. In the first stage, the portion of the part program that is to have the continuous stream of image acquisition is scanned for image acquisition operations, and the most efficient order for acquiring the images is determined, after which the image acquisition process is begun. Then, in the second stage, while the image acquisition process is being performed, the portion of the part program is scanned again, with the image analysis operations then being performed.

Transparent object detection system and transparent flat plate detection system

A disclosed transparent body detection system includes an image acquisition unit acquiring a vertical polarization image and a horizontal polarization image by acquiring an image of a first region, the image including a transparent body having characteristics in which a polarization direction of transmission light changes; a placing table on which the transparent body is to be placed; a polarization filter disposed opposite to the image acquisition unit across the placing table and at a position including a second region, an image of the second region including at least the transparent body in the first region and being acquired; and an image processing apparatus detecting the transparent body based on distribution of vertical/lateral polarization degree of a vertical/lateral polarization degree image based on the vertical polarization image and the horizontal polarization image.

Automatic Optical Detection Method and Optical Automatic Detector

The present invention relates to an automatic optical detection method and an optical automatic detector. The automatic optical detection method includes the following steps: in the step of colored light projection, the lamplight with tricolor light is uniformly projected on an object to be detected to form images with different colors; gray-scale information corresponding to different zones of the images is obtained, then, an automatic optical inspection standard image is generated, and the automatic optical inspection standard image and a prestored reference image are contrastively detected. In the present invention, only the gray-scale information of the images needs processing, so the data quantity and the processing difficulty of an image processing unit and a statistical analysis unit are reduced, which is favorable for increasing the reliability, accuracy, repeatability and speed of data acquisition, and the present invention reduces the requirement of the detector, which is favorable for reducing the input cost of the detector.

FAULT INSPECTION DEVICE AND FAULT INSPECTION METHOD

Proposed is a defect inspection method whereby: illuminating light having a substantially uniform illumination intensity distribution in one direction of a sample surface irradiated on the sample surface; multiple scattered light components, which are output in multiple independent directions, are detected among the scattered light from the sample surface and multiple corresponding scattered light detection signals are obtained; at least one of the multiple scattered light detection signals is processed and the presence of defects is determined; at least one of the multiple scattered light detection signals that correspond to each of the points determined by the processing as a defect is processed and the dimensions of the defect are determined; and the position and dimensions of the defect on the sample surface, at each of the points determined as a defect, are displayed. 1. A defect inspection device comprising: an illumination light adjusting unit which adjusts light emitted from a light source into illumination light having predetermined irradiation conditions; and', 'an illumination intensity distribution control unit which controls an illumination intensity so that an illumination intensity in a predetermined detection target area out of an illumination area on a surface of a sample on which the illumination light is irradiated is 50% or more of an illumination intensity at a center position of the illumination light on a surface of the sample and an illumination intensity in an illumination area other than the predetermined detection target area is 0.1% or less of an illumination intensity at a center position of the illumination light on a surface of the sample;, 'an irradiating unit, the irradiating unit comprisinga scanning unit which scans the sample in a direction perpendicular to a longitudinal direction of the illumination area in the irradiating unit;a detecting unit which detects scattered light generated from a surface of the sample due to ...

Lens apparatus for inspecting object and machine vision system including the same

Provided are a lens apparatus and a machine vision system including the lens apparatus. The lens apparatus includes: a first lens group and a second lens group which are designed to use a wavelength of light of a first single color as a reference wavelength and disposed on opposite sides of an aperture; and a converter lens group which is disposed at an object side of the first lens group, wherein the converter lens group performs selectively at least one of a first conversion for converting a magnification, and a second conversion for converting the reference wavelength.

Electron-Bombarded Charge-Coupled Device And Inspection Systems Using EBCCD Detectors

A focusing EBCCD includes a control device positioned between a photocathode and a CCD. The control device has a plurality of holes therein, wherein the plurality of holes are formed perpendicular to a surface of the photocathode, and wherein a pattern of the plurality of holes is aligned with a pattern of pixels in the CCD. Each hole is surrounded by at least one first electrode, which is formed on a surface of the control device facing the photocathode. The control device may include a plurality of ridges between the holes. The control device may be separated from the photocathode by approximately half a shorter dimension of a CCD pixel or less. A plurality of first electrodes may be provided, wherein each first electrode surrounds a given hole and is separated from the given hole by a gap. 1. An electron-bombarded charge-coupled device (EBCCD) comprising:an assembly including a window;a photocathode inside the assembly and adjacent to the window;a CCD device inside the assembly and positioned to collect electrons emitted from the photocathode; anda control device positioned between the photocathode and the CCD, the control device having a plurality of holes therein, wherein the plurality of holes are formed perpendicular to a surface of the photocathode, and wherein a pattern of the plurality of holes is aligned with a pattern of pixels in the CCD, each hole being surrounded by at least one first electrode formed on a surface of the control device facing the photocathode.2. The EBCCD of claim 1 , wherein the CCD has a boron coating on its surface facing the at least one first electrode.3. The EBCCD of claim 1 , wherein the CCD comprises a back-thinned CCD.4. The EBCCD of claim 1 , wherein the CCD comprises a time-delay integration CCD.5. The EBCCD of claim 1 , wherein an exterior surface of the window includes an anti-reflective coating.6. The EBCCD of claim 1 , wherein the control device comprises a silicon structure.7. The EBCCD of claim 1 , wherein the control ...

INSPECTION APPARATUS AND INSPECTION METHOD

The light scattered from the sample surface and foreign matter is imaged on an image intensifier and detected by a lens-coupled multi-pixel sensor such as a TDI sensor or a CCD sensor. The light scattered by surface roughness is spatially eliminated to detect the light scattered from foreign matter with increased sensitivity. A mechanism for shifting the image intensifier is incorporated to prevent a signal intensity decrease, which may be caused by a decrease in the sensitivity of the image intensifier. 1. An inspection apparatus that checks for a defect in a substrate , comprising:a radiation optical system; anda detection optical system; at least one LED light source, and', 'a waveguide for guiding light emitted from the LED light source., 'wherein the radiation optical system includes'}2. The inspection apparatus according to claim 1 ,wherein the radiation optical system includes an optical device that is disposed between the LED light source and the waveguide to diffuse the light emitted from the LED light source.3. The inspection apparatus according to claim 1 ,wherein the waveguide is an optical fiber or an iris.4. The inspection apparatus according to claim 1 ,wherein the waveguide is a multi-mode single-core optical fiber.5. The inspection apparatus according to claim 1 ,wherein the waveguide is a multi-core optical fiber.6. The inspection apparatus according to claim 5 ,wherein cores are linearly disposed at a substrate side end of the multi-core optical fiber.7. The inspection apparatus according to claim 1 , further comprising:a first LED light source having a first wavelength; anda second LED light source having a second wavelength.8. The inspection apparatus according to claim 7 ,wherein the radiation optical system includes a reflection optical system that is disposed between the waveguide and the substrate.9. The inspection apparatus according to claim 7 , further comprising:a first multi-core optical fiber for guiding first light from the first LED ...

DEVICE AND METHOD FOR DETECTION OF DEFECTS IN VITREOUS BODIES

The invention relates to a device for detection of glass container defects comprising a cold light source for emitting a light spectrum with limited infrared portion and optical means for directing the cold light through one or more glass containers to be observed. 114-. (canceled)15. Device for detection of defects of a vitreous body comprising:a cold light source for emitting a cold light;optical means for directing the cold light to at least one vitreous body along a light line, wherein a view line for visually detecting a defect of the vitreous body extends in longitudinal direction of the vitreous body,variation means for modifying the direction of the light line of the cold light, such that a detection angle between the view line and the light line is larger than 60° and smaller than 180°.16. Device according to characterised in that the variation means is adapted to vary the detection angle between 120° and 60°.17. Device according to claim 15 , wherein the variation means is adapted to vary the detection angle between 105° and 75°.18. Device according to claim 15 , wherein the vitreous body comprises a cylindrically shaped container claim 15 , wherein the view line extends substantially parallel to the axial direction of the container.19. Device according to claim 15 , further comprising a handling means adapted to rotate the at least one vitreous body around an axis defined by the view line.20. Device according to characterised in that the handling means is a mass tray for multiple vitreous bodies.21. Device according to claim 15 , characterised in that the variation means is configured to provide a detection angle of 90° in a starting configuration.22. Device according to claim 15 , characterised in that the variation means comprises at least one mirror and/or at least one lens.23. Device according to claim 21 , characterised in that the variation means comprises two rotating mirrors.24. Method for detecting defects in a vitreous body comprising the ...

APPARATUS AND METHOD FOR AUTOMATIC INSPECTION OF THROUGH-HOLES OF A COMPONENT

An apparatus and a method for automatic inspection of through-holes of a component is provided. The proposed apparatus includes an imaging module, an image processing module and an analysis module. The imaging module generates a thermographic image of the component by passing a medium through the through-holes and capturing infra-red radiation emitted from the component while the medium is flowing through the through-holes. The image processing module fits the thermographic image on a digital image obtained from geometrical data of the component. The image processing module is further masks the fitted thermographic image using a digital image mask to extract regions corresponding to through-holes in the thermographic image. The digital image mask is computed based on a determination of positions of through-holes on the digital image. The analysis module evaluates the masked thermographic image to determine an irregularity or blockage in one or more of the through-holes. 115-. (canceled)16. A method for automatic inspection of a plurality of through-holes of a component , comprising:obtaining a thermographic image of the component generated by passing a medium through the plurality of through-holes and capturing infra-red radiation emitted from the component while the medium is flowing through the plurality of through-holes;fitting the thermographic image on a digital image obtained from geometrical data of the component;masking the fitted thermographic image using a digital image mask to extract regions corresponding to the plurality of through-holes in the thermographic image wherein the digital image mask is computed based on a determination of positions of the plurality of through-holes on the digital image; andevaluating the masked thermographic image to determine an irregularity or blockage in one or more of the plurality of through-holes.17. The method according to claim 16 , wherein the digital image is obtained from a Computer-Aided Design model of the ...

ENHANCED HIGH-SPEED LOGARITHMIC PHOTO-DETECTOR FOR SPOT SCANNING SYSTEM

Disclosed are apparatus and methods for inspecting or measuring a specimen. An incident beam is directed across a plurality of consecutive scan portions of a specimen so that an output beam profile from each scan portion is consecutively collected by a photomultiplier tube (PMT), and the scan portions include at least one or more first scan portions and a next scan portion that is scanned after the one or more first scan portions. After or while the incident beam is directed to the one or more first scan portions of the specimen, an output signal for each first scan portion is obtained based on the output beam profile that is collected by the PMT for each first scan portion. An expected output beam profile for the next scan portion is determined based on the output signal that is obtained for each one or more first scan portions. As the incident beam is directed towards the next scan portion, a gain input to the PMT for the next scan portion is set based on the expected output beam profile so that the gain for such next scan portion results in a measured signal at the PMT that is within a predefined specification of the PMT or other hardware components that receive a measured signal from the PMT. 1. A method of inspecting or measuring a specimen , the method comprising:directing an incident beam across a plurality of consecutive scan portions of a specimen so that an output beam profile from each scan portion is consecutively collected by a photomultiplier tube (PMT), wherein the scan portions include one or more first scan portions and a next scan portion that is scanned after the one or more first scan portions;after or while the incident beam is directed to the one or more first scan portions of the specimen, obtaining an output signal for each first scan portion based on the output beam profile that is collected by the PMT for each first scan portion;determining an expected output beam profile for the next scan portion based on the output signal that is obtained ...

Air Pocket Detection Methods and Systems

Methods and systems for use in detecting an air pocket in a single crystal material are described. One example method includes providing a matrix including a plurality of data units, the plurality of data units including image data related to a region of interest of the single crystal material; determining, by a processor, a difference between data units of the matrix and a corresponding data unit of the matrix, wherein the corresponding data unit is defined by a first operation of the matrix; calculating, by the processor, a first index value based on the differences of the corresponding data units; and identifying an air pocket within the single crystal material based on the first index value and a predetermined threshold.

Filter Systems Including Patterned Optical Analyte Sensors and Optical Readers

A filter system includes a housing, a filter medium disposed within the housing, an optical analyte sensor, and an optical reader. The optical analyte sensor is characterized by a first region that exhibit a first response to an analyte of interest and a second region that exhibit a second, different, response to an analyte of interest. The optical analyte sensor includes a detection medium and is disposed within the housing such that the detection medium is in fluid communication with the filter medium. The optical reader includes at least one light source and at least one detector. 1. A filter system comprising:a housing;a filter medium disposed within the housing;an optical analyte sensor characterized by a first region that exhibits a first response to an analyte of interest and a second region that exhibits a second, different, response to an analyte of interest, the optical analyte sensor comprising a detection medium and disposed within the housing such that the detection medium is in fluid communication with the filter medium; andan optical reader comprising a first assembly comprising at least one light source and at least one detector and a second assembly comprising at least one light source and at least one detector;wherein the optical reader is attached to the housing such that at least a portion of light emitted by at least one light source of the first assembly is reflected from the first region of the optical analyte sensor and captured by at least one detector of the first assembly, and at least a portion of light emitted by at least one light source of the second assembly is reflected from the second region of the optical analyte sensor and captured by at least one detector of the second assembly.2. The filter system of claim 1 , wherein the housing comprises a removable housing portion and the optical reader is attached to the removable housing portion.3. The filter system of claim 1 , wherein the optical analyte sensor comprises an occluding ...

Sensor tape for security detection and method of fabrication

A sensor in the form of an elongated flexible tape has a signal path made from electrical wire or optical fiber which extends between one end and another end of the tape. The electrical wires or optical fibers are disposed in spaced relation across the width and along the length of the tape and are terminated in connectors at the endpoints of the tape. The connectors may be integrated into a signal detector to interface with communication links. The tape is a material that is non-conductive and in which the wires or optical fibers may be woven, disposed or embedded in some manner. One or more layers of flexible material can be laminated on respective sides of the sensor tape to provide a robust laminated or bonded structure that can be rolled and unrolled from a reel. An adhesive layer and a removable layer can be provided to protect the adhesive layer prior to use. An overcoat of outer layer resin may be applied.

SURFACE INSPECTION METHOD AND SURFACE INSPECTION APPARATUS

A surface inspection method for inspecting a surface H of an inspection subject having a specular surface H, including: a step in which the surface H of the inspection subject is irradiated with light L from an oblique direction; a step in which measurement is conducted of the intensity of diffracted light D that is diffracted by adhering foreign matter K among light that is regularly reflected by the surface H of the inspection subject; a step in which measurement is conducted of the intensity of scattered light S that is irregularly reflected by the adhering foreign matter K; and a step in which an adhering condition of foreign matter K on the surface H of the inspection subject is determined based on measurement results for the intensity of the diffracted light D that is regularly reflected, and the intensity of the scattered light S that is irregularly reflected. 1. A surface inspection method for inspecting a surface of an inspection subject having a specular surface , comprising:a step in which the surface of said inspection subject is irradiated with light from an oblique direction;a step in which measurement is conducted of an intensity of diffracted light that is diffracted by adhering foreign matter among light that is regularly reflected at the surface of said inspection subject;a step in which measurement is conducted of an intensity of scattered light that is irregularly reflected by said adhering foreign matter;and a step in which an adhering condition of a foreign matter adhering to the surface of said inspection subject is determined based on measurement results for an intensity of said diffracted light that is regularly reflected, and an intensity of said scattered light that is irregularly reflected.2. The surface inspection method according to claim 1 , wherein an adhering strength of a foreign matter adhering to the surface of said inspection subject is determined.3. The surface inspection method according to claim 1 , wherein an incident angle ...

DEVICE AND SYSTEM FOR PROCESSING IMAGE DATA REPRESENTING BAR CODES

A device for processing image data relating to bar codes is described. In one embodiment a bar code verification device is provided having an ergonomic form factor characterized by a domed hand held trigger and a viewing window. The verification device may be disposed in a network that includes a host processor system and other bar code reading devices which may include other bar code verification devices. Processing circuitry for processing image signals corresponding to printed bar codes may be partially disposed within the hand held verification device and partially disposed within a host processor system spaced apart from and associated with the hand held verification device. The hand held verification device may be in wireless communication with the host processor system to which it is associated. The bar code verification system may include signal enhancement modules which interpolate constructed pixel values from actual pixel values and which correct for signal degradation resulting from high frequency spatial sampling. 1. A device for verification of a bar code disposed on a horizontal substrate , said device comprising:(A) an imaging assembly including a solid state image sensor;(B) a housing encapsulating a component of said imaging assembly, said housing having a plurality of surfaces that extend generally upward from said substrate when said device is positioned in a position to measure print quality of said bar code;(C) an illumination assembly at least partially disposed in said housing projecting illumination onto said substrate;(D) an image capture module configured to capture at least one frame of image data corresponding to a bar code symbol;(E) a bar code quality measurement module configured to determine at least one of: a value of contrast of said bar code symbol, a value of edge contrast of said bar code symbol, a value of modulation of said bar code symbol;(F) wherein said device is configured, responsive to detecting that said trigger has ...

Variable sensitivity interferometer systems

Variable Sensitivity optical sensors can have a respective actual sensitivity of one or more portions of the sensor corresponding, at least in part, to a selected environment of each respective sensor portion. Some disclosed sensors have a plurality of optical conduits extending longitudinally of the sensors. At least one of the optical conduits can have at least one longitudinally extending segment having one or more optical and/or mechanical properties that differs from the optical properties of an adjacent longitudinally extending segment, providing the conduit with longitudinally varying signal propagation characteristics. An optical sensor having such optical conduits can exhibit a longitudinally varying actual sensitivity. Nonetheless, such a sensor can exhibit a substantially constant apparent sensitivity, e.g., when each respective portion of the sensor exhibits an actual sensitivity corresponding to a selected environment. Innovative sensors can provide a low-incidence of false or nuisance alarms, accurate position and magnitude information, and other advantages.

Accurate machine tool inspection of turbine airfoil

Inspecting features of an object including measuring features of the master part that represents a desired nominal dimensions to obtain a preliminary set of dimensional data. The preliminary set of data becomes a master data set. The same master part is measured on a second machine to obtain another set of data on the master part. The two data sets are compared and correction data is generated representing differences between the different data sets for the same master part measured on different machines. Subsequent parts are then measured on the second machine to obtain measurement data that is corrected based on the correction data. The application of the correction information provides for the use of 5-axis machines within a desired measurement capability.

Illumination apparatus

An illumination apparatus includes lenses, a first casing that has a radiation plane provided with annularly arranged windows for attaching the lenses, respectively, independently, and that has an opening at a position opposite to the radiation plane, and a first substrate associated with each of the lenses and accordingly disposed. The first substrate has at least one light emitting device mounted thereon. The first casing includes a holding portion associated with each of the windows. The holding portion each permits the lens to be attached to the first casing from a side thereof having the opening and also restrains the lens from moving through the first casing toward the radiation plane, and when the lens is attached to the first casing, the lens has an optical axis in a direction having a predetermined angle relative to a center axis of the first casing.

Building inspection device

The invention is a building inspection device for inspecting a side of a building comprising a body having a under-side, a line attachment means connected to the body for movably connecting the body to a guide line, an alignment means for aligning the body so that the underside of the body faces the side of the building, a system controller for controlling the inspection device, and a sensing device disposed in the body having a sensor located on the underside of the body for inspecting a portion of the side of the building, wherein the sensing device is controlled by the system controller. The line attachment means may be connected to a vertical weight-bearing guide line, and the alignment means may comprise a second vertical guide line also connected to the line attachment means.

Wafer Inspection with Multi-Spot Illumination and Multiple Channels

Systems configured to inspect a wafer are provided. One system includes an illumination subsystem configured to illuminate a set of spots on a wafer and a collection subsystem configured to collect light from the set of spots. The collection subsystem separately images the light collected from each of the individual spots onto only a corresponding first detector of a first detection subsystem. The collection subsystem also images the light collected from at least some of the individual spots onto a number of second detectors of a second detection subsystem that is less than a number of spots in the set. Output produced by the first and second detectors can be used to detect defects on the wafer. 1. A system configured to inspect a wafer , comprising:an illumination subsystem configured to illuminate a set of spots on the wafer, wherein individual spots within the set are separated spatially from each other on the wafer;a collection subsystem configured to collect light from the set of spots on the wafer;a first detection subsystem comprising first detectors, wherein each of the first detectors corresponds to only one of the individual spots, wherein the collection subsystem is further configured to separately image the light collected from each of the individual spots onto only its corresponding first detector, and wherein each of the first detectors generates output responsive to the light imaged thereon;a second detection subsystem comprising second detectors, wherein the collection subsystem is further configured to image the light collected from at least some of the individual spots onto a number of the second detectors that is less than a number of the spots in the set, and wherein each of the second detectors generates output responsive to the light imaged thereon; anda computer subsystem configured to detect defects on the wafer using the output generated by the first detectors and the second detectors.2. The system of claim 1 , wherein the illumination ...

Electromagnetic wave measuring apparatus, measuring method, program, and recording medium

An electromagnetic wave measurement device includes an electromagnetic wave outputter that outputs an electromagnetic wave having a frequency equal to or more than 0.01 THz and equal to or less than 100 THz toward a device under test. An electromagnetic wave detector detects the electromagnetic wave which has transmitted through the device under test. A relative position changer changes a relative position of an intersection of an optical path of the electromagnetic wave transmitting through the device under test and the device under test, with respect to the device under test, so that the intersection is at a predetermined relative position due to the refraction of the electromagnetic wave by the device under test. A characteristic value deriver derives a characteristic value of the electromagnetic wave based on a detection result of the electromagnetic wave detector, the characteristic value being associated with the predetermined relative position.

Retro-reflective imaging

Methods, systems, and apparatus for imaging a substrate through the use of retro-reflective optics and detecting any defects and patterns therein. Through the use of optical imaging, optical focusing is adjusted to capture optical effects of interest in the substrate with enhanced size, precision, clarity and image quality. Imaging data obtained from these images may then be analyzed. Both bright field image data and dark field image data are captured and analyzed to provide accurate and reliable imaging results. The invention is suitable for use in on-line, real-time detection of visual defects and pattern recognition or off-line for non-production use.

Photomultiplier Tube with Extended Dynamic Range

The disclosure is directed to a photomultiplier tube with extended dynamic range. According to various embodiments, a repulsive electric field is introduced between a photocathode and a plurality of dynodes in order to repel or block low-energy electrons from reaching and being multiplied by the dynodes. As a result, time intervals between current peaks and drops may be decreased because the photomultiplier current will be primarily affected by high-energy electrons emitted by the photocathode in response to incident illumination versus low-energy electrons, some of which may result from dangling bonds or slow surface states after illumination no longer impinges the photocathode. Dynamic range and optical responsiveness of the photomultiplier tube are increased accordingly. 1. A photomultiplier tube , comprising:a photocathode configured to emit electrons in response to incident illumination;a plurality of dynodes configured to multiply electrons received from the photocathode;an anode configured to receive electrons multiplied by the plurality of dynodes; anda control grid configured to prevent a portion of the electrons emitted by the photocathode from being received by the plurality of dynodes.2. The photomultiplier tube of claim 1 , wherein the control grid is disposed between the photocathode and a first dynode of the plurality of dynodes.3. The photomultiplier tube of claim 2 , wherein the control grid is arranged substantially parallel to the photocathode.4. The photomultiplier tube of claim 2 , further comprising:an accelerating grid disposed between the control grid and the first dynode.5. The photomultiplier tube of claim 1 , wherein the control grid includes a conductor configured to carry a negative electric potential relative to an electric potential of the photocathode.6. The photomultiplier tube of claim 5 , wherein the conductor includes a wire mesh.7. The photomultiplier tube of claim 5 , wherein the conductor is configured to carry a potential in ...

Appearance Inspection Apparatus

An appearance inspection apparatus analyzes a difference in detection characteristics of detection signals obtained by detectors to flexibly meet various inspection purposes without changing a circuit or software. The apparatus includes a signal synthesizing section that synthesizes detection signals from the detectors in accordance with a set condition. An input operating section sets a synthesizing condition of the detection signal by the signal synthesizing section, and an information display section displays a synthesizing map structured based on a synthesized signal which is synthesized by the signal synthesizing section in accordance with a condition set by the input operating section. 1. A system for acquiring a condition of an object comprising:an illumination unit, which supplies the object with light;a first detection unit, which detects light from the object and outputs a first signal;a second detection unit which detects light from the object and outputs a second signal, wherein the second detection unit is arranged at a different position from a position where the first detection unit is arranged; anda processing unit, which acquires a first object image from the first signal and the second signal.2. The system according to claim 1 , further comprising:a third detection unit, which detects light from the object and outputs a third signal; anda fourth detection unit, which detects light from the object and outputs a fourth signal, wherein the fourth detection unit is arranged at different position from a position where the third detection unit is arranged;wherein the processing unit acquires a second object image from the third signal and the fourth signal.3. The system according to claim 2 , wherein the processing unit acquires an integrated image from the first object image and the second object image.4. The system according to claim 3 , further comprising:a first layer, which processes the first signal, the second signal, the third signal, and the ...

Illumination System with Time Multiplexed Sources for Reticle Inspection

The disclosure is directed to a system and method of providing illumination for reticle inspection. According to various embodiments of the disclosure, a multiplexing mirror system receives pulses of illumination from a plurality of illumination sources and directs the pulses of illumination along an illumination path to a plurality of field mirror facets. The field mirror facets receive at least a portion of illumination from the illumination path and direct at least a portion of the illumination to a plurality of pupil mirror facets. The pupil mirror facets receive at least a portion of illumination reflected from the field mirror facets and direct the portion of illumination along a delivery path to a reticle for imaging and/or defect inspection. 1. An illumination system for reticle inspection , comprising:a plurality of illumination sources;a multiplexing mirror system configured to receive pulses of illumination from the plurality of illumination sources, and further configured to direct the pulses of illumination along an illumination path;a plurality of field mirror facets, each configured to receive a portion of illumination from the illumination path; anda plurality of pupil mirror facets, each configured to receive a portion of illumination reflected from the plurality of field mirror facets, and further configured to direct the portion of illumination received from the plurality of field mirror facets along a delivery path to a reticle.2. The system of claim 1 , wherein the plurality of illumination sources are configured to provide illumination at one or more wavelengths in the range of approximately 5 nm to 124 nm.3. The system of claim 1 , wherein the multiplexing mirror system includes a plurality of actuatable mirror facets claim 1 , wherein the multiplexing mirror system is configured to receive each pulse of illumination utilizing a mirror facet with a selected angle of incidence.4. The system of claim 3 , wherein the plurality of actuatable ...

Digital light masking systems

The systems and methods described herein relate to digital light masking systems and methods for automated image inspection. First, a digital light masking system comprising a video signal; a source light which outputs emitted light; a digital light mask which attenuates the emitted light; and a vision system. The systems may inspect a disposable absorbent article. Second, a method for automated image inspection, comprising the steps of: generating a video signal; providing a uniform source light which outputs emitted light; providing a digital light mask which attenuates the emitted light; directing the attenuated light towards an article; and inspecting the article with a vision system. The uniform source light may be an LED light, the digital light mask may be an LCD panel, the attenuated light may be directed towards a disposable absorbent article, and/or the vision system may comprise a camera.

Methods for automated image inspection

The systems and methods described herein relate to digital light masking systems and methods for automated image inspection. First, a digital light masking system comprising a video signal; a source light which outputs emitted light; a digital light mask which attenuates the emitted light; and a vision system. The systems may inspect a disposable absorbent article. Second, a method for automated image inspection, comprising the steps of: generating a video signal; providing a uniform source light which outputs emitted light; providing a digital light mask which attenuates the emitted light; directing the attenuated light towards an article; and inspecting the article with a vision system. The uniform source light may be an LED light, the digital light mask may be an LCD panel, the attenuated light may be directed towards a disposable absorbent article, and/or the vision system may comprise a camera.

DISK SURFACE INSPECTION METHOD AND DISK SURFACE INSPECTION DEVICE

Provided is a disk surface inspection device that makes it possible to extract defects repeatedly occurring at a particular position on the disk surface. The disk surface inspection device comprises conveyance means which extracts a disk from a cassette and conveys the disk, table means including a spindle which rotates the disk mounted thereon while moving the disk in a direction and a rotation angle detecting unit which detects the rotation angle of the spindle, optical detection means which irradiates the disk with light and detects reflected light from the disk, signal processing means which detects defects by processing a detection signal from the optical detection means, and output means. The signal processing means stores positional information of defects detected on the disk by use of rotation angle information on the spindle and positional information on a particular part of the disk stored in the cassette. 1. A disk surface inspection device comprising:conveyance means which extracts a disk from a cassette and conveys the disk;table means including a spindle on which the disk conveyed by the conveyance means is mounted, a rotary driving unit which drives and rotates the spindle, a rotation angle detecting unit which detects the rotation angle of the spindle, and a linear driving unit which drives the spindle in an axial direction;optical detection means including a light irradiation unit which irradiates the disk mounted on the spindle with light and a condensation/detection unit which condenses and detects reflected light from the disk irradiated with the light from the light irradiation unit;signal processing means which detects defects on the disk by processing a signal from the optical detection means condensing and detecting the reflected light from the disk; andoutput means which outputs the result of the processing by the signal processing means,wherein the signal processing means stores the position of each of the detected defects after converting ...

Inspection Apparatus, Inspection Method and Program for Inspection

In a first platen gap, a light emitting amount is decided to obtain a light receiving amount for inspection as a first light emitting amount for inspection. Subsequently, in a second platen gap, a light emitting amount is decided to obtain a light receiving amount for inspection as a second light emitting amount for inspection. An inspection on dot forming is performed, using a smaller light emitting amount for inspection between the first and second light emitting amounts for inspection, and using the platen gap in which the smaller light emitting amount for inspection is decided. 1. An inspection apparatus that inspects a printed result , comprising:a sensor that includes a light emitting element and a light receiving element;a control unit that changes a light emitting amount received from the light emitting element;wherein the inspection apparatus inspects the printed result using an optimal light emitting amount decided by changing the light emitting amount received from the light emitting element.2. The inspection apparatus according to claim 1 ,wherein the optimal light emitting amount is decided based on a value related to a light receiving amount received by a light receiving element with respect to the light emitting amount received from the light emitting element.3. The inspection apparatus according to claim 1 , further comprising:a movement unit that changes a height of the sensor,wherein the optimal light emitting amount is decided by changing the light emitting amount received from the light emitting element at different heights of the sensor.4. The inspection apparatus according to claim 1 ,wherein the optimal light emitting amount is, among the changed light emitting amounts, a minimum light emitting amount which enables the inspection of the printed result to be normally performed.5. An inspection method comprising:changing the light emitting amount received from a light emitting element;measuring a light receiving amount using a light receiving ...

Back-Illuminated Sensor With Boron Layer

An image sensor for short-wavelength light and charged particles includes a semiconductor membrane, circuit elements formed on one surface of the semiconductor membrane, and a pure boron layer on the other surface of the semiconductor membrane. This image sensor has high efficiency and good stability even under continuous use at high flux for multiple years. The image sensor may be fabricated using CCD (charge coupled device) or CMOS (complementary metal oxide semiconductor) technology. The image sensor may be a two-dimensional area sensor, or a one-dimensional array sensor. The image sensor can be included in an electron-bombarded image sensor and/or in an inspection system. 1. An image sensor for sensing at least one of deep ultraviolet (DUV) radiation , vacuum ultraviolet (VUV) radiation , extreme ultraviolet (EUV) radiation , and charged particles , the image sensor comprising:a semiconductor membrane, the semiconductor membrane including circuit elements formed on a first surface of the semiconductor membrane and a pure boron layer formed on a second surface of the semiconductor membrane.2. The image sensor of claim 1 , wherein the semiconductor membrane comprises an epitaxial layer between about 20 μm and about 40 μm in thickness.3. The image sensor of claim 2 , further including a doped layer formed in the second surface of the membrane.4. The image sensor of claim 1 , wherein the pure boron layer is between 2 nm and 20 nm thick.5. The image sensor of claim 1 , further comprising an anti-reflection coating deposited on the boron layer.6. The image sensor of claim 1 , further comprising a conductive coating deposited on the boron layer to form a capping layer.7. The image sensor of claim 1 , further comprising a handling wafer attached to the circuit elements.8. The image sensor of claim 1 , further comprising a protective layer formed on the circuit elements.9. The image sensor of claim 4 , wherein the image sensor comprises a charge-coupled device (CCD) or a ...

Terahertz imaging device, and method of eliminating interference patterns from terahertz image

A sample is irradiated with terahertz light from a light source, so that an image (G1) is generated by capturing an image of a region (R1) including a point (S) of the sample, and an image (G2) is generated by capturing an image of a region (R2) including the point (S) and separated from the region (R1) by a distance (L). A single image (V) is generated by applying a predetermined binary operation to the images (G1) and (G2).

Protective Fluorine-Doped Silicon Oxide Film For Optical Components

An optical component includes a substrate and a fluorine-doped thin film formed on the substrate. This fluorine-doped thin film is dense, and thus very low absorbing and insensitive to various vacuum, temperature, and humidity conditions. This dense film has a high refractive index, which remains stable irrespective of environmental conditions. The fluorine-doped thin film can advantageously ensure low scattering, low reflectance, and high transmittance. Moreover, the fluorine-doped thin film is damage resistant to incident radiation density. The fluorine-doped thin film may be a fluorine-doped silicon oxide film having a thickness of approximately 1-10 nm and a fluorine concentration of 0.1% to 5%. 1. An optical component operable with at least one of deep ultraviolet (DUV) radiation , vacuum ultraviolet (VUV) radiation , extreme ultraviolet (EUV) radiation , and charged particles , the optical component comprising:a substrate; anda fluorine-doped silicon oxide film formed on the substrate, the fluorine-doped silicon oxide film having a thickness of approximately 1-10 nm and having a fluorine concentration of 0.1% to 5%.2. The optical component of claim 1 , wherein the optical component forms part of a charge-coupled device (CCD) or a time delay integration (TDI) CCD.3. An anti-reflective coating (ARC) for an optical component operable with at least one of deep ultraviolet (DUV) radiation claim 1 , vacuum ultraviolet (VUV) radiation claim 1 , extreme ultraviolet (EUV) radiation claim 1 , and charged particles claim 1 , the ARC comprising:a substrate; anda fluorine-doped silicon oxide film formed on the substrate, the fluorine-doped silicon oxide film having a thickness of approximately 1-10 nm and having a fluorine concentration of 0.1% to 5%.4. The ARC of claim 3 , wherein the optical component is a beam splitter claim 3 , a mirror claim 3 , a detector claim 3 , or a sensor.5. A method of fabricating a protective film for an optical component claim 3 , the method ...

Systems and Methods for Sample Inspection and Review

The disclosure is directed to systems and methods for sample inspection and review. In some embodiments, images are collected and/or defects are located utilizing separately addressable red, green, and blue (RGB) illumination sources to improve image quality. In some embodiments, illumination sources are pulse width modulated for substantially consistent light intensity in presence of variable sample motion. In some embodiments, a stage assembly is configured to support the sample without blocking access to the supported surface of the sample, and further configured to reduce oscillations or vibrations of the sample. In some embodiments, an illumination system includes an imaging path and a focusing path to allow full field of view focusing. 1. A system for analyzing a sample , comprising:an inspection module including one or more illumination sources configured to sequentially illuminate a surface of the sample with red, green, and blue illumination, and one or more monochromic detectors configured to receive illumination reflected from the surface of the sample in response to the sequential illumination by the one or more illumination sources;a review module including one or more illumination sources configured to illuminate the surface of the sample, and one or more detectors configured to receive illumination reflected from the surface of the sample in response to the illumination by the one or more illumination sources; andat least one computing system in communication with the inspection module and the review module, the at least one computing system configured to determine a location of a defect of the sample utilizing information associated with the illumination received by the one or more monochromic detectors of the inspection module, and further configured to collect an image of a portion of the surface of the sample including the defect utilizing the one or more detectors of the review module and the determined location of the defect.2. The system of ...

SOILING CHECK OF THE WINDOW OF A MEASURING APPARATUS FOR CHECKING SHEET MATERIAL

A method carries out a soiling check of the measurement window of a measuring device for checking sheet material. A measuring device carries out the method. A device for processing a sheet material comprises the measuring device. The soiling check uses, only areas of the measurement window which correspond, in terms of width and position in the beam path of a light, to the areas of the checked sheet material which are checked during the checking of the sheet material. As a result, fewer cleaning steps are needed for the measurement window. 253943114142. The method according to claim 1 , characterized in that for the check of the sheet material there is respectively recorded an image () of a sheet of the sheet material claim 1 , which image has a greater length than the sheet claim 1 , and for the soiling check of the window () there is evaluated an image region () arranged next to the sheet on the image claim 1 , which image region represents that partial region () of the window () claim 1 , through which claim 1 , upon the check of the sheet material () claim 1 , the light () reaches the sensor line and which with respect to its width and its location in the beam path of the light () corresponds to the at least one checked partial region () of the sheet material.3144333. The method according to either of or claim 1 , characterized in that the light () emanating from the partial region () of the window () is a light remitted by the window () and/or a light transmitted through the window ().4431431. The method according to any of to claim 1 , characterized in that the partial region () of the window () claim 1 , from which partial region the light () emanates that is evaluated for checking a soiling of the window () claim 1 , has a smaller width than the width of the checked sheet material ().543143311411. The method according to any of to claim 1 , characterized in that the partial region () of the window () claim 1 , from which partial region the light () emanates ...

DETECTING DEVICE AND METHOD FOR SUBSTRATE

A detecting method for a substrate includes the following steps: positioning the substrate; optically scanning the substrate and determining whether there is any defect on the substrate, if there is at least one defect on the substrate, determining the position of the at least one defect; obtaining a plurality of size images of a plurality of measuring areas of the substrate and transferring the size images; and calculating a width of each line on the substrate, and simultaneously obtaining a defection image of the at least one defect. The present disclosure further provides a detecting device for the substrate. With the detecting method and device, the defect detecting and measurement of the width of each line can be carried out simultaneously, which reduces the manufacturing time of the substrate and improves the manufacturing efficiency thereof. 1. A detecting method for a substrate , comprising:positioning the substrate;optically scanning the substrate and determining whether there is any defect on the substrate, if there is at least one defect on the substrate, determining the position of the at least one defect;obtaining a plurality of size images of a plurality of measuring areas of the substrate and transferring the size images; andcalculating a width of each line on the substrate, and simultaneously obtaining a defection image of the at least one defect, and determining the type of the at least one defect according to the defection image.2. The detecting method as claimed in claim 1 , wherein the step of positioning the substrate comprises:providing a plurality of positioning marks on four corners or edges of the substrate, and determining the position of the substrate relative to a detecting device according to the positions of the positioning marks on the substrate.3. The detecting method as claimed in claim 2 , wherein the step of obtaining a plurality of size images of a plurality of measuring areas and transferring the size images comprises:providing ...

Device for inspecting and/or rehabilitating pipelines

A device for inspecting and/or rehabilitating pipelines includes a camera or a tool arranged at a carrier that can be passed through the pipeline. To enable the device to pass through pipelines having bends, as used in house service connections, a first cross section of the carrier, taken in a first plane, which includes a central longitudinal axis of the carrier, an essentially straight or concave underside with outer ends. End-side sections of a top side extend upwardly in an arc-shaped and convex manner and away from the respective outer end of the underside in the direction of the opposite end thereof. The radius of curvature or radii of curvature of the end-side sections of the top side of the first cross section, equals (equal) more than 50% of the maximum distance of the underside from the top side.

Monitoring apparatus and method particularly useful in photolithographically processing substrates

Apparatus for processing substrates according to a predetermined photolithography process includes a loading station in which the substrates are loaded, a coating station in which the substrates are coated with a photoresist material, an exposing station in which the photoresist coating is exposed to light through a mask having a predetermined pattern to produce a latent image of the mask on the photoresist coating, a developing station in which the latent image is developed, an unloading station in which the substrates are unloaded and a monitoring station for monitoring the substrates with respect to predetermined parameters of said photolithography process before reaching the unloading station.

Surface features mapping

Provided herein is an apparatus, including a photon emitting means for emitting photons onto a surface of an article, a photon detecting means for detecting photons scattered from features in the surface of the article; and a mapping means for mapping the features in the surface of the article, wherein the apparatus is configured to process more than one article every 100 seconds.

SYSTEMS AND METHODS FOR TESTING AND DIAGNOSING MALFUNCTIONS IN A LIQUID DISPENSER

Systems and methods for testing and diagnosing malfunctions in a liquid dispenser are provided. In a general embodiment, the present disclosure provides a testing and diagnosing system including a pre-tester configured to test for and collect testing data regarding an operational status of the liquid dispenser and in communication with the liquid dispenser, a communication central module configured to receive information from the testing device and the pre-tester, and a database management system configured to operate, monitor and control the testing device, the pre-tester and/or the communication central module. 1. A liquid dispenser testing and diagnosing system comprising:a liquid dispenser;a pre-tester configured to test for and collect testing data regarding an operational status of the liquid dispenser;a communication central module configured to receive information from the testing device and the pre-tester; anda database management system configured to operate, monitor and control at least one of the testing device, the pre-tester or the communication central module, the database management system is programmed with an algorithm to determine whether the testing data is within or outside of specifications.2. The liquid dispenser testing and diagnosing system of claim 1 , wherein the communication central module is configured to monitor environmental temperature and humidity.3. The liquid dispenser testing and diagnosing system of comprising a testing device configured for evaluating one or more conditions in the liquid dispenser claim 1 , the testing device being in communication with the liquid dispenser.4. The liquid dispenser testing and diagnosing system of claim 3 , wherein the testing device comprises an electrical safety tester.5. The liquid dispenser testing and diagnosing system of claim 3 , wherein the testing device comprises an air leakage detector.6. The liquid dispenser testing and diagnosing system of comprising a responding module configured ...

Solid-State Laser And Inspection System Using 193nm Laser

Improved laser systems and associated techniques generate an ultra-violet (UV) wavelength of approximately 193.368 nm from a fundamental vacuum wavelength near 1064 nm. Preferred embodiments separate out an unconsumed portion of an input wavelength to at least one stage and redirect that unconsumed portion for use in another stage. The improved laser systems and associated techniques result in less expensive, longer life lasers than those currently being used in the industry. These laser systems can be constructed with readily-available, relatively inexpensive components. 1. A laser system for generating approximately 193.368 nm wavelength light , the laser system comprising:a fundamental laser configured to generate a fundamental frequency with a corresponding wavelength of approximately 1064 nm;an optical parametric (OP) module configured to down convert the fundamental frequency and to generate an OP output, which is a half harmonic of the fundamental frequency;a fifth harmonic generator module configured to use an unconsumed fundamental frequency of the OP module to generate a fifth harmonic frequency; anda frequency mixing module for combining the fifth harmonic frequency and the OP output to generate a laser output with the approximately 193.368 nm wavelength light.2. The laser system of claim 1 , wherein the fundamental laser includes an ytterbium-doped fiber laser.3. The laser system of claim 1 , wherein the fundamental laser includes one of a Q-switched claim 1 , mode-locked claim 1 , and a continuous wave (CW) laser.4. The laser system of claim 1 , wherein the fundamental laser includes a neodymium-doped yttrium aluminum garnate lasing medium claim 1 , a neodymium-doped yttrium orthovanadate lasing medium claim 1 , or a neodymium doped mixture of gadolinium vanadate and yttrium vanadate.5. The laser system of claim 1 , wherein the OP module includes a seed laser that generates light of approximately 2127 nm wavelength or approximately 2109.7 nm wavelength. ...

DEVICE FOR DETECTING FOREIGN MATTER AND METHOD FOR DETECTING FOREIGN MATTER

The present invention provides a device for detecting foreign matter and a method for detecting foreign matter to detect a foreign matter on a surface of an object such as a film of an electrode mixture etc. or a foreign matter contained in the object, thereby to improve the reliability of the object. By irradiating an object with a terahertz illumination light (wavelength of 4 μm to 10 mm) and detecting a scattered light from an electrode as an example of the object by a scattered light detector , a foreign matter on a surface of the electrode or contained in the electrode , for example, a metal foreign matter , is detected. The electrode is one in which electrode mixture layers each including an active material , conductive additive and a binder as components are coated on both surfaces of a collector . The scattered light results from a part of a transmitted light reflected by the metal foreign matter 1. A device for detecting foreign matter which detects the foreign matter on a surface of an object or in the object ,comprising an illumination light generating unit which generates an illumination light to be irradiated to the object; anda scattered light detecting unit which detects scattered light from the object as a signal using a light receiving element,wherein a wavelength of the illumination light ranges from 4 μm to 10 mm.2. The device for detecting foreign matter according to claim 1 ,further comprising a specular reflection light detecting unit which detects a specular reflected light from the object using a light receiving element.3. The device for detecting foreign matter according to claim 1 ,further comprising a smoothing processing unit which smoothes the signal obtained by the scattered light detecting unit; anda filter processing unit which filters the smoothed signal smoothed in the smoothing processing unit.4. The device for detecting foreign matter according to claim 3 ,further comprising a manifestation processing unit which executes a ...

Inspection device

The invention relates to a device for inspecting contact-sensitive planar materials or workpieces, e.g. wafers for the semiconductor industry, solar cells, glasses, FPD substrates, or biologically active substrates for biosensors, as well as materials having contact-sensitive curved surfaces. Said inspection device comprises a support element ( 1 ) for supporting a material ( 3 ) on the top face of the support element ( 1 ), at least one oscillator which is connected to the support element ( 1 ) and the oscillation frequency and amplitude of which are selected in such a way as to keep the material ( 3 ) hovering on the support element ( 1 ), and at least one optical sensor ( 4 ). The support element is made of a light-permeable material, and the optical sensor ( 4 ) is arranged below the support element ( 1 ).

Super resolution inspection system

The disclosure is directed to a system and method for inspecting a sample by illuminating the sample at a plurality of different angles and independently processing the resulting image streams. Illumination is directed through a plurality of pupil apertures to a plurality of respective field apertures so that the sample is imaged by portions of illumination directed at different angles. The corresponding portions of light reflected, scattered, or radiated from the surface of the sample are independently processed. Information associated with the independently processed portions of illumination is utilized to determine a location of at least one defect of the sample. Independently processing multiple image streams associated with different illumination angles allows for retention of frequency content that would otherwise be lost by averaging information from multiple imaging angles.

DEFECT INSPECTION METHOD, LOW LIGHT DETECTING METHOD AND LOW LIGHT DETECTOR

A defect inspection method includes an illumination light adjustment step of adjusting light emitted from a light source, an illumination intensity distribution control step of forming light flux obtained in the illumination light adjustment step into desired illumination intensity distribution, a sample scanning step of displacing a sample in a direction substantially perpendicular to a longitudinal direction of the illumination intensity distribution, a scattered light detection step of counting the number of photons of scattered light emitted from plural small areas in an area irradiated with illumination light to produce plural scattered light detection signals corresponding to the plural small areas, a defect judgment step of processing the plural scattered light detection signals to judge presence of a defect, a defect dimension judgment step of judging dimensions of the defect in each place in which the defect is judged to be present and a display step of displaying a position on sample surface and the dimensions of the defect in each place in which the defect is judged to be present. 1. A defect inspection method comprising:an illumination light adjustment step of adjusting light emitted from a light source to light flux having desired light amount, position, beam diameter and polarization state;an illumination intensity distribution control step of leading the light flux obtained in the illumination light adjustment step to a surface of a sample with a desired incident angle and forming illumination intensity distribution which is long in one direction and short in a direction perpendicular to the one direction on the surface of the sample;a sample scanning step of displacing the sample in a direction substantially perpendicular to a longitudinal direction of the illumination intensity distribution in an illumination light irradiation position on the surface of the sample by the illumination intensity distribution control step;a scattered light detection ...

OPTICAL INSPECTION METHOD AND OPTICAL INSPECTION APPARATUS

An optical inspection apparatus is provided which suppresses the influence of quantum noise including: light irradiator which irradiates a sample with light; reference light emitter which emits reference light; light interference unit which generates interfering light through interference between transmitted light, scattered light, or reflected light from the sample irradiated with light by the light irradiator, and the reference light emitted by the reference light emitter; light detector which detects the interfering light generated by the light interference unit; defect identifier which identifies the presence or absence of a defect based on a detection signal obtained by the light detector detecting the interfering light; and light convertor which converts at least the state of the transmitted, scattered, or reflected light from the sample, the state of the reference light emitted by the reference light emitter, or the state of the interfering light generated by the light interference unit. 1. An optical inspection apparatus comprising:light irradiator which irradiates a sample with light;reference light emitter which emits reference light;light interference unit which generates interfering light through interference between transmitted light, scattered light, or reflected light from said sample irradiated with light by said light irradiator on the one hand, and the reference light emitted by said reference light emitter on the other hand;light detector which detects the interfering light generated by said light interference unit;defect identifier which identifies the presence or absence of a defect based on a detection signal obtained by said light detector detecting the interfering light; andlight convertor which converts at least the state of the transmitted light, scattered light, or reflected light from said sample, the state of the reference light emitted by said reference light emitter, or the state of the interfering light generated by said light ...

Laser Crystal Degradation Compensation

Method and system for laser crystal degradation compensation are disclosed. The method includes: defining a plurality of sites on a frequency converting crystal; determining a degradation rate associated with each of the plurality of sites; determining an amount of time T wherein a site is continuously operable within a tolerated variation of at least one beam parameter, the amount of time T being determined based on the tolerated variation of the at least one beam parameter and the degradation rate; determining an amount of time t wherein t is a fraction of T; and iteratively shifting among the plurality of sites, wherein each of the plurality of sites is utilized continuously for a duration of time t for each iteration.

DEVICE AND METHOD FOR ULTRASONIC NONDESTRUCTIVE TESTING USING A LASER

Device and method for the nondestructive testing of a part made of a composite material reinforced with fibers, the device including: a) an energizing laser beam generator and elements for producing a photoelastic stress pattern of the surface of the part, in an energizing area, using the laser beam; b) elements for generating a first detection laser beam capable of illuminating the part in a target area; c) elements for generating a second reference detection laser beam, whose characteristics can be controlled independently of those of the detection laser beam; d) a two-wave photoreactive detector including a photorefractive crystal pumped by the reference laser beam; e) elements for collecting the beam reflected by the target area of the first detection laser and conveying the beam into the photorefractive detector; and f) elements for modifying the characteristics of the reference laser so as to adjust the bandwidth of the photorefractive detector. 19-. (canceled)10. A device for the non-destructive testing of a workpiece , in particular made from a fibrous reinforced composite material , characterised in that it includes:a. generator known as excitation laser beam generator and means to produce a photoelastic stress pattern of the surface of the workpiece, in an excitation area, using said laser beam;b. means for generating a first laser beam known as detection laser beam, suitable to illuminate the workpiece in a target area;c. means for generating a second detection laser beam known as reference laser beam, one characteristic of which can be adjusted independently of the characteristics of the detection laser beam;d. a two-wave photorefractive detector comprising a photorefractive crystal pumped by the reference laser beam;e. means for collecting the beam reflected by the target area of the first detection laser, and conveying said beam into the photorefractive detector);f. means of generation comprising a single source made up of a monolithic stabilised ...

EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers

Inspection of EUV patterned masks, blank masks, and patterned wafers generated by EUV patterned masks requires high magnification and a large field of view at the image plane. An EUV inspection system can include a light source directed to an inspected surface, a detector for detecting light deflected from the inspected surface, and an optic configuration for directing the light from the inspected surface to the detector. In particular, the detector can include a plurality of sensor modules. Additionally, the optic configuration can include a plurality of mirrors that provide magnification of at least 100× within an optical path less than 5 meters long. In one embodiment, the optical path is approximately 2-3 meters long. 1a light source directed to an inspected surface;a detector for detecting light deflected from the inspected surface, the detector including a plurality of sensor modules; andan optic configuration for directing the light from the inspected surface to the detector, the optic configuration including a plurality of mirrors that provide magnification of at least 100× within an optical path less than 5 meters long.. An extreme ultraviolet (EUV) inspection system comprising: This application is a continuation of U.S. patent application Ser. No. 12/812,950 entitled “EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers” filed Jul. 14, 2010 which claims priority of U.S. Provisional Patent Application Ser. No. 61/218,900 entitled “Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers” filed Jun. 19, 2009 and PCT Application serial no. PCT/US10/39150 entitled “EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers” filed Jun. 18, 2010.1. Field of the InventionThe present invention relates to an inspection system, and in particular to an extreme ultraviolet (EUV) high throughput inspection system.2. Related ArtCurrent ...

Wafer Inspection

Systems and methods for inspecting a wafer are provided. One system includes an illumination subsystem configured to illuminate the wafer; a collection subsystem configured to collect light scattered from the wafer and to preserve the polarization of the scattered light; an optical element configured to separate the scattered light collected in different segments of the collection numerical aperture of the collection subsystem, where the optical element is positioned at a Fourier plane or a conjugate of the Fourier plane of the collection subsystem; a polarizing element configured to separate the scattered light in one of the different segments into different portions of the scattered light based on polarization; and a detector configured to detect one of the different. portions of the scattered light and to generate output responsive to the detected light, which is used to detect defects on the wafer. 1. A system configured to inspect a wafer , comprising:an illumination subsystem configured to illuminate the wafer;a collection subsystem configured to collect light scattered from the wafer and to preserve the polarization of the scattered light;an optical element configured to separate the scattered light collected in different segments of the collection numerical aperture of the collection subsystem, wherein the optical element is positioned at a Fourier plane or a conjugate of the Fourier plane of the collection subsystem;a polarizing element configured to separate the scattered light in one of the different segments into different portions of the scattered light based on polarization; anda detector configured to detect one of the different portions of the scattered light and to generate output responsive to the detected light, wherein the output is used to detect defects on the wafer.2. The system of claim 1 , wherein the illumination subsystem is further configured to simultaneously illuminate an array of spaced apart spots on the wafer.3. The system of claim 2 ...

Measurement assembly with fiber optic array

A measurement assembly ( 12 ) that directs a light beam ( 32 ) at a surface ( 16, 56 ) comprises a light source ( 20 ) and a fiber optic array ( 22 ). The light source ( 20 ) emits the light beam ( 32 ) that is directed at the surface ( 16, 56 ). Subsequently, the light beam ( 32 ) is reflected off of the surface ( 16, 56 ) to create a reflected beam ( 58 ). The fiber optic array ( 22 ) has a first array end ( 33 B) that receives the reflected beam ( 58 ). Additionally, the fiber optic array ( 22 ) includes a primary fiber ( 234 ) and at least one auxiliary fiber ( 238 ) that is positioned substantially adjacent to the primary fiber ( 234 ) at the first array end ( 33 B). A detector assembly ( 28 ) is coupled to the fiber optic array ( 22 ) to detect any light from the reflected beam ( 58 ) in the primary fiber ( 234 ) and the at least one auxiliary fiber ( 238 ).

Chemical Indicator Obstruction Detection System and Method For An Aquatic Environment

A system and method for determining adverse conditions associated with a chemical indicator in an aquatic environment monitoring system in which reference illumination from an optical reader is used to illuminate a chemical indicator. Response from the reference illumination is used to determine a confidence value that can be part of an analysis associated with a measurement illumination response to produce a confidence adjustment instruction for possible action on the measured response value. 1. A method for determining error in a chemical indicator reading of an aquatic environment monitoring system , the method comprising:illuminating a first region of a first chemical indicator of a chemical indicator apparatus with a first reference illumination from an optical reader of the aquatic environment monitoring system;measuring a first reference response from the first reference illumination;comparing the first reference response for a deviation from a predetermined trusted reference value stored in a memory of the aquatic environment monitoring system;determining a first confidence value from said comparing the first reference response to the predetermined trusted reference value;illuminating a second region of the first chemical indicator with a first measurement illumination;measuring a first measurement response from the first measurement illumination; andgenerating a confidence adjustment based on the first measurement response and the first confidence value.2. A method according to claim 1 , wherein said generating a confidence adjustment includes modifying a value of the first measurement response based on the first confidence value.3. A method according to claim 2 , wherein said determining a first confidence value includes determining a ratio of a value of the reference response to the predetermined trusted reference value and said generating a confidence adjustment includes modifying the value of the first measurement response based on the ratio.4. A method ...

PROBE HOLDING STRUCTURE AND OPTICAL INSPECTION DEVICE EQUIPPED WITH THE SAME

A probe holding structure includes a substrate and a plurality of holding modules. The substrate has an opening and a plurality of grooves arranged around a periphery of the opening. The holding modules are connected with the grooves, respectively. Each holding modules includes a fixing member and a plurality of probes. The fixing member is connected with a corresponding groove. The probes are connected with the fixing member and pass through the corresponding groove. The probe holding structure is combined with a lens adjusting mechanism having a lens to form an optical inspection device for testing electric characteristics of chips. 1. A probe holding structure comprising:a substrate having an opening and a plurality of grooves arranged around a periphery of the opening; and a fixing member connected with a corresponding said groove; and', 'a plurality of probes connected with the fixing member and passing through the corresponding said groove., 'a plurality of holding modules connected with the grooves respectively; each of the holding modules comprising2. The probe holding structure as claimed in claim 1 , wherein the grooves penetrate through a body of the substrate; each of the holding modules is received in one of the grooves.3. The probe holding structure as claimed in claim 2 , wherein each of the probes comprises:an extension portion abutted at a lateral surface of the fixing member and passing through the corresponding said groove;a suspension arm connected with the extension portion and defining with the extension portion a first contained angle; anda detecting portion connected with the suspension arm and defining with the suspension arm a second contained angle;wherein an adhesive is applied between the suspension portion and the fixing member.4. The probe holding structure as claimed in claim 1 , wherein each of the probes comprises:an extension portion abutted at a lateral surface of the fixing member and passing through the corresponding said groove ...

OPTICAL INSPECTION DEVICE

An optical inspection device includes a circuit board having at least one first opening, a mounting plate disposed on a top or bottom surface of the circuit board and having at least one second opening corresponding to the at least one first opening respectively, at least one lens holder received in the at least one second opening, and at least one probe module disposed on a bottom surface of the mounting plate or the bottom surface of the circuit board, corresponding to the at least one lens holder respectively, and having probes electrically connected with the circuit board. Each lens holder has an accommodation for accommodating a lens, and is operatable to do a position adjusting motion in the corresponding second opening. 1. An optical inspection device comprising:a circuit board having at least one first opening; a mounting plate disposed on a top surface or a bottom surface of the circuit board and provided with at least one second opening corresponding to the at least one first opening respectively; and', 'at least one lens holder received in the at least one second opening and each provided with an accommodation for accommodating a lens, wherein a position of the at least one lens holder in the at least one second opening is adjustable by a position adjusting motion; and, 'at least one lens adjusting mechanism comprisingat least one probe module disposed on a bottom surface of the mounting plate or the bottom surface of the circuit board, corresponding to the at least one lens holder respectively, and each provided with a plurality of probes electrically connected with the circuit board.2. The optical inspection device as claimed in claim 1 , further comprising a flexible ring sleeved onto the at least one lens holder.3. The optical inspection device as claimed in claim 2 , wherein the at least one lens holder is provided with an annular recess into which the flexible ring is sleeved.4. The optical inspection device as claimed in claim 1 , wherein the at ...

System and Method for Apodization in a Semiconductor Device Inspection System

An inspection system with selectable apodization includes an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light emanating from the surface of the sample, the illumination source and the detector being optically coupled via an optical pathway of an optical system, a selectably configurable apodization device disposed along the optical pathway, wherein the apodization device includes one or more apodization elements operatively coupled to one or more actuation stages configured to selectably actuate the one or more apodization elements along one or more directions, and a control system communicatively coupled to the one or more actuation and configured to selectably control apodization of illumination transmitted along the optical pathway by controlling an actuation state of the one or more apodization elements.

Combined Illuminator/Light Collectors For Optical Readers

Combined illuminator/light collectors (I/LCs) that provide measurement and/or reference light to a target and collect light from the target. One example of a use for a combined I/LC of the present disclosure is for an optic of an optical reader used to read one or more chemical indicators that undergo physical changes that can be optically detected. The combined I/LC includes a spot lensing designed and configured in conjunction with the target to provide spot illumination on the target from one or more light sources. A light collector collects light from the target resulting from the spot illumination. Some embodiments further include dispersive lensing to direct a portion of the light from each light source away from the spot illumination to keep that light from interfering with the spot illumination.

Method of inspecting impacts observed in fan casings

A method for inspecting impacts present on an internal face of a fan casing, the method including: spotting a first impact present on the internal face of the fan casing; delimiting an inspection area containing the first impact; spotting the various impacts present in the delimited inspection area, the various spotted impacts forming a set of impacts to be considered; measuring, for each impact that is to be considered, the depth of length of the impact; for each impact to be considered, determining a harmfulness value, using at least one chart relating the depth and length of each impact to be considered to a level of harmfulness; determining, for the inspection area containing the first impact, a total harmfulness value by adding together the harmfulness level determined for each impact to be considered.

Inspection device

An inspection device, suitable for use when inspecting a component for defects, including a cluster of lights which are arranged into two or more groups of lights, wherein the cluster of lights is configured such that each group of lights can be operated asynchronously to the other group(s) of lights so that light can be directed asynchronously at a component, from different directions; an image capturing means which is configured to capture an image of a component when each of the groups of lights are lit, to provide a plurality of images, each image showing the component lit from a different direction; a processing means configured to perform arithmetic computation using the images, so as to provide a single image in which defects in the component can be more easily identified. Also, a corresponding method of inspecting a component and a lighting arrangement with a dome and a diffuser.

METHOD AND SYSTEM FOR OPTICALLY INSPECTING PARTS

A method and system for optically inspecting parts are provided wherein the system includes a part transfer subsystem including a transfer mechanism adapted to receive and support a part at a loading station and to transfer the supported part so that the part travels along a first path which extends from the loading station to an inspection station at which the part has a predetermined position and orientation for inspection. An illumination assembly simultaneously illuminates a plurality of exterior side surfaces of the part with a plurality of separate beams of radiation. A telecentric lens and detector assembly forms an optical image of at least a portion of each of the illuminated side surfaces of the part and detects the optical images. A processor processes the detected optical images to obtain a plurality of views of the part which are angularly spaced about the axis of the part. 142-. (canceled)43. A method of optically inspecting parts , each of the parts having a length , a width , an axis , and an outer peripheral surface which extends 360° around the part , the method comprising:supporting a part to be inspected at an inspection station so that the part has a predetermined position and orientation for inspection;simultaneously imaging a plurality of exterior side surfaces of the outer peripheral surface, the side surfaces being angularly spaced about the axis of the part at the inspection station to form an optical image of at least a portion of each of the imaged side surfaces of the part at a single image plane;detecting the optical images at the image plane; andprocessing the detected optical images to obtain a plurality of views of the part which are angularly spaced about the axis of the part.44. The method as claimed in claim 43 , wherein the views are substantially equally spaced about the axis of the part at the inspection station.45. The method as claimed in claim 43 , wherein the part is stationary at the inspection station.46. The method as ...

METHOD FOR IN-LINE DETERMINATION OF FILM THICKNESS AND QUALITY DURING PRINTING PROCESSES FOR THE PRODUCTION OF ORGANIC ELECTRONICS

The present invention is related to the in-line determination of thickness, optical properties and quality of thin films and multilayer structures of organic (conductors, semiconductors and insulators), hybrid (organic/inorganic) and inorganic (e.g. metals, oxides) materials in real-time by the use of Spectroscopic Ellipsometry—SE, during their printing and/or treating by roll-to-roll and sheet-to-sheet processes. SE unit is located on a stage with the possibility of movement in the lateral direction in relation to the movement of e.g. the roll, taking measurements in the spectral range of Vis-fUV from 1.5-6.5 eV. The method can be used in-line to monitor and control in real-time the printing and surface or bulk treatment processes on flexible rolls or sheets both along and across the web or sheet, in the air or in an environment of nitrogen or other gas, resulting in the production of flexible organic and printed electronic devices such as organic photovoltaics, organic light-emitting diodes etc with controlled and tailored functional properties. 12347101112131416. A method for the in-line determination of thickness , optical properties and quality of thin films and multilayer films , wherein it is specified for the monitoring of organic ( , , , , ) hybrid organic/inorganic ( , , , ) and inorganic materials or their combination () during their R2R and S2S printing and/or coating and/or patterning processes on polymeric and other flexible substrates (for the production of organic and printed electronics , in particular organic photovoltaics and organic light emitting diodes , which is characterized by the steps consisting of:(a) covering an energy range that is found to be necessary with extension of the energy range to the visible and to the far ultraviolet;{'b': '108', '(b) collecting experimental data with the simultaneous measurement in a set of different wavelengths, preferably at least 32 ones that cover a determined energy range, preferably within 1.5-6.5 eV ...

CHROMATIC SENSOR AND METHOD

An apparatus for inspecting a measurement object, comprising a workpiece support for supporting the measurement object, and a measuring head carrying an optical sensor. The measuring head and the workpiece support are movable relative to one another. The optical sensor has an objective and a camera for capturing an image of the measurement object along an imaging beam path. The objective has a light entrance opening and a light exit opening, a diaphragm and a multitude of lens-element groups arranged in the objective between the light entrance opening and the light exit opening along a longitudinal axis of the objective. At least two lens-element groups are displaceable parallel to the longitudinal axis. The apparatus also has an illumination device for illuminating the measurement object along an illumination beam path, and a chromatic assembly that can selectively be introduced into the illumination beam path and/or the imaging beam path. 1. An apparatus for inspecting a measurement object , comprising a workpiece support for supporting the measurement object , and a measuring head carrying an optical sensor , wherein the measuring head and the workpiece support are movable relative to one another , wherein the optical sensor has an objective and a camera , which is designed to capture an image of the measurement object through the objective along an imaging beam path , wherein the objective has a light entrance opening and a light exit opening , wherein the objective furthermore has a diaphragm and a multitude of lens-element groups which are arranged in the objective between the light entrance opening and the light exit opening one behind another along a longitudinal axis of the objective , wherein at least two lens-element groups are displaceable parallel to the longitudinal axis , and wherein the apparatus has an illumination device for illuminating the measurement object along an illumination beam path , wherein the apparatus furthermore has a chromatic ...

APPARATUS AND METHOD FOR INSPECTING AN OBJECT

An apparatus and method for optically inspecting an object, comprising an object carrier for carrying the object, a pattern generating unit for illuminating the object with a measurement pattern, an image capture unit for capturing a number of images of the object, imaging optics for influencing a light beam path between the object and the image capture unit, and a data processing unit for determining at least one property of the object on the basis of the captured images. The apparatus can be set to at least a first operating distance and a second operating distance, and furthermore has a diffusing unit, which can be changed between an active state, in which the diffusing unit influences the light beam path in front of the pattern generating unit and an inactive state, in which the diffusing unit does not influence the light beam path in front of the pattern generating unit. 1. An apparatus for optically inspecting an object , comprising an object carrier for carrying the object , a pattern generating unit for illuminating the object with a measurement pattern , an image capture unit for capturing a number of images of the object , an imaging optics for influencing a light beam path between the object and the image capture unit , and a data processing unit , which is designed to determine at least one property of the object on the basis of the number of images , wherein the apparatus can be set to at least a first operating distance and a second operating distance , and the apparatus has a diffusing unit , which can be changed between an active state , in which the diffusing unit influences the light beam path in front of the pattern generating unit and an inactive state , in which the diffusing unit does not influence the light beam path.2. The apparatus as claimed in claim 1 , wherein the diffusing unit claim 1 , for the purpose of changing between the active state and the inactive state claim 1 , is optionally movable into a light beam path in front of the ...

In-line particle discrimination for cosmetic inspection

A method for in-line cosmetic inspection of at least a portion of a surface of a product includes identifying if at least one blemish exists on the portion of the surface, disturbing the portion of the surface based on the identifying, and determining if the at least one blemish is immobile based on the disturbing.

METHOD AND DEVICE FOR INSPECTING GLASS SUBSTRATE OF LIQUID CRYSTAL DISPLAY

The present invention provides a method and a device for inspecting glass substrate of liquid crystal display. The method includes (1) providing an inspection device, wherein the inspection device comprises a device body, an operation table mounted on the device body, an irradiation lamp mounted to the device body and located above the operation table, and a steam nozzle mounted to the device body and located above the operation table, the operation table having a bearing surface, the bearing surface forming an included angle with respect to the horizon; (2) positioning a glass substrate-to-be-inspected on the bearing surface; and (3) turning on the irradiation lamp and spraying steam through the steam nozzle toward the glass substrate-to-be-inspected and at the same time, performing visual inspection of the glass substrate to which the steam attaches. 1. A method for inspecting glass substrate of liquid crystal display , comprising the following steps:(1) providing an inspection device, wherein the inspection device comprises a device body, an operation table mounted on the device body, an irradiation lamp mounted to the device body and located above the operation table, and a steam nozzle mounted to the device body and located above the operation table, the operation table having a bearing surface, the bearing surface forming an included angle with respect to the horizon;(2) positioning a glass substrate-to-be-inspected on the bearing surface; and(3) turning on the irradiation lamp and spraying steam through the steam nozzle toward the glass substrate-to-be-inspected and at the same time, performing visual inspection of the glass substrate to which the steam attaches.2. The method for inspecting glass substrate of liquid crystal display as claimed in claim 1 , wherein the inspection device further comprises a storage device mounted to the device body and a heating device mounted to the device body claim 1 , the storage device storing water therein claim 1 , the ...

Advanced inspection method utilizing short pulses led illumination

An illumination module that may include a LED driver; a group of light emitting diodes (LEDs) that comprises at least one LED; the group of LED is coupled to the LED driver; wherein the LED driver is arranged to activate the group of LEDs by driving a high current short duration driving signal; and wherein the group of LEDs is arranged to emit at least one light pulse in response to the high current short duration driving signal.

Projection Laser Profiler

A laser profiler includes: a laser diode mounted within a substantially cylindrical housing; a conical mirror positioned upstream from the laser diode within the cylindrical housing; and a transparent shroud positioned to surround the conical mirror. A beam produced by the laser diode is directed to the conical mirror and is reflected therefrom at 360° through the transparent shroud to produce a ring of light. 1. A laser profiler comprising:a laser diode mounted within a substantially cylindrical housing;a conical mirror positioned upstream from the laser diode within the cylindrical housing; anda transparent shroud positioned to surround the conical mirror,wherein a beam produced by the laser diode is directed to the conical mirror and is reflected therefrom at 360° through the transparent shroud to produce a ring of light.2. The laser profiler of claim 1 , wherein the cylindrical housing includes a base claim 1 , a first flange portion connected to the base claim 1 , and a second flange portion and a mirror mount portion forming the top of the cylindrical housing.3. The laser profiler of claim 2 , wherein the transparent shroud is secured between the first flange portion and the second flange portion to establish a connection between the first flange portion and the second flange portion and the mirror mount portion.4. The laser profiler of claim 2 , wherein the first flange portion and the mirror mount portion of the cylindrical housing are machined to a shape to shield misaligned light reflected from the conical mirror from passing through the transparent shroud to ensure that the ring of light has a uniform width.5. The laser profiler of claim 2 , wherein the laser diode is positioned at least partially within the first flange portion.6. The laser profiler of claim 2 , wherein the base of the cylindrical housing includes a connection port for supplying power to the laser diode.7. The laser profiler of claim 1 , wherein the cylindrical housing comprises a base ...

Appearance Inspection Device, Appearance Inspection Method, And Program

A burden on a user is reduced by referring to a measurement region set for a certain measurement tool among a plurality of measurement tools to be used by an appearance inspection device as a measurement region of another measurement tool. A reference point or a search region serving as a reference of measurement for a first measurement tool such as a connector dimension inspection tool is set for a basic image acquired by imaging a non-defective product. Next, a second measurement tool such as an area measurement tool that performs measurement separate from the first measurement tool is selected by the user. For coordinate data of a measurement region, which is a region to be measured by the second measurement tool, coordinate data of the reference point or the search region set for the first measurement tool is adjusted if necessary and referred to. 1. An appearance inspection device comprising:a basic image storage section which stores a basic image obtained by imaging an inspection object having a plurality of characteristic portions arrayed in a specific direction;a display section which displays the basic image;a position detection region setting section which sets, to the basic image displayed on the display section, a position detection region for detecting positions of the plurality of characteristic portions of the inspection object according to each of the characteristic portions;a measurement tool selection section which selects, from a plurality of measurement tools for performing different measurement, a measurement tool to measure the inspection object;a measurement region setting section which sets a measurement region, which is a region to be measured by the measurement tool selected by the measurement tool selection section, based on the position detection region set by the position detection region setting section; anda quality determination section which performs measurement according to the measurement region set by the measurement region ...

Distributed sensing employing stimulated brillouin scattering in optical fibers

Disclosed are methods and devices for distributed sensing of a measurable parameter employing stimulated Brillouin scattering in an optical fiber. A frequency-modulated or phase-modulated light wave is transmitted into the optical fiber. A scattered light wave in the optical fiber is monitored for sensing a measurable parameter. In some embodiments, the calculating step may include calculating a distance of a sensed location along the optical fiber using the monitored time of arrival.

ANGULAR VISUAL RESPONSE OF COSMETIC SURFACES

A system for determining the angular visual response of a cosmetic surface includes a sample support member configured to support a sample of material, a light detector arranged to travel along a first arcuate path about the sample of material, a light emitter arranged to travel along a second arcuate path about the sample of material, and an imaging device arranged to travel along a third arcuate path about the sample of material. 1. A system for determining the angular visual response of a cosmetic surface , comprising:a sample support member configured to support a sample of material;a light detector arranged to travel along a first arcuate path about the sample of material;a light emitter arranged to travel along a second arcuate path about the sample of material; andan imaging device arranged to travel along a third arcuate path about the sample of material.2. The system of claim 1 , wherein the sample support member is configured to fixedly retain the sample of material during angular visual response measurement.3. The system of claim 1 , wherein the light detector includes a spectrometer configured to measure magnitudes of spectrum components of light reflected off of the sample of material at a plurality of angles of observation.4. The system of claim 3 , wherein the first arcuate path defines the plurality of angles of observation.5. The system of claim 3 , wherein the imaging device is configured to capture images of the sample of material at each of the plurality of angles of observation.6. The system of claim 1 , wherein the light emitter includes at least one emitter configured to emit collimated light for reflection off of the sample of material at a plurality of angles of incidence.7. The system of claim 6 , wherein the second arcuate path defines the plurality of angles of incidence.8. The system of claim 1 , wherein the light emitter includes at least two emitters claim 1 , and wherein:a first emitter of the at least two emitters is configured to ...

DEVICE AND METHOD FOR DETECTING LIQUID CRYSTAL DISPLAY PANEL

A device and method for detecting a liquid crystal display panel () can perform loaded electrical signal detection on an FFS-type liquid crystal display panel (), thereby increasing the yield of products. The device comprises a transparent bearing platform (), a first polarizer (), a second polarizer () and a backlight source (), and also comprises a first transparent electrode layer () which is located above the transparent bearing platform (); a second transparent electrode layer () which is located beneath the transparent bearing platform (); a signal loading unit () which is electrically connected to the first transparent electrode layer () and the second transparent electrode layer () and used for loading electrical signals to the first transparent electrode layer () and the second transparent electrode layer (), to enable an electric field making liquid crystal molecules of the liquid crystal panel () to be detected on the transparent bearing platform () deflect to be formed between the first transparent electrode layer () and the second transparent electrode layer (). 1. A device for detecting a liquid crystal display panel , comprising:a transparent bearing platform for bearing the liquid crystal display panel to be detected;a first polarizer, positioned over the transparent bearing platform;a second polarizer, positioned under the transparent bearing platform;a backlight source, positioned below the second polarizer, wherein light emitted from the backlight source is capable of arriving at the first polarizer after passing through the second polarizer and the transparent bearing platform;a first transparent electrode layer, provided over the transparent bearing platform;a second transparent electrode layer, provided under the transparent bearing platform; anda signal loading unit, electrically connected to the first transparent electrode layer and the second transparent electrode layer, for loading an electric signal to the first transparent electrode layer ...

Residue Detection with Spectrographic Sensor

Detecting residue of a filler material over a patterned underlying layer includes causing relative motion between a probe of an optical metrology system and a substrate, obtaining a plurality of measured spectra with the optical metrology system through the probe from a plurality of different measurement spots within an area on the substrate, comparing each of the plurality of measured spectra to a reference spectrum to generate a plurality of similarity values, the reference spectrum being a spectrum reflected from the filler material, combining the similarity values to generate a scalar value, and determining the presence of residue based on the scalar value. 1. A method of detecting residue of a filler material over a patterned underlying layer , comprising:causing relative motion between a probe of an optical metrology system and a substrate;obtaining a plurality of measured spectra with the optical metrology system through the probe from a plurality of different measurement spots within an area on the substrate;comparing each of the plurality of measured spectra to a reference spectrum to generate a plurality of similarity values, the reference spectrum being a spectrum reflected from the filler material;combining the similarity values to generate a scalar value; anddetermining the presence of residue based on the scalar value.2. The method of claim 1 , wherein the substrate comprises a plurality of dies claim 1 , and the area is substantially equal to an area of one of the dies.3. The method of claim 1 , wherein the plurality of different measurement spots comprises at least 100 measurement spots.4. The method of claim 1 , wherein the plurality of different measurement are distributed with substantially uniform density across the area.5. The method of claim 1 , wherein causing relative motion comprises holding the substrate in a fixed position in a carrier head and moving the probe.6. The method of claim 5 , wherein moving the probe comprises moving the probe ...

APPARATUS FOR IMAGING A UNIFORMLY IRRADIATED ARTICLE

Provided herein is an apparatus, including a reflective surface configured to reflect photons onto a surface of an article, a stage configured to support the article, and an assembly. In some embodiments, the assembly configured to radiate photons through the article to the reflective surface. The assembly is further configured to image the article with irradiance of the photons. 1. An apparatus , comprising:a photon emitter configured to emit photons;a lens;a reflective surface; and the stage is positioned in between the lens and the reflective surface,', 'the lens is configured to receive photons from the photon emitter and is further configured to project the photons onto the reflective surface, and', 'the reflective surface is configured to receive the photons from the lens and reflect the photons onto a surface of the article with a substantially uniform irradiance of photons., 'a stage configured to support an article, wherein'}2. The apparatus of further comprising:a camera configured to image the surface of the article,wherein the camera is selected from the group consisting of a complementary metal-oxide semiconductor (“CMOS”) camera, a scientific complementary metal-oxide semiconductor (“sCMOS”) camera, and a charge-coupled device (“CCD”) camera.3. The apparatus of claim 1 , wherein the lens is configured to redistribute a flux of photons by monotonically increasing a flux of photons as photons are projected across the surface of the article from an initial location to a final location of the surface of the article.4. The apparatus of claim 1 , whereinthe article is a disk comprising of an inner diameter and an outer diameter, andthe lens projects a greater flux of photons onto a surface location of the reflective surface corresponding to the outer diameter of the article in comparison to a flux of photons projected onto a surface location of the reflective surface corresponding to the inner diameter of the article.5. The apparatus of claim 1 , wherein the ...

NON-INVASIVE VISUALIZATION AND QUANTIFICATION OF NATURAL PIGMENTS

A system for visualizing melanin present in tissue can include an imaging system to record a signal based on a presence of melanin in tissue and a display device to display an image based on the signal. A first laser source can emit a Stokes pulse train and a second laser source can emit a pump pulse train. Both the first laser source and the second laser source comprise a tunable center wavelength or frequency. An energy difference between a frequency of the Stokes pulse train and a frequency of the pump pulse train is from 1750 cmto 2250 cm. The Stokes and the pump pulse train overlap in space and time. A scanning mechanism focuses the combined Stokes pulse train and pump pulse train within the tissue and scans across the tissue. A detector detects the signal based on a presence of melanin within the tissue. 1. A system comprising: a first laser source to emit a Stokes pulse train comprising a tunable center wavelength or frequency;', 'a second laser source to emit a pump pulse train comprising a tunable center wavelength or frequency,', {'sup': −1', '−1, 'wherein an energy difference between a frequency of the Stokes pulse train and a frequency of the pump pulse train is from 1750 cmto 2250 cm, wherein the Stokes pulse train and the pump pulse train overlap in space and time to image the tissue;'}, 'a scanning mechanism to focus the combined Stokes pulse train and pump pulse train within the tissue and scan across the tissue;', 'a detector to detect the signal based on a presence of melanin within the tissue; and, 'an imaging system to record a signal based on a presence of melanin in tissue comprisinga display device to display an image based on the signal to visualize the melanin present in the tissue.2. The system of claim 1 , wherein a ratio of power for the pump pulse train to the Stokes pulse train is about 1.5 to 1 so as to not cause changes in the melanin in the tissue.3. The system of claim 1 , wherein the detector detects the signal in the epi direction ...

System and Method for Defect Detection and Photoluminescence Measurement of a Sample

Defect detection and photoluminescence measurement of a sample directing a beam of oblique-illumination wavelength light onto a portion of the sample, directing a beam of normal-illumination wavelength light for causing one or more photoluminescing defects of the sample to emit photoluminescent light onto a portion of the sample, collecting defect scattered radiation or photoluminescence radiation from the sample, separating the radiation from the sample into a first portion of radiation in the visible spectrum, a second portion of radiation including the normal-illumination wavelength light, and at least a third portion of radiation including the oblique-illumination wavelength light, measuring one or more characteristics of the first portion, the second portion or the third portion of radiation; detecting one or more photoluminescence defects or one or more scattering defects based on the measured one or more characteristics of the first portion, the second portion or the third portion of radiation. 1. A system for defect detection and photoluminescence measurement of a sample comprising:an oblique-incidence radiation source configured to direct a beam of light of an oblique-illumination wavelength onto a portion of the sample along a direction oblique to the surface of the sample;a normal-incidence radiation source configured to direct a beam of light of a normal-illumination wavelength different from the oblique-illumination wavelength onto a portion of the sample along a direction substantially normal to the surface of the sample, wherein the beam of light of the normal-illumination wavelength is suitable for causing one or more photoluminescing defects of the sample to emit photoluminescent light;a sample stage assembly configured to secure the sample and selectively actuate the sample in order to perform a scanning process with at least the oblique-incidence radiation source and the normal-incidence radiation source;a set of collection optics configured to ...

INSPECTION PORT FOR INSULATED TANK CAR

An inspection port is provided for allowing inspection of an insulated tanker. The insulated tanker may include a tank shell configured for containing a fluid, and a jacket disposed at least partially around, and spaced from, the tank shell to define a volume between the tank shell and the jacket. An insulation layer may be disposed between the tank shell and the jacket. An inspection port may include an opening formed in the jacket. The inspection port may provide access to at least a portion of an exterior of the tank shell. A cover plate may be disposed over the inspection port, and may be mechanically fastened relative to the jacket. 1. An insulated tanker comprising:a tank shell configured for containing a fluid;a jacket disposed at least partially around the tank shell and spaced therefrom, defining a volume between the tank shell and the jacket;an insulation layer disposed between the tank shell and the jacket;an inspection port including an opening formed in the jacket, the inspection port providing access to at least a portion of an exterior of the tank shell; anda cover plate disposed over the inspection port, and mechanically fastened relative to the jacket.2. The insulated tanker according to claim 1 , wherein the jacket and the cover plate comprise sheet metal.3. The insulated tanker according to claim 1 , further comprising an inspection port frame including a reinforcing feature formed around at least a portion of a periphery of the inspection port.4. The insulated tanker according to claim 3 , wherein the inspection port frame includes a sheet metal structure defining an opening at least generally corresponding to the inspection port.5. The insulated tanker according to claim 4 , wherein the inspection port frame is coupled with the jacket.6. The insulated tanker according to claim 5 , wherein the inspection port frame is welded to the jacket.7. The insulated tanker according to claim 3 , wherein the cover plate is mechanically fastened to the jacket ...

INSPECTION DEVICE FOR PAINTED SURFACE OF VEHICLE

An inspection device for painted surface with a base layer and a clear layer painted on the base layer of a vehicle includes a frame mounted to an arm of a robot, a line scan camera, a first light source lighting up at a predetermined angle is provided thereto, which is mounted to the frame, and the line scan camera which acquires first vision data through the regular reflection light from the painted surface using the light of the first light source, and a controller which receives the first vision data from the line scan camera and detects surface defect of the painted surface according to the first vision data. 1. An inspection device for painted surface with a base layer and a clear layer painted on the base layer of a vehicle comprising:a frame mounted to an arm of a robot; wherein a first light source lighting up at a predetermined angle is provided to the line scan camera, and', 'wherein the line scan camera is mounted to the frame, and acquires first vision data through a regular reflection light from the painted surface using a light of the first light source; and, 'a line scan camera,'}a controller which receives the first vision data from the line scan camera and detects surface defect of the painted surface according to the first vision data.2. The inspection device of claim 1 ,wherein the inspection device further comprises a second light source which lights up perpendicular to the painted surface for the line scan camera to acquire second vision data through diffused reflection light from the painted surface, andwherein the controller receives the second vision data from the line scan camera and detects interlaminated defect between the base layer and the clear layer of the painted surface according to the second vision data.3. The inspection device of claim 2 , wherein the first and the second light sources are on or off alternately with a predetermined time interval by control of the controller.4. The inspection device of claim 2 , wherein the ...

METHOD FOR DETECTING A COMPROMISED COMPONENT

A method for providing visually detectable changes to a surface that has been subjected to a temperature in excess of a predetermined temperature. A coating is applied to the surface, wherein the coating will melt when the predetermined temperature has been reached. Centrifugal forces acting on the melted coating will cause it to be displaced such that the disturbed surface is visibly detectable upon inspection after solidifying. 1. A method for determining if a component having a coating thereon has been compromised , the method comprising the steps of:a) visually inspecting the coating; andb) determining that the component has been compromised if the coating is displaced.2. The method of claim 1 , wherein the coating comprises a metallic coating.3. The method of claim 2 , wherein the metallic coating comprises NiCoCrAlY.4. The method of claim 2 , wherein the metallic coating comprises more than one layer.5. The method of claim 1 , wherein the component comprises an turbine blade in a turbine engine.6. The method of claim 5 , wherein the component comprises a high pressure turbine blade in a turbine engine.7. The method of claim 1 , further comprising the step of:c) determining that the component should be serviced if it is determined at step (b) that the component has been compromised.8. The method of claim 1 , wherein the displaced coating is rumpled.9. The method of claim 1 , wherein the displaced coating exhibits evidence of having flowed.10. The method of claim 2 , wherein the metallic coating is at least partially covered by a thermal barrier coating.11. The method of claim 1 , wherein the component includes at least one cooling hole formed therein and the displaced coating has flowed into at least one of the at least one cooling holes.12. A method for determining if a component has been operated above a predetermined temperature claim 1 , the method comprising the steps of:a) applying a coating to the component;b) visually inspecting the coating; andc) ...

METHOD AND TOOL TO DETERMINE A BRAKE DISK DETERIORATION STATE

Method to determine a deterioration state of a brake disk of a braking system of a vehicle. The method comprises the steps of: emitting, by means of a light emitting head, a beam of light towards a face of the brake disk so as to trace on the face at least one light line, and determine a deterioration state of the brake disk on the basis of the traced light line. 124323322. A method to determine a deterioration state of a brake disk () of a braking system of a vehicle , the method comprises the steps of: emitting , by means of a light emitting head () , a collimated light beam (E) towards a face () of the brake disk () so as to trace at least one light line (L) on said face (); said collimated light beam (E) being emitted in order to have a direction essentially inclined/oblique with respect to the laying plane of said face () of the brake disk (); determining the deterioration state or non-deterioration state of said brake disk () according to said traced light line (L);the method being characterized in that it comprises the steps of:{'b': '2', 'determining a deterioration state or non-deterioration state of the brake disk () according to the presence or absence, respectively, of one or more irregular/distorted geometric segments (T) in said traced light line (L).'}2. (canceled)32. A method according to claim 1 , comprising the step of determining one or more said irregular/distorted geometric segments (T) on said traced light line (L) claim 1 , according to a comparison between said traced light line (L) and a reference line (R) associated with a non-deterioration state of said brake disk ().43256. A method according to claim 1 , comprising the steps of: acquiring/capturing the image of said traced light line (L) on the face () of the brake disk () claim 1 , by means of an electronic image acquisition device (); processing said image of said traced light line (L) acquired/captured by means of an electronic control device () so as to locally determine one or more ...

WAFER IMAGE INSPECTION APPARATUS

ProA wafer image inspection apparatus for inspecting defects of a semiconductor wafer comprises: a lighting portion for generating light; a lens portion for obtaining a wafer image, which is reflected after the light has been reflected onto a wafer to be inspected, and delivering the wafer image by lighting same in one direction; a dividing optical element for dividing the wafer image delivered from the lens portion; an image detection portion comprising a plurality of image-capturing elements, which are installed so that images which have passed through the lens portion and the dividing optical element are respectively formed on different focus positions; and an image processing portion for combining the images on different focus positions captured by the plurality of image pick-up elements to form a TSOM image, and comparing the TSOM image with a TSOM image of a normal semiconductor apparatus part to determine whether an object is defective. 1. A wafer image inspection apparatus for obtaining and inspecting an image of a semiconductor wafer so as to inspect a defect in the wafer , the wafer image inspection apparatus comprising:a lighting unit which generates lighting,a lens unit which obtains an image of a target inspection wafer reflected after the lighting is radiated to the wafer and projects and transfers the image in one direction,an image detection unit which comprises a split optical element for splitting the image of the wafer transferred by the lens unit and a plurality of image pick-up elements installed so that an image passing through the lens unit and the split optical element is formed on different focal positions, anda through focus scanning optical microscopy (TSOM) image processing unit which forms a TSOM image by combining the images of the different focal positions captured by the plurality of image pick-up elements and determines whether the target inspection wafer has a defect by comparing the TSOM image with a TSOM image of a normal pattern ...

APPARATUS, METHOD AND COMPUTER PROGRAM PRODUCT FOR INSPECTION OF AT LEAST SIDE FACES OF SEMICONDUCTOR DEVICES

An apparatus, a method and a computer program product for inspecting at least side faces of a semiconductor device are disclosed. A frame construction is provided, which holds a camera, defining an imaging beam path. The semiconductor device is inserted into a mirror block. The mirror block has a first mirror, a second mirror, a third mirror and a fourth mirror, wherein the mirrors are arranged such that they surround a free space in the form of a rectangle. The opposing first mirror and third mirror are fixedly mounted and the opposing second mirror and fourth mirror movably mounted. A tilted mirror directs an image of the side faces of the semiconductor substrate generated by the mirror block to the camera. 1. An apparatus for inspecting at least side faces of a semiconductor device comprising:a camera, defining an imaging beam path;a mirror block, having a first mirror, a second mirror, a third mirror, and a fourth mirror, the mirrors being arranged such that they surround a free space in the form of a rectangle, and the opposing first mirror and third mirror are fixedly mounted and the opposing second mirror and fourth mirror are movably mounted; anda tilted mirror, for directing to an image of at least the side faces semiconductor device from the mirror block to the camera.2. The apparatus as claimed in claim 1 , wherein a first motor is assigned to the camera for an adjustment of a focus position of the camera.3. The apparatus as claimed in claim 2 , wherein the first motor is part of the camera with a zoom-lens set-up with auto-focus.4. The apparatus as claimed in claim 2 , wherein for the adjustment of the focus position of the camera the first motor is configured to carry out a linear movement of the camera along the imaging beam path.5. The apparatus as claimed in claim 4 , wherein a leadscrew is driven by the first motor and the driven leadscrew is coupled to a slide of the camera.6. The apparatus as claimed in claim 1 , wherein a second motor is assigned ...