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Космические корабли и станции, автоматические КА и методы их проектирования, бортовые комплексы управления, системы и средства жизнеобеспечения, особенности технологии производства ракетно-космических систем

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Применить Всего найдено 1806. Отображено 100.
10-02-2010 дата публикации

СИСТЕМА ДИСТАНЦИОННОЙ ИДЕНТИФИКАЦИИ И КОНТРОЛЯ ТЕХНОЛОГИЧЕСКОГО ПРОЦЕССА ТОПЛИВНОЙ ЗАПРАВКИ ЖЕЛЕЗНОДОРОЖНЫХ ТРАНСПОРТНЫХ СРЕДСТВ, УСТРОЙСТВО АВТОМАТИЗИРОВАННОГО СБОРА, ОБРАБОТКИ, УЧЕТА И КОНТРОЛЯ ИДЕНТИФИКАЦИОННОЙ ИНФОРМАЦИИ, ГОРЛОВИНА ТОПЛИВНОГО БАКА И КРАН-ПИСТОЛЕТ ТОПЛИВОРАЗДАТОЧНОЙ КОЛОНКИ

Номер: RU0000091436U1
Автор: Малышева Наталья Ивановна, Тимченко Александр Юрьевич, Троицкий Анатолий Александрович
Принадлежит: Общество с ограниченной ответственностью "Центр транспортных технологий" (ООО "ЦТТ")

1. Система дистанционной идентификации и контроля технологического процесса топливной заправки железнодорожных транспортных средств, включающая в качестве устройства идентификации объектов установленный, по меньшей мере, на одном тепловозе кодовый бортовой датчик и стационарную систему обработки информации с возможностью ее последующей визуализации, отличающаяся тем, что дополнительно снабжена системой идентификации объекта заправки на экипировочной позиции, содержащей размещенную на горловине топливного бака идентификационную бесконтактную метку, взаимодействующую с устройством считывания идентификационной информации на кран-пистолете топливораздаточной колонки при установке последнего на горловине топливного бака, кроме того, кодовый бортовой датчик тепловоза через систему автоматической идентификации подвижного состава (САИ ПС) связан с системой автоматизированного учета дизельного топлива (САУ ДТ), при этом САИ ПС, САУ ДТ и система идентификации объекта заправки на экипировочной позиции соединены с устройством автоматизированного сбора, обработки, учета и контроля идентификационной информации. 2. Система по п.1, отличающаяся тем, что связь кодового бортового датчика с антенной САИ ПС и связь идентификационной бесконтактной метки горловины топливного бака с устройством считывания идентификационной информации осуществляется с помощью электромагнитного сигнала в диапазоне волн сверхвысокой частоты. 3. Устройство автоматизированного сбора, обработки, учета и контроля идентификационной информации системы дистанционной идентификации и контроля технологического процесса топливной заправки железнодорожных транспортных средств, содержащее размещенные в корпусе блоки функциональных подсистем, связанные сетью передачи данных с системами и средствами регистрации физических параметров технологического процесса, а также с аппаратными и программными интерфейсами, отличающаяся тем, что устройство связано с системой автоматической идентификации подвижного состава (САИ ПС), с ...

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Номер записи: 1
27-01-2011 дата публикации

УСТРОЙСТВО ИЗГОТОВЛЕНИЯ ИГЛ ДЛЯ СКАНИРУЮЩЕГО ТУННЕЛЬНОГО МИКРОСКОПА ИЗ ВОЛЬФРАМОВОЙ ПРОВОЛОКИ

Номер: RU0000101840U1
Автор: Соколов Игорь Викторович
Принадлежит: Соколов Игорь Викторович

1. Устройство изготовления игл для сканирующего туннельного микроскопа из вольфрамовой проволоки, содержащее устройство подачи вольфрамовой проволоки, блок электрохимического травления с щелочью и источник переменного тока, отличающееся тем, что оно содержит электромагнитный клапан, к которому крепится свободный конец проволоки, и соединенный с ним блок управления клапаном, при этом один конец источника питания подключен к нижней части проволоки, а второй конец источника питания подключается к электроду травления и параллельно ему - к верхней части проволоки, с включенным в электрическую цепь блоком управления клапаном, при этом вольфрамовая проволока в блоке электрохимического травления частично закрыта от воздействия щелочи. 2. Устройство по п.1, отличающееся тем, что в блоке электрохимического травления присутствует сквозное отверстие для вольфрамовой проволоки. 3. Устройство по п.1, отличающееся тем, что вольфрамовая проволока в блоке электрохимического травления частично закрыта от воздействия щелочи инертным к щелочи материалом. 4. Устройство по п.1, отличающееся тем, что к нижнему концу проволоки крепится груз или пружина на растяжение. 5. Устройство по п.1, отличающееся тем, что содержит блок отключения питания переменного напряжения от нижнего конца проволоки. 6. Устройство по п.1, отличающееся тем, что оно дополнительно содержит катушку для вольфрамовой проволоки, горелку для подогрева вольфрамовой проволоки и механизм протяжки вольфрамовой проволоки. РОССИЙСКАЯ ФЕДЕРАЦИЯ (19) RU (11) 101 840 (13) U1 (51) МПК G01Q 10/00 (2010.01) ФЕДЕРАЛЬНАЯ СЛУЖБА ПО ИНТЕЛЛЕКТУАЛЬНОЙ СОБСТВЕННОСТИ, ПАТЕНТАМ И ТОВАРНЫМ ЗНАКАМ (12) ОПИСАНИЕ ПОЛЕЗНОЙ МОДЕЛИ К ПАТЕНТУ (21)(22) Заявка: 2010102129/28, 26.01.2010 (24) Дата начала отсчета срока действия патента: 26.01.2010 (73) Патентообладатель(и): Соколов Игорь Викторович (RU) R U Приоритет(ы): (22) Дата подачи заявки: 26.01.2010 (72) Автор(ы): Соколов Игорь Викторович (RU) (45) Опубликовано: 27.01.2011 1 0 1 8 4 0 R U Формула ...

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Номер записи: 2
17-05-2012 дата публикации

System and method for reducing the amplitude of thermally induced vibrations in microscale and nanoscale systems

Номер: US20120118036A1
Автор: Jason Vaughn Clark
Принадлежит: PURDUE RESEARCH FOUNDATION

The present invention generally relates to a system and method for improving the precision and applicability of microscale and nanoscale electromechanical systems. The system includes a device (such as an electrostatic sensor) for measuring parameters of a force associated with noise-induced background readings of a microscale or nanoscale electromechanical system, and a device (such as an electrostatic actuator) for applying a countering force to the electromechanical system.

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Номер записи: 3
09-08-2012 дата публикации

Fast-scanning spm scanner and method of operating same

Номер: US20120204295A1
Автор: Craig Cusworth, Craig Prater, Nghi Phan
Принадлежит: BRUKER NANO INC

A high-bandwidth SPM tip scanner includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.

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Номер записи: 4
29-11-2012 дата публикации

Electronic control and amplification device for a local piezoelectric force measurement probe under a particle beam

Номер: US20120304341A1
Автор: Jerome Polesel
Принадлежит: Commissariat a lEnergie Atomique et aux Energies Alternatives CEA

An electronic control device for a local probe with a piezoelectric resonator and preamplification and processing of its signals, the probe being configured for local measurement of physical properties of a sample in an environment with a particle beam directed towards the probe, in which an excitation voltage generated by an excitation mechanism is applied to the piezoelectric resonator through a first galvanic isolation transformer, and a current for measurement of mechanical oscillations of the piezoelectric resonator is applied through a second galvanic isolation transformer to a preamplification device on the output side.

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Номер записи: 5
06-12-2012 дата публикации

Multi-axis actuating apparatus

Номер: US20120306317A1
Автор: En-Te Hwu, Ing-Shouh Hwang
Принадлежит: Academia Sinica

A multi-axis actuating apparatus for a nano-positioning apparatus includes a movable element attached to a sample platform, a plurality of driving elements, and a plurality of actuators. The driving elements frictionally engage the movable element and are configured to selectively move the movable element along a first direction. The plurality of actuators move the plurality of driving elements when driving signals are applied to the plurality of actuators. Different driving signals may be applied to the plurality of actuators to cause different movement of the driving elements such that the movable element has different displacements in different directions along the plurality of driving elements. The movable element is titled due to the different displacements.

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Номер записи: 6
09-05-2013 дата публикации

Quantitative measurements using multiple frequency atomic force microscopy

Номер: US20130117895A1
Автор: Bemis Jason, Proksch Roger B.
Принадлежит: Asylum Research Corporation

The imaging mode presented here combines the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the second resonant drive frequency operates in FM mode and is adjusted to keep the phase at 90 degrees, on resonance. With this approach, frequency feedback on the second resonant mode and topographic feedback on the first are decoupled, allowing much more stable, robust operation. 1. A method of operating an atomic force microscope , comprising: exciting the chip of the cantilever at the first two resonant frequencies of the cantilever which have been summed together by a circuit element;', 'providing each resonant frequency as a reference signal to a lock-in amplifier;, 'using a feedback loop to control the distance between the base of the cantilever and the sample surface to maintain the probe tip of the cantilever in a pre-established relationship with respect to the surface of the sample in the Z direction while scanning the sample by creating relative movement between the probe tip of the cantilever and the sample;'}controlling the distance between base of the cantilever and the sample so that the amplitude of oscillation at the first frequency of the probe tip is maintained essentially constant at an amplitude setpoint;detecting changes in phase and/or amplitude in the oscillation at the first frequency while the amplitude of oscillation at the first frequency is maintained essentially constant at the amplitude setpoint; anddetecting changes in phase and/or amplitude in the oscillation at the second frequency while the amplitude of oscillation at the first frequency is maintained essentially constant at the amplitude setpoint; andmeasuring the amplitude and/or phase of the cantilever at the different excitation frequencies.2. The method according to claim 1 , ...

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Номер записи: 7
06-06-2013 дата публикации

NEAR FIELD OPTICAL MICROSCOPE WITH OPTICAL IMAGING SYSTEM

Номер: US20130145505A1
Автор: Huth Florian, Ocelic Nenad
Принадлежит: Neaspec GmbH

The invention relates to a device for conducting near-field optical measurements of a specimen comprising an optical imaging system, the use of such device and to a method for adjusting the probe or the illumination of the probe in such a device. 13223123. A device for the near-field optical measurement of a specimen comprising: a probe comprising a cantilever () and a tip () , and at least one optical imaging system , characterized in that the optical imaging system(s) is (are) arranged to image the tip () , which imaging is from a direction within a half space defined by a plane parallel to the cantilever () and transecting the tip apex () of the tip () , and wherein said half space comprises the cantilever ().210210. The device according to claim 1 , said device further comprising primary mirror () claim 1 , which is a concave mirror claim 1 , wherein at least one of the optical imaging system(s) is (are) arranged to image the tip () via the primary mirror ().32312. The device according to claim 1 , wherein the optical imaging system(s) is (are) arranged to image the tip () at an angle α between 10° to 70° and with a numerical aperture of at least 0.1 claim 1 , wherein the angle α is measured relative to the plane parallel to the cantilever () and transecting the apex () of the tip ().43. The device according to claim 1 , said device further comprising an optical monitoring system arranged to monitor the specimen and/or the alignment of the deflection detection system of the cantilever ().52. The device according to claim 1 , said device comprising at least two optical imaging systems arranged to image the tip ().62. The device according to claim 5 , wherein the two optical imaging systems to image the tip () are arranged to image the tip from different directions such that the angle γ between the imaging directions is at least about 30°.7161610161610. The device according to claim 5 , said device further comprising at least two secondary mirrors () claim 5 , ...

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Номер записи: 8
11-07-2013 дата публикации

Mems actuator device with integrated temperature sensors

Номер: US20130175952A1
Автор: Niladri Sarkar
Принадлежит: ICSPI Corp

An electro-thermal actuator which includes a unit cell comprising at least one thermal bimorph, the thermal bimorph comprising at least two materials of different thermal expansion coefficient bonded together, the unit cell having a first end and a second end; and at least one temperature sensor located on the at least one thermal bimorph for measuring a temperature of the at least one thermal bimorph and determining a position of the unit cell. The basic structure can be expanded to 1-D, 2-D and 3-D positioners. The bimorphs can also be coupled to an active yoke which is in turn anchored to a plate, in order to reduce the parasitic heat effects on displacement of the tip of the bimorph.

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Номер записи: 9
08-08-2013 дата публикации

Scanning probe microscope

Номер: US20130205454A1
Автор: Manabu Edamura, Masahiro Watanabe, Satoshi Sekino, Shuichi Baba, Takafumi Morimoto, Toru Kurenuma, Toshihiko Nakata, Yukio Kembo
Принадлежит: HITACHI LTD

In the case of measuring a pattern having a steep side wall, a probe adheres to the side wall by the van der Waals forces acting between the probe and the side wall when approaching the pattern side wall, and an error occurs in a measured profile of the side wall portion. When a pattern having a groove width almost equal to a probe diameter is measured, the probe adheres to both side walls, the probe cannot reach the groove bottom, and the groove depth cannot be measured. When the probe adheres to a pattern side wall in measurements of a microscopic high-aspect ratio pattern using an elongated probe, the probe is caused to reach the side wall bottom by detecting the adhesion of the probe to the pattern side wall, and temporarily increasing a contact force between the probe and the sample. Also, by obtaining the data of the amount of torsion of a cantilever with the shape data of the pattern, a profile error of the side wall portion by the adhesion is corrected by the obtained data of the amount of torsion.

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Номер записи: 10
15-08-2013 дата публикации

Scanning Probe Microscope and Surface Shape Measuring Method Using Same

Номер: US20130212749A1
Автор: Nakata Toshihiko, Tachizaki Takehiro, Watanabe Masahiro
Принадлежит: HITACHI LTD.

It has been difficult to highly accurately measure the profiles of samples using scanning probe microscopes at the time when scanning is performed due to scanning mechanism fluctuations in the non drive direction, i.e., vertical direction. The present invention is provided with, on the rear side of a sample stage, a high-accuracy displacement gauge for measuring fluctuation in the non drive direction, i.e., vertical direction, at the time when the sample stage is being scanned in the horizontal directions, and as a result, highly accurate planarity evaluation with accuracy of sample nm-order or less is made possible by correcting sample surface shape measurement results obtained using a probe. 1. A scanning probe microscope which measures a surface shape of a sample by bringing a probe into proximal to or contact with the surface of the sample , comprising:a probe;a probe holder that holds the probe;probe drive unit that drives the probe holder at least in a vertical direction;first measurement unit which measures a position of the probe drive unit in the vertical direction;sample stage unit movable in a plane, on which a sample is mounted;second measurement unit which measures a position of the sample stage unit in a direction orthogonal to the plane;vertical rough stage unit configured to change a vertical relative position between the probe held by the probe holder and the sample stage unit;horizontal rough stage unit configured to change a horizontal relative position between the probe held by the probe holder and the sample stage unit;detection unit which detects a contact state between the sample and the probe held by the probe holder; andimage generation unit that generates an image of the sample surface using information obtained through measurement performed by the first measurement unit, information obtained through measurement performed by the second measurement unit, and information obtained through detection performed by the detection unit.2. The ...

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Номер записи: 11
26-09-2013 дата публикации

Scanning Method for Scanning a Sample with a Probe

Номер: US20130254948A1
Автор: Hartong Arthur Reinout, Kooijman Cornelis Sander
Принадлежит:

The method relates to a method of scanning a sample. Scanning a sample is typically done by scanning the sample with a probe along a multitude of parallel lines. In prior art scan methods a sample is scanned multiple times with a nominally identical scan pattern. The invention is based on the insight that the coherence between adjacent points in a direction along the scan direction is much better than the coherence of adjacent points perpendicular to the scan direction. By combining two images that are scanned perpendicular to each other, it should thus be possible to form an image making use of the improved coherence (due to shorter temporal distance) in both directions. The method thus involves scanning the sample with two scan patterns, the lines of one scan pattern preferably perpendicular to the lines of the other scan pattern. Hereby it is possible to use the temporal coherence of scan points on a line of one scan pattern to align the lines of the other scan pattern, and vice versa. 1. A method of scanning a sample with a probe , the method comprising:scanning the sample using at least two scan patterns;while scanning the sample with the first scan pattern sequentially acquiring data resulting from said scanning and mapping the data obtained in a first memory area associated with the first scan pattern, the memory area comprising a multitude of memory locations, each memory location associated with a nominal scan position (x,y),while scanning the sample with the second scan pattern acquiring data resulting from said scanning and mapping the data obtained in a second memory area associated with the second scan pattern, the memory area comprising a multitude of memory locations, each memory location associated with a nominal scan position (u,v),forming an improved image by combining the data from the first and the second memory area and mapping the combined data in a memory area associated with the improved image, each point of the memory area associated with ...

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Номер записи: 12
17-10-2013 дата публикации

Atomic force microscope probe, method for preparing same, and uses thereof

Номер: US20130276176A1
Автор: Jerome Polesel-Maris, Pascal Viel, Thomas Berthelot
Принадлежит: Commissariat a lEnergie Atomique et aux Energies Alternatives CEA

An atomic force microscope probe comprising a piezo-electric resonator provided with two electrodes and coated with an insulating layer and a tip attached on the coated resonator and functionalized with at least one group or molecule of interest is disclosed. The disclosed technology also relates to preparation method and to different uses thereof.

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Номер записи: 13
24-10-2013 дата публикации

Atomic Force Microscope Manipulation of Living Cells

Номер: US20130283486A1
Автор: Bruce Marc Amor, Butte Manish J.
Принадлежит: THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY

Techniques for atomic force microscope manipulation of living cells include functionalizing a nanoscale tip of a microscale cantilever with a first ligand for a first receptor associated with a surface of a first type of cell. The method further comprises controlling the cantilever to cause the first ligand on the nanoscale tip to contact the first receptor on a surface of a living cell of the first type in a particular temporal pattern to induce a target response by the living cell. Other techniques for controlling an atomic force microscope comprising a nanoscale tip include controlling the cantilever to cause the nanoscale tip to contact a living cardiomyocyte at a predetermined pressure. The cantilever is also controlled to turn off vertical deflection feedback after contacting the cardiomyocyte and collecting deflection data that indicates a time series of nanoscale vertical deflections of the microscale cantilever caused by the living cardiomyocyte. 1. An apparatus comprising:an atomic force microscope comprising a microscale cantilever on which is disposed a nanoscale tip;a stage configured to be moveably positioned relative to the nanoscale tip of the microscale cantilever in microscale steps; anda confocal optical microscope, wherein the stage is disposed so that a sample on the stage is disposed in a focal plane of the confocal optical microscope.2. An apparatus as recited in claim 1 , the apparatus further comprising an acoustical isolation component between the stage and an acoustic source component of the confocal optical microscope.3. An apparatus as recited in claim 1 , the stage comprising a microscale well for corralling a living cell.4. An apparatus as recited in claim 3 , the nanoscale tip functionalized with a first ligand for a first receptor associated with a surface of a first type of cell.5. An apparatus as recited in claim 2 , the acoustical isolation component further comprising a massive slab.6. An apparatus as recited in claim 2 , the ...

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Номер записи: 14
12-12-2013 дата публикации

ATOMIC FORCE MICROSCOPY CONTROLLER AND METHOD

Номер: US20130333076A1
Автор: MOON Christopher Ryan
Принадлежит: AGILENT TECHNOLOGIES ,INC.

A method for determining a loop response for an apparatus for an atomic force microscope is disclosed. The method comprises: determining a loop response for an on-surface movement of a cantilever over a frequency range; determining a loop response for an off-surface movement of the cantilever over the frequency range; and adjusting an output of the controller at a frequency based on the loop response for the off-surface movement. An atomic force microscopy system is disclosed. 1. A method for determining a loop response for an apparatus for an atomic force microscope , the method comprising:determining a loop response for an on-surface movement of a cantilever over a frequency range;determining a loop response for an off-surface movement of the cantilever over the frequency range; andadjusting an output of the controller at a frequency based on the loop response for the off-surface movement.2. A method as claimed in claim 1 , wherein the determining the loop response for off-surface movement of the cantilever comprises determining a resonance condition for the cantilever.3. A method as claimed in claim 2 , further comprising claim 2 , after the determining the resonance condition claim 2 , reducing a gain of the controller at a frequency of the resonance condition.4. A method as claimed in claim 2 , wherein the determining the loop response for the off-surface movement of the cantilever comprises providing a notch filter having a center frequency at the resonance condition.5. A method as claimed in claim 2 , further comprising claim 2 , after the adjusting claim 2 , determining a second resonance condition for the cantilever.6. A method as claimed in claim 5 , further comprising claim 5 , after determining the second resonance condition claim 5 , providing a second notch filter having a center frequency at the second resonance condition.7. A computer readable medium having a computer readable program code embodied therein claim 5 , the computer readable program code ...

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Номер записи: 15
02-01-2014 дата публикации

APPARATUS AND METHOD FOR ANALYZING AND MODIFYING A SPECIMEN SURFACE

Номер: US20140007306A1
Автор: Baralia Gabriel, Baur Christof, Edinger Klaus, Hofmann Thorsten
Принадлежит:

The invention refers to a probe assembly for a scanning probe microscope which comprises at least one first probe-adapted for analyzing a specimen, at least one second probe adapted for modifying the specimen and at least one motion element associated with the probe assembly and adapted for scanning one of the probes being in a working position across a surface of the specimen so that the at least one first probe interacts with the specimen whereas the at least one second probe is in a neutral position in which it does not interact with the specimen and to bring the at least one second probe into a position so that the at least one second probe can modify a region of the specimen analyzed with the at least one first probe. 114.-. (canceled)15. A probe assembly , comprising:a first probe, the first probe having a neutral position in which the first probe does not interact the specimen, and the first probe having a working position in which the first probe is configured to analyze the specimen;a second probe, the second probe having a neutral position in which the second probe does not interact with the specimen, and the second probe having a working position in which the second probe is configured to modify the specimen; anda motion element configured to scan the first probe across a surface of the specimen when the first probe is in its working position and the second probe is in its neutral position, the motion element also being configured to bring the second probe into its working position so that a region of the specimen analyzed with the first probe is modifiable with the second probe,wherein the probe assembly is a scanning probe microscope probe assembly.16. The probe assembly of claim 15 , wherein the motion element comprises a piezo actuator.17. The probe assembly of claim 15 , wherein the motion element comprises a tubular piezo actuator.18. The probe assembly of claim 15 , wherein the motion element further comprises first and second control members claim ...

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Номер записи: 16
02-01-2014 дата публикации

METHOD OF PREPARING AND IMAGING A LAMELLA IN A PARTICLE-OPTICAL APPARATUS

Номер: US20140007307A1
Автор: Foord David, Janssen Bart Jozef, JR. Brian Roberts, Lazic Ivan, Miller Thomas G., Routh, Tiemeijer Peter Christiaan
Принадлежит:

The invention relates to a method of preparing and imaging a sample using a particle-optical apparatus, equipped with an electron column and an ion beam column, a camera system, a manipulator. 1. A method of preparing and imaging a sample using a particle-optical apparatus , the particle-optical apparatus comprising:an electron column mounted on an evacuable sample chamber, the electron column equipped to produce a beam of electrons, the beam of electrons for irradiating the sample,a camera system for forming an electron image of the diffraction pattern caused by electrons transmitted through the sample, anda manipulator for positioning the sample in the sample chamber with respect to the beam of electrons, preparing the sample,', 'positioning the sample in the sample chamber with respect to the beam of electrons,', 'forming an electron image on the camera system using the electron column, and', 'deriving a first ptychographic image of the sample from said first electron image, the ptychographic image the result of an iterative converging process in which estimates of the sample are formed,, 'the method comprising the steps of the particle-optical apparatus comprises a focused ion beam column mounted on the sample chamber for producing a focused ion beam, the focused ion beam for machining the sample,', 'preparing the sample involves positioning the sample with respect to the ion beam and thinning the sample using the focused ion beam,', 'after forming the first image, a layer of the sample is removed using the ion beam, after which a second electron image is formed using the electron column, and', 'a second ptychographic image of the sample is derived using the second electron image, and', 'the sample is kept under vacuum at least from the moment that the sample is prepared by thinning the sample with the focused ion beam until the moment that the second electron image is taken., 'wherein2. The method of in which the first ptychographic image or one of the guesses ...

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Номер записи: 17
23-01-2014 дата публикации

ADAPTIVE MODE SCANNING PROBE MICROSCOPE

Номер: US20140026263A1
Автор: Humphris Andrew
Принадлежит: Infinitesima Limited

A scanning probe microscope comprising a probe that is mechanically responsive to a driving force. A signal generator provides a drive signal to an actuator that generates the driving force, the drive signal being such as to cause the actuator to move the probe repeatedly towards and away from a sample. A detection system is arranged to output a height signal indicative of a path difference between light reflected from the probe and a height reference beam. Image processing apparatus is arranged to use the height signal to form an image of the sample. Signal processing apparatus is arranged to monitor the probe as the probe approaches a sample and to detect a surface position at which the probe interacts with the sample. In response to detection of the surface position, the signal processing apparatus prompts the signal generator to modify the drive signal. 1. A scanning probe microscope comprising:a probe that is mechanically responsive to a driving force,a signal generator for providing a drive signal to an actuator that generates the driving force, the drive signal being such as to cause the actuator to move the probe repeatedly towards and away from a sample;a detection system arranged to output a height signal indicative of a path difference between light reflected from the probe and a height reference beam;image processing apparatus that is arranged to use the height signal to form an image of the sample; andsignal processing apparatus arranged to monitor the probe as the probe approaches a sample and to detect a surface position at which the probe interacts with the sample; wherein in response to detection of the surface position the signal processing apparatus prompts the signal generator to modify the drive signal.2. A scanning probe microscope according to in which the signal processing apparatus is arranged to monitor the height signal as the probe approaches a sample and to detect the surface position at which the probe interacts with the sample.3. A ...

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Номер записи: 18
27-02-2014 дата публикации

Scanning Probe Microscope

Номер: US20140059724A1
Автор: Iyoki Masato, Kuwahara Junji, Momota Hiroumi, Nosaka Naokatsu
Принадлежит: HITACHI HIGH-TECH SCIENCE CORPORATION

A scanning probe microscope including: a scanning probe microscope unit section including, a cantilever having a probe, a cantilever holder configured to fix the cantilever, a sample holder on which a sample is configured to be placed, a horizontal fine transfer mechanism configured to relatively scan a surface of the sample with the probe, a vertical fine transfer mechanism configured to control a distance between the probe and the sample surface, an optical microscope configured to observe the cantilever and the sample; a control device; an imaging device to which a viewing field, wider than that of the optical microscope and capable of observing the cantilever and the sample at the same time, can be set; and an image display device configured to display images observed by the optical microscope and the imaging device. 1. A scanning probe microscope comprising: a cantilever having a probe at a tip thereof,', 'a cantilever holder configured to fix the cantilever,', 'a sample holder on which a sample is configured to be placed,', 'a horizontal fine transfer mechanism configured to relatively scan a surface of the sample with the probe,', 'a vertical fine transfer mechanism configured to control a distance between the probe and the sample surface,', 'a horizontal coarse transfer mechanism and a vertical coarse transfer mechanism which are larger in operation range than the horizontal fine transfer mechanism and the vertical fine transfer mechanism, and', 'an optical microscope configured to observe the cantilever and the sample;, 'a scanning probe microscope unit section including,'}a control device configured to control the scanning probe microscope;an imaging device having an observation axis non-coaxial with an optical axis of the optical microscope, and to which a viewing field, which is wider than that of the optical microscope and capable of observing the cantilever and the sample at the same time, can be set; andan image display device including a first image ...

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Номер записи: 19
07-01-2016 дата публикации

Microscope Having A Multimode Local Probe, Tip-Enhanced Raman Microscope, And Method For Controlling The Distance Between The Local Probe And The Sample

Номер: US20160003866A1
Автор: Akli Karar, Bernard Drevillon, Marc Chaigneau, Razvigor Ossikovski
Принадлежит: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS, ECOLE POLYTECHNIQUE

The present invention relates to a multimode local probe microscope having a resonator ( 1 ), a first electrode ( 9 ), and a second electrode ( 8 ), an excitation source adapted to generate mechanical resonance in the resonator, a metal tip ( 4 ) fastened to the resonator, movement means for imparting relative movement between the local probe and a sample and adapted to bring the end of the tip to within a distance Z lying in the range 0 to 100 nm, and detector means for detecting at least one electrical signal representative of friction forces at the terminals of said electrodes ( 8, 9 ). According to the invention, said metal tip ( 4 ) is electrically connected to said output second electrode ( 9 ) and the microscopy apparatus includes amplifier and filter means for amplifying and filtering signals relating to the friction forces and to the tunnelling current in a single electronic circuit, and means for regulating the distance Z between the end of the tip and the surface of the sample.

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Номер записи: 20
04-01-2018 дата публикации

ISOLATED WET CELL

Номер: US20180003694A1
Автор: Ott John A., Pereira Michael A., Wang Deqiang
Принадлежит:

A wet cell apparatus is provided and includes a sensor body defining a nano-pore by which respective cell interiors are fluidly communicative and a scanning probe microscope (SPM) tip. The SPM tip is configured to draw a molecule through the nano-pore from one of the respective cell interiors whereby sensing components of the sensor body identify molecule components as the molecule passes through the nano-pore. 1. A wet cell apparatus , comprising:a sensor body defining a nano-pore by which respective cell interiors are fluidly communicative; anda scanning probe microscope (SPM) tip configured to draw a molecule through the nano-pore from one of the respective cell interiors whereby sensing components of the sensor body identify molecule components as the molecule passes through the nano-pore.2. The wet cell apparatus according to claim 1 , wherein the molecule comprises a DNA strand claim 1 , an RNA strand or a macro-molecule and the SPM tip has a chemical affinity with the molecule.3. The wet cell apparatus according to claim 1 , wherein the sensing components identify bases of the molecule.4. The wet cell apparatus according to claim 1 , wherein the nano-pore is provided as a plurality of nano-pores and the SPM tip is provided as one or more SPM tips that are configured to draw a molecule through each of the plurality of nano-pores.5. The wet cell apparatus according to claim 1 , wherein the sensor body comprises a multi-level body formed of dielectric material.6. The wet cell apparatus according to claim 1 , wherein the sensing components comprise:electrodes disposed proximate to the nano-pore;a ground element disposed about the nano-pore; andelectrical elements electrically communicative with the electrodes and the ground ring to sense characteristics of the molecule components.7. The wet cell apparatus according to claim 6 , wherein the electrodes comprise multiple electrodes at multiple levels of the sensor body and the ground element comprises a ground ring ...

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Номер записи: 21
03-01-2019 дата публикации

LINEAR STRUCTURE FOR DISPLACEMENT TRANSMISSION, AND ONE-DIMENSIONAL AND THREE-DIMENSIONAL MICRO MOVEMENT DEVICE USING SAME

Номер: US20190006144A1
Автор: Kim Dal Hyun, PARK Byong Chon, SHIN Chae Ho
Принадлежит:

Provided is a linear structure for displacement transmission having a structure that enables a desired movement to be performed smoothly while minimizing complexity of a system through a simple structure in performing a precise and fine movement, and a one-dimensional and three-dimensional micro movement device using the same. 1. A linear structure for displacement transmission in which a spring constant in a second direction and a third direction which are perpendicular to a first direction is smaller than the spring constant in the first direction such that the linear structure for displacement transmission is bent in the second direction or the third direction when force in the second direction or the third direction is applied and transmits a displacement in the first direction from an end of one side to an end of the other side when force in the first direction is applied , the linear structure for displacement transmission comprising:a displacement transmission plate formed in a surface shape and disposed on a plane in the second direction and the third direction; anda plurality of displacement transmission rods formed in a linear shape extended in the first direction and having ends of one side connected to the displacement transmission plate,wherein the plurality of displacement transmission rods are disposed radially on the displacement transmission plate to transmit the displacement in the first direction from the end of one side to the end of the other side.2. The linear structure for displacement transmission of claim 1 , wherein the linear structure for displacement transmission is formed so that a ratio of an equivalent diameter of a cross section to a length of the displacement transmission rod is within the range of 1 to 10% claim 1 , andthe displacement transmitted by the linear structure for displacement transmission is within the range of 0.001 to 1% of the length of the displacement transmission rod.3. The linear structure for displacement ...

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Номер записи: 22
14-01-2016 дата публикации

SCANNING MECHANISM AND SCANNING PROBE MICROSCOPE

Номер: US20160011230A1
Автор: SAKAI Nobuaki
Принадлежит: OLYMPUS CORPORATION

A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane. 1. A scanning mechanism comprising:a cantilever;an XY movable stage movable in X and Y directions parallel to an X-Y plane;an XY actuator to scan the XY movable stage in the X and Y directions;a Z actuator, held by the XY movable stage, to scan the cantilever in a Z direction perpendicular to the X-Y plane; anda light condensing optical unit comprising at least one lens, the at least one lens being held by the XY movable stage and the at least one lens directing light to the cantilever for detecting a displacement of the cantilever,wherein in projection to the X-Y plane, at least part of the Z actuator being not overlapped with the light condensing optical unit.2. The scanning mechanism according to claim 1 , wherein the Z actuator includes at least one piezoelectric element claim 1 , the at least one piezoelectric element and the light condensing optical unit being arranged so as not to be overlapped with each other in projection to the X-Y plane.3. The scanning mechanism according to claim 1 , wherein both a center of gravity of the Z actuator and a center of gravity of the light condensing optical unit fall within a thickness of the XY movable stage.4. The scanning mechanism according to claim 3 , wherein the Z actuator includes two claim 3 , substantially identical claim 3 , laminated piezoelectric elements to expand and contract along a Z axis claim 3 , and the two laminated piezoelectric elements extend from the XY movable stage to ...

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Номер записи: 23
14-01-2016 дата публикации

Three-Dimensional Fine Movement Device

Номер: US20160011231A1
Автор: Shigeno Masatsugu, WATANABE Kazutoshi, WATANABE Masafumi
Принадлежит: HITACHI HIGH-TECH SCIENCE CORPORATION

A three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member. 1. A three-dimensional fine movement device comprising:a moving body;a fixation member to which the moving body is fixed;a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween;a base member to which the three-dimensional fine movement unit is fixed; anda movement amount detector that is fixed to the base member and is configured to detect a movement amount of the fixation member.2. The three-dimensional fine movement device according to claim 1 ,wherein the movement amount detector is configured to detect a detection surface of the fixation member.3. The three-dimensional fine movement device according to claim 2 ,wherein a plurality the detection surfaces are arranged on the respective axes of the three-dimensional axes, and the movement amount detector is provided on the respective detection surface on the respective axes to detect the corresponding detection surfaces.4. The three-dimensional fine movement device according to claim 1 ,wherein the movement amount detector is a non-contact sensor.5. The three-dimensional fine movement device according to claim 4 ,wherein the non-contact sensor is a sensor that uses electrostatic capacitance, optical interference or optical diffraction.6. The three-dimensional fine movement device according to claim 1 ,wherein the moving body is a cantilever that comes into contact with ...

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Номер записи: 24
08-01-2015 дата публикации

PROBE ACTUATION

Номер: US20150013035A1
Автор: Humphris Andrew, ZHAO BIN
Принадлежит:

A method of driving a probe of a scanning probe microscope. The intensities of first and second radiation beams are modulated; and the beams are directed simultaneously onto the probe whereby each beam heats the probe and causes the probe to deform, typically by the photothermal effect. The optical system is arranged to direct the centres of the beams onto different locations on the probe. This enables the location of each beam to be chosen to optimise its effect. A lens receives the first and second beams and focuses them onto the probe. A beam combiner is arranged to receive and combine the beams and direct the combined beams towards the probe. 1. An actuation system for driving a probe of a scanning probe microscope , the system comprising: an optical system arranged to illuminate the probe at two or more locations on the probe; and a modulation system arranged to modulate the intensity of the illumination differently at the two or more locations.2. The actuation system of wherein the optical system is arranged to simultaneously illuminate the probe at the two or more locations on the probe.3. The actuation system of wherein the optical system comprises a lens arranged to receive first and second beams and direct them onto the probe at first and second locations.4. The actuation system of wherein the first and second beams enter the lens at different angles of incidence relative to its optical axis whereby they are directed by the lens onto the probe at different locations.5. The actuation system of wherein the optical system comprises a beam combiner arranged to receive and combine first and second beams and direct the combined beams towards the probe to illuminate the probe.6. The actuation system of wherein the beams have different characteristics such that the beam combiner reflects one of the beams and transmits the other.7. The actuation system of further comprising a tracking system for moving a beam so as to track movement of the probe claim 1 , thereby ...

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Номер записи: 25
09-01-2020 дата публикации

SCANNING PROBE SYSTEM

Номер: US20200011893A1
Автор: Humphris Andrew
Принадлежит:

A scanning probe system with a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever. A first driver is provided with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input. A second driver is provided with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input. A control system is arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles. A surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample. The control system is also arranged to modify the second drive signal in response to receipt of the surface signal from the surface detector, the modification of the second drive signal causing the second driver to control the probe tip. 1. A scanning probe system comprising: a probe comprising a cantilever extending from a base to a free end , and a probe tip carried by the free end of the cantilever; a first driver with a first driver input , the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input; a second driver with a second driver input , the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input; a control system arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles; and a surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample , wherein the control system is also arranged to modify the second drive signal ...

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Номер записи: 26
19-01-2017 дата публикации

Probe system with multiple actuation locations

Номер: US20170016932A1
Автор: Andrew Humphris
Принадлежит: INFINITESIMA LTD

A probe system comprising a probe with first and second arms and a probe tip carried by the first and second arms. An illumination system is arranged to deform the probe by illuminating the first arm at a first actuation location and the second arm at a second actuation location each with a respective illumination power. An actuation controller is arranged to independently control the illumination power at each actuation location in order to control the height and tilt angle of the probe and thus height and lateral position of the tip. The first and second arms are mirror images of each other on opposite sides of a plane of symmetry passing through the probe tip. A detection system is provided which not only measures a height of the probe tip to generate a height signal, but also measures a tilt angle of the probe to generate a tilt signal from which the lateral position of the tip can be determined.

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Номер записи: 27
19-01-2017 дата публикации

Scanning ion conductance microscopy

Номер: US20170016933A1
Автор: Andrew James Richardson
Принадлежит: Openiolabs Ltd

A method for interrogating a surface of a sample bathed in electrolyte solution using SICM, comprising: controlling the potential between first and second electrodes bathed in the electrolyte solution to induce an ion current in the electrolyte solution, a submerged portion of the first electrode being contained within a micropipette and the second electrode being external to the micropipette; recording the ion current whilst controlling the micropipette to move with respect to a stage supporting the sample; and determining, from the ion current and calibration data, the surface height profile of the sample. Said potential can be controlled according to a spread spectrum modulated signal. Said micropipette motion can be according to an AC mode pattern having a modulation frequency greater than a resonant frequency of an assembly of the micropipette, first electrode and a first piezoelectric actuator configured to control z-axis motion of said micropipette.

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Номер записи: 28
15-01-2015 дата публикации

SCANNING MECHANISM AND SCANNING PROBE MICROSCOPE

Номер: US20150020243A1
Автор: SAKAI Nobuaki
Принадлежит: OLYMPUS CORPORATION

A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane. 1. A scanning mechanism comprising:a cantilever;an XY movable portion movable in X and Y directions parallel to an X-Y plane;an XY actuator to scan the XY movable portion in the X and Y directions;a Z actuator, held by the XY movable portion, to scan the cantilever in a Z direction perpendicular to the X-Y plane; anda light condensing portion, held by the XY movable portion, to cause light for detecting a displacement of the cantilever to enter the cantilever,in projection to the X-Y plane, at least part of the Z actuator being not overlapped with the light condensing portion.2. The scanning mechanism according to claim 1 , wherein the Z actuator includes at least one piezoelectric element claim 1 , the piezoelectric element and the light condensing portion are arranged so as not to be overlapped with each other in projection to the X-Y plane.3. The scanning mechanism according to claim 1 , wherein both a center of gravity of the Z actuator and a center of gravity of the light condensing portion fall within a thickness of the XY movable portion.4. The scanning mechanism according to claim 3 , wherein the Z actuator includes two claim 3 , substantially identical laminated piezoelectric elements to expand and contract along a Z axis claim 3 , and the two laminated piezoelectric elements extend from the XY movable portion to opposite sides along the Z axis claim 3 , respectively.5. The scanning mechanism according to claim 4 , wherein a ...

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Номер записи: 29
17-01-2019 дата публикации

Motion sensor integrated nano-probe n/mems apparatus, method, and applications

Номер: US20190018039A1
Автор: Amit Lal, Kwame Amponsah
Принадлежит: CORNELL UNIVERSITY

A multi-tip nano-probe apparatus and a method for probing a sample while using the multi-tip nano-probe apparatus each employ located over a substrate: (1) an immovable probe tip with respect to the substrate; (2) a movable probe tip with respect to the substrate; and (3) a motion sensor that is coupled with the movable probe tip. The multi-tip nano-probe apparatus and related method provide for improved sample probing due to close coupling of the motion sensor with the movable probe tip, and also retractability of the movable probe tip with respect to the immovable probe tip.

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Номер записи: 30
17-01-2019 дата публикации

Method and Apparatus of Using Peak Force Tapping Mode to Measure Physical Properties of a Sample

Номер: US20190018040A1
Автор: Hu Shuiqing, Hu Yan, Ma Ji, Shi Jian, Su Chanmin
Принадлежит:

Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation. 1generating relative substantially periodic motion between a probe and a sample;detecting the motion of the probe;recovering, from the detected probe motion, a substantially instantaneous force between the probe and the sample as the probe and sample interact;determining a time zone of interest associated with the recovered substantially instantaneous force;{'b': 1', '2', '2', '4', '4', '5, 'generating a constant or gated physical excitation signal between the probe and the sample within a period of the interaction between the probe and the sample, the period including a proximate interaction zone during approach (p-p), a contact time (p-p) and a proximate interaction zone during tip retraction (p-p), wherein the excitation signal is at least one of heat applied to the sample or the probe, an externally applied interaction field, an electromagnetic wave, an optical excitation, a voltage signal, or a magnetic force; and'}synchronously measuring the gated physical response of the probe to the generating step, in the gated time zone of interest within said period of the interaction between the probe and the sample, wherein signals other than those in the gated time zone of interest are considered parasitic noise.. A method of operating a scanning probe ...

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Номер записи: 31
21-01-2021 дата публикации

Cantilever with a collocated piezoelectric actuator-sensor pair

Номер: US20210020825A1
Автор: Mohammad Mahdavi, Seyed Omid Reza Moheimani
Принадлежит: University of Texas System

Illustrative embodiments provide an apparatus comprising a substrate comprising a cantilever, a bottom electrode on the substrate, a bottom piezoelectric transducer on the bottom electrode such that the bottom electrode is between the substrate and the bottom piezoelectric transducer, a middle electrode on the bottom piezoelectric transducer such that the bottom piezoelectric transducer is between the bottom electrode and the middle electrode, a top piezoelectric transducer on the middle electrode such that the middle electrode is between the bottom piezoelectric transducer and the top piezoelectric transducer, and a top electrode on the top piezoelectric transducer, such that the top piezoelectric transducer is between the middle electrode and the top electrode. Illustrative embodiments also provide a method of making the apparatus and a method of using the apparatus for atomic force microscopy.

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Номер записи: 32
22-01-2015 дата публикации

Variable Density Scanning

Номер: US20150026846A1
Автор: Callahan Roger C., Proksch Roger B.
Принадлежит:

Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time. 1. A method of controlling a cantilever based scanning instrument that determines information about a surface , comprising:using the cantilever to characterize and measure information from the surface by driving the cantilever to obtain more data density in a first region of the surface that is scanned by the cantilever, and to obtain less data density in a second region of the surface, where said information about said first and second regions of the surface are obtained from a single scan of the cantilever, and said single scan of the cantilever obtains more data density for said first region and less data density for said second region;to obtain sampled information about the surface which has more data density in said first region and less data density in said second region from said single scan; andproducing an output showing said sampled information, where said output provides said more data density in said first region and said less data density in said second region.2. The method as in claim 1 , wherein said output is a display output that shows more detail in one area of the surface for a single display obtained over a single scan.3. The method as in claim 2 , wherein said display output that shows rectangular pixels that have one of each pixel being longer than an other side of said pixel claim 2 , in said one area of the surface.4. The method as in claim 2 , wherein said display output shows pixels which have a different size in said one area of the surface than in other areas of the surface.5. The method as in claim 1 ...

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Номер записи: 33
25-01-2018 дата публикации

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANALYSIS USING SECONDARY ION MASS SPECTROMETRY

Номер: US20180025897A1
Автор: BEVIS Chris, NEWCOME Bruce H, REED David A., SCHUELER Bruno W, Smedt Rodney
Принадлежит:

Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA). 1. A secondary ion mass spectrometry (SIMS) system , comprising:a sample stage;a primary ion source and ion optics for producing and directing a primary ion beam to the sample stage;an extraction lens directed at the sample stage, the extraction lens configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage; anda magnetic sector spectrograph coupled to the extraction lens along an optical path of the SIMS system, the magnetic sector spectrograph comprising an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).2. The SIMS system of claim 1 , wherein the sample stage contains a Faraday cup.3. The SIMS system of claim 1 , further comprising:a plurality of detectors spaced along a plane of the magnetic sector spectrograph.4. The SIMS system of claim 3 , wherein the plurality of detectors is for detecting a corresponding plurality of different species from a beam of the secondary ions emitted from the sample.5. The SIMS system of claim 1 , further comprising:a first additional ESA coupled along the optical path of the SIMS system, between the extraction lens and the ESA of the magnetic sector spectrograph; anda second additional ESA coupled along the optical path of the SIMS system, between the first additional ESA and the ESA of the ...

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Номер записи: 34
23-01-2020 дата публикации

APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE

Номер: US20200025796A1
Автор: Baur Christof, Matejka Ulrich
Принадлежит:

The present application relates to an apparatus for a scanning probe microscope, said apparatus having: (a) at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip; (b) at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; and (c) at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip. 1. An apparatus for a scanning probe microscope , having:a. at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip;b. at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; andc. at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip.2. The apparatus according to claim 1 , wherein the at least one first reflective area is arranged on a side claim 1 , opposite the first measuring tip claim 1 , of the at least one first cantilever.3. The apparatus according to claim 1 , wherein the at least one first reflective area comprises at least one first reflective portion and at least one second reflective portion claim 1 , and wherein the first reflective portion and the second reflective portion are not arranged in a plane.4. The apparatus according to claim 3 , wherein the at least one second reflective portion is arranged tilted by an angle β in relation to the at least one first reflective portion and/or wherein the at least one second reflective portion is rotated through an angle α relative to a longitudinal axis of the cantilever.5. The apparatus ...

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Номер записи: 35
05-02-2015 дата публикации

IONIZATION APPARATUS, MASS SPECTROMETER INCLUDING IONIZATION APPARATUS, AND IMAGE FORMING SYSTEM

Номер: US20150034821A1
Автор: Kyogaku Masafumi, Otsuka Yoichi
Принадлежит:

Provided is an ionization apparatus including: a holder configured to hold a sample; a probe configured to determine a part to be ionized of the sample held by the holder; an extract electrode configured to extract ionized ions of the sample; a liquid supply unit configured to supply liquid to a part of a region of the sample; and a unit configured to apply a first voltage between the probe and the extract electrode, in which the first voltage is pulse-modulated. 1. An ionization apparatus comprising:a holder configured to hold a sample;a probe configured to determine a part to be ionized of the sample held by the holder;an extract electrode configured to extract ionized ions of the sample;a liquid supply unit configured to supply liquid to a part of a region of the sample; anda unit configured to apply a first voltage between the probe and the extract electrode,wherein the first voltage is pulse-modulated.2. The ionization apparatus according to claim 1 , wherein a liquid bridge is formed between an end portion of the probe and the sample held by the holder.3. The ionization apparatus according to claim 1 , further comprising a unit configured to apply a second voltage between the probe and the holder.4. The ionization apparatus according to claim 1 , wherein the second voltage is pulse-modulated.5. The ionization apparatus according to claim 4 , wherein the pulse-modulated first voltage and the pulse-modulated second voltage are applied in synchronization with each other.6. The ionization apparatus according to claim 2 , wherein a time period is set claim 2 , in which one of the first voltage and the second voltage is only applied.7. The ionization apparatus according to claim 2 , wherein the second voltage is lower than the first voltage.8. The ionization apparatus according to claim 1 , further comprising a displacement measuring unit configured to measure a displacement of the probe or the sample claim 1 ,wherein a feedback control of a position of a moving ...

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Номер записи: 36
05-02-2015 дата публикации

COMPOUND MICROSCOPE

Номер: US20150040273A1
Автор: SAKAI Nobuaki, UEKUSA Yoshitsugu
Принадлежит: OLYMPUS CORPORATION

A compound microscope of an optical microscope and a scanning probe microscope includes a stage to support a sample substrate holding a sample, and a cantilever chip having a substrate, a cantilever supported by the substrate, and a probe provided at the free end of the cantilever. The compound microscope further includes a scanner to hold the cantilever chip so that the probe faces the sample substrate and so that the substrate is inclined with respect to the sample substrate and to three-dimensionally scan the cantilever chip with respect to the sample substrate, a displacement sensor to optically detect the displacement of the cantilever, and an illumination light source to apply illumination light for observation by the optical microscope to the sample through the space between the substrate and the sample substrate. 1. A compound microscope of an optical microscope and a scanning probe microscope , the compound microscope comprising:a stage to support a sample substrate holding a sample;a cantilever chip comprising a substrate, a cantilever supported by the substrate, a probe provided at the free end of the cantilever;a scanner to hold the cantilever chip so that the probe faces the sample substrate and so that the substrate is inclined with respect to the sample substrate and to three-dimensionally scan the cantilever chip with respect to the sample substrate;a displacement sensor to optically detect the displacement of the cantilever; andan illumination light source to apply illumination light for observation by the optical microscope to the sample through the space between the substrate and the sample substrate.2. The compound microscope according to claim 1 , comprising a housing holding the scanner and the optical displacement sensor claim 1 ,wherein the housing has an inclined plane inclined with respect to the sample substrate, and the inclination angle of the inclined plane with respect to the sample substrate is equal to or more than the inclination ...

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Номер записи: 37
09-02-2017 дата публикации

HARMONIC FEEDBACK ATOMIC FORCE MICROSCOPY

Номер: US20170038410A1
Автор: Serry Fardad Michael
Принадлежит:

Harmonic feedback atomic force microscopy (HF-AFM) includes regulating feedback in oscillating probe atomic force microscopy (AFM) based upon an extracted frequency component of a probe response signal. Feedback in conventional oscillating probe AFM uses the probe response signal as a whole (or at least a driven frequency component of the probe response signal). The extracted frequency of the extracted frequency component of HF-AFM generally is different from any substantially driven frequency that generates the probe oscillation and may be a harmonic of a driven frequency. The regulating may include responding to the strength or weakness of the extracted frequency component such that weakening (or strengthening) of the extracted frequency component contributes positively to a decrease (or an increase) in the average tip-sample distance and contributes negatively to an increase (or a decrease) in the average tip-sample distance. 1. A method of atomic force microscopy , the method comprising:driving an AFM probe in an oscillatory motion with a probe drive signal, wherein the AFM probe includes a sensing tip;detecting the oscillatory motion of the AFM probe to produce a probe response signal;extracting an extracted frequency component of the probe response signal; andregulating an average distance between the sensing tip and a sample surface according to a contribution due to the extracted frequency component;wherein the regulating includes regulating such that a weakening of the extracted frequency component contributes positively to a decrease in the average distance between the sensing tip and the sample surface, and contributes negatively to an increase in the average distance between the sensing tip and the sample surface; andwherein the regulating includes regulating such that a strengthening of the extracted frequency component contributes positively to an increase in the average distance between the sensing tip and the sample surface, and contributes ...

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Номер записи: 38
24-02-2022 дата публикации

SCANNING PROBE MICROSCOPE, SCAN HEAD AND METHOD

Номер: US20220057430A1
Автор: HERFST Roelof Willem, Sadeghian Marnani Hamed
Принадлежит:

The present invention relates to a scan head for a scanning probe microscope arranged for moving a probe including a conductive cantilever relatively to a substrate surface, the head comprising: a first electrode positioned such that a capacitor is formed across a gap between the first electrode and a second electrode, wherein the second electrode is formed by the conductive cantilever; a voltage source for actuating the conductive cantilever by applying a voltage to the capacitor; and at least a first resistor arranged in series between the voltage source and one of the first and second electrodes such as to form an RC circuit for damping a vibration of the cantilever. 1. A scan head for a scanning probe microscope arranged for moving a probe , including a conductive cantilever , relatively to a substrate surface , the scan head comprising:a first electrode positioned such that a capacitor is formed across a gap between the first electrode and a second electrode, wherein the second electrode is formed by the conductive cantilever;a voltage source for actuating the conductive cantilever by applying a voltage to the capacitor formed between the first electrode and the second electrode; andat least a first resistor arranged in series between the voltage source and either one of the first electrode and the second electrode so as to form an RC circuit for damping a vibration of the conductive cantilever.2. The scan head according to claim 1 , wherein the resistor is arranged to provide an RC time suited to enhance damping of the conductive cantilever.3. The scan head according to claim 1 , wherein the resistance of the first resistor is adjustable.4. The scan head according to claim 3 , wherein the first resistor is:a tunable resistor; ora switchable resistor comprising an array of selectable resistors.5. The scan head according to claim 1 , wherein the capacitor is a parallel plate capacitor.6. The scan head according to claim 1 , further comprising a diode and second ...

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Номер записи: 39
12-02-2015 дата публикации

SCANNING PROBE MICROSCOPE COMPRISING AN ISOTHERMAL ACTUATOR

Номер: US20150047078A1
Автор: Lee Geoffrey, Sarkar Niladri, Strathearn Duncan Wesley
Принадлежит:

A single-chip scanning probe microscope is disclosed, wherein the microscope includes an isothermal two-dimensional scanner and a cantilever that includes an integrated strain sensor and a probe tip. The scanner is operative for scanning a probe tip about a scanning region on a sample while the sensor measures tip-sample interaction forces. The scanner, cantilever, probe tip, and integrated sensor can be fabricated using the backend processes of a conventional CMOS fabrication process. In addition, the small size of the microscope system, as well as its isothermal operation, enable arrays of scanning probe microscopes to be integrated on a single substrate. 1. An apparatus comprising:a substrate that defines a first plane;a first platform that defines a second plane that is parallel with the first plane; anda first scanner that is operative for moving the first platform in two dimensions within the second plane, wherein the first scanner is dimensioned and arranged to constrain motion of the first platform to the second plane, the first scanner comprising a plurality of thermal actuators that are mechanically coupled such that they collectively define an isothermal scanner;wherein the first platform, the first scanner, and the substrate are monolithically integrated.2. The system of further comprising:a first probe tip; and a first actuator that is operative for controlling a first separation between the first probe tip and a surface, the first probe tip being disposed at the first free end; and', 'a first sensor that is operative for providing a first signal based on a first interaction force between the first probe tip and the surface;, 'a first cantilever that is mechanically connected with the first platform such that the first cantilever has a first free end, wherein the first cantilever comprises;'}wherein the first cantilever and the substrate are monolithically integrated.3. The system of claim 2 , wherein each of the first scanner claim 2 , the first ...

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Номер записи: 40
06-02-2020 дата публикации

Scanning Probe System

Номер: US20200041540A1
Автор: Humphris Andrew
Принадлежит:

A method of scanning a feature with a probe, the probe comprising a cantilever mount, a cantilever extending from the cantilever mount to a free end, and a probe tip carried by the free end of the cantilever. An orientation of the probe is measured relative to a reference surface to generate a probe orientation measurement. The reference surface defines a reference surface axis which is normal to the reference surface and the probe tip has a reference tilt angle relative to the reference surface axis. A shape of the cantilever is changed in accordance with the probe orientation measurement so that the probe tip moves relative to the cantilever mount and the reference tilt angle decreases from a first reference tilt angle to a second reference tilt angle. A sample surface is scanned with the probe, wherein the sample surface defines a sample surface axis which is normal to the sample surface and the probe tip has a scanning tilt angle relative to the sample surface axis. During the scanning of the sample surface the cantilever mount is moved so that the probe tip is inserted into a feature in the sample surface with the scanning tilt angle below the first reference tilt angle. 1. A method of scanning a feature with a probe , the probe comprising a cantilever mount , a cantilever extending from the cantilever mount to a free end , and a probe tip carried by the free end of the cantilever , the method comprising: measuring an orientation of the probe relative to a reference surface to generate a probe orientation measurement , wherein the reference surface defines a reference surface axis which is normal to the reference surface and the probe tip has a reference tilt angle relative to the reference surface axis; changing a shape of the cantilever in accordance with the probe orientation measurement so that the probe tip moves relative to the cantilever mount and the reference tilt angle decreases from a first reference tilt angle to a second reference tilt angle; and ...

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Номер записи: 41
06-02-2020 дата публикации

Nanoscale Dynamic Mechanical Analysis via Atomic Force Microscopy (AFM-nDMA)

Номер: US20200041541A1
Автор: Osechinskiy Sergey, Pittenger Bede, Ruiter Anthonius, Syed-Amanulla Syed-Asif
Принадлежит:

An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device. 1. A method for determining a mechanical property of a soft viscoelastic sample with an atomic-force-microscope (AFM)-based system , the method comprising:repositioning a probe of the system towards a surface of the sample until a cantilever of the probe is deflected by a pre-determined amount from a nominal orientation of the cantilever; i) an average sample-loading force, generated by the probe, and', 'ii) an area of contact between a tip of the probe and the surface to be substantially constant;, 'modifying said repositioning to maintain at least one of'}measuring, at a set of pre-defined frequencies, a viscoelastic parameter of the surface while compensating for at least one of the creep of the surface and a spatial drift of the system; andproducing an output, perceivable by a user and representing said viscoelastic parameter as a function of at least one of variable conditions of said measuring.2. The method according to claim 1 , wherein said measuring is carried out simultaneously at multiple frequencies from said set of pre-defined frequencies.3. The method according to claim 1 , wherein said modifying includes modulating a sample-loading force applied by the probe to the sample at a given excitation frequency from said set of pre-defined frequencies.4. The method according to claim 1 , wherein said modifying includes maintaining the average sample-loading force substantially constant while a separation between the surface and the base of the probe is being modulated.5. The method according to claim 1 , wherein measuring the viscoelastic parameter includes performing dual-channel demodulation of ...

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Номер записи: 42
03-03-2022 дата публикации

Method and Apparatus for Aligning a Probe for Scanning Probe Microscopy to the Tip of a Pointed Sample

Номер: US20220065895A1
Автор: Fleischmann Claudia, Op de Beeck Jonathan, Paredis Kristof, Vandervorst Wilfried
Принадлежит:

Example embodiments relate to methods and apparatuses for aligning a probe for scanning probe microscopy (SPM) to the tip of a pointed sample. One embodiments includes a method for aligning an SPM probe to an apex area of a free-standing tip of a pointed sample. The method includes providing an SPM apparatus that includes the SPM probe; a sample holder; a drive mechanism; and detection, control, and representation tools for acquiring and representing an image of a surface scanned by the SPM probe. The method also includes mounting the sample on the sample holder. Further, the method includes positioning the probe tip of the SPM, determining a 2-dimensional area that includes the pointed sample, performing an SPM acquisition scan, evaluating and acquired image, and placing the SPM probe in a position where it is aligned with an apex area of the free-standing tip of the pointed sample.

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Номер записи: 43
13-02-2020 дата публикации

SCANNER AND SCANNING PROBE MICROSCOPE

Номер: US20200049733A1
Автор: Abe Masayuki, YAMASHITA Hayato
Принадлежит: OSAKA UNIVERSITY

The present invention provides a scanner capable of achieving both a wide range of measurements and a high-speed and high-precision measurement. 114-. (canceled)15. A scanner comprising:an outer frame;a first inner frame disposed inside the outer frame;a wide range Y actuator for moving the first inner frame relative to the outer frame in the Y direction;a second inner frame disposed inside the first inner frame;a wide range X actuator for moving the second inner frame relative to the first inner frame in an X direction orthogonal to the Y direction;a third inner frame disposed inside the second inner frame;a narrow range Y actuator for moving the third inner frame relative to the second inner frame in the Y direction;a movable base disposed inside the third inner frame; anda narrow range X actuator for moving the movable base relatively to the third inner frame in the X direction,wherein:the wide range Y actuator is a piezoelectric element expandable and contractible in the Y direction in response to a control signal, and is disposed between an inner side surface of the outer frame and an outer side surface of the first inner frame;the wide range X actuator is a piezoelectric element expandable and contractible in the X direction in response to a control signal, and is disposed so that one end of the wide range X actuator abuts on the approximate center in the Y direction on the inner side surface of the outer frame or on the approximate center in the Y direction on an inner side surface of the first inner frame, and the other end abuts the approximate center in the Y direction on an outer side surface of the second inner frame; andthe narrow range Y actuator is a piezoelectric element expandable and contractible in the Y direction in response to a control signal, and is disposed so that one end of the narrow range Y actuator abuts on the approximate center in X direction on an inner side surface of the second inner frame, and the other end abuts the approximate ...

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Номер записи: 44
23-02-2017 дата публикации

METHOD OF ADVANCING A PROBE TIP OF A SCANNING MICROSCOPY DEVICE TOWARDS A SAMPLE SURFACE, AND DEVICE THEREFORE

Номер: US20170052209A1
Автор: Kramer Geerten Frans Ijsbrand, Sadeghian Marnani Hamed, van den Dool Teunis Comelis
Принадлежит:

The invention is directed at a method of advancing a probe tip of a probe of a scanning microscopy device towards a sample surface. The scanning microscopy device comprises the probe for scanning the sample surface for mapping nanostructures on the sample surface. The probe tip of the probe is mounted on a cantilever arranged for bringing the probe tip in contact with the sample surface. The method comprises controlling, by a controller, an actuator system of the device for moving the probe to the sample surface, and receiving, by the controller, a sensor signal indicative of at least one operational parameter of the probe for providing feedback to perform said controlling. The method further comprises maintaining, during said controlling, an electric field between the sample surface and the probe tip, and evaluating the sensor signal indicative of the at least one operational parameter for determining an influence on said probe by said electric field, for determining proximity of the sample surface relative to the probe tip. The invention is further directed at a scanning microscopy device comprising a probe for scanning a sample surface for mapping nanostructures thereon. 1. A method of advancing a probe tip of a probe of a scanning microscopy device towards a sample surface , the device comprising the probe for scanning the sample surface for mapping nanostructures on the sample surface , wherein the probe tip of the probe is mounted on a cantilever arranged for bringing the probe tip in contact with the sample surface , the method comprising:controlling, by a controller, an actuator system of the device for moving the probe to the sample surface;receiving, by the controller, a sensor signal indicative of at least one operational parameter of the probe for providing feedback to perform said controlling;wherein the method further comprises:maintaining, during said controlling, an electric field between the sample surface and the probe tip; andevaluating the sensor ...

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Номер записи: 45
26-02-2015 дата публикации

SCANNING PROBE MICROSCOPE

Номер: US20150059025A1
Автор: Harada Kazunori, Hirota Jun, Shinomiya Hideo, Yabuki Moto
Принадлежит: KABUSHIKI KAISHA TOSHIBA

A scanning probe microscope includes a stage on which a sample is mounted, a probe configured to measure a characteristic of the sample, and a controller configured to move the probe and the stage relative to each other along a scanning trajectory during measurement of the characteristic of the sample. The scanning trajectory includes a plurality of linear segments, wherein each pair of adjacent linear segments form an angle that is 90 degrees or less. 1. A scanning probe microscope comprising:a stage on which a sample is mounted;a probe configured to measure a characteristic of the sample; anda controller configured to move the probe and the stage relative to each other along a scanning trajectory during measurement of the characteristic of the sample, the scanning trajectory including a plurality of linear segments, wherein each pair of adjacent linear segments form an angle that is 90 degrees or less.2. The scanning probe microscope according to claim 1 , whereina measurement trajectory coincides with the scanning trajectory.3. The scanning probe microscope according to claim 2 , whereinthe measurement trajectory is continuous.4. The scanning probe microscope according to claim 2 , whereinthe measurement trajectory do not have any portions that intersect.5. The scanning probe microscope according to claim 2 , whereinthe measurement trajectory begins at an inner side and ends at an outer side.6. The scanning probe microscope according to claim 5 , wherein a distance between adjacent parallel portions of the measurement trajectory is greater than a width of the scanning trajectory.7. The scanning probe microscope according to claim 2 , whereinthe measurement trajectory begins at an outer side and ends at an inner side.8. The scanning probe microscope according to claim 7 , wherein a distance between adjacent parallel portions of the measurement trajectory is less than a width of the scanning trajectory.9. The scanning probe microscope according to claim 2 , wherein ...

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Номер записи: 46
15-05-2014 дата публикации

ATOMIC FORCE MICROSCOPE SYSTEM USING SELECTIVE ACTIVE DAMPING

Номер: US20140137300A1
Автор: MOON Christopher Ryan, Workman Richard K.
Принадлежит: AGILENT TECHNOLOGIES, INC.

An atomic force microscope (AFM) system comprises a cantilever arm attached to a probe tip. The system controls a height of the cantilever arm to press the probe tip against a sample and then separate the probe tip from the sample, to detect a disturbance of the cantilever arm after the separation of the probe tip from the surface, and to engage active damping of the cantilever arm to suppress the disturbance. 1. A method of operating an atomic force microscope (AFM) system comprising a cantilever arm attached to a probe tip , the method comprising:controlling a height of the cantilever arm to press the probe tip against a sample and then separate the probe tip from the sample;detecting a vibration of the cantilever arm after the separation of the probe tip from the surface; andengaging active damping of the cantilever arm to counteract a vibration of the cantilever to increase a rate of decay of the vibration of the cantilever arm compared to a natural damping of the cantilever arm.2. The method of claim 1 , further comprising detecting suppression of the vibration claim 1 , and disengaging the active damping upon detecting the suppression.3. The method of claim 1 , further comprising disengaging the active damping after it has been engaged for a predetermined time.4. The method of claim 1 , wherein detecting the vibration comprises detecting that a deflection of the cantilever arm changes from a negative value to a positive value.5. The method of claim 1 , wherein detecting the vibration comprises detecting that a derivative of a cantilever deflection signal exceeds a predetermined threshold.6. The method of claim 1 , wherein controlling the height of the cantilever arm comprises operating a first piezoelectric actuator claim 1 , and engaging the active damping comprises operating a second piezoelectric actuator that is separate from the first piezoelectric actuator.7. The method of claim 1 , further comprising:measuring an eigenmode of the cantilever arm; ...

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Номер записи: 47
05-03-2015 дата публикации

Test mass compensation of mass measurement drift in a microcantilever resonator

Номер: US20150064803A1
Автор: W. Daniel Hillis
Принадлежит: Applied Invention LLC

The present disclosure provides methods and mechanisms for measuring small masses attached to a substrate within a microcantilever. Specifically, the disclosure describes the measurement of small particles accumulated at a substrate that cannot be flowed through a microchannel within a microcantilever. A resonance measurement is acquired at a first time. A pair resonance measurements is then acquired at a second point in time one with the test mass at a first position off or along the microcantilever, the second with the test mass at a second position along the microcantilever. Comparing the resonance frequencies determined for the two test mass positions allows for disambiguation of changes in the mass of the particles from changes in the resonant behavior of the microcantilever itself.

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Номер записи: 48
05-03-2015 дата публикации

ILLUMINATION FOR OPTICAL SCAN AND MEASUREMENT

Номер: US20150067929A1
Автор: Blanton Keith A., Hatzilias Karol, POSEY STEFAN T., Sharpe Wess Eric
Принадлежит:

Optical scanning with an optical probe composed of an elongated cylinder of transparent material mounted upon an optical scanner body; one or more sources of scan illumination mounted in the probe distally or proximally with respect to the scanner body and projecting scan illumination longitudinally through the probe; a radially-reflecting optical element mounted in the probe having a conical mirror on a surface of the radially-reflecting optical element, the mirror oriented so as to project scan illumination radially away from a longitudinal axis of the probe with at least some of the scan illumination projected onto a scanned object; a lens mounted in the probe between the radially-reflecting optical element and the scanner body and disposed so as to conduct to an optical sensor scan illumination reflected from the scanned object. 1. Apparatus for optical scanning , the apparatus comprising:an optical probe comprising an elongated cylinder of transparent material mounted upon an optical scanner body;one or more sources of scan illumination mounted in the probe distally from the scanner body and projecting scan illumination longitudinally through the probe toward the scanner body;a radially-reflecting optical element mounted in the probe between the sources of scan illumination and the scanner body, the radially-reflecting optical element comprising a conical mirror on a surface of the radially-reflecting optical element distal from the scanner body, the mirror oriented so as to project scan illumination radially away from a longitudinal axis of the probe with at least some of the scan illumination projected onto a scanned object;a lens mounted in the probe between the radially-reflecting optical element and the scanner body and disposed so as to conduct to an optical sensor scan illumination reflected from the scanned object; andthe optical sensor mounted in the scanner body and disposed with respect to the lens so as to receive through the lens the scan ...

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Номер записи: 49
05-03-2015 дата публикации

Method and Apparatus of Physical Property Measurement Using a Probe-Based Nano-Localized Light Source

Номер: US20150067930A1
Автор: Kaemmer Stefan B., Minne Stephen C., Raschke Markus B., Su Chanmin
Принадлежит:

An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme. 1. An SPM including:a probe including a cantilever and a tip, the tip positioned at a distal end of the cantilever and including a) a shaft and b) an apex positioned adjacent to a sample;a receiving element supported by the shaft of the tip; anda source of electromagnetic wave excitation that directs electromagnetic waves toward the receiving element, the electromagnetic waves being coupled to the apex via the receiving element, and wherein the coupled electromagnetic waves at the apex yield locally enhanced, background free spectroscopic signal that interacts with the sample.2. The SPM of claim 1 , further comprising a controller that maintains a separation between the apex and the sample greater than zero nanometers and less than 100 nm during electromagnetic wave excitation.3. The SPM of claim 2 , wherein the separation is maintained at less than 10 nm during electromagnetic wave excitation.4. The SPM of claim 2 , wherein the controller maintains the separation using o torsional resonance mode (TR Mode) feedback and contact mode feedback.5. The SPM of claim 2 , wherein the controller maintains the separation at less than 5 nm using tapping mode claim 2 , wherein a tapping mode setpoint amplitude is between about 0.1 nm and 10 nm.6. The SPM of claim 1 , wherein the shaft has a continuous surface around its entire periphery.7. The SPM of claim 6 , wherein the continuous surface is at least one of a ...

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Номер записи: 50
22-05-2014 дата публикации

SYSTEM AND METHOD FOR NON-CONTACT MICROSCOPY FOR THREE-DIMENSIONAL PRE-CHARACTERIZATION OF A SAMPLE FOR FAST AND NON-DESTRUCTIVE ON SAMPLE NAVIGATION DURING NANOPROBING

Номер: US20140143912A1
Автор: Berkmyre Mike, Pryadkin Sergiy, Sanders John, Stallcup Richard, Ukraintsev Vladimir A.
Принадлежит:

A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates. 1. A system for performing sample probing , comprising: receive three-dimensional coordinates for a sample based on at least three fiducial marks;', 'receive said sample mounted in a holder; and', 'navigate to at least a location on said sample based on said at least three fiducial marks and said three-dimensional coordinates., 'an topography microscope configured to2. The system of claim 1 , further comprising a three-dimensional microscope configured to generate three-dimensional coordinates of said sample based on said at least three fiducial marks.3. The system of claim 2 , wherein said three-dimension microscope is an optical microscope.4. The system of claim 1 , wherein said topography microscope is a scanning-probe microscope.5. The system of claim 1 , wherein said topography microscope is an atomic-force microscope.6. The system of wherein said fiducial mark is on said holder.7. The system of wherein said fiducial mark is on said sample.8. The system of claim 1 , further comprising a preparation tool configured to receive said sample mounted in said holder and configured to navigate to at least said location on said sample based on said at least three fiducial marks and said three-dimensional coordinates.9. The system of claim 1 , wherein said topography microscope is further configured to navigate to said at least one location on said sample based on a computer-aided design map.10. A method of performing sample probing claim 1 , comprising:characterizing a sample to generate three-dimensional coordinates based on at least three fiducial marks;aligning said sample based on said at least three fiduciary ...

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Номер записи: 51
17-03-2022 дата публикации

METHODS AND DEVICES CONFIGURED TO OPERATED SCANNING TUNNELING MICROSCOPES USING OUT-OF-BANDWIDTH FREQUENCY COMPONENTS ADDED TO BIAS VOLTAGE AND RELATED SOFTWARE

Номер: US20220082582A1
Автор: Alemansour Hamed, Moheimani Seyed Omid Reza
Принадлежит:

In the system and method disclosed, an ultrahigh vacuum (UHV) scanning tunneling microscope (STM) tip is used to selectively desorb hydrogen atoms from the Si(100)-2X1:H surface by injecting electrons at a negative sample bias voltage. A new lithography method is disclosed that allows the STM to operate under imaging conditions and simultaneously desorb H atoms as required. A high frequency signal is added to the negative sample bias voltage to deliver the required energy for hydrogen removal. The resulted current at this frequency and its harmonics are filtered to minimize their effect on the operation of the STM's feedback loop. This approach offers a significant potential for controlled and precise removal of hydrogen atoms from a hydrogen-terminated silicon surface and thus may be used for the fabrication of practical silicon-based atomic-scale devices. 1. A scanning tunneling device comprising:a scanning tunneling tip configured to receive a bias voltage with respect to a sample to be processed by the scanning tunneling device, the bias voltage modulated with a dither voltage at a dither frequency and a dither amplitude; and receive a time varying tip-sample current signal, including components at the dither frequency, tunneling between the tip and the sample; and', 'provide the time varying tip-sample current signal as a feedback signal in the control system., 'a control system, connected to a z-actuator and an x-y scanner, the control system configured to2. The scanning tunneling device of wherein the control system is further configured to filter the time varying tip-sample current signal to attenuate the components at the dither frequency to provide a filtered tip-sample current signal as the feedback signal to a control feedback loop of the control system.3. The scanning tunneling device of wherein the control feedback loop has an associated operating bandwidth including an upper frequency limit that is less than the dither frequency.4. The scanning ...

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Номер записи: 52
17-03-2022 дата публикации

Device and method for operating a bending beam in a closed control loop

Номер: US20220082583A1
Автор: Christof Baur, Florian Demski
Принадлежит: CARL ZEISS SMT GMBH

The present invention relates to a device for operating at least one bending beam in at least one closed control loop, wherein the device has: (a) at least one first interface designed to receive at least one controlled variable of the at least one control loop; (b) at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth greater than the bit depth of the controlled variable; and (c) at least one second interface designed to provide a manipulated variable of the at least one control loop.

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Номер записи: 53
28-02-2019 дата публикации

Atomic Force Microscope with Optical Guiding Mechanism

Номер: US20190064208A1
Автор: Jonathan Adams
Принадлежит: Nanosurf AG

An atomic force microscope includes a scanner for scanning a probe along at least one translational axis, a stationary light source for generating an incident light beam, a stationary position sensitive detector for detecting a light beam reflected from a cantilever, an optical guiding mechanism for compensating a scanning motion of the probe and configured to guide the incident light beam to a spot on the cantilever and to guide the reflected light beam from the cantilever to the position sensitive detector, wherein the optical guiding mechanism includes at least two optical deflection elements per translational axis arranged to move synchronously with the probe along the respective translational axis, and configured to define an optical path between the light source and the detector for the incident and reflected light beam such that the optical path length is independent of the translation of the probe along the respective translational axis.

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Номер записи: 54
28-02-2019 дата публикации

TUNNEL CURRENT CONTROL APPARATUS AND TUNNEL CURRENT CONTROL METHOD

Номер: US20190064210A1
Автор: ARASHIDA Yusuke, KATAYAMA Ikufumi, Kawada Yoichi, TAKAHASHI Hironori, Takeda Jun, YOSHIOKA Katsumasa
Принадлежит: HAMAMATSU PHOTONICS K.K.

A tunnel current control apparatus includes a light source, a branching unit, a chopper, an optical path difference adjustment unit, a polarizer, a terahertz wave generation element, a CEP adjustment unit, a terahertz wave detection element, a quarter-wave plate, a polarization separation element, photodetectors, a differential amplifier, a lock-in amplifier, a current measurement unit, a processing unit, mirrors, and off-axis parabolic mirrors. The CEP adjustment unit can arbitrarily adjust a CEP of a terahertz wave pulse. The processing unit obtains a conversion filter used for conversion from an electric field waveform of a far field of the terahertz wave pulse to an electric field waveform of a near field based on a tunnel current measured by the current measurement unit and a correlation detected by the terahertz wave detection element. 1. A tunnel current control apparatus for controlling a tunnel current flowing between a first conductive object and a second conductive object , the apparatus comprising:a light source configured to output a light pulse;a branching unit configured to branch the light pulse, output from the light source, output one of the branched light pulses as a pump light pulse, and output the other light pulse as a probe light pulse;a terahertz wave generation element configured to generate and output a terahertz wave pulse by inputting the pump light pulse output from the branching unit;a CEP adjustment unit configured to input the terahertz wave pulse output from the terahertz wave generation element, adjust a CEP of the input terahertz wave pulse, and output the terahertz wave pulse after the CEP adjustment;a focusing element configured to input the terahertz wave pulse output from the CEP adjustment unit, and focus the input terahertz wave pulse in a gap between the first conductive object and the second conductive object;a current measurement unit configured to measure the tunnel current flowing between the first conductive object and ...

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Номер записи: 55
28-02-2019 дата публикации

SCANNING PROBE MICROSCOPE

Номер: US20190064211A1
Автор: Cleveland Jason, Grigg David A., Walters Deron, Zhang Haigang
Принадлежит:

A scanning probe microscope has a probe configured to move across the surface of a sample to be monitored. A scanner, to which the probe is mounted, moves the probe across the sample surface such that the probe is deflected in accordance with the structure of the sample surface. A beam system directs a light beam at the probe during the movement of the probe across the sample surface and a detector monitors the deflection of the probe using the light beam. The arrangement is such that the scanner is physically independent of the beam system. 1. A scanning probe microscope , comprising:a probe configured to move across the surface of a sample to be monitored;a scanner, to which the probe is mounted, configured to cause said movement of the probe across the sample surface such that the probe is deflected in accordance with the structure of the sample surface;a beam system for directing a light beam at the probe during said movement of the probe across the sample surface; anda detector for monitoring the deflection of the probe using the light beam;wherein the scanner is physically independent of the beam system.2. A scanning probe microscope according to claim 1 , wherein the light beam is directed at the probe by one or more optical elements and wherein none of the optical elements which direct the light beam so as to be incident upon the probe are mounted to the scanner or the probe.3. A scanning probe microscope according to claim 2 , wherein each of the said optical elements is physically mounted to the beam system.4. A scanning probe microscope according to claim 1 , wherein the scanner is moveable independently of the beam system.5. A scanning probe microscope according to claim 1 , further comprising a sample holder for holding the sample and wherein the sample holder is moveable independently of each of the scanner claim 1 , the probe and the beam system.6. A scanning probe microscope according to claim 1 , wherein the surface of the sample is arranged in use ...

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Номер записи: 56
15-03-2018 дата публикации

INFORMATION ACQUIRING METHOD IN ATOMIC FORCE MICROSCOPE

Номер: US20180074092A1
Автор: SAKAI Nobuaki
Принадлежит: OLYMPUS CORPORATION

An information acquiring method in an atomic force microscope includes, during causing the microscope to raster scan a cantilever and a sample relatively while causing a mechanical interaction between the sample and a probe provided at a free end of the cantilever, causing a first interaction having first strength between the probe and sample, acquiring first information on the sample when the first interaction is generated, causing a second interaction having second strength between the probe and sample, and acquiring second information on the sample when the second interaction is generated. The first strength and second strength are different. The causing the first interaction, the acquiring the first information, the causing the second interaction, and the acquiring the second information are performed in a same scanning region. 1. An information acquiring method in an atomic force microscope to acquire information on a sample by raster scanning a cantilever and the sample relatively across an XY-plane , while contacting a probe provided at a free end of the cantilever with the sample to cause a mechanical interaction to be generated between the probe and the sample , the method comprising:causing a first interaction having a first strength to be generated between the probe and the sample;acquiring first information on the sample when the first interaction is generated between the probe and the sample;causing a second interaction having a second strength different from the first strength to be generated between the probe and the sample; andacquiring second information on the sample when the second interaction is generated between the probe and the sample,the causing the first interaction to be generated and the acquiring the first information, and the causing the second interaction to be generated and the acquiring the second information being performed in a same scanning region.2. The information acquiring method in an atomic force microscope according to claim ...

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Номер записи: 57
15-03-2018 дата публикации

CONDUCTIVE PROBE, ELECTRICAL PROPERTY EVALUATING SYSTEM, SCANNING PROBE MICROSCOPE, CONDUCTIVE PROBE MANUFACTURING METHOD, AND ELECTRICAL PROPERTY MEASURING METHOD

Номер: US20180074093A1
Автор: Harada Kazunori
Принадлежит: KABUSHIKI KAISHA TOSHIBA

A conductive probe includes a protruding portion provided on an elastic member, a conductive metal film covering at least a tip of the protruding portion; and an insulating thin film covering the conductive metal film provided on the tip of the protruding portion. 1. A conductive probe comprising:a protruding portion provided on an elastic member;a conductive metal film covering at least a tip of the protruding portion; andan insulating thin film covering the conductive metal film provided on the tip of the protruding portion.2. The conductive probe according to claim 1 ,wherein the insulating thin film has a conductive filament formed by metal ions diffused from the conductive metal film.3. The conductive probe according to claim 1 ,wherein:the elastic member has a cantilever shape; andthe protruding portion is provided on a top portion of the elastic member.4. The conductive probe according to claim 1 ,wherein the conductive metal film contains at least one selected from Ag, Cu, Ni, Ti and W.5. The conductive probe according to claim 1 ,{'sub': 2', '2', '5', 'm', 'n', 'm', 'n, 'wherein the insulating thin film contains at least one selected from SiO, SiON, TaO, AlO, GeSe, WOand MoO.'}6. An electrical property evaluating system comprising;a protruding portion provided on an elastic member;a conductive metal film covering at least a tip of the protruding portion;a conductive probe having an insulating thin film covering the conductive metal film provided on the tip of the protruding portion;a sample stage provided so as to be able to hold a sample to be measured;a scanning mechanism scanning the surface of the sample while changing a relative position between the conductive probe and the sample stage;a power supply portion applying a predetermined voltage between the conductive probe and the sample held by the sample stage; anda detecting portion detecting a current value varying with scanning of the conductive probe.7. A scanning probe microscope comprising:a ...

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Номер записи: 58
07-03-2019 дата публикации

MICROFLUIDIC CELL FOR ATOMIC FORCE MICROSCOPY

Номер: US20190072582A1
Автор: Fu Wanyi, Zhang Wen
Принадлежит: NEW JERSEY INSTITUTE OF TECHNOLOGY

A liquid cell for in situ atomic force microscopy (AFM) measurement of a sample during filtration is provided. The liquid cell includes a cantilever probe; a cantilever holder to position the probe near a surface of a sample (e.g., a filtration membrane); a liquid cell housing provided to hold the sample and comprising an opening at the top; an upper part; a lower part; an internal cavity to contain a fluid; a fluid inlet passage located in the upper part; a first fluid outlet passage located in the upper part; and a second fluid outlet passage located in the lower part. A method of in situ atomic force microscopy (AFM) measurement of a sample during filtration in a liquid by using the liquid cell described herein is also provided. 1. A liquid cell for in situ atomic force microscopy (AFM) measurement of a sample , the liquid cell comprising:a cantilever holder to position a cantilever probe near a surface of a sample;a lid part coupled to the cantilever holder;a liquid cell housing to hold the sample, the liquid cell housing includes a top surface defining an opening, an upper part, a lower part, and an internal cavity defined by the liquid cell housing to contain a fluid;the liquid cell housing further including a fluid inlet passage and a first fluid outlet passage both located in the upper part; and a second fluid outlet passage located in the lower part; andwherein, the liquid cell allows real-time and in situ observations and measurements of membrane properties and surface characteristic evolutions during filtration, fouling, and/or aging processes of the sample.2. The liquid cell of claim 1 , wherein the upper part and the lower part is separable by the sample claim 1 , and the internal cavity is separable by the sample to form an upper internal cavity above the sample and a lower internal cavity below the sample.3. The liquid cell of claim 1 , wherein the lid part further comprises an optical window claim 1 , through which a light beam transmits.4. The ...

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Номер записи: 59
16-03-2017 дата публикации

PROBE ACTUATION SYSTEM WITH FEEDBACK CONTROLLER

Номер: US20170074901A1
Автор: Humphris Andrew
Принадлежит:

A probe actuation system has a detection system arranged to measure a position or angle of a probe to generate a detection signal. An illumination system is arranged to illuminate the probe. Varying the illumination of the probe causes the probe to deform which in turn causes the detection signal to vary. A probe controller is arranged to generate a desired value which varies with time. A feedback controller is arranged to vary the illumination of the probe according to the detection signal and the desired value so that the detection signal is driven towards the desired value. The probe controller receives as its inputs a detection signal and a desired value, but unlike conventional feedback systems this desired value varies with time. Such a time-varying desired value enables the probe to be driven so that it follows a trajectory with a predetermined speed. A position or angle of the probe is measured to generate the detection signal and the desired value represents a desired position or angle of the probe. 1. A probe actuation system comprising: a detection system arranged to measure a probe to generate a detection signal; an illumination system arranged to illuminate the probe , wherein varying the illumination of the probe causes the probe to deform which in turn causes the detection signal to vary; a probe controller arranged to generate a desired value; and a feedback controller arranged to vary the illumination of the probe according to the detection signal and the desired value so that the detection signal is driven towards the desired value , characterised in that a position or angle of the probe is measured to generate the detection signal and the desired value represents a desired position or angle of the probe.2. A probe actuation system comprising: a detection system arranged to measure a probe to generate a detection signal; an illumination system arranged to illuminate the probe , wherein varying the illumination of the probe causes the probe to ...

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Номер записи: 60
19-03-2015 дата публикации

SCANNING PROBE MICROSCOPE WITH IMPROVED FEATURE LOCATION CAPABILITIES

Номер: US20150082498A1
Автор: Meyer Charles
Принадлежит:

An SPM assembly includes an SPM and a wide field image acquisition device that can be used to rapidly locate a region of interest and position that region within a SPM scan range of 100 microns or less. The wide field image acquisition device may include a low resolution camera having wide field of view in excess of 12 mm, and a high magnification camera having a field of view in the single mm range. Alternatively, a single camera could be used if it has sufficient zoom capability to have functionalities commensurate with both cameras. Collocation preferably is employed to coordinate translation between the low magnification and high magnification cameras (if separate cameras are used) and between the high magnification camera and the SPM. 1. A method of operating a scanning probe microscope (SPM) assembly having a wide field image acquisition device and an SPM , the wide field image acquisition device having a field of view having a maximum dimension of at least 12 mm , and the SPM having a scan range having a maximum dimension of no more than 200 microns:calibrating the wide field image acquisition device and the SPM so that the fields of view thereof are collocated;placing a sample within the field of view of the wide field image acquisition device;using the wide field image acquisition device, locating a region of interest on the sample surface having a maximum dimension of less than 200 microns;effecting relative sample/SPM assembly movement to position the region of interest within the scan range of the SPM; andscanning the region of interest with a probe of the SPM and acquiring data while monitoring interaction between the probe and the sample.2. The method of claim 1 , wherein the wide field image acquisition device comprises an optical instrument including a first claim 1 , wide field camera.4. The method of claim 3 , wherein the first camera has a resolution of no more than 20 microns.5. The method of claim 4 , wherein the field of view of the first ...

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Номер записи: 61
18-03-2021 дата публикации

Methods And Systems For Scanning Probe Sample Property Measurement And Imaging

Номер: US20210080484A1
Автор: Eric MÜLLER, Markus B. Raschke, Rafael Piestun, Samuel Johnson, Simon Labouesse
Принадлежит: University of Colorado

Infrared (IR) vibrational scattering scanning near-field optical microscopy (s-SNOM) has advanced to become a powerful nanoimaging and spectroscopy technique with applications ranging from biological to quantum materials. However, full spatiospectral s-SNOM continues to be challenged by long measurement times and drift during the acquisition of large associated datasets. Various embodiments provide for a novel approach of computational spatiospectral s-SNOM by transforming the basis from the stationary frame into the rotating frame of the IR carrier frequency. Some embodiments see acceleration of IR s-SNOM data collection by a factor of 10 or more in combination with prior knowledge of the electronic or vibrational resonances to be probed, the IR source excitation spectrum, and other general sample characteristics.

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Номер записи: 62
14-03-2019 дата публикации

Integrated measurement and micromechanical positioning apparatus for real-time test control

Номер: US20190077024A1
Автор: Vãhãsöyrinki Mikko
Принадлежит: Sensapex Oy

The invention relates to a measurement device (), for example for testing, comprising a micromechanical positioning actuator () for causing movement of a sensor () with respect to a target (), a positioning controller (), the positioning controller () having an output coupled to the actuator () for controlling the movement, and the having an input coupled to the sensor () for receiving a sensor signal from the sensor () to the positioning controller (), and the positioning controller () arranged to control the movement based on the sensor signal. The measurement device () may have memory for storing positioning control instructions (). The positioning controller () may be arranged to control said movement based on said sensor signal and said positioning control instructions (). 1. A measurement device for performing measurements using a sensor , said sensor being positioned related to a target in micromechanical fashion , said measurement device comprising:a body;a micromechanical positioning actuator for causing movement of said sensor with respect to said target;a positioning controller embodied within said body, said positioning controller having a sensor input coupled to said sensor, said sensor input arranged to receive a sensor signal from said sensor to said positioning controller; andsaid positioning controller having an output, said output coupled to said micromechanical positioning actuator for controlling said movement based on said sensor signal.2. The measurement device according to claim 1 , further comprising memory for storing positioning control instructions claim 1 , wherein said positioning control instructions comprise computer-readable instructions suitable for use by said positioning controller in controlling said movement based on said sensor signal claim 1 , wherein said positioning controller is arranged to control said movement based on said sensor signal and said positioning control instructions.3. The measurement device according to claim ...

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Номер записи: 63
26-03-2015 дата публикации

MULTI-RESONANT DETECTION SYSTEM FOR ATOMIC FORCE MICROSCOPY

Номер: US20150089693A1
Автор: Jesse Stephen
Принадлежит:

A multi-resonant detection system (MRD) chip comprises an AFM tip, a cantilever, and resonator members separately positioned relative to the cantilever and tip. The chip may be fabricated from a silicon wafer. Frequency of tip motion is detected or actuated by displacement of resonator members. A rigid member, which is coupled to the chip by flexible members, coupled to the resonator members and rigidly coupled to the cantilever, enables tip motion. Resonator members include an array of discrete resonator bars, a single resonator bar or a continuous membrane which resonates at a continuous range of frequency. Tip motion is detected by measuring displacement of the resonator members using angle of light reflection, capacitance, piezo-resistive or piezo-strain techniques. Tip motion is actuated using displacement of the resonator members and capacitive, piezo-strain or piezo-resistive techniques. Resonator members may be encased by cover plates and/or hermetically sealed for measurements in a liquid medium. 1. A method for making atomic force microscopy (AFM) measurements , the method comprising the steps of: detecting a frequency of motion of said AFM tip and said cantilever, by said one or more of said resonator members; and', 'actuating motion of said AFM tip and said cantilever by said one or more of said resonator members., 'in a multi-resonant detection system (MRD) chip comprising an AFM tip, a cantilever, said cantilever mechanically coupled to said AFM tip, and one or more resonator members wherein said one or more resonator members are separately positioned in said MRD chip relative to said cantilever and said AFM tip, one or both of2. The method of claim 1 , wherein said cantilever is interactively coupled to said one or more resonating members.3. The method of claim 1 , wherein said MRD chip comprises a rigid member which enables said cantilever to oscillate and which is:coupled to said MRD chip by one or more flexible members,rigidly coupled to said ...

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Номер записи: 64
29-03-2018 дата публикации

SCANNING PROBE MICROSCOPE

Номер: US20180088148A1
Автор: HIRADE Masato
Принадлежит: SHIMADZU CORPORATION

A scanning probe microscope capable of increasing a relative speed of a probe and making noise unlikely to occur in a measurement result for the surface shape of a sample. When a relative movement direction of the probe is switched at the time of reciprocation in an X direction and a direction opposite to the X direction (at a starting position P and a return position P), the relative speed is gradually decreased and then the direction is switched, and after the switching, the relative speed is gradually increased, to prevent a rapid change in the relative speed. At the time of shifting the probe in a Y direction and a direction opposite to the Y direction (at the starting position P and the return position P), the relative speed of the probe is gradually increased and then the relative speed is gradually decreased, to prevent a rapid change in the relative speed. 19- (canceled)10. A scanning probe microscope , comprising:a probe that is relatively moved along a surface of a sample;a reciprocation control unit that relatively moves the probe in a first direction and a direction opposite to the first direction with respect to the surface of the sample, to reciprocate the probe;a shifting control unit that relatively moves the probe in a second direction orthogonal to the first direction with respect to the surface of the sample, to shift the probe; anda measurement control unit that measures a surface shape of the sample based on a relative displacement amount of the probe in a direction orthogonal to the first direction and the second direction, the probe being relatively moved along the surface of the sample by the reciprocation control unit and the shifting control unit,wherein, when a relative movement direction of the probe is switched, the reciprocation control unit gradually decreases a relative speed and then switches the direction, and gradually increases the relative speed after the switching, to relatively reciprocate the probe, andthe shifting control ...

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Номер записи: 65
30-03-2017 дата публикации

Integrated Micro Actuator and LVDT for High Precision Position Measurements

Номер: US20170089733A1
Автор: Bocek Dan, Cleveland Jason, Klonowski Matthew, Longmire Matthew, Proksch Roger Carlos
Принадлежит:

A single housing with a non-ferromagnetic piezo-driven flexure has primary and secondary coil forms of different diameters, one coaxially inside the other, integrated in the flexure. The cylinders defining the planes of the primary and secondaries do not spatially overlap. The secondary coil forms may be wound in opposite directions and wired to provide a transformer device. Movement of the primary relative to the secondaries in the direction of the central axis of the coils can be differentially detected with high precision. 1. A method , comprising:placing a sample to be tested on a top surface of one part of a housing;moving said top surface with the sample to be tested relative to another part of the housing, where said one part of said housing is movable relative to the another part of the housing, and where said moving is in a z-axis direction substantially perpendicular to said top surface and uses a flexure; anddifferentially detecting said moving of said top surface with the sample to be tested relative to the another part of the housing and producing an output signal indicative thereof.2. A method as in claim 1 , further comprising moving said top surface with the sample to be tested in x and y directions that are substantially perpendicular to each other and parallel to said top surface.3. A method as in claim 1 , wherein said top surface includes a screwable connection part which allows said flexure to be preloaded.4. A detector claim 1 , comprising:a housing, having a top surface that holds a sample to be tested on one part of the top surface, and having and side surfaces that are perpendicular to said top surface;said housing controlled to move by deflecting said sample to move said top surface with the sample,to move said one part of the housing relative to another part of the housing, where said one part moves in a z-axis direction substantially perpendicular to said top surface; anda differential detector, differentially detecting movement of said ...

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Номер записи: 66
01-04-2021 дата публикации

MICRO-OPTOMECHANICAL SYSTEM AND METHOD FOR THE PRODUCTION THEREOF

Номер: US20210096152A1
Автор: Blaicher Matthias, Dietrich Philipp-Immanuel, Goering Gerald, Hölscher Hendrik, Koos Christian, Trappen Mareike
Принадлежит: KARLSRUHER INSTITUT FUR TECHNOLOGIE

The present invention relates to a micro-optomechanical system () and to a method for the production thereof. The micro-optomechanical system () comprises 2. The micro-optomechanical system as claimed in claim 1 , wherein the optical subsystem has at least one optical component selected from a group comprising an optical fiber claim 1 , a single-mode fiber claim 1 , a multi-core fiber claim 1 , a fiber array claim 1 , a fiber plug claim 1 , an integrated optical chip claim 1 , a fiber-optical component claim 1 , a micro-optical component claim 1 , an active optical component claim 1 , an optical modulator claim 1 , an optical amplifier claim 1 , an integrated optical chip and an optical signal processing unit.3. The micro-optomechanical system as claimed in claim 1 , wherein the change in the mechanical state of the optomechanical structure or the variable related thereto comprises at least one mechanical change in a component of the optomechanical structure claim 1 , wherein the mechanical change comprises a movement selected from a group comprising bending claim 1 , translation claim 1 , oscillation claim 1 , tilting claim 1 , contraction claim 1 , expansion and torsion of the optomechanical structure or of at least one partial region thereof.4. The micro-optomechanical system as claimed in claim 3 , wherein the optomechanical structure has a light-sensitive coating configured for exciting or amplifying a conversion of the optical actuator signal into the movement.5. The micro-optomechanical system as claimed in claim 3 , wherein the optomechanical structure has at least one second partial region configured for exciting or for amplifying the conversion of the optical actuator signal into the mechanical movement.6. The micro-optomechanical system as claimed in claim 5 , wherein the second partial region differs from the rest of the optomechanical structure in terms of one or more of a different coefficient of thermal expansion claim 5 , a different light absorption ...

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Номер записи: 67
12-05-2022 дата публикации

APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE

Номер: US20220146548A1
Автор: Baur Christof, Matejka Ulrich
Принадлежит:

The present application relates to an apparatus for a scanning probe microscope, said apparatus having: (a) at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip; (b) at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; and (c) at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip. 1. A method for adapting scan parameters of at least one measuring probe of a scanning probe microscope to a sample to be examined , wherein the method comprises the steps of:a. Obtaining first data of a sample to be examined;b. determining a variable for describing a contour of at least one portion of a sample surface of the sample to be examined from the first data; andc. determining a spacing between adjacent measurement points of the at least one measuring probe of the scanning probe microscope from the determined variable.2. The method of claim 1 , wherein the at least one measuring probe comprises at least one first measuring probe and at least one second measuring probe claim 1 , and the method further comprises the step of: determining the measuring probe suitable for scanning over the sample surface to be examined from the determined variable.3. The method of claim 1 , wherein the first data are obtained from a database claim 1 , in which design data of the sample to be examined are stored.4. The method of claim I claim 1 , wherein the first data are obtained from a scan of the at least one measuring probe over the sample surface with a constant spacing between adjacent measurement points.5. The method of claim 1 , wherein the first data are obtained from a scan of the at least one measuring probe without a tilt of the cantilever of the at least one ...

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Номер записи: 68
28-03-2019 дата публикации

AFM with Suppressed Parasitic Signals

Номер: US20190094265A1
Автор: SAHIN Ozgur
Принадлежит:

An AFM that suppress parasitic deflection signals is described. In particular, the AFM may use a cantilever with a probe tip that is offset along a lateral direction from a longitudinal axis of torsion of the cantilever. During AFM measurements, an actuator may vary a distance between the sample and the probe tip along a direction approximately perpendicular to a plane of the sample stage in an intermittent contact mode. Then, a measurement circuit may measure a lateral signal associated with a torsional mode of the cantilever during the AFM measurements. This lateral signal may correspond to a force between the sample and the probe tip. Moreover, a feedback circuit may maintain, relative to a threshold value: the force between the sample and the probe tip; and/or a deflection of the cantilever corresponding to the force. Next, the AFM may determine information about the sample based on the lateral signal. 1. An atomic force microscope (AFM) , comprising:a sample stage configured to hold a sample;a cantilever with a probe tip, the probe tip being offset along a lateral direction from a longitudinal axis of torsion of the cantilever;a first actuator, coupled to at least one of the sample stage and the cantilever, configured to vary a distance between the sample and the probe tip along a direction approximately perpendicular to a plane of the sample stage in an intermittent contact mode;a measurement circuit configured to measure a lateral signal associated with a torsional mode of the cantilever during the AFM measurements, the lateral signal corresponding to a force between the sample and the probe tip, wherein, during the AFM measurements, the variation of the distance has a fundamental frequency that is significantly less than a lowest flexural resonance frequency of the cantilever; anda feedback circuit, coupled to the measurement circuit and one of the first actuator and a second actuator, configured to maintain, relative to a threshold value, one of: the force ...

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Номер записи: 69
28-03-2019 дата публикации

A method of operating an afm

Номер: US20190094266A1
Автор: Atsushi Miyagi, Simon Scheuring
Принадлежит: Aix Marseille Universite, Institut National de la Sante et de la Recherche Medicale INSERM

A method of operating an atomic force microscope, comprising a probe, the probe being moved forth and back during respective trace and retrace times of a scan line, the method comprising: a) during trace time, oscillating the probe, b) generating a z feedback signal to keep an amplitude of oscillation of the probe constant at a setpoint value, the z feedback signal being generated by a first feedback loop, c) during retrace time, placing the probe in a drift compensation state by changing the setpoint value to a different value so that the z feedback signal being generated by the first feedback loop causes the probe to move away from the sample and oscillate free, d) detecting an amplitude of free oscillation of the probe and adjusting with a second feedback loop its excitation signal to maintain the amplitude of free oscillation of the probe close to a set value.

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Номер записи: 70
28-03-2019 дата публикации

METHOD OF CONTROLLING A PROBE

Номер: US20190094267A1
Автор: Pacheco Louis
Принадлежит: CONCEPT SCIENTIFIQUE INSTRUMENTS

A method for commanding a tip of a probe is disclosed, wherein a command signal, representative of the force applied by said tip on the surface of a sample to be analyzed, includes at least one cycle successively defined by: a first step where the value of said command signal decreases from a maximum value (Smax) to a minimum value (Smin) so as to move said tip away from said surface at a predetermined distance called detachment height; a second step where the value of the command signal is maintained constant at said minimum value so as to maintain the tip at said detachment height; a third step where the value of the command signal increases from the minimum value up to said maximum value so as to bring the tip closer towards the surface to be analyzed until the tip comes into contact with the surface; and a fourth step where the value of the command signal is maintained constant at said maximum value to maintain the tip in contact with the surface to be analyzed under a constant force between the tip and the surface to be analyzed; the command signal being controlled between two successive steps to avoid any oscillation of the tip. 1. A method for commanding a tip of a probe , wherein the command signal , representative of the force applied by said tip on the surface of a sample to be analyzed , comprises at least one cycle successively defined by:a first step where the value of said command signal decreases from a maximum value (Smax) to a minimum value (Smin) so as to move said tip away from said surface at a predetermined distance called detachment height;a second step where the value of the command signal is maintained constant at said minimum value so as to maintain the tip at said detachment height;a third step where the value of the command signal increases from a minimum value up to said maximum value so as to bring the tip towards the surface to be analyzed until the tip comes into contact with the surface; anda fourth step where the value of the command ...

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Номер записи: 71
12-04-2018 дата публикации

METHODS, DEVICES AND SYSTEMS FOR SCANNING TUNNELING MICROSCOPY CONTROL SYSTEM DESIGN

Номер: US20180100875A1
Автор: Ballard Joshua, Fuchs Ehud, Moheimani Seyed Omid Reza, Owen James, RANDALL John, Tajaddodianfar Farid
Принадлежит:

Methods, devices, and systems for controlling a scanning tunneling microscope system are provided. In some embodiments, the methods, devices, and systems of the present disclosure utilize a control system included in or added to a scanning tunneling microscope (STM) to receive data characterizing a tunneling current between a tip of the scanning tunneling microscope system and a sample, to estimate, in real-time, a work function associated with the scanning tunneling microscope system, and to adjust, by a control system, a position of the tip based on an estimated work function. Associated systems are described herein. 1. A method of controlling a scanning tunneling microscope system , the method comprising:receiving data characterizing a tunneling current between a tip of the scanning tunneling microscope system and a sample;estimating, in real-time, a work function associated with the scanning tunneling microscope system; andadjusting, by a control system, a position of the tip based on the estimated work function.2. The method of claim 1 , wherein the control system comprises a closed loop having a gain controller and a plant.3. The method of claim 1 , further comprising:introducing a system identification signal into a closed loop of the control system; andfiltering an output signal to identify a system identification portion of the output signal, the system identification portion of the output signal resulting at least in part from the system identification signal.4. The method of claim 3 , further comprising estimating the work function based on the system identification portion.5. The method of claim 3 , wherein the system identification signal has a fixed frequency.6. The method of claim 3 , wherein the system identification signal is selectively introduced at a first location in the control system or at a second location in the control system.7. The method of claim 1 , wherein adjusting the position of the tip comprises actuating a piezoelectric actuator to ...

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Номер записи: 72
13-04-2017 дата публикации

SCANNING PROBE MICROSCOPE AND METHOD FOR EXAMINING A SURFACE WITH A HIGH ASPECT RATIO

Номер: US20170102407A1
Автор: Baur Christof, Edinger Klaus
Принадлежит:

The invention relates to a scanning probe microscope, having: (a) a scanning device for scanning a measurement tip over a surface; (b) a cantilever for the measurement tip, wherein the cantilever has a torsion region; (c) wherein the torsion region is configured such that it undergoes torsion when a control signal is applied and thereby pivots the measurement tip; and (d) a control device for outputting the control signal when the measurement tip scans a region of the surface that can be examined more closely with a pivoted measurement tip than with-out pivoting the measurement tip. 1. A scanning probe microscope , having:a. a scanning device for scanning a measurement tip over a surface;b. a cantilever for the measurement tip, wherein the cantilever has a torsion region;c. wherein the torsion region is configured such that it undergoes torsion when a control signal is applied and thereby pivots the measurement tip; andd. a control device for outputting the control signal when the measurement tip scans a region of the surface that can be examined more closely with a pivoted measurement tip than without pivoting the measurement tip, wherein the scanning device is configured to extend a distance feedback loop for the z-movement to a z-x-movement, wherein the x-direction indicates a fast scan direction.2. The scanning probe microscope as claimed in claim 1 , wherein the torsion region comprises at least in a partial region at least two material layers that are connected to one another and have different coefficients of thermal expansion.3. The scanning probe microscope as claimed in claim 1 , wherein at least a partial region of the torsion region comprises implanted material such that the partial region and the torsion region have different coefficients of thermal expansion.4. The scanning probe microscope as claimed in claim 2 , wherein the torsion region comprises at least a first region having at least two first material layers claim 2 , which are connected to one ...

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Номер записи: 73
19-04-2018 дата публикации

Method and Device of Using a Scanning Probe Microscope

Номер: US20180106830A1
Автор: Adams Jonathan David, Fantner Georg Ernest, Nievergelt Adrian Pascal
Принадлежит:

a scanning probe microscope for high-speed imaging and/or nanomechanical mapping. The microscope comprises a scanning probe comprising a cantilever with a tip at the distal end; and means for modulating a tip-sample distance separating the tip from an intended sample to be viewed with the microscope, the means for modulating being adapted to provide a direct cantilever actuation. 117-. (canceled)18: A method for characterising a surface of a sample using atomic force microscopy with a cantilever acting as both actuator and sensor , the method comprising the steps of:generating an oscillating motion between a probe of the cantilever of the atomic force microscope and the surface of the sample by direct cantilever actuation;recording a deflection of the cantilever as a first signal as a function of time;extracting a tip-sample interaction as a second function of time from the first signal, by subtracting a background signal as a function of time;determining a peak force from the extracted tip-sample interaction;comparing the peak force to a predetermined setpoint force to determine an error signal;generating a control signal from the error signal; andactuating a z-actuator using the control signal to maintain the peak force at the predetermined setpoint force.19: The method of claim 18 , wherein the background signal includes a signal of the deflection of the direct cantilever actuation to generate tip-sample distance modulation.20: The method of claim 18 , wherein the step of generating the oscillating motion is performed by a modulation device that includes at least one of a photothermal device claim 18 , electrothermal device claim 18 , electrostatic device claim 18 , magnetic device claim 18 , and piezoelectric device.21: The method of claim 18 , wherein the step of recording the cantilever signal includes a step of reading a light beam.22: The method of claim 18 , wherein the step of recording the cantilever signal includes using a piezoresistive cantilever ...

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Номер записи: 74
23-04-2015 дата публикации

Fully Digitally Controller for Cantilever-Based Instruments

Номер: US20150113687A1
Автор: Bocek Dan, Callahan Clint, Cleveland Jason, Day Todd, Proksch Roger, Viani Mario
Принадлежит:

A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware. 1. A method , comprising:receiving a signal from a cantilever of an atomic force microscope;in a first cycle of operation, analyzing an amplitude of said signal using a first processing mode for said analyzing; andin a second cycle of operation, directly after said first cycle of operation, analyzing the amplitude of said signal using a second processing mode for said analyzing, said second processing mode being different than said first processing mode.2. A method as in claim 1 , wherein said first processing mode is a digital lock-in mode claim 1 , and said second processing mode is a peak detector mode.3. An apparatus claim 1 , comprising:a connection to an atomic force microscope that receives at least one signal indicative of movement of a cantilever of said atomic force microscope;a switching assembly, receiving said at least one signal as an input, and having a plurality of different switchable outputs, and enabling switching said at least one signal to said plurality of outputs;a digital signal processor, connected to a first of said plurality ...

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Номер записи: 75
20-04-2017 дата публикации

ACTUATOR MODULE FOR ACTUATING A LOAD

Номер: US20170108531A1
Автор: Crowcombe William Edward, DE LANGE Theodorus Jacobus, PEREBOOM Hajo Pieter, VAN DEN DOOL Teunis Cornelis, WITVOET Gerrit
Принадлежит:

The disclosure concerns an actuator module () for actuating a load (). The actuator module () comprises a deformable frame () and an actuator () connected to the deformable frame (). A time-varying force distribution (F) couples to an excited state (V) of an eigenmode (V) of the deformable frame (). The force distribution (F), as well as a stiffness distribution (K) and/or mass distribution (M) of the deformable frame are adapted such that static nodal points () of the deformable frame are coincided with mode nodal points (). The locations where the nodal points coincide can be used to connect the actuator module () to a base frame to reduce transfer of vibrations to the base frame and back which may otherwise undesirably influence the transfer function from actuator to load. The disclosure further concerns a method for designing and/or manufacturing the actuator module. 1. An actuator system comprising an actuator module for actuating a load , the actuator module comprisinga deformable frame having a stiffness distribution and mass distribution determining a vibrational eigenmode of the deformable frame, wherein an interface formed by a surface of the deformable frame comprises a plurality of mode nodal points which are stationary during modal deformation of the deformable frame in an excited state of the eigenmode; andan actuator connected to the deformable frame and arranged for exerting a time-varying force distribution onto the deformable frame via a connection between the deformable frame and the actuator, wherein the interface of the deformable frame comprises a plurality of static nodal points which are stationary during static deformation of the deformable frame when the time-varying force distribution exerted by the actuator is applied under quasi-static conditions;wherein the time-varying force distribution is arranged to couple to the excited state of the eigenmode and the deformable frame comprises an actuation surface, in use, oscillating due to the ...

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Номер записи: 76
29-04-2021 дата публикации

A METHOD FOR SEM-GUIDED AFM SCAN WITH DYNAMICALLY VARIED SCAN SPEED

Номер: US20210125809A1
Автор: CHEN Jun, CHEN Ko Lun, Sun Yu, WANG Tiancong
Принадлежит:

A method discloses topography information extracted from scanning electron microscope (SEM) images to determine the atomic force microscope (AFM) image scanning speed at each sampling point or in each region on a sample. The method includes the processing of SEM images to extract possible topography features and create a feature metric map (step 1), the conversion of the feature metric map into AFM scan speed map (step 2), and performing AFM scan according to the scan speed map (step 3). The method enables AFM scan with higher scan speeds in areas with less topography feature, and lower scan speeds in areas that are rich in topography features. 1. A method of varying scan speed of atomic force microscopy (AFM) imaging at each sampling point based on prior topography information extracted from a scanning electron microscopy (SEM) image , comprising:(a) A method for producing a feature metric map based on image processing algorithms for identifying and locating topography features from the SEM image;(b) A method for converting the feature metric map into an AFM scan speed map;(c) A method for setting scan speed for each sampling point, based on the scan speed map, to use a high scan speed for locations on the sample with minimal topography feature, and use a low scan speed for locations on the sample with rich topography features.2. The method of claim 1 , wherein said SEM images are captured using secondary electron imaging mode.3. The method of claim 1 , wherein said algorithms used to generate the feature metric map is based on detecting rapid changing gray scale pixels within the SEM images.4. The method of claim 3 , wherein said algorithm can be local entropy claim 3 , local standard deviation claim 3 , local range of gray level claim 3 , and local magnitude of gradient.5. The method of claim 1 , wherein said feature metric map quantitatively describes the amount of local topography features and distinguishes the feature-containing and feature-lacking regions in ...

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Номер записи: 77
10-07-2014 дата публикации

ULTRA-COMPACT NANOCAVITY-ENHANCED SCANNING PROBE MICROSCOPY AND METHOD

Номер: US20140196179A1
Автор: Englund Dirk R.
Принадлежит:

Techniques for measuring the topography of a surface using a device including a semiconductor slab having a distal end and a base region, and an air slot therein. A sensor tip can be coupled to the slab below the air-slot. A photonic crystal including a lattice pattern with a cavity region defined by a local perturbation in the lattice pattern can be integrated into the semiconductor slab above and below the air slot, thereby providing a split-cavity photonic crystal resonator integrated into the semiconductor slab. 1. A device for measuring the topography of a surface , comprising:a semiconductor slab having a distal end and a base region, and an air-slot therein, the air-slot having a proximal end and a distal end;a sensor tip, coupled to the slab, below the air-slot; anda photonic crystal including a lattice pattern and having a cavity region defined by a local perturbation in the lattice pattern, the photonic crystal being integrated into the semiconductor slab above and below the air-slot;wherein the air-slot runs through the cavity region, thereby splitting the cavity region and providing a split-cavity photonic crystal resonator integrated into the semiconductor slab.2. The device of claim 1 , further comprising a holder claim 1 , coupled to the base region and configured for coupling with a piezo scanning device.3. The device of claim 1 , wherein the sensor tip comprises a sensor tip having a nm-scale radius of curvature.4. The device of claim 3 , wherein the semiconductor slab comprises a planar slab.5. The device of claim 3 , wherein the semiconductor slab further comprises:a drop-filter; andwherein the air-slot comprises an air-slot adapted to function as a waveguide, coupling the cavity and the drop-filter.6. The device of claim 5 , further comprising a detector claim 5 , coupled to the drop-filter claim 5 , configured to measure a property of light resonated by the split cavity photonic crystal resonator.7. The device of claim 6 , wherein the detector ...

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Номер записи: 78
03-05-2018 дата публикации

ATOMIC FORCE MICROSCOPE AND CONTROL METHOD OF THE SAME

Номер: US20180120343A1
Автор: SAKAI Nobuaki
Принадлежит: OLYMPUS CORPORATION

An atomic force microscope acquires sample information by performing relative raster scanning between a cantilever and a sample across an XY-plane, while causing an interaction to be generated between a probe provided at a free end of the cantilever and the sample. The atomic force microscope includes a raster-scanning-information generator to generate raster scanning information, a raster-scanning controller to control the raster scanning based on the raster scanning information, and an interaction controller to control strength of the interaction based on the raster scanning information. The interaction controller relatively reduces the strength of the interaction, when a relative speed between the cantilever and the sample across the XY-plane of the raster scanning relatively decreases. 1. An atomic force microscope to acquire sample information by performing relative raster scanning between a cantilever and a sample across an XY-plane , while causing an interaction to be generated between a probe provided at a free end of the cantilever and the sample , the atomic force microscope comprising:a raster-scanning-information generator to generate raster scanning information;a raster-scanning controller to control the raster scanning based on the raster scanning information; andan interaction controller to control strength of the interaction based on the raster scanning information,the interaction controller relatively reducing the strength of the interaction, when a relative speed between the cantilever and the sample across the XY-plane of the raster scanning relatively decreases.2. The atomic force microscope according to claim 1 , wherein the interaction controller comprises a relative-speed-information generator to generate relative speed information corresponding to the relative speed between the cantilever and the sample based on the raster scanning information claim 1 , and the interaction controller controls the strength of the interaction based on the ...

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Номер записи: 79
16-04-2020 дата публикации

SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, MACHINE LEARNING DEVICE, AND PREDICTION DEVICE

Номер: US20200116480A1
Автор: Shima Shohei
Принадлежит:

A substrate cleaning method which can determine an appropriate replacement time of a cleaning tool is disclosed. The substrate cleaning method includes: rubbing a cleaning tool against a substrate in the presence of a cleaning liquid while supplying the cleaning liquid onto the substrate to thereby clean a surface of the substrate; acquiring surface data representing surface properties of the cleaning tool in a wet condition by use of an atomic force microscope after performing cleaning of the surfaces of a predetermined number of substrates; and comparing the surface data with a predetermined threshold to thereby determine a replacement time of the cleaning tool. 1. A substrate cleaning method comprising:rubbing a cleaning tool against a substrate in the presence of a cleaning liquid while supplying the cleaning liquid onto the substrate to thereby clean a surface of the substrate;acquiring surface data representing surface properties of the cleaning tool in a wet condition by use of an atomic force microscope after performing cleaning of the surfaces of a predetermined number of substrates; andcomparing the surface data with a predetermined threshold to thereby determine a replacement time of the cleaning tool.2. The substrate cleaning method according to claim 1 , wherein the surface data is an arithmetic mean roughness of the cleaning tool acquired by use of the atomic force microscope.3. The substrate cleaning method according to claim 1 , wherein the surface data is a maximum difference in height over the surface of the cleaning tool claim 1 , and the maximum difference in height is a difference between a maximum value and a minimum value of the surface roughness of the cleaning tool acquired by the atomic force microscope.4. The substrate cleaning method according to claim 1 , wherein the threshold is an average diameter of particles attached to the surface of the substrate.5. The substrate cleaning method according to claim 1 , wherein the surface data is a ...

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Номер записи: 80
16-04-2020 дата публикации

SCANNING PROBE MICROSCOPY SYSTEM FOR AND METHOD OF MAPPING NANOSTRUCTURES ON THE SURFACE OF A SAMPLE

Номер: US20200116754A1
Автор: Dekker Albert, Kastelijn Aukje Arianne Annette, Kramer Geerten Frans Ijsbrand, Kruidhof Rik, NIEUWKOOP Evert, Sadeghian Marnani Hamed, Toet Peter Martijn, van Riel Martinus Cornelius Johannes Maria
Принадлежит:

The present document relates to a scanning probe microscopy system and method for mapping nanostructures on the surface of a sample. The system comprises a sample support structure, a scan head including a probe comprising a cantilever and a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system also includes an optical source, and a sensor unit for obtaining a sensor signal indicative of a position of the probe tip. The sensor unit includes a partially reflecting element for reflecting a reference fraction and for transmitting a sensing fraction of the optical signal. It further includes directional optics for directing the sensing fraction as an optical beam towards the probe tip, and for receiving a reflected fraction thereof to provide a sensed signal. Moreover the sensor includes an interferometer for providing one or more output signals, and signal conveyance optics for conveying the sensed signal and the reference signal to the interferometer. The directional optics is configured for directing the sensing fraction such that at least a part of the sensing fraction is reflected by the probe tip such as to form the reflected fraction. 1. A scanning probe microscopy system for mapping nanostructures on the surface of a sample , comprising:a sample support structure for supporting the sample,a scan head including a probe comprising a cantilever and a probe tip arranged on the cantilever,an actuator for scanning the probe tip relative to the sample surface for mapping of the nanostructures,an optical source for providing an optical signal, and [ reflect a reference fraction of the optical signal to provide a reference signal, and', 'transmit a sensing fraction of the optical signal;, 'a partially reflecting element, configured to, directing the sensing fraction as an optical beam towards the probe tip, and', 'receiving a reflected fraction of the optical beam to provide a sensed signal;, 'a directional optics configured for ...

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Номер записи: 81
14-05-2015 дата публикации

SCANNING PROBE MICROSCOPE

Номер: US20150135374A1
Автор: SAKAI Nobuaki, UEKUSA Yoshitsugu
Принадлежит: OLYMPUS CORPORATION

A scanning probe microscope to measure a sample set on a sample mount in liquid includes a scanning mechanism to scan a cantilever provided with a probe at a free end along an X-axis, a Y-axis, and a Z-axis perpendicular to each other, and a liquid contact member including an optical transmission portion to transmit detection light for detecting a displacement of the cantilever, and arranged at least partially in contact with the liquid. The liquid contact member is not scanned by the scanning mechanism. 1. A scanning probe microscope to measure a sample set on a sample mount in liquid , comprising:a scanning mechanism to scan a cantilever provided with a probe at a free end along an X-axis, a Y-axis, and a Z-axis perpendicular to each other; anda liquid contact member including an optical transmission portion to transmit detection light for detecting a displacement of the cantilever, and arranged at least partially in contact with the liquid,the liquid contact member being not scanned by the scanning mechanism.2. The scanning probe microscope according to claim 1 , further comprising a support member to support the scanning mechanism and the liquid contact member.3. The scanning claim 1 , probe microscope according to claim 1 , wherein the liquid contact member includes a cell forming portion to form a liquid cell together with the sample mount.4. The scanning probe microscope according to claim 1 , whereinthe scanning mechanism includes a holder to hold a cantilever chip including the cantilever, andthe liquid contact member has a through hole, the cantilever chip and at least part of the holder projecting into the liquid through the through hole.5. The scanning probe microscope according to claim 4 , wherein a gap between the through hole and the holder is sealed in watertight by an elastic member.6. The scanning probe microscope according to claim 5 , wherein the optical transmission portion is constituted by a second through hole formed in the liquid contact ...

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Номер записи: 82
21-05-2015 дата публикации

MULTI-ACTUATOR DESIGN AND CONTROL FOR A HIGH-SPEED/LARGE-RANGE NANOPOSITIONING SYSTEM

Номер: US20150137712A1
Автор: Bozchalooi Iman Soltani, Houck Andrew Careaga, Youcef-Toumi Kamal
Принадлежит:

Multi-actuator system. The system includes at least two nano positioners having different ranges and bandwidths located in cascaded serial form to contact and move an object. A control system employs data-based control design to combine the at least two nano positioners so as to apportion actuation responsibilities among the at least two nano positioners so as to compensate for their coupled dynamics while moving the object. It is preferred to provide a separate controller for controlling separately each of the at least two nano positioners. Parameters of the separate controllers may be determined by minimizing output error. 1. Multi-actuator system for nano positioning control comprising:at least two nano positioners having different ranges and bandwidths located in cascaded series form to contact and move an object; anda control system to combine the at least two nano positioners so as to apportion actuation responsibilities among the at least two nano positioners and to compensate for their coupled dynamics while moving the object.2. The system of further including a separate controller for controlling separately each of the at least two nano positioners.3. The system of wherein the controller system employs a data-based control design scheme4. The system of wherein parameters of the separate controllers are determined by minimizing output error.5. The system of wherein the at least two nano positioners each contain a piezoelectric stack.6. The system of wherein the at least two nano positioners position the object in an atomic force microscope scanner. This patent application claims priority to provisional application Ser. No. 61/906,547 filed on Nov. 20, 2013, the contents of which are incorporated herein by reference.This invention relates to nanopositioning such as for an atomic force microscope, and more particularly to such a nanopositioning system using series-connected actuators that simultaneously achieve high speed performance as well as large out-of- ...

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Номер записи: 83
11-05-2017 дата публикации

AM/FM Measurements Using Multiple Frequency of Atomic Force Microscopy

Номер: US20170131322A1
Автор: Bemis Jason, Labuda Aleksander, Proksch Roger
Принадлежит:

Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation. 1. An atomic force microscope , comprising:a cantilever having a tip at one end and a driving part at its other end;a cantilever position detector;a positioning system for controlling a position of the cantilever relative to the sample, the positioning system operating by: first operating by turning off a drive mechanism and positioning the cantilever at a specified point relative to the sample, and determining a stiffness of the cantilever from a measured thermal spectrum taken far from a surface of the sample and recording information indicative of the stiffness as representing a natural frequency of the cantilever; second approaching the tip of the cantilever to closer proximity with the sample and turning the drive mechanism on and setting a drive frequency of the cantilever to the natural frequency of the cantilever as measured during said first operating, and approaching the tip of the cantilever to the surface of the sample until contact is established by setting the feedback set point to a desired interaction amplitude that is less than a free oscillation amplitude; third operating by fully separating the sample from the tip of the cantilever and tuning the cantilever using the drive frequency using a first relationship acquired; and after said tuning, turning off the drive mechanism and acquiring an additional thermal spectrum of the cantilever that is obtained during conditions that are ...

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Номер записи: 84
11-05-2017 дата публикации

SYSTEM AND METHOD OF PERFORMING SCANNING PROBE MICROSCOPY ON A SUBSTRATE SURFACE

Номер: US20170131323A1
Автор: Crowcombe William Edward, Kramer Geerten Frans ljsbrand, Sadeghian Marnani Hamed, VAN DEN DOOL Teunis Cornelis, Winters Jasper
Принадлежит: Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO

The invention is directed at a method of performing scanning probe microscopy on a substrate surface using a scanning probe microscopy system, the system including at least one probe head, the probe head comprising a probe tip arranged on a cantilever and a tip position detector for determining a position of the probe tip along a z-direction transverse to an image plane, the method comprising: positioning the at least one probe head relative to the substrate surface; moving the probe tip and the substrate surface relative to each other in one or more directions parallel to the image plane for scanning of the substrate surface with the probe tip; and determining the position of the probe tip with the tip position detector during said scanning for mapping nanostructures on the substrate surface; wherein said step of positioning is performed by placing the at least one probe head on a static carrier surface. 1. Method of performing scanning probe microscopy on a substrate surface using a scanning probe microscopy system , the system including at least one probe head , the probe head comprising a probe tip arranged on a cantilever and a tip position detector for determining a position of the probe tip along a z-direction transverse to an image plane , the method comprising:positioning the at least one probe head relative to the substrate surface;moving the probe tip and the substrate surface relative to each other in one or more directions parallel to the image plane for scanning of the substrate surface with the probe tip; anddetermining the position of the probe tip with the tip position detector during said scanning for mapping nanostructures on the substrate surface;wherein said step of positioning is performed by placing the at least one probe head on a static carrier surface;characterized in thatplacing of the at least one probe head is performed by a positioning structure, andwherein the or each probe head comprises a carrier cooperating with the positioning ...

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Номер записи: 85
11-05-2017 дата публикации

SCANNING PROBE MICROSCOPE

Номер: US20170131324A1
Автор: HIRADE Masato
Принадлежит: SHIMADZU CORPORATION

A scanning probe microscope includes sample moving means and including a cylindrical piezoelectric scanner and configured to move a sample arranged on an upper end surface of the piezoelectric scanner by bending the piezoelectric scanner by an applied voltage, scanning control means configured to control a relative position of the probe and the sample by controlling the applied voltage, sample thickness acquisition means configured to acquire a thickness value of the sample , and correlative information determination means configured to determine correlative information showing a corresponding relationship between the applied voltage to the piezoelectric scanner and a displacement amount of a surface of the sample in a horizontal direction using the thickness value, wherein the scanning control means performs controlling of the relative position using the correlative information. With this, it becomes possible to perform accurate sample scanning considering effects on the movement amount of the sample in the XY direction due to the thickness. 1. A scanning probe microscope for detecting a three-dimensional shape or a physical quantity of a sample surface by scanning the sample surface by a minute probe , comprising:a) sample moving means including a cylindrical piezoelectric scanner and configured to move a sample arranged on an upper end surface of the piezoelectric scanner by bending the piezoelectric scanner by an applied voltage;b) scanning control means configured to control a relative position of the probe and the sample by controlling the applied voltage;c) sample thickness acquisition means configured to acquire a thickness value of the sample; andd) correlative information determination means configured to determine correlative information showing a corresponding relationship between the applied voltage to the piezoelectric scanner and a displacement amount of a surface of the sample in a horizontal direction using the thickness value,wherein the scanning ...

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Номер записи: 86
07-08-2014 дата публикации

Dielectrophoretic Tweezers as a Platform for Molecular Force Spectroscopy in a Highly Parallel Format

Номер: US20140216935A1
Автор: Vezenov Dmitri
Принадлежит: Lehigh University

Provided herein are methods of performing force spectroscopy, the methods comprising the steps of providing dielectrophoretic tweezers having at least one set of macroscopic electrodes, at least one of the electrodes having a microfabricated dielectric structure comprising a microwell; depositing force probes on a surface; binding the force probes to molecules on the surface; and applying voltage across set of macroscopic electrodes to thereby manipulate the molecules. Also provided are novel apparatus for performing force spectroscopy, the apparatus comprising dielectrophoretic tweezers having at least one set of macroscopic electrodes, at least one of the electrodes having a microfabricated dielectric structure comprising a microwell. 1. A method of performing force spectroscopy , the method comprising the steps of providing dielectrophoretic tweezers having at least one set of macroscopic electrodes , at least one of the electrodes having a microfabricated dielectric structure comprising a microwell; depositing force probes on a surface; binding the force probes to molecules on the surface; and applying voltage across set of macroscopic electrodes to thereby manipulate the molecules.2. The method of claim 1 , wherein the macroscopic electrodes comprise parallel flat electrodes configured to manipulate an array of polymer microspheres (force probes).3. The method of claim 2 , wherein the molecules are biomolecules.4. The method of claim 3 , wherein the bio molecules comprise DNA claim 3 , and wherein the environment of the probes approximates a physiological condition.5. An apparatus for performing force spectroscopy claim 3 , the apparatus comprising comprising dielectrophoretic tweezers having at least one set of macroscopic electrodes claim 3 , at least one of the electrodes having a microfabricated dielectric structure comprising a microwell. This application claims priority to U.S. Provisional Patent Application Ser. No. 61/680,984 filed Aug. 8, 2012.This ...

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Номер записи: 87
17-05-2018 дата публикации

Method and Apparatus of Operating a Scanning Probe Microscope

Номер: US20180136251A1
Автор: Hu Shuiqing, Hu Yan, Ma Ji, Shi Jian, Su Chanmin
Принадлежит:

Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined, and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation. 1. A method for determining an occurrence of parachuting of a probe of a scanning probe microscope operating in an oscillating mode , the method comprising:providing relative motion between a probe and a sample and controlling that motion using a feedback loop that generates a feedback error signal in peak force tapping (PFT) mode;detecting at least one of a peak force, an adhesion force and a peak-to-peak force on the probe; anddetermining one of a group including: a) whether the peak force, the adhesion force or the peak-to-peak force within an oscillation period of the relative motion is less than a threshold value, b) a point at which the feedback error signal is between two threshold values indicating the peak force is about zero, and c) whether the standard deviation and/or spectrum amplitude, at a certain frequency or selected frequencies, of the feedback error signal is less than a threshold value which indicates that the feedback loop is open.2. The method of claim 1 , further comprising claim 1 , after determining an occurrence of parachuting claim 1 , returning the probe to the sample by moving at least one of the probe and the sample.3. The method of claim 2 , further comprising moving the probe toward the sample when the feedback error signal ...

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Номер записи: 88
07-08-2014 дата публикации

Modular Atomic Force Microscope

Номер: US20140223612A1
Автор: Cleveland Jason, Costales Paul, Hensel Jonathan, HODGSON James, Klonowski Matthew, Proksch Roger, Rutgers Maarten, Viani Mario, Walters Deron
Принадлежит: ASYLUM CORPORATION

A modular AFM/SPM which provides faster measurements, in part through the use of smaller probes, of smaller forces and movements, free of noise artifacts, that the old generations of these devices have increasingly been unable to provide. The modular AFM/SPM includes a chassis, the foundation on which the modules of the instrument are supported; a view module providing the optics for viewing the sample and the probe; a head module providing the components for the optical lever arrangement and for steering and focusing those components; a scanner module providing the XYZ translation stage that actuates the sample in those dimensions and the engage mechanism; a isolation module that encloses the chassis and provides acoustic and/or thermal isolation for the instrument and an electronics module which, together with the separate controller, provide the electronics for acquiring and processing images and controlling the other functions of the instrument. All these modules and many of their subassemblies are replaceable and potentially upgradeable. This allows updating to new technology as it becomes available. 1. An atomic force microscope system operating to characterize a sample , comprising:a chassis;an atomic force microscope cantilever, coupled to the chassis;an isolation system, forming an enclosure that encloses the chassis, and provides acoustic and thermal isolation for the atomic force microscope system, said isolation system including a first heater under said chassis, and a duct providing a laminar flow of heated air into an inside of the enclosure;a closed loop temperature control, controlling a temperature of said inside of the enclosure by controlling power to said first heater, and controlling said laminar flow;a view system, coupled to said chassis, that has optical features which allow optical viewing in an area of the cantilever or of the sample, said view system having a draft shield around an area of said optical viewing;a head system, coupled to ...

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Номер записи: 89
07-08-2014 дата публикации

Scanning probe microscope and control method thereof

Номер: US20140223613A1
Автор: Nobuaki Sakai
Принадлежит: Olympus Corp

A scanning probe microscope includes a cantilever having a probe at a free thereof, a displacement detector to output a displacement signal of the cantilever, a vibrator to vibrate the cantilever, and a scanner to three-dimensionally relatively move the sample and probe. A mixed signal generator includes an amplitude information detecting section to provide a vibrating signal to the vibrator and generate an amplitude signal including information of an amplitude of the displacement signal, and a phase difference information detecting section to generate a phase signal including information of a phase difference between the displacement signal and the synchronous signal, and adds the displacement signal and the synchronous signal to generate a mixed signal. A controller to control the scanner includes a Z control section, which controls the distance between the sample and the probe on the basis of the mixed signal.

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Номер записи: 90
07-08-2014 дата публикации

POTENTIAL MEASUREMENT DEVICE AND ATOMIC FORCE MICROSCOPE

Номер: US20140223614A1
Автор: Fukuma Takeshi, KOBAYASHI Naritaka
Принадлежит:

A device includes: an electrode; a displacement measurement unit outputting voltage corresponding to electrostatic force between the electrode and a sample; a first power supply applying a first voltage between the electrode and sample; a second power supply adding, to the first voltage, a second voltage having a different frequency than the first voltage, and applying the added voltage; and a signal detection unit outputting a particular frequency component's magnitude contained in the displacement measurement unit's output, in which the signal detection unit extracts, from the output by the displacement measurement unit, and outputs, to a potential calculation unit, magnitude and phase of a frequency component of a frequency identical to the frequency of the first voltage, and magnitude of a frequency component of a frequency identical to a frequency equivalent to a difference between the frequencies of the first and second voltages, to measure the sample's surface potential. 1. A potential measurement device for measuring a surface potential of a sample , the potential measurement device comprising:an electrode;a displacement measurement unit configured to output a voltage corresponding to an electrostatic force between the electrode and the sample;a first alternating-current power supply which applies a first alternating-current voltage between the electrode and the sample;a second alternating-current power supply which adds, to the first alternating-current voltage, a second alternating-current voltage having a frequency different from a frequency of the first alternating-current voltage, and applies the added voltage between the electrode and the sample; anda signal detection unit configured to output a magnitude of a particular frequency component contained in the voltage outputted by the displacement measurement unit,wherein the signal detection unit is configured to extract, from the voltage outputted by the displacement measurement unit, and output, to a ...

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Номер записи: 91
08-09-2022 дата публикации

Method and metrology tool for determining information about a target structure, and cantilever probe

Номер: US20220283122A1
Автор: Coen Adrianus Verschuren, Mustafa Ümit ARABUL, Zili ZHOU
Принадлежит: ASML Netherlands BV

The disclosure relates to determining information about a target structure formed on a substrate using a lithographic process. In one arrangement, a cantilever probe is provided having a cantilever arm and a probe element. The probe element extends from the cantilever arm towards the target structure. Ultrasonic waves are generated in the cantilever probe. The ultrasonic waves propagate through the probe element into the target structure and reflect back from the target structure into the probe element or into a further probe element extending from the cantilever arm. The reflected ultrasonic waves are detected and used to determine information about the target structure.

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Номер записи: 92
30-04-2020 дата публикации

Depassivation Lithography by Scanning Tunneling Microscopy

Номер: US20200132718A1
Автор: Fuchs Ehud, Lake Joseph, Owen James H. G., RANDALL John
Принадлежит:

Methods, devices, and systems for forming atomically precise structures are provided. In some embodiments, the methods, devices, and systems of the present disclosure utilize a scanning tunneling microscope (STM) system to receive a sample having a surface to be patterned. The system positions a conductive tip over a pixel region of the surface. While the conductive tip remains laterally fixed relative to the surface, the system applies a bias voltage between the conductive tip and the surface such that a current between the conductive tip and the surface removes at least one atom from the pixel region. The system stops applying the voltage and current when it senses the removal of the at least one atom. The system then verifies that the at least one atom has been removed from the pixel region. 1. A method of patterning a surface , the method comprising:receiving a sample having a surface to be patterned;positioning a conductive tip of a scanning tunneling microscope over a pixel region of the surface, wherein the pixel region includes a plurality of dimers, each including a plurality of atoms of a first element and a plurality of atoms of a second element;while the conductive tip remains laterally fixed relative to the surface, applying a bias voltage between the conductive tip and the surface such that a current between the conductive tip and the surface removes at least one atom from the pixel region;detecting a signal indicating depassivation of the pixel region; andverifying that the at least one atom has been removed from the pixel region.2. The method of claim 1 , wherein the pixel region is a first pixel region claim 1 , the method further comprising:moving the conductive tip to a second pixel region after the detecting of the signal and the verifying that the at least one atom has been removed from the first pixel region; andthereafter, while the conductive tip remains laterally fixed relative to the surface, applying the bias voltage between the conductive ...

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Номер записи: 93
28-05-2015 дата публикации

Modular atomic force microscope with environmental controls

Номер: US20150150163A1
Автор: Cleveland Jason, Hodgeson Jim, Proksch Roger, Rutgers Maarten, Viani Mario
Принадлежит: Oxford Instruments Asylum Research, Inc.

A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures. 2. A system as in claim 1 , wherein said cantilever holder is replaceable to allow replacement of the cantilever with a different cantilever having a different size or functionality.3. The system as in claim 1 , wherein said dovetail includes a spot that seals to the stage.4. the system as in claim 1 , wherein said dovetail includes a groove that is formed in the stage claim 1 , and holds a seal.5. the system as in claim 1 , further comprising a diaphragm connected between said holder for the cantilever and said stage.6. The system as in claim 5 , wherein said diaphragm is a rolling diaphragm that allows movement between said sample and said stage.7. The system as in claim 6 , wherein said rolling diaphragm is formed of an elastomer.8. An atomic force microscope scope system claim 6 , comprising:a sample stage, having a sample surface for holding a sample to be measured;a cantilever part, having a cantilever holder holding a cantilever that faces towards said sample surface;an isolation structure, sealing between said sample stage and said cantilever part, to form a chamber between said sample stage and said cantilever part, while allowing movement between said sample stage and said cantilever part, said isolation structure including a diaphragm that is connected to a first portion on said sample stage, and also connected to a second portion on said cantilever part, wherein said isolation structure seals a chamber between said sample stage and said cantilever part, but allows movement between said sample stage and said cantilever part.9. The system as in claim 8 , wherein said diaphragm is sealed by tightening to both said cantilever part and to said sample stage ...

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Номер записи: 94
10-06-2021 дата публикации

PHASE-SHIFT-BASED AMPLITUDE DETECTOR FOR A HIGH-SPEED ATOMIC FORCE MICROSCOPE

Номер: US20210172976A1
Автор: MIYAGI Atsushi, SCHEURING Simon
Принадлежит:

An atomic force microscope includes a cantilever operating in amplitude modulation mode. A controller determines the amplitude of the cantilever oscillation by processing a signal representative of the cantilever motion by square-rooting a signal having a value substantially equal to a sum of a square of the received signal and a squared and phase-shifted version of the received signal. The aforementioned processing, in some implementations is implemented using analog circuit components. 1. An atomic force microscope , havinga cantilever operating in amplitude modulation mode, and receive an input signal indicative of motion of the cantilever,', 'calculate a resultant amplitude signal by square-rooting a signal having a value substantially equal to a sum of a square of the input signal and a squared and phase-shifted version of the input signal, and', 'output the resultant amplitude signal., 'a controller including at least one processor configured to2. The atomic force microscope of claim 1 , wherein the controller includes a circuit having:an input branch receiving the input signal, at least one −90 degree phase shifter for phase shifting the input signal and', 'a second multiplier for squaring the phase shifted input signal,, 'a first branch havinga second branch having a first multiplier for squaring the input signal,a merge node coupling the first and second branches, the merge node including an adder for summing the square of the input signal with the square of the phase shifted input signal,a third branch connected to the merge node, the third branch including square rooting logic configured to apply a square-root function to the output of the adder, andan output branch connected to the third branch configured to output the resultant amplitude signal.3. The atomic force microscope of claim 2 , wherein the input branch couples to both the first branch and the second branch.4. The atomic force microscope of claim 2 , wherein the at least one −90 degree phase ...

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Номер записи: 95
24-05-2018 дата публикации

ATOMIC FORCE MICROSCOPE AND CONTROL METHOD OF THE SAME

Номер: US20180143220A1
Автор: SAKAI Nobuaki
Принадлежит: OLYMPUS CORPORATION

An atomic force microscope is to acquire sample information by a raster scanning of a cantilever with respect to a sample. The atomic force microscope includes a raster-scanning-information generator to generate raster scanning information including timing information. The timing information includes a first timing at which a relative speed between the cantilever and sample decreases lower than a threshold, and a second timing at which the relative speed increases higher than the threshold after the first timing. The atomic force microscope also includes a raster-scanning controller to control the raster scanning, and an interaction controller to decrease the strength of an interaction between the cantilever and sample at the first timing, and increase the strength of the interaction at the second timing. 1. An atomic force microscope to acquire sample information by a raster scanning of a cantilever with respect to a sample in combination of scanning in Y-direction and scanning in X-direction faster than the scanning in Y-direction , the atomic force microscope comprising:a raster-scanning-information generator to generate raster scanning information including timing information synchronized with the scanning in the X-direction, the timing information including a first timing at which a relative speed between the cantilever and the sample decreases lower than a predetermined threshold, and a second timing at which the relative speed increases higher than the predetermined threshold after the first timing;a raster-scanning controller to control the raster scanning based on the raster scanning information; andan interaction controller to, based on the timing information, relatively decrease the strength of an interaction between a probe provided at a free end of the cantilever and the sample at the first timing, and relatively increase the strength of the interaction at the second timing.2. The atomic force microscope according to claim 1 , wherein the raster ...

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Номер записи: 96
24-05-2018 дата публикации

Imaging a Gap Between Sample and Probe of a Scanning Probe Microscope in a Substantially Horizontal Side View

Номер: US20180143221A1
Автор: BRANDNER Markus, Gomez-Casado Alberto, Koller Daniel
Принадлежит:

A scanning probe microscope analyses a sample by moving a probe and the sample relative to one another. The scanning probe microscope includes a detection unit for detecting an image of a gap between the sample and the probe in a substantially horizontal side view. 1. A scanning probe microscope for analyzing a sample by moving a probe and the sample relative to one another , the scanning probe microscope , comprising:a detection unit for detecting an image of a gap between the sample and the probe in a substantially horizontal side view.2. The scanning probe microscope according to claim 1 , wherein the image in the substantially horizontal side view is detected at an angle of less than 5° to a horizontal axis.3. The scanning probe microscope according to claim 1 , further comprising:a drive unit configured for moving at least one of the probe and the sample for mutually approaching probe and sample from an initial distance to a final distance of less than 1 mm, based on the detected image of the gap.4. The scanning probe microscope according to claim 3 , wherein the drive unit is configured for moving at least one of the probe and the sample for mutually approaching probe and sample from the initial distance to an intermediate distance with a first velocity and subsequently from the intermediate distance to the final distance with a second velocity smaller than the first velocity based on the detected image of the gap.5. The scanning probe microscope according to claim 1 , wherein the detection unit is configured for being capable of detecting a size of the gap for samples of different sizes without readjustment.6. The scanning probe microscope according to claim 1 , further comprising:an illumination unit configured for illuminating the gap with electromagnetic radiation from a substantially horizontal side position.7. The scanning probe microscope according to claim 6 , comprising at least one of the following features:wherein the detecting unit and the ...

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Номер записи: 97
04-06-2015 дата публикации

SCANNING MECHANISM AND SCANNING PROBE MICROSCOPE

Номер: US20150153385A1
Автор: SAKAI Nobuaki, UEKUSA Yoshitsugu
Принадлежит: OLYMPUS CORPORATION

A scanning mechanism includes a movable portion to which a scanning target object is attached, and an X-Y actuator to scan the movable portion in an X direction and a Y direction perpendicular to the X direction. The X-Y actuator is symmetrical with respect to a straight line parallel to the Y direction and asymmetrical with respect to a straight line parallel to the X direction. 1. A scanning mechanism to scan a scanning target object at high speed in an X direction and at low speed in a Y direction perpendicular to the X direction , comprising:a movable portion to which the scanning target object is attached; andan X-Y actuator to scan the movable portion in the X direction and the Y direction, the X-Y actuator being symmetrical with respect to a straight line parallel to the Y direction and asymmetrical with respect to a straight line parallel to the X direction.2. The scanning mechanism according to claim 1 , further comprising a fixed frame surrounding the movable portion claim 1 ,wherein the X-Y actuator comprises first and second X actuators to scan the movable portion in the X direction, and a Y actuator to scan the movable portion in the Y direction,the first and second X actuators are arranged on both sides of the movable portion along an X-axis between the fixed frame and the movable portion along the X-axis, andthe Y actuator is arranged between the fixed frame and the movable portion along a Y-axis perpendicular to the X-axis.3. The scanning mechanism according to claim 2 , wherein the Y actuator is larger in displacement amount per unit driving signal than the first and second X actuators.4. The scanning mechanism according to claim 3 , wherein the first X actuator claim 3 , the second X actuator claim 3 , and the Y actuator comprise a first multilayer piezoelectric element claim 3 , a second multilayer piezoelectric element claim 3 , and a third multilayer piezoelectric element claim 3 , respectively claim 3 ,the first multilayer piezoelectric element ...

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Номер записи: 98
02-06-2016 дата публикации

PROBE MICROSCOPE

Номер: US20160154022A1
Автор: Humphris Andrew
Принадлежит:

A scanning probe microscope comprising: a signal generator providing a drive signal for an actuator to move a probe repeatedly towards and away from a sample. In response to the detection of an interaction of the probe with the sample the drive signal is modified to cause the probe to move away from the sample. The drive signal comprises an approach phase in which an intensity of the drive signal increases to a maximum value; and a retract phase in which the intensity of the drive signal reduces from the maximum value to a minimum value in response to the detection of the surface position. The intensity of the drive signal is held at the minimum value during the retract phase and then increased at the end of the retract phase. The duration of the retract phase is dependent on the maximum value in the approach phase. 1. A scanning probe microscope comprising:a probe that is mechanically responsive to a driving force;a signal generator for providing a drive signal to an actuator that generates the driving force by heating the probe, the drive signal being such as to cause the actuator to move the probe repeatedly towards and away from a sample;a detection system arranged to output a detection signal indicative of a position of the probe; andsignal processing apparatus arranged to monitor the probe as the probe approaches the sample and to detect a surface position at which the probe interacts with the sample;wherein in response to detection of the surface position the signal processing apparatus prompts the signal generator to modify the drive signal to cause the probe to move away from the sample,wherein the signal generator is arranged so that the drive signal comprises a series of cycles, each cycle comprising an approach phase in which an intensity of the drive signal increases to a maximum value to heat the probe and cause the probe to move towards the sample; and a retract phase after the approach phase in which the intensity of the drive signal reduces from the ...

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Номер записи: 99
31-05-2018 дата публикации

APPARATUS AND METHODS FOR INVESTIGATING A SAMPLE SURFACE

Номер: US20180149673A1
Автор: HUO Fengwei, WU Jin
Принадлежит:

An apparatus for investigating a sample surface is disclosed. The apparatus comprises: a probe array comprising a substrate and a plurality of probe tips extending from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface; an actuator configured to move the probe array towards the sample surface; a light source configured to illuminate the probe tips with an illumination through the substrate; and an image capture device arranged to detect a change in intensity of the illumination reflected from the probe tips. 1. An apparatus for investigating a sample surface , the apparatus comprising:a probe array comprising a substrate and a plurality of probe tips extending from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface;an actuator configured to move the probe array towards the sample surface;a light source configured to illuminate the probe tips with an illumination through the substrate; andan image capture device arranged to detect a change in intensity of the illumination reflected from the probe tips.2. An apparatus according to wherein the probe tips comprise an elastomer.3. An apparatus according to claim 2 , wherein the probe tips comprise polydimethylsiloxane (PDMS).4. An apparatus according to claim 1 , wherein the actuator is configured to move the probe array towards the sample surface and away from the sample surface.5. An apparatus according to claim 1 , further comprising an XY scanning stage configured to scan the probe array parallel to the sample surface.6. An apparatus according to claim 1 , wherein the probe tips of the probe array have a length of between 1 μm and 500 μm.7. An apparatus according to claim 1 , wherein the actuator is configured to move the probe array towards and/or away from the sample surface at a speed in the range of 0.1 μm/s to 2000 μm/s.8. An apparatus according to claim 1 , wherein ...

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Номер записи: 100