13-01-2022 дата публикации
Номер: US20220011254A1
According to one embodiment, a sensor includes a sensor part including a first film. The first film includes a first element including at least one selected from the group consisting of Pd, Pt, and Au. The first film includes a first region, and a second region including a plurality of protrusions. A protruding direction of the protrusions is along a first direction from the first region toward the second region. 1. A sensor , comprising:a sensor part including a first film including a first element,the first element including at least one selected from the group consisting of Pd, Pt, and Au, a first region, and', 'a second region including a plurality of protrusions,, 'the first film including'}a protruding direction of the protrusions being along a first direction from the first region toward the second region.2. A sensor , comprising:a sensor part including a first film including a first element,the first element including at least one selected from the group consisting of Pd, Pt, and Au,the first film including a first surface, a second surface, a first region, and a second region,the first region being located between the first surface and the second surface,the second region being located between the first region and the second surface,the second surface being rougher than the first surface.3. The sensor according to claim 1 , whereinthe first region is amorphous, and the second region includes a crystal grain, ora crystallinity of the second region is greater than a crystallinity of the first region.4. The sensor according to claim 3 , whereinan average grain size of the crystal grains of the second region is not less than 0.1 nm and not more than 100 nm.5. The sensor according to claim 1 , whereinthe first region includes a second element including at least one selected from the group consisting of Si, P, and B, andthe second region does not include the second element, or a concentration of the second element in the second region is less than a concentration ...
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