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Небесная энциклопедия

Космические корабли и станции, автоматические КА и методы их проектирования, бортовые комплексы управления, системы и средства жизнеобеспечения, особенности технологии производства ракетно-космических систем

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Мониторинг СМИ

Мониторинг СМИ и социальных сетей. Сканирование интернета, новостных сайтов, специализированных контентных площадок на базе мессенджеров. Гибкие настройки фильтров и первоначальных источников.

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Поддерживает ввод нескольких поисковых фраз (по одной на строку). При поиске обеспечивает поддержку морфологии русского и английского языка
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Применить Всего найдено 1164. Отображено 100.
09-08-2012 дата публикации

Fast-scanning spm scanner and method of operating same

Номер: US20120204295A1
Автор: Craig Cusworth, Craig Prater, Nghi Phan
Принадлежит: BRUKER NANO INC

A high-bandwidth SPM tip scanner includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.

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Номер записи: 1
02-05-2013 дата публикации

Probe head scanning probe microscope including the same

Номер: US20130111635A1
Автор: In-Su Jeon
Принадлежит: SAMSUNG ELECTRONICS CO LTD

A probe head and a scanning probe microscope (SPM) including the probe head are provided. The probe head includes a plurality of cantilevers, each including a probe; and a holder on which the plurality of cantilevers are installed, wherein a cantilever facing a sample is changed by rotating the holder.

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Номер записи: 2
27-06-2013 дата публикации

ELECTRICAL-MECHANICAL COMPLEX SENSOR FOR NANOMATERIALS

Номер: US20130167272A1
Автор: Jang Hoon Sik, Jeon Sang Gu, KIM Min Seok, Nahm Seung Hoon
Принадлежит: Korea Research Institute of Standards and Science

Disclosed is an electrical-mechanical complex sensor for nanomaterials, including: a detector having a piezoelectric film therein, for measuring a mechanical property of a nanomaterial when a bending or tensile load is applied to the nanomaterial; a first detection film formed at an end of the detector to measure the mechanical property and an electrical property of the nanomaterial) in real time at the same time, when the nanomaterial contacts the first detection film; and a support to which one end of the detector is integrally connected, for supporting the detector. 1. An electrical-mechanical complex sensor for nanomaterials , comprising:{'b': 20', '35', '35, 'a detector () having a piezoelectric film therein, for measuring a mechanical property of a nanomaterial () when a bending or tensile load is applied to the nanomaterial ();'}{'b': 21', '20', '35', '35', '21, 'i': a', 'a, 'a first detection film () formed at an end of the detector () to measure the mechanical property and an electrical property of the nanomaterial () in real time at the same time, when the nanomaterial () contacts the first detection film (); and'}{'b': 10', '20', '20, 'a support () to which one end of the detector () is integrally connected, for supporting the detector (),'}{'b': 10', '11', '14', '35', '15', '21', '21', '35, 'i': b', 'a, 'wherein the support () comprises first to fourth electrodes ( to ) constituting a Wheatstone bridge circuit to measure the load applied to the nanomaterial (), and a fifth electrode () haying a second detection film () at an end thereof to be connected to a first detection film (), for measuring an electrical property of the nanomaterial ().'}220222324232224. The electrical-mechanical complex sensor of claim 1 , wherein the detector () has a structure in which a silicon oxide film () claim 1 , an Au layer () claim 1 , a piezoelectric film () formed of a piezoelectric material claim 1 , an Au layer () claim 1 , and a silicon oxide film () are laminated ...

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Номер записи: 3
17-10-2013 дата публикации

Method and Apparatus of Electrical Property Measurement Using an AFM Operating in Peak Force Tapping Mode

Номер: US20130276174A1
Автор: He Jianli, Hu Shuiqing, Hu Yan, Huang Lin, Li Chunzeng, Ma Ji, Minne Stephen C., Mittel Henry, Su Chanmin, Wang Weijie
Принадлежит:

An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement. 1. A method for measuring multiple properties of a sample , the method including:providing an atomic force microscope (AFM) including a probe having a cantilever and a tip;operating the AFM to cause the probe to interact with the sample in a two pass procedure;detecting, during a first pass of the two pass procedure, a surface of the sample by operating the AFM in PFT Mode; andcollecting, during a second pass of the two pass procedure, electrical property data corresponding to the sample with the probe.2. The method of claim 1 , further comprising acquiring at least one of topography and mechanical property data during the detecting step.3. The method of claim 2 , wherein the acquiring step includes collecting mechanical property data and the mechanical property data includes at least one of elasticity claim 2 , stiffness claim 2 , plasticity claim 2 , viscoelasticity and hardness.4. The method of claim 3 , wherein the first collecting step includes collecting topography data which is used to perform said collecting electrical property data step.5. The method of claim 1 , wherein the probe has a sensitivity factor (Q/k) greater than 40.6. The method of claim 1 , wherein the second pass of the collecting step includes using at least one of FM-KPFM and AM-KPFM.7. The method of claim 6 , wherein a DC bias employed in the second pass is set to zero in the first pass.8. The method of claim 7 , wherein an AC bias is set to equal half the fundamental cantilever resonant frequency in the second pass.9. The method of claim 1 , further comprising generating a map of at least two of topography claim 1 , mechanical ...

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Номер записи: 4
17-10-2013 дата публикации

Atomic force microscope probe, method for preparing same, and uses thereof

Номер: US20130276176A1
Автор: Jerome Polesel-Maris, Pascal Viel, Thomas Berthelot
Принадлежит: Commissariat a lEnergie Atomique et aux Energies Alternatives CEA

An atomic force microscope probe comprising a piezo-electric resonator provided with two electrodes and coated with an insulating layer and a tip attached on the coated resonator and functionalized with at least one group or molecule of interest is disclosed. The disclosed technology also relates to preparation method and to different uses thereof.

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Номер записи: 5
24-10-2013 дата публикации

Integrated Displacement Sensors for Probe Microscopy and Force Spectroscopy

Номер: US20130278937A1
Автор: Degertekin Fahrettin L.
Принадлежит:

A force sensor for a probe based instrument includes a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance. 1. A force sensor for a probe based instrument used to measure a property of a sample , the force sensor comprising:a detection surface that is transparent to a predetermined wavelength of light;a flexible mechanical structure spaced apart from the detection surface at a so as to form a gap therebetween, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, the flexible mechanical structure clamped to the detection surface along a first edge and along a second edge, spaced apart from the first edge;an atomic force microscope probe tip extending upwardly from the flexible mechanical structure;an electrically conductive optical diffraction grating disposed on the transparent detection surface;a top electrode disposed on the flexible mechanical structure;a circuit configured to apply a voltage between the electrically conductive optical grating and the top electrode, thereby applying the external force to the flexible mechanical structure, thereby moving the atomic force microscope probe tip from a first position to a different second position at which the probe tip interacts with the sample;a coherent light source configured to direct a beam of light of the predetermined wavelength to the flexible mechanical structure adjacent to the probe tip;at least one light detector configured to sense an intensity of at least one diffraction order of light diffracted from the diffraction grating, wherein the intensity of the at least one diffraction order is indicative of a distance between the flexible mechanical structure adjacent to the probe ...

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Номер записи: 6
07-11-2013 дата публикации

SYSTEM AND METHOD FOR IMAGING SOFT MATERIALS

Номер: US20130298294A1
Автор: Kim Byung I.
Принадлежит:

A method of measuring properties of a sample, the method comprising: measuring a deflection of a cantilever of a COIFM; measuring a voltage at an actuator contacting the cantilever and configured to counteract the deflection of the cantilever; measuring a voltage at a scan signal source, wherein the scan signal source is communicably coupled to the piezotube and configured to move the piezotube along an X- and a Y-axis; measuring a voltage at a feedback controller, wherein the feedback controller is communicably coupled to the piezotube and configured to move the piezotube along a Z-axis; switching a switch from a first position to a second position; switching the switch to a third position; correlating at least one of the measurements to (i) a repulsive force, and (ii) an attractive force. 1. A microscopy device for measuring properties of soft materials , the device comprising:a cantilever;an actuator connected to the cantilever and configured to resist deflection of the cantilever;an optical detector configured to detect deflection of the cantilever, wherein the optical detector is communicably connected to the actuator;a piezotube arranged in proximity to the cantilever;a first feedback controller communicably connected between the optical detector and the actuator;a second feedback controller communicably connected between the optical detector and the piezotube via a switch comprising a first ON position, a second ON position, and an OFF position, and wherein the second feedback controller is configured to impel movement of the piezotube along a Z-axis when the switch is in the first ON position;a scan signal source communicably connected to the piezotube and configured to impel movement of the piezotube along an X- and a Y-axis; andan inverter coupled to the second ON position of the switch.2. The microscopy device of further comprising a high voltage amplifier communicably connected between the second feedback controller and the piezotube.3. The microscopy ...

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Номер записи: 7
21-11-2013 дата публикации

SYSTEM AND METHOD FOR HIGH-SPEED ATOMIC FORCE MICROSCOPY

Номер: US20130312142A1
Автор: Kim Byung I.
Принадлежит: BOISE STATE UNIVERSITY

A high-speed atomic force microscope (HSAFM) is disclosed herein. The HSAFM includes a cantilever, a piezotube, an optical detector, a circuit element, and a feedback controller. The cantilever has a probe, and the piezotube is arranged in proximity to the probe. The optical detector is configured to detect deflection of the cantilever, and the circuit element is abutting a first end of the cantilever and is configured to exert a force on the cantilever to resist deflection of the cantilever. The circuit element is communicably connected to the optical detector by a first feedback loop. The feedback controller is communicably connected to the piezotube and configured to modulate the piezotube along the Z-axis towards and away from the probe. And the feedback controller is communicably connected to the optical detector through a second feedback loop. 1. A high-speed atomic force microscope comprising:a cantilever having a probe;a piezotube arranged in proximity to the probe;an optical detector configured to detect deflection of the cantilever;a circuit element abutting a first end of the cantilever and configured to exert a force on the cantilever to resist deflection of the cantilever;wherein the circuit element is communicably connected to the optical detector by a first feedback loop; anda feedback controller communicably connected to the piezotube and configured to modulate the piezotube along the Z-axis towards and away from the probe;wherein the feedback controller is communicably connected to the optical detector through a second feedback loop.2. The high-speed atomic force microscope of further comprising a switch communicably connected between the optical detector and the first and second feedback loops.3. The high-speed atomic force microscope of further comprising:a high voltage scanner;at least one high voltage amplifier communicably connected between the high voltage scanner and the piezotube; andwherein the high voltage scanner is configured generate a ...

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Номер записи: 8
19-12-2013 дата публикации

BAND EXCITATION METHOD APPLICABLE TO SCANNING PROBE MICROSCOPY

Номер: US20130340125A1
Автор: Jesse Stephen, Kalinin Sergei V.
Принадлежит: UT-BATTELLE, LLC

Scanning probe microscopy may include a method for generating a band excitation (BE) signal and simultaneously exciting a probe at a plurality of frequencies within a predetermined frequency band based on the excitation signal. A response of the probe is measured across a subset of frequencies of the predetermined frequency band and the excitation signal is adjusted based on the measured response. 129.-. (canceled)30. A method , comprising:generating an excitation signal;simultaneously exciting a probe at a plurality of frequencies within a predetermined frequency band based on the excitation signal;measuring a response of the probe across a subset of frequencies of the predetermined frequency band; andadjusting the excitation signal based on the measured response.31. The method of claim 30 , further comprising performing claim 30 , by a processor of a relevant dynamic parameter extractor claim 30 , a mathematical transform on the measured response and outputting an amplitude-frequency data and phase-frequency data at each scanned position of the sample.32. The method of claim 31 , wherein the mathematical function is selected from the group consisting of an integral transform and a discrete transform.33. The method of claim 31 , wherein the relevant dynamic parameter extractor extracts resonant frequency claim 31 , maximum amplitude claim 31 , and Q factor parameters for each position of the sample based on an analysis of the amplitude frequency data and the phase-frequency data.34. The method of claim 33 , wherein the relevant dynamic parameter extractor extracts the resonant frequency claim 33 , the maximum amplitude claim 33 , and the Q factor parameters independently for each position.35. The method of claim 30 , wherein the subset of frequencies of the predetermined frequency band includes a selected frequency and associated resonance frequencies.36. The method of claim 30 , wherein the subset of frequencies is substantially the same as the predetermined ...

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Номер записи: 9
06-02-2014 дата публикации

Material Property Measurements Using Multiple Frequency Atomic Fore Microscopy

Номер: US20140041084A1
Автор: Roger C. Callahan, Roger Proksch
Принадлежит: Oxford Instruments AFM Inc, Oxford Instruments PLC

Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.

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Номер записи: 10
13-02-2014 дата публикации

Scanning probe microscopy cantilever comprising an electromagnetic sensor

Номер: US20140047585A1
Автор: Felix Holzner, Folkert Horst, Jens Hofrichter, Philip Paul
Принадлежит: International Business Machines Corp

An apparatus and method directed to a scanning probe microscopy cantilever. The apparatus includes body and an electromagnetic sensor having a detectable electromagnetic property varying upon deformation of the body. The method includes scanning the surface of a material with the cantilever, such that the body of the cantilever undergoes deformations and detecting the electromagnetic property varying upon deformation of the body of the cantilever.

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Номер записи: 11
20-03-2014 дата публикации

Modular UHV Compatible Angle Physical Contact Fiber Connection for Transferable Fiber Interferometer Type Dynamic Force Microscope Head

Номер: US20140082775A1
Автор: Zahl Percy
Принадлежит: Brookhaven Science Associates, LLC

A modular transferable ultra-high vacuum compatible device has a body with a tunnel through its thickness. An interferometric sensor is mounted above the body and has a brace on which a cantilever is disposed and through which an optical fiber passes so that the two may be aligned prior to installation in an atomic force measurement apparatus. The sensor-mounted body is coupled to a mount for engaging an atomic force measurement apparatus to act as the interferometric head of the apparatus. 1. A modular fiber connector device , comprising:a body having a tunnel extending therethrough;an interferometric sensor assembly disposed vertically above the body and comprising a brace extending in the direction distal from the end of the tunnel and circumscribing an opening through which a first optical fiber extends, the first optical fiber traveling through the tunnel;a cantilever extending from the interferometric sensor assembly and over the opening, the cantilever being configured for alignment with the first optical fiber; anda mount for coupling the first optical fiber with a second optical fiber disposed within an atomic force measurement apparatus for measuring atomic forces.2. The device of claim 1 , wherein the brace is configured to hold the first optical fiber.3. The device of claim 1 , wherein the mount extends in the same direction as the brace.4. The device of claim 1 , further comprising a sleeve coupled to the tunnel in which the first optical fiber is aligned.5. The device of claim 1 , further comprising an aperture in the brace through which a piezoelectric actuator is disposed between the interferometer-type cantilever and the body.6. The device of claim 3 , wherein the mount extends from the body in a direction perpendicular to the tunnel.7. The device of claim 5 , wherein the interferometric sensor assembly further comprises alignment devices for aligning the cantilever and first optical fiber.8. The device of claim 7 , wherein the alignment devices ...

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Номер записи: 12
07-01-2016 дата публикации

Microscope Having A Multimode Local Probe, Tip-Enhanced Raman Microscope, And Method For Controlling The Distance Between The Local Probe And The Sample

Номер: US20160003866A1
Автор: Akli Karar, Bernard Drevillon, Marc Chaigneau, Razvigor Ossikovski
Принадлежит: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS, ECOLE POLYTECHNIQUE

The present invention relates to a multimode local probe microscope having a resonator ( 1 ), a first electrode ( 9 ), and a second electrode ( 8 ), an excitation source adapted to generate mechanical resonance in the resonator, a metal tip ( 4 ) fastened to the resonator, movement means for imparting relative movement between the local probe and a sample and adapted to bring the end of the tip to within a distance Z lying in the range 0 to 100 nm, and detector means for detecting at least one electrical signal representative of friction forces at the terminals of said electrodes ( 8, 9 ). According to the invention, said metal tip ( 4 ) is electrically connected to said output second electrode ( 9 ) and the microscopy apparatus includes amplifier and filter means for amplifying and filtering signals relating to the friction forces and to the tunnelling current in a single electronic circuit, and means for regulating the distance Z between the end of the tip and the surface of the sample.

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Номер записи: 13
02-01-2020 дата публикации

SCANNING PROBE MICROSCOPE

Номер: US20200003800A1
Автор: OHTA Masahiro
Принадлежит: SHIMADZU CORPORATION

A scanning probe microscope including a measurement light-casting section configured to cast light onto a reflective surface provided on a movable end of a cantilever; a light-detecting section configured to detect reflected light from the reflective surface with a light-receiving surface having a larger area than the incident area of the reflected light, the light-receiving surface divided into a plurality of areas; a deflection-calculating section configured to determine at preset intervals, the amount of deflection of the cantilever based on the proportion of the amounts of light incident on the plurality of areas while the distance between the base end and the sample is changed; a determining section configured to determine whether or not the amount of change in the deflection of the cantilever is equal to or larger than a previously determined threshold K. 13-. (canceled)4. A scanning probe microscope configured to scan a surface of a sample with a probe provided at a movable end of a flexible cantilever having the movable end and a base end as both ends , the scanning probe microscope comprising:a) a measurement light-casting section configured to cast light onto a reflective surface provided on the movable end;b) a light-detecting section configured to detect reflected light from the reflective surface with a light-receiving surface having a larger area than an incident area of the reflected light, the light-receiving surface divided into a plurality of areas;c) a deflection-calculating section configured to determine, at preset intervals, an amount of deflection of the cantilever based on a proportion of amounts of light incident on the plurality of areas while the distance between the base end and the sample is changed;d) a determining section configured to determine whether or not an amount of change in the deflection of the cantilever is equal to or larger than a previously determined threshold; ande) an incident position-changing section configured to ...

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Номер записи: 14
10-01-2019 дата публикации

METHOD FOR ESTIMATING A STIFFNESS OF A DEFORMABLE PART

Номер: US20190011343A1
Автор: Bellon Ludovic
Принадлежит:

A method for estimating a stiffness of a deformable part of a system including a four-photodiode detector for analyzing at least one characteristic of a sample. The method includes receiving the signals recorded by the four photodiodes, calculating the resultant signals from the recorded signals, calculating a cross-correlation of the resultant signals calculated for obtaining an intercorrelated signal, estimating the stiffness of the deformable part depending on the intercorrelated signal. 1. A method for estimating a stiffness of a deformable part of a system for analyzing at least one characteristic of a sample , the system including:the deformable part capable of interacting with the sample to be analyzed,a source, upstream from the deformable part, for emitting a light beam toward the deformable part,a sensor downstream from the source for detecting the beam reflected on the deformable part, said beam being capable of moving in a direction of interest depending on the deformation of the deformable part, the sensor including at least one first photodetector for recording a first signal representative of a first portion of the beam reflected by the deformable part, and at least one second photodetector arranged in line with the first photodetector in the direction of interest for recording a second signal representative of a second portion of the beam reflected by the deformable part and distinct from the first portion, the first and second signals depending on the deformation;wherein the method comprises the steps consisting in:receiving a first signal recorded by the first photodetector, and a second signal recorded by the second photodetector,calculating a cross-correlation of the first and second signals for obtaining an intercorrelated signal representative of a power spectral density or a root-mean-square deformation,estimating the stiffness of the deformable part depending on the intercorrelated signal.2. The estimating method according to claim 1 , ...

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Номер записи: 15
09-01-2020 дата публикации

SCANNING PROBE SYSTEM

Номер: US20200011893A1
Автор: Humphris Andrew
Принадлежит:

A scanning probe system with a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever. A first driver is provided with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input. A second driver is provided with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input. A control system is arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles. A surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample. The control system is also arranged to modify the second drive signal in response to receipt of the surface signal from the surface detector, the modification of the second drive signal causing the second driver to control the probe tip. 1. A scanning probe system comprising: a probe comprising a cantilever extending from a base to a free end , and a probe tip carried by the free end of the cantilever; a first driver with a first driver input , the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input; a second driver with a second driver input , the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input; a control system arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles; and a surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample , wherein the control system is also arranged to modify the second drive signal ...

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Номер записи: 16
15-01-2015 дата публикации

BEAM SCANNING SYSTEM

Номер: US20150020244A1
Автор: Humphris Andrew, ZHAO BIN
Принадлежит:

Apparatus for illuminating a probe of a probe microscope. A lens is arranged to receive a beam and focus it onto the probe. A scanning system varies over time the angle of incidence at which the beam enters the lens relative to its optical axis. The scanning system is typically arranged to move the beam so as to track movement of the probe, thereby maintaining the location on the probe at which the beam is focused. The scanning system may comprise a beam steering mirror which reflects the beam towards the lens; and a mirror actuator for rotating the beam steering mirror. 1. Apparatus for illuminating a probe of a probe microscope , the apparatus comprising: a lens arranged to receive a radiation beam and direct it onto the probe; and a scanning system for varying over time the angle of incidence at which the beam enters the lens relative to its optical axis.2. The apparatus of wherein the apparatus is an actuation system for driving the probe claim 1 , and further comprises a modulation system for modulating the intensity of the radiation beam.3. (canceled)4. (canceled)5. (canceled)6. (canceled)7. The apparatus of wherein the beam is a detection beam which reflects from the probe to produce a reflected detection beam claim 1 , and the apparatus further comprises a detection system arranged to receive the reflected detection beam from the probe and detect movement of the probe from the reflected detection beam claim 1 , wherein the scanning system comprises a beam steering mirror which reflects the beam towards the lens and a mirror actuator for rotating the beam steering mirror claim 1 , and wherein the lens is also arranged to receive an actuation radiation beam and direct it onto the probe; the apparatus further comprises a modulation system for modulating the intensity of the actuation radiation beam; and the beam steering mirror reflects both the detection beam and the actuation radiation beam towards the lens.8. The apparatus of wherein the scanning system ...

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Номер записи: 17
17-01-2019 дата публикации

Motion sensor integrated nano-probe n/mems apparatus, method, and applications

Номер: US20190018039A1
Автор: Amit Lal, Kwame Amponsah
Принадлежит: CORNELL UNIVERSITY

A multi-tip nano-probe apparatus and a method for probing a sample while using the multi-tip nano-probe apparatus each employ located over a substrate: (1) an immovable probe tip with respect to the substrate; (2) a movable probe tip with respect to the substrate; and (3) a motion sensor that is coupled with the movable probe tip. The multi-tip nano-probe apparatus and related method provide for improved sample probing due to close coupling of the motion sensor with the movable probe tip, and also retractability of the movable probe tip with respect to the immovable probe tip.

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Номер записи: 18
17-01-2019 дата публикации

Method and Apparatus of Using Peak Force Tapping Mode to Measure Physical Properties of a Sample

Номер: US20190018040A1
Автор: Hu Shuiqing, Hu Yan, Ma Ji, Shi Jian, Su Chanmin
Принадлежит:

Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation. 1generating relative substantially periodic motion between a probe and a sample;detecting the motion of the probe;recovering, from the detected probe motion, a substantially instantaneous force between the probe and the sample as the probe and sample interact;determining a time zone of interest associated with the recovered substantially instantaneous force;{'b': 1', '2', '2', '4', '4', '5, 'generating a constant or gated physical excitation signal between the probe and the sample within a period of the interaction between the probe and the sample, the period including a proximate interaction zone during approach (p-p), a contact time (p-p) and a proximate interaction zone during tip retraction (p-p), wherein the excitation signal is at least one of heat applied to the sample or the probe, an externally applied interaction field, an electromagnetic wave, an optical excitation, a voltage signal, or a magnetic force; and'}synchronously measuring the gated physical response of the probe to the generating step, in the gated time zone of interest within said period of the interaction between the probe and the sample, wherein signals other than those in the gated time zone of interest are considered parasitic noise.. A method of operating a scanning probe ...

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Номер записи: 19
21-01-2021 дата публикации

Cantilever with a collocated piezoelectric actuator-sensor pair

Номер: US20210020825A1
Автор: Mohammad Mahdavi, Seyed Omid Reza Moheimani
Принадлежит: University of Texas System

Illustrative embodiments provide an apparatus comprising a substrate comprising a cantilever, a bottom electrode on the substrate, a bottom piezoelectric transducer on the bottom electrode such that the bottom electrode is between the substrate and the bottom piezoelectric transducer, a middle electrode on the bottom piezoelectric transducer such that the bottom piezoelectric transducer is between the bottom electrode and the middle electrode, a top piezoelectric transducer on the middle electrode such that the middle electrode is between the bottom piezoelectric transducer and the top piezoelectric transducer, and a top electrode on the top piezoelectric transducer, such that the top piezoelectric transducer is between the middle electrode and the top electrode. Illustrative embodiments also provide a method of making the apparatus and a method of using the apparatus for atomic force microscopy.

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Номер записи: 20
28-01-2016 дата публикации

Scanning probe microscope and scanning probe microscopy

Номер: US20160025770A1
Автор: Nobuaki Sakai
Принадлежит: Olympus Corp

A scanning probe microscope includes a vibration unit to vibrate the cantilever on the basis of a vibration signal, a displacement detection unit to output a displacement signal indicating the displacement of the cantilever, a phase adjustment unit to provide a phase offset to a phase difference between the vibration signal and displacement signal, a phase signal generating unit to generate a phase signal including information regarding the phase difference and phase offset, and a control unit to control the distance between the probe and sample on the basis of the phase signal. The phase adjustment unit combines a first phase amount that cancels an initial phase difference exiting in a condition where the probe and sample are out of contact, with a second phase amount equal to or more than (0 [rad]) and less than or equal to (π/2 [rad]) and provides a combined amount to the phase difference.

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Номер записи: 21
28-01-2016 дата публикации

SCANNING PROBE MICROSCOPE HEAD DESIGN

Номер: US20160025771A1
Автор: Erickson Andrew Norman, Hofstatter Kyle Alfred, Ippolito Stephen Bradley
Принадлежит:

A SPM head incorporates a probe and a cantilever on which the probe is mounted. The cantilever has a planar reflecting surface proximate a free end of the cantilever. The cantilever extends from a mechanical mount and a single-mode optical fiber is supported by the mechanical mount to provide a beam axis at an angle away from normal relative to the reflecting surface. 1. A structure comprising:a probe;a cantilever on which the probe is mounted, said cantilever having a planar reflecting surface proximate a free end of the cantilever;a mechanical mount from which the cantilever extends and,a single-mode optical fiber; said single-mode optical fiber supported by the mechanical mount to provide a beam axis at an angle away from normal relative to the reflecting surface.2. The structure of claim 1 , wherein a lens is disposed between the fiber and reflection surface.3. The structure of claim 2 , wherein said lens is mounted to the fiber as a lensed fiber.4. The structure of wherein the single mode optical fiber is oriented by the mechanical mount substantially parallel to the cantilever and further comprising a coreless fiber disposed adjacent the lens opposite the single mode optical fiber claim 2 , said coreless fiber having a reflecting facet to provide the beam axis at the angle away from normal relative to the reflecting surface of the cantilever.5. The structure of wherein the coreless fiber further has a transmitting facet angled relative to the reflecting facet to accommodate refraction within the coreless fiber to provide the beam axis at the angle away from normal relative to the reflecting surface of the cantilever.6. The structure of wherein the lens is formed by a method selected from fusion splicing a graded index lens to an end of the single mode fiber claim 3 , fusion splicing a ball lens to the end of the single mode fiber claim 3 , or fusion splicing a small section of coreless fiber to the end of the single mode fiber and forming a spherical surface ...

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Номер записи: 22
24-01-2019 дата публикации

DETERMINING INTERACTION FORCES IN A DYNAMIC MODE AFM DURING IMAGING

Номер: US20190025340A1
Автор: Sadeghian Marnani Hamed, Tamer Mehmet Selman
Принадлежит:

A method and system for calibrating force (F) in a dynamic mode atomic force microscope (AFM). An AFM tip () is disposed on a first cantilever (). The first cantilever () is actuated to oscillate the AFM tip () in a dynamic mode. A first sensor () is configured to measure a first parameter (A) of the oscillating AFM tip (). A second sensor () is configured to measure a second parameter (A) of a resilient element (). The oscillating AFM tip () is moved in proximity to the resilient element () while measuring the first parameter (A) of the AFM tip () and the second parameter (A) of the resilient element (). A force (F) between the oscillating AFM tip () and the resilient element () is calculated based on the measured second parameter (A) and a calibrated force constant (K) of the resilient element (). 1. A method of calibrating force in a dynamic mode atomic force microscope , the method comprisingproviding an AFM tip disposed on a first cantileveractuating the first cantilever to oscillate the AFM tip in a dynamic mode;providing a first sensor configured to measure a first parameter of the AFM tip during oscillating of the AFM tip;providing a resilient element having a force constant, wherein a fundamental frequency of the resilient element is at least a factor ten higher than a fundamental frequency of the first cantilever;providing a second sensor configured to measure a second parameter of the resilient element; a value of the first parameter of the AFM tip, and', 'a value of the second parameter of the resilient element;, 'moving the AFM tip, while the AFM tip is oscillating due to the actuating, in proximity to the resilient element while measuring the measured value of the second parameter, and', 'a calibrated value of the force constant of the resilient element; and, 'calculating a force between the AFM tip and the resilient element based on the force between the AFM tip and the resilient element, and', 'the measured value of the first parameter of the AFM tip ...

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Номер записи: 23
23-01-2020 дата публикации

APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE

Номер: US20200025796A1
Автор: Baur Christof, Matejka Ulrich
Принадлежит:

The present application relates to an apparatus for a scanning probe microscope, said apparatus having: (a) at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip; (b) at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; and (c) at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip. 1. An apparatus for a scanning probe microscope , having:a. at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip;b. at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; andc. at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip.2. The apparatus according to claim 1 , wherein the at least one first reflective area is arranged on a side claim 1 , opposite the first measuring tip claim 1 , of the at least one first cantilever.3. The apparatus according to claim 1 , wherein the at least one first reflective area comprises at least one first reflective portion and at least one second reflective portion claim 1 , and wherein the first reflective portion and the second reflective portion are not arranged in a plane.4. The apparatus according to claim 3 , wherein the at least one second reflective portion is arranged tilted by an angle β in relation to the at least one first reflective portion and/or wherein the at least one second reflective portion is rotated through an angle α relative to a longitudinal axis of the cantilever.5. The apparatus ...

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Номер записи: 24
28-01-2021 дата публикации

ACTIVE NOISE ISOLATION FOR TUNNELING APPLICATIONS (ANITA)

Номер: US20210025919A1
Автор: Hudson Eric, Pabbi Lavish
Принадлежит:

An active noise isolation apparatus and method for cancelling vibration noise from the probe signal of a scanning tunneling microscope by generating a correction signal by convolution based on the probe signal and the sensor signal, which is based on the ambient vibration that adds noise to the probe signal. 1. A scanning tunneling microscope , comprising:a sample holder for holding a sample with a surface;a probe operable to provide a probe signal based on the surface of the sample disposed on the sample holder;a sensor generating a sensor signal based on an ambient vibration, the ambient vibration signal creating a relative motion between the probe and the sample surface, the relative motion due to the ambient vibration adding noise to the probe signal; anda processing unit generating a correction signal by convolution based on the probe signal and the sensor signal, the processing unit removing noise from the probe signal by applying the correction signal to the probe signal.2. The scanning tunneling microscope of claim 1 , wherein the sensor comprises a plurality of sensors.3. The scanning tunneling microscope of claim 1 , wherein the sensor is selected from the group of an accelerometer claim 1 , velocity sensor claim 1 , proximity sensor and laser displacement sensor.4. The scanning tunneling microscope of claim 1 , wherein the sensor is disposed at a location that is spaced from a location of the probe claim 1 , sample holder and/or the surface of the sample.5. The scanning tunneling microscope of claim 1 , wherein the sensor is not physically attached or connected with the probe claim 1 , sample holder and/or the surface of the sample.6. The scanning tunneling microscope of claim 1 , wherein the sensor generates the sensor signal based on the ambient vibration having a variable frequency and/or amplitude.7. The scanning tunneling microscope of claim 1 , wherein the scanning tunneling microscope includes a constant tip-current or constant tip-height based ...

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Номер записи: 25
04-02-2016 дата публикации

Method and Apparatus of Physical Property Measurement Using a Probe-Based Nano-Localized Light Source

Номер: US20160033547A1
Автор: Kaemmer Stefan B., Minne Stephen C., Raschke Markus B., Su Chanmin
Принадлежит:

An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme. 1plasmonic nanofocusing electromagnetic waves directed at an AFM tip, the AFM tip interacting with a sample; andcontrolling dynamic interactions of the sample on the nanoscale using the nanofocusing step; andwherein the sample is at least one of molecular and solid matter.. A method of ultrafast spectroscopy comprising: This application is divisional of U.S. patent application Ser. No. 14/532,926, filed Nov. 4, 2014, which is a divisional of U.S. patent application Ser. No. 14/202,669, filed Mar. 10, 2014 and issued as U.S. Pat. No. 8,881,331, which claims priority under 35 USC §1.119(e) to U.S. Provisional Patent Application Ser. No. 61/775,166, filed Mar. 8, 2013, each of which is entitled Method and Apparatus of Physical Property Measurement Using a Probe-Based Nano-Localized Light Source. The subject matter of this application is hereby incorporated by reference in its entirety.1. Field of the InventionThe preferred embodiments are directed to using a nano-localized light source to measure physical properties of a sample, and more particularly, to a method and apparatus of making nano-imaging and spectroscopy measurements using an atomic force microscope operating in either contact or a low amplitude mode, with the tip apex of the probe functioning as the nano-localized source.2. Description of Related ArtThe interaction between a sample under test and radiated energy can be monitored to yield ...

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Номер записи: 26
04-02-2016 дата публикации

INSPECTION METHOD AND ITS APPARATUS FOR THERMAL ASSIST TYPE MAGNETIC HEAD ELEMENT

Номер: US20160033548A1
Автор: Hirose Takenori, SUGIYAMA Toshinori, TOBITA Akira, Watanabe Masahiro, Zhang Kaifeng
Принадлежит:

To detect near-field light, which is generated by a thermal assist type magnetic head element, and leaking light with high sensitivity and to more accurately obtain the spatial intensity distribution of a near-field light generation area, an inspection apparatus for a thermal assist type magnetic head element is adapted so that a distance between a cantilever and the surface of a specimen and the excitation amplitude of the cantilever are set to be small to detect near-field light with high sensitivity by the suppression of an influence of other light components, a distance between the cantilever and the surface of the specimen and the excitation amplitude of the cantilever are set to be large to detect other light components present in the vicinity of near-field light with high sensitivity by the suppression of an influence of the amount of detected near-field light when other light components are measured. 1. An inspection apparatus for a thermal assist type magnetic head element , the inspection apparatus comprising:a table unit on which a thermal assist type magnetic head element, which is a specimen, including a magnetic field generating portion and a near-field light emitting portion is placed and which is movable in a plane;a cantilever that includes a probe including a magnetic film and a noble metal film on a surface thereof and scans the surface of the specimen placed on the table unit;a probe height adjusting unit that adjusts a distance between the probe of the cantilever and the surface of the specimen;a vibration driving unit that vibrates the cantilever with a predetermined period and a predetermined amplitude in a vertical direction relative to the surface of the specimen;a signal output unit that outputs a signal generating a magnetic field from the magnetic field generating portion of the thermal assist type magnetic head element and a signal for generating near-field light from the near-field light emitting portion;a displacement detecting unit ...

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Номер записи: 27
04-02-2021 дата публикации

APPARATUS AND METHODS FOR QUANTUM BEAM TRACKING

Номер: US20210033640A1
Автор: GUHA Saikat, QI Haoyu
Принадлежит: Xanadu Quantum Technologies Inc.

A method includes sending a probe beam into a beam path that induces a lateral displacement to the probe beam. The probe beam includes a plurality of orthogonal spatial modes that are entangled with each other. The method also includes measuring a phase of each spatial mode from the plurality of orthogonal spatial modes in the probe beam at a detector disposed within a near field propagation regime of the probe beam. The method also includes estimating the lateral displacement of the probe beam based on a phase of each spatial mode from the plurality of spatial modes in the probe beam after the beam path. 1. A method , comprising:sending a probe beam into a beam path that induces a lateral displacement to the probe beam, the probe beam including a plurality of orthogonal spatial modes that are entangled with each other;measuring a phase of each spatial mode from the plurality of orthogonal spatial modes in the probe beam at a detector disposed within a near field propagation regime of the probe beam; andestimating the lateral displacement of the probe beam based on the phase of each spatial mode from the plurality of spatial modes in the probe beam after the beam path.2. The method of claim 1 , wherein the probe beam includes displaced squeezed light.3. The method of claim 1 , wherein the beam path includes an interferometer having a first arm to propagate a first portion of the probe beam and a second arm to propagate a second portion of the probe beam claim 1 , the first arm being configured to induce the lateral displacement to the probe beam.4. The method of claim 1 , wherein:{'sub': 't', 'sending the probe beam includes sending the probe beam from a transmitter having a first pupil area A,'}{'sub': 'r', 'measuring the phase of each spatial mode from the plurality of orthogonal spatial modes includes measuring the phase of that spatial mode using the detector having a second pupil area A, and'}{'sub': t', 'r, 'sup': '2', 'AA/(λL)is not less than 5, where λ is a ...

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Номер записи: 28
24-02-2022 дата публикации

Atomic Force Microscope

Номер: US20220057429A1
Автор: Bellon Ludovic, Labuda Aleks, Pottier Basile
Принадлежит:

An atomic force microscope (“AFM”) based interferometer, uses a light source, and a splitting optical interface, splitting the light beam into a signal light beam and a reference light beam. Both the signal and reference light beams are focused in the vicinity of an AFM cantilever. A beam displacer introduces a lateral displacement between the signal light beam and reference light beam, the lateral displacement being such that, in at least one plane between the beam displacer and the focusing lens structure, the center of the signal light beam is separated from the center of the reference light beam by more than half a sum of their beam diameters on that plane. A detector operates to determine differences in optical path length between the signal light beam and reference light beam to determine information about movement of the cantilever. 1. An atomic force microscope (“AFM”) based interferometer , comprising:a light source, emitting a light beam;a splitting optical interface, splitting the light beam into a signal light beam and a reference light beam;an AFM cantilever;a focusing lens structure, which focuses both the signal and reference light beams in the vicinity of the AFM cantilever;a beam displacer, which introduces a lateral displacement between the signal light beam and reference light beam, the lateral displacement being such that, in at least one plane between the beam displacer and the focusing lens structure, the center of the signal light beam is separated from the center of the reference light beam by more than half a sum of their beam diameters on that plane;and;a detector that operates to determine differences in optical path length between the signal light beam and reference light beam to determine information about movement of the cantilever.2. The interferometer as in claim 1 , where the signal light beam and reference light beam refract differently at the splitting optical interface.3. The interferometer as in claim 2 , where the splitting ...

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Номер записи: 29
24-02-2022 дата публикации

SCANNING PROBE MICROSCOPE, SCAN HEAD AND METHOD

Номер: US20220057430A1
Автор: HERFST Roelof Willem, Sadeghian Marnani Hamed
Принадлежит:

The present invention relates to a scan head for a scanning probe microscope arranged for moving a probe including a conductive cantilever relatively to a substrate surface, the head comprising: a first electrode positioned such that a capacitor is formed across a gap between the first electrode and a second electrode, wherein the second electrode is formed by the conductive cantilever; a voltage source for actuating the conductive cantilever by applying a voltage to the capacitor; and at least a first resistor arranged in series between the voltage source and one of the first and second electrodes such as to form an RC circuit for damping a vibration of the cantilever. 1. A scan head for a scanning probe microscope arranged for moving a probe , including a conductive cantilever , relatively to a substrate surface , the scan head comprising:a first electrode positioned such that a capacitor is formed across a gap between the first electrode and a second electrode, wherein the second electrode is formed by the conductive cantilever;a voltage source for actuating the conductive cantilever by applying a voltage to the capacitor formed between the first electrode and the second electrode; andat least a first resistor arranged in series between the voltage source and either one of the first electrode and the second electrode so as to form an RC circuit for damping a vibration of the conductive cantilever.2. The scan head according to claim 1 , wherein the resistor is arranged to provide an RC time suited to enhance damping of the conductive cantilever.3. The scan head according to claim 1 , wherein the resistance of the first resistor is adjustable.4. The scan head according to claim 3 , wherein the first resistor is:a tunable resistor; ora switchable resistor comprising an array of selectable resistors.5. The scan head according to claim 1 , wherein the capacitor is a parallel plate capacitor.6. The scan head according to claim 1 , further comprising a diode and second ...

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Номер записи: 30
06-02-2020 дата публикации

Nanoscale Dynamic Mechanical Analysis via Atomic Force Microscopy (AFM-nDMA)

Номер: US20200041541A1
Автор: Osechinskiy Sergey, Pittenger Bede, Ruiter Anthonius, Syed-Amanulla Syed-Asif
Принадлежит:

An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device. 1. A method for determining a mechanical property of a soft viscoelastic sample with an atomic-force-microscope (AFM)-based system , the method comprising:repositioning a probe of the system towards a surface of the sample until a cantilever of the probe is deflected by a pre-determined amount from a nominal orientation of the cantilever; i) an average sample-loading force, generated by the probe, and', 'ii) an area of contact between a tip of the probe and the surface to be substantially constant;, 'modifying said repositioning to maintain at least one of'}measuring, at a set of pre-defined frequencies, a viscoelastic parameter of the surface while compensating for at least one of the creep of the surface and a spatial drift of the system; andproducing an output, perceivable by a user and representing said viscoelastic parameter as a function of at least one of variable conditions of said measuring.2. The method according to claim 1 , wherein said measuring is carried out simultaneously at multiple frequencies from said set of pre-defined frequencies.3. The method according to claim 1 , wherein said modifying includes modulating a sample-loading force applied by the probe to the sample at a given excitation frequency from said set of pre-defined frequencies.4. The method according to claim 1 , wherein said modifying includes maintaining the average sample-loading force substantially constant while a separation between the surface and the base of the probe is being modulated.5. The method according to claim 1 , wherein measuring the viscoelastic parameter includes performing dual-channel demodulation of ...

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Номер записи: 31
18-02-2016 дата публикации

SIGNAL DETECTION CIRCUIT AND SCANNING PROBE MICROSCOPE

Номер: US20160047841A1
Автор: Fukuma Takeshi, MIYATA Kazuki
Принадлежит:

A signal detection circuit includes: a VCO that generates a reference signal; a complex signal generation circuit that generates a complex signal from an input signal and the reference signal; a vector operation circuit that calculates an argument of the complex signal by performing a vector operation; and a subtracting phase comparator that compares the argument with a phase of the reference signal by calculating a difference between the argument and the phase of the reference signal, wherein the complex signal generation circuit includes: a multiplication circuit that multiplies the input signal by the reference signal; and an HPF that removes a DC component from a signal output from the multiplication circuit. 1. A signal detection circuit that detects at least one of an amplitude , a phase , and a frequency signal based on an input signal and a reference signal , the signal detection circuit comprising:a first oscillation circuit that generates the reference signal;a complex signal generation circuit that generates a complex signal from the input signal and the reference signal;a vector operation circuit that calculates an argument of the complex signal by performing a vector operation; anda subtracting phase comparator that compares the argument with a phase of the reference signal by calculating a difference between the argument and the phase of the reference signal,wherein the complex signal generation circuit includes:a multiplication circuit that multiplies the input signal by the reference signal; anda high-pass filter that removes a DC component from a signal output from the multiplication circuit.2. The signal detection circuit according to claim 1 ,wherein the subtracting phase comparator outputs at least a phase difference signal.3. The signal detection circuit according to claim 1 , further comprisinga loop filter that forms a phase locked loop circuit with the first oscillation circuit and the subtracting phase comparator,wherein the phase locked ...

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Номер записи: 32
01-05-2014 дата публикации

ANALYSIS OF EX VIVO CELLS FOR DISEASE STATE DETECTION AND THERAPEUTIC AGENT SELECTION AND MONITORING

Номер: US20140123347A1
Автор: Cross Sarah E., Gimzewski James K., Jin Yusheng, Rao Jianyu
Принадлежит: The Regents of the University of California

Described herein is the analysis of nanomechanical characteristics of cells. In particular, changes in certain local nanomechanical characteristics of ex vivo human cells can correlate with presence of a human disease, such as cancer, as well as a particular stage of progression of the disease. Also, for human patients that are administered with a therapeutic agent, changes in local nanomechanical characteristics of ex vivo cells collected from the patients can correlate with effectiveness of the therapeutic agent in terms of impeding or reversing progression of the disease. By exploiting this correlation, systems and related methods can be advantageously implemented for disease state detection and therapeutic agent selection and monitoring. 117-. (canceled)18. A nanomechanical analysis system , comprising:an expansion element;a cantilever having a first end and a second end, the first end of the cantilever being connected to the expansion element;a probe disposed adjacent to the second end of the cantilever, the probe being elongated and extending from the cantilever towards an upper surface of a cell to be analyzed;a detector element disposed adjacent to the second end of the cantilever; andan optical microscope disposed adjacent to a lower surface of the cell,wherein the optical microscope is configured to provide visual examination of the cell to position the probe with respect to a central region of the cell,wherein the expansion element is configured to move the first end of the cantilever, such that the probe applies a stimulus to the cell,wherein the detector element is configured to produce an output indicative of an extent of deflection of the second end of the cantilever in accordance with a response of the cell to the stimulus.19. The system of claim 18 , wherein the probe includes a tip that is configured to apply the stimulus to the cell claim 18 , and the tip has a radius in the range of 5 nm to 900 nm.20. The system of claim 18 , further comprising:a ...

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Номер записи: 33
03-03-2022 дата публикации

Method and Apparatus for Aligning a Probe for Scanning Probe Microscopy to the Tip of a Pointed Sample

Номер: US20220065895A1
Автор: Fleischmann Claudia, Op de Beeck Jonathan, Paredis Kristof, Vandervorst Wilfried
Принадлежит:

Example embodiments relate to methods and apparatuses for aligning a probe for scanning probe microscopy (SPM) to the tip of a pointed sample. One embodiments includes a method for aligning an SPM probe to an apex area of a free-standing tip of a pointed sample. The method includes providing an SPM apparatus that includes the SPM probe; a sample holder; a drive mechanism; and detection, control, and representation tools for acquiring and representing an image of a surface scanned by the SPM probe. The method also includes mounting the sample on the sample holder. Further, the method includes positioning the probe tip of the SPM, determining a 2-dimensional area that includes the pointed sample, performing an SPM acquisition scan, evaluating and acquired image, and placing the SPM probe in a position where it is aligned with an apex area of the free-standing tip of the pointed sample.

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Номер записи: 34
14-02-2019 дата публикации

Characterizing a Height Profile of a Sample by Side View Imaging

Номер: US20190049486A1
Автор: BRANDNER Markus, GODEC-SCHÖNBACHER Martin, Gomez-Casado Alberto, Koller Daniel
Принадлежит:

A scanning probe microscope, in particular an atomic force microscope, for analyzing a sample by moving a probe and the sample relative to one another, wherein the scanning probe microscope includes a detection unit with a side view camera arranged and configured for detecting an image of the sample in a substantially horizontal side view, and a determining unit for determining information indicative of a profile of at least part of a surface of the sample based on the detected image. 1. A scanning probe microscope , in particular an atomic force microscope , for analyzing a sample by moving a probe and the sample relative to one another , the scanning probe microscope comprises:a detection unit which comprises a side view camera arranged and configured for detecting an image of the sample in a substantially horizontal side view; anda determining unit for determining information indicative of a profile of at least part of a surface of the sample based on the detected image.2. The scanning probe microscope according to claim 1 , wherein the determining unit is configured for determining information of at least one of the group consisting of determining one or multiple height values from a shadow image of the sample claim 1 , and determining a three dimensional surface function of at least part of the sample.3. The scanning probe microscope according to claim 1 , wherein the determining unit is configured for determining information indicative of the profile by combining multiple images of the sample detected by the detection unit from different positions and/or orientations relative to the sample.4. The scanning probe microscope according to claim 3 , wherein the detection unit is configured for detecting the multiple images of the sample by:multiple cameras of the detection unit arranged at different spatial positions and/or in different spatial orientations relative to the sample;and/or configuring at least one camera of the detection unit and the sample for being ...

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Номер записи: 35
13-02-2020 дата публикации

High Speed Atomic Force Profilometry of Large Areas

Номер: US20200049734A1
Автор: Fonoberov Vladimir, Hand Sean Michael, Osborne Jason
Принадлежит:

An apparatus and method of operating an atomic force profiler (AFP), such as an AFM, using a feedforward control signal in subsequent scan lines of a large area sample to achieve large throughput advantages in, for example, automated applications. 1. A method of atomic force profilometry (AFP) , the method comprising:providing relative scanning motion between a probe of the AFM and a sample at a first line of the sample;measuring the deflection of the probe in response to the providing step and controlling the probe-sample separation according to a mode of AFM operation;generating a feed forward Z signal based on the measuring step;providing relative scanning motion between the probe and the sample at a second line of the sample;measuring the deflection of the probe in the second line and controlling the probe-sample separation according to a mode of AFM operation;combining the feedforward Z signal with the measured deflection corresponding to the second line to generate a HyperZ signal; andusing the HyperZ signal in a next line of the scan as the feed forward Z signal.2. The method of claim 1 , repeating all steps until a region of interest of the sample is imaged.3. The method of claim 2 , further comprising identifying a feature of interest based on an output of the repeating step.4. The method of claim 3 , further comprising performing high resolution AFM imaging of the feature of interest.5. The method of claim 1 , wherein the providing step is performed at a speed greater than 2 mm/s.6. The method of claim 1 , wherein the providing step is performed at a speed greater than 25 mm/s.7. The method of claim 1 , wherein surface features of the sample are >2 nm at XY pixel sizes of <1 um claim 1 , and wherein a lateral scanning speed is at least about 30 mm/s.8. The method of claim 1 , wherein the mode is one of peak force tapping (PFT) mode and tapping mode.9. An atomic force microscope (AFM) comprising:a scanner that provides relative scanning motion between a ...

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Номер записи: 36
23-02-2017 дата публикации

MEASURING METHOD FOR ATOMIC FORCE MICROSCOPE

Номер: US20170052210A1
Автор: KIM DalHyun, PARK Byong Chon, SHIN ChaeHo
Принадлежит: Korea Research Institute of Standards and Science

Provided is a measuring method for an atomic force microscope that scans a surface of a sample with a probe to measure a surface property of the sample, the measuring method including detecting a motion of the probe while vibrating the probe on the surface of the sample, acquiring surface information on the sample by using a variation in the motion of the probe, and controlling the probe by using the surface information on the sample. The surface information on the sample may include a position and a slope of the surface. The vibrating of the probe on the surface of the sample may include performing a circular motion by the probe around axes perpendicular to a scan direction of the probe and to a height direction of the sample. 1. A measuring method for an atomic force microscope that scans a surface of a sample with a probe to measure a surface property of the sample , the measuring method comprising:detecting a motion of the probe while vibrating the probe on the surface of the sample;acquiring surface information on the sample by using a variation in the motion of the probe wherein the surface information on the sample comprises a position and a slope of the surface; andcontrolling the probe by using the surface information on the sample,wherein the vibrating of the probe on the surface of the sample comprises performing a circular motion by the probe around axes perpendicular to a scan direction of the probe and to a height direction of the sample.2. The measuring method of claim 1 , wherein the circular motion of the probe is provided by a first oscillating unit that makes a vibration in the scan direction of the probe claim 1 , and a second oscillating unit that makes a vibration in the height direction of the sample.3. The measuring method of claim 2 , wherein the vibrations that are made by the first oscillating unit and the second oscillating unit have a same frequency and amplitude claim 2 , wherein the vibrations mutually have a phase difference of about ...

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Номер записи: 37
26-02-2015 дата публикации

Measuring surface curvature

Номер: US20150059026A1
Автор: Gabriel Aeppli, Rodolfo Hermans
Принадлежит: UCL BUSINESS LTD

A method of measuring surface curvature comprises forming an intensity distribution defined by Fresnel diffraction, wherein said intensity distribution is formed by electromagnetic radiation reflected from a surface, obtaining data for the intensity distribution and determining information relating to the curvature of the surface using the obtained data.

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Номер записи: 38
01-03-2018 дата публикации

CHEMICAL NANO-IDENTIFICATION OF A SAMPLE USING NORMALIZED NEAR-FIELD SPECTROSCOPY

Номер: US20180059136A1
Автор: Andreev Gregory, Minne Stephen, Osechinskiy Sergey, Su Chanmin
Принадлежит:

Apparatus and method for nano-identification a sample by measuring, with the use of evanescent waves, optical spectra of near-field interaction between the sample and optical nanoantenna oscillating at nano-distance above the sample and discriminating background backscattered radiation not sensitive to such near-field interaction. Discrimination may be effectuated by optical data acquisition at periodically repeated moments of nanoantenna oscillation without knowledge of distance separating nanoantenna and sample. Measurement includes chemical identification of sample on nano-scale, during which absolute value of phase corresponding to near-field radiation representing said interaction is measured directly, without offset. Calibration of apparatus and measurement is provided by performing, prior to sample measurement, a reference measurement of reference sample having known index of refraction. Nano-identification is realized with sub-50 nm resolution and, optionally, in the mid-infrared portion of the spectrum. 2. A method according to claim 1 , wherein said detecting includes detecting during a relative scanning motion between the surface and the nanoantenna claim 1 , said motion occurring within a scan range.3. A method according to claim 2 , a first scanning of the surface of the SUT at a first predetermined distance of separation between the nanoantenna and the surface, and', 'a second scanning of said surface at a second predetermined distance, and, 'wherein said detecting during the relative scanning motion includes'}further comprising determining at least one of real and imaginary components of a difference between first and second magnitudes of said electromagnetic field, the first magnitude corresponding to the first pre-determined distance of separation from the pre-determined distances of separation, the second magnitude corresponding to the second pre-determined distance of separation from the distances of separation.4. A method according to claim 1 , ...

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Номер записи: 39
02-03-2017 дата публикации

SCANNING PROBE MICROSCOPE AND OPTICAL AXIS ADJUSTMENT METHOD FOR SCANNING PROBE MICROSCOPE

Номер: US20170059609A1
Автор: Hasegawa Shoichi, ITO Susumu, Ueno Toshihiro, WATANABE Masafumi
Принадлежит:

A scanning probe microscope includes: a cantilever; a cantilever supporting portion; a movement mechanism that moves a position of the cantilever; a light source that emits detection light; a detector that receives the detection light reflected on a reflecting surface of the cantilever; an objective lens; and a controller that controls the movement mechanism to perform a process including: detecting a spot position of a spot light of the detection light; detecting a position of the cantilever from an image captured by the imaging device; and controlling the movement mechanism based on the spot position, the position of the cantilever, an incident angle of the detection light, and the attachment angle such that the detection light is reflected on the reflecting surface when the cantilever is attached to the cantilever supporting portion. 1. A scanning probe microscope comprising:a cantilever that includes a reflecting surface that reflects light and a probe to be approximate to a surface of a sample;a cantilever supporting portion to which the cantilever is attached and supports the cantilever at a predetermined attachment angle with respect to a horizontal plane;a movement mechanism that moves a position of the cantilever;a light source that emits detection light;a detector that receives the detection light reflected on the reflecting surface of the cantilever and detects a position and a displacement of the cantilever based on the received detection light;an objective lens that is provided at a position facing the cantilever for capturing an image of a vicinity of the cantilever through the objective lens; anda controller that controls the movement mechanism to perform a process including:detecting a spot position of a spot light of the detection light captured through the objective lens in a state where the cantilever is not attached to the cantilever supporting portion;detecting a position of the cantilever from an image captured through the objective lens; ...

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Номер записи: 40
28-02-2019 дата публикации

Atomic Force Microscope with Optical Guiding Mechanism

Номер: US20190064208A1
Автор: Jonathan Adams
Принадлежит: Nanosurf AG

An atomic force microscope includes a scanner for scanning a probe along at least one translational axis, a stationary light source for generating an incident light beam, a stationary position sensitive detector for detecting a light beam reflected from a cantilever, an optical guiding mechanism for compensating a scanning motion of the probe and configured to guide the incident light beam to a spot on the cantilever and to guide the reflected light beam from the cantilever to the position sensitive detector, wherein the optical guiding mechanism includes at least two optical deflection elements per translational axis arranged to move synchronously with the probe along the respective translational axis, and configured to define an optical path between the light source and the detector for the incident and reflected light beam such that the optical path length is independent of the translation of the probe along the respective translational axis.

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Номер записи: 41
28-02-2019 дата публикации

SCANNING PROBE MICROSCOPE

Номер: US20190064211A1
Автор: Cleveland Jason, Grigg David A., Walters Deron, Zhang Haigang
Принадлежит:

A scanning probe microscope has a probe configured to move across the surface of a sample to be monitored. A scanner, to which the probe is mounted, moves the probe across the sample surface such that the probe is deflected in accordance with the structure of the sample surface. A beam system directs a light beam at the probe during the movement of the probe across the sample surface and a detector monitors the deflection of the probe using the light beam. The arrangement is such that the scanner is physically independent of the beam system. 1. A scanning probe microscope , comprising:a probe configured to move across the surface of a sample to be monitored;a scanner, to which the probe is mounted, configured to cause said movement of the probe across the sample surface such that the probe is deflected in accordance with the structure of the sample surface;a beam system for directing a light beam at the probe during said movement of the probe across the sample surface; anda detector for monitoring the deflection of the probe using the light beam;wherein the scanner is physically independent of the beam system.2. A scanning probe microscope according to claim 1 , wherein the light beam is directed at the probe by one or more optical elements and wherein none of the optical elements which direct the light beam so as to be incident upon the probe are mounted to the scanner or the probe.3. A scanning probe microscope according to claim 2 , wherein each of the said optical elements is physically mounted to the beam system.4. A scanning probe microscope according to claim 1 , wherein the scanner is moveable independently of the beam system.5. A scanning probe microscope according to claim 1 , further comprising a sample holder for holding the sample and wherein the sample holder is moveable independently of each of the scanner claim 1 , the probe and the beam system.6. A scanning probe microscope according to claim 1 , wherein the surface of the sample is arranged in use ...

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Номер записи: 42
29-05-2014 дата публикации

METHOD OF CONTROLLING FREQUENCY MODULATED-ATOMIC FORCE MICROSCOPE

Номер: US20140150139A1
Автор: MOON Christopher Ryan
Принадлежит: AGILENT TECHNOLOGIES, INC.

A method is provided for controlling an FM-AFM including a cantilever having a resonant frequency and an excitation system configured to oscillate the cantilever in response to a drive signal. The method includes determining latency of the excitation system; receiving a deflection signal indicating a deflection of a cantilever tip; mixing the deflection signal with a first sine signal output by a PLL indicating a frequency shift of a frequency response of the cantilever; measuring the frequency shift in response to the drive signal; determining spurious phase of the cantilever based on the determined latency, the resonant frequency of the cantilever, and the measured frequency shift; providing a second sine signal having a phase that is advanced by the determined spurious phase to preemptively compensate for subsequent spurious phase of the cantilever; and driving the excitation system using the second sine signal with an adjusted amplitude as the drive signal. 1. A method of controlling a frequency modulation (FM) atomic force microscope (AFM) comprising a cantilever having a resonant frequency and an excitation system configured to oscillate the cantilever in response to a drive signal , the method comprising:determining latency of the excitation system;receiving a deflection signal indicating a deflection of a tip of the cantilever;mixing the deflection signal with a first sine signal generated by a phase lock loop (PLL) indicating a frequency shift of a frequency response of the cantilever;measuring the frequency shift of the frequency response of the cantilever in response to the drive signal;determining spurious phase of the cantilever based on the determined latency, the resonant frequency of the cantilever, and the measured frequency shift of the frequency response of the cantilever in response to the drive signal;outputting a second sine signal from the PLL as a sine drive signal having a phase that is advanced by the determined spurious phase to ...

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Номер записи: 43
17-03-2016 дата публикации

EVALUATION SYSTEM AND A METHOD FOR EVALUATING A SUBSTRATE

Номер: US20160077016A1
Автор: Adan Ofer, Bar-or Ron, Feldman Haim, Naftali Ron, Shneyour Ofer, Uziel Yoram
Принадлежит:

There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate. 1. An evaluation system , comprising:a solid immersion lens;a plurality of spatial sensors, each spatial sensor in the plurality of spatial sensors being arranged to generate spatial relationship information indicative of a spatial relationship between the solid immersion lens and a substrate, wherein the plurality of spatial sensors comprises multiple atomic force microscopes (AFMs);at least one location correction element;a controller arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate; anda supporting structure coupled to the spatial sensors, the solid immersion lens and the at least one location correction element.2. The evaluation system according to wherein each AFM comprises a cantilever claim 1 , a tip claim 1 , a cantilever holder claim 1 , a cantilever illuminator that is arranged to illuminate the cantilever and a detector that is arranged to sense light deflected from the cantilever.3. The evaluation system according to wherein the multiple AFMs comprise at least three non-collinear AFMs.4. The evaluation system according to wherein the multiple AFMs comprise at least four non-collinear AFMs.5. The evaluation system according to wherein each AFM comprises an oscillator for oscillating the cantilever.6. The evaluation ...

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Номер записи: 44
29-03-2018 дата публикации

SCANNING PROBE MICROSCOPE

Номер: US20180088148A1
Автор: HIRADE Masato
Принадлежит: SHIMADZU CORPORATION

A scanning probe microscope capable of increasing a relative speed of a probe and making noise unlikely to occur in a measurement result for the surface shape of a sample. When a relative movement direction of the probe is switched at the time of reciprocation in an X direction and a direction opposite to the X direction (at a starting position P and a return position P), the relative speed is gradually decreased and then the direction is switched, and after the switching, the relative speed is gradually increased, to prevent a rapid change in the relative speed. At the time of shifting the probe in a Y direction and a direction opposite to the Y direction (at the starting position P and the return position P), the relative speed of the probe is gradually increased and then the relative speed is gradually decreased, to prevent a rapid change in the relative speed. 19- (canceled)10. A scanning probe microscope , comprising:a probe that is relatively moved along a surface of a sample;a reciprocation control unit that relatively moves the probe in a first direction and a direction opposite to the first direction with respect to the surface of the sample, to reciprocate the probe;a shifting control unit that relatively moves the probe in a second direction orthogonal to the first direction with respect to the surface of the sample, to shift the probe; anda measurement control unit that measures a surface shape of the sample based on a relative displacement amount of the probe in a direction orthogonal to the first direction and the second direction, the probe being relatively moved along the surface of the sample by the reciprocation control unit and the shifting control unit,wherein, when a relative movement direction of the probe is switched, the reciprocation control unit gradually decreases a relative speed and then switches the direction, and gradually increases the relative speed after the switching, to relatively reciprocate the probe, andthe shifting control ...

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Номер записи: 45
19-03-2020 дата публикации

REAL-TIME DIRECT MEASUREMENT OF MECHANICAL PROPERTIES IN-SITU OF SCANNING BEAM MICROSCOPE

Номер: US20200090901A1
Автор: Favata Joseph, Hadjikhani Ali, Ray Valery, Shahbazmohamadi SIna
Принадлежит:

System and methods are described for directly measuring mechanical properties of a sample while concurrently imaging the sample using a scanning beam microscope (e.g., a scanning electron microscope (SEM)). The system includes a clamping mount configured to hold the sample and a load cell positioned proximal to the clamping mount and configured to provide a direct, real-time measurement of force on the sample end. The system further includes a controllable probe configured to apply a force to the sample. In some embodiments, the sample load cell is tiltably couplable to a sample held by the clamping mount and the controllable probe is moveable between a plurality of different mounting positions relative to the load cell. 1. A method for direct-measurement of mechanical properties of a sample during electronic imaging , the method comprising:coupling a load cell to a sample under test, where the load cell is configured to directly measure a magnitude of force applied to the sample under test;capturing electronic image data of the sample under test; andoperating an actuator to apply a force to the sample under test while capturing the electronic image data.2. The method of claim 1 , further comprising correlating force data received from the load cell with the electronic image data.3. The method of claim 1 , further comprising coupling the sample under test to a device frame claim 1 , wherein the actuator is coupled to the device frame and configured to controllably move a probe relative to the sample under test.4. The method of claim 1 , wherein the sample under test includes a microelectronic component with at least one wire bonded to the microelectronic device claim 1 , the method further comprising:coupling a probe of the actuator to the at least one wire bonded to the microelectronic device, wherein operating the actuator to apply a force to the sample under test includes controllably moving the probe of the micromanipulator to pull the at least one wire bonded ...

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Номер записи: 46
12-05-2022 дата публикации

3D MULTIPURPOSE SCANNING MICROSCOPY PROBES

Номер: US20220146549A1
Автор: Glia Ayoub, QASAIMEH Mohammad A.
Принадлежит:

Disclosed is a multipurpose scanning microscopy probe comprising a probe holder, a cantilever connected to the probe holder, and a probe tip connected to the cantilever, wherein the probe tip is a three-dimensional geometry, and wherein the probe tip is a 3D printed part. In some embodiments the probe is made from SU8 epoxy-based resin. In some embodiments the probe is made from a combination of SU8 and nanomaterial such as carbon nanotubes. In some embodiments the probe includes cavities and voids. In some embodies the probe includes fluidic features and elements. Scanning microscopy probe methods are also disclosed. 1. A multipurpose scanning microscopy probe , comprising:a probe holder;a cantilever connected to the probe holder; anda probe tip connected to the cantilever, wherein the probe tip is a three-dimensional geometry, and wherein the probe tip is a 3D printed part.2. The probe of claim 1 , wherein the probe holder and the cantilever are 3D printed parts.3. The probe of claim 1 , wherein the probe holder claim 1 , the cantilever claim 1 , and the probe tip are 3D printed as a single part.4. The probe of claim 1 , wherein the probe comprises at least one material selected from the group consisting of SU8 epoxy-based resin claim 1 , photoresist claim 1 , polymers claim 1 , and a nanomaterial.5. The probe of claim 4 , wherein the nanomaterial comprises at least one material selected from the group consisting of carbon nanotubes claim 4 , nanorods claim 4 , biomolecules and nanoparticles.6. The probe of claim 5 , wherein the nanomaterial is embedded in the probe tip.7. The probe of claim 1 , wherein the probe tip is post-processed via at least one process selected from the group consisting of a focused ion beam etching claim 1 , a chemical vapor deposition claim 1 , a sputtering claim 1 , and a reactive ion etching.8. The probe of claim 1 , wherein the probe tip includes a hemispherical cavity.9. The probe of claim 1 , wherein the probe comprises at least one ...

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Номер записи: 47
28-03-2019 дата публикации

METHOD OF CONTROLLING A PROBE

Номер: US20190094267A1
Автор: Pacheco Louis
Принадлежит: CONCEPT SCIENTIFIQUE INSTRUMENTS

A method for commanding a tip of a probe is disclosed, wherein a command signal, representative of the force applied by said tip on the surface of a sample to be analyzed, includes at least one cycle successively defined by: a first step where the value of said command signal decreases from a maximum value (Smax) to a minimum value (Smin) so as to move said tip away from said surface at a predetermined distance called detachment height; a second step where the value of the command signal is maintained constant at said minimum value so as to maintain the tip at said detachment height; a third step where the value of the command signal increases from the minimum value up to said maximum value so as to bring the tip closer towards the surface to be analyzed until the tip comes into contact with the surface; and a fourth step where the value of the command signal is maintained constant at said maximum value to maintain the tip in contact with the surface to be analyzed under a constant force between the tip and the surface to be analyzed; the command signal being controlled between two successive steps to avoid any oscillation of the tip. 1. A method for commanding a tip of a probe , wherein the command signal , representative of the force applied by said tip on the surface of a sample to be analyzed , comprises at least one cycle successively defined by:a first step where the value of said command signal decreases from a maximum value (Smax) to a minimum value (Smin) so as to move said tip away from said surface at a predetermined distance called detachment height;a second step where the value of the command signal is maintained constant at said minimum value so as to maintain the tip at said detachment height;a third step where the value of the command signal increases from a minimum value up to said maximum value so as to bring the tip towards the surface to be analyzed until the tip comes into contact with the surface; anda fourth step where the value of the command ...

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Номер записи: 48
19-04-2018 дата публикации

Method and Device of Using a Scanning Probe Microscope

Номер: US20180106830A1
Автор: Adams Jonathan David, Fantner Georg Ernest, Nievergelt Adrian Pascal
Принадлежит:

a scanning probe microscope for high-speed imaging and/or nanomechanical mapping. The microscope comprises a scanning probe comprising a cantilever with a tip at the distal end; and means for modulating a tip-sample distance separating the tip from an intended sample to be viewed with the microscope, the means for modulating being adapted to provide a direct cantilever actuation. 117-. (canceled)18: A method for characterising a surface of a sample using atomic force microscopy with a cantilever acting as both actuator and sensor , the method comprising the steps of:generating an oscillating motion between a probe of the cantilever of the atomic force microscope and the surface of the sample by direct cantilever actuation;recording a deflection of the cantilever as a first signal as a function of time;extracting a tip-sample interaction as a second function of time from the first signal, by subtracting a background signal as a function of time;determining a peak force from the extracted tip-sample interaction;comparing the peak force to a predetermined setpoint force to determine an error signal;generating a control signal from the error signal; andactuating a z-actuator using the control signal to maintain the peak force at the predetermined setpoint force.19: The method of claim 18 , wherein the background signal includes a signal of the deflection of the direct cantilever actuation to generate tip-sample distance modulation.20: The method of claim 18 , wherein the step of generating the oscillating motion is performed by a modulation device that includes at least one of a photothermal device claim 18 , electrothermal device claim 18 , electrostatic device claim 18 , magnetic device claim 18 , and piezoelectric device.21: The method of claim 18 , wherein the step of recording the cantilever signal includes a step of reading a light beam.22: The method of claim 18 , wherein the step of recording the cantilever signal includes using a piezoresistive cantilever ...

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Номер записи: 49
19-04-2018 дата публикации

Scanning probe microscope

Номер: US20180106832A1
Автор: Kanji Kobayashi, Masato Hirade
Принадлежит: Shimadzu Corp

Provided is a scanning probe microscope capable of performing observation with high accuracy even when a beam splitter is configured to be movable. When checking positions of a sample and a cantilever in a scanning probe microscope, by disposing an optical microscope to face a first opening portion of a top surface of a housing, and by gripping and rotating an operating portion provided on a side surface of the housing, a user rotates and moves a beam splitter held by a holding portion in the housing, and retracts the beam splitter from the field of view of the optical microscope. Therefore, the beam splitter can always be disposed in the housing, and the user can be prevented from touching the beam splitter. As a result, it is possible to prevent the beam splitter from being damaged or stains from adhering to the beam splitter. Further, the moving distance of the bears splitter 6 can be shortened. Therefore, it is possible to suppress the occurrence of a deviation in the position of the beam splitter.

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Номер записи: 50
26-04-2018 дата публикации

Miniaturized and compact probe for atomic force microscopy

Номер: US20180113149A1
Автор: FAUCHER Marc, MAIRIAUX-MAGE Estelle, WALTER Benjamin
Принадлежит:

A probe for atomic force microscopy comprises a tip for atomic force microscopy oriented in a longitudinal direction, wherein: the tip is arranged at one end of a sensitive part of the probe, which is movable or deformable and linked to a support structure, which is anchored to the main surface of the substrate; the sensitive portion and the support structure are planar elements, extending mainly in planes that are parallel to the main surface of the substrate; the sensitive portion is linked to the support structure via at least one element allowing the sensitive portion to be displaced or to be extended in this direction; and the tip, the sensitive part and the support structure protrude from an edge of the substrate in the longitudinal direction. An atomic force microscope comprising at least one such probe is also provided. 1. A probe for atomic force microscopy comprising a tip for atomic force microscopy borne by a planar substrate having a main surface , said tip being oriented in a direction referred to as the longitudinal direction , parallel to said main surface , wherein:the tip is arranged at one end of a sensitive part of the probe, which is movable or deformable and linked to a support structure, which is anchored to the main surface of the substrate;the sensitive part and the support structure are planar elements, extending mainly in planes that are parallel to the main surface of the substrate;the sensitive part is linked to the support structure via at least one element allowing said sensitive part to be displaced or to be extended in this direction;the tip, the sensitive part and the support structure protrude from an edge of the substrate in said longitudinal direction;the sensitive part of the probe is at least partly formed by a portion of a layer of a first material, referred to as the first layer, separated from the main surface of the substrate, and the support structure is formed by a portion of a layer of a second material, referred to as ...

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Номер записи: 51
09-06-2022 дата публикации

APPARATUS AND METHOD FOR EXAMINING AND/OR PROCESSING A SAMPLE

Номер: US20220178965A1
Автор: Baur Christof, Budach Michael
Принадлежит:

The present invention relates to an apparatus for examining and/or processing a sample, said apparatus comprising: (a) a scanning particle microscope for providing a beam of charged particles, which can be directed on a surface of the sample; and (b) a scanning probe microscope with a deflectable probe; (c) wherein a detection structure is attached to the deflectable probe. 1. An apparatus for examining and/or processing a sample , the apparatus comprising:a. scanning particle microscope for providing a beam of charged particles, which can be directed on a surface of the sample; andb. scanning probe microscope with a deflectable probe and a light pointer system for detecting a deflection of the probe;c. wherein the light pointer system is guided at least in part in a column of the scanning particle microscope.2. The apparatus of claim 1 , wherein the scanning particle microscope comprises claim 1 , at its outlet opening for the beam of charged particles claim 1 , at least one lens for the light pointer system with an opening for the passage of the beam of charged particles.3. The apparatus of claim 1 , wherein the scanning particle microscope comprises a deflection mirror and a window of the light pointer system.4. The apparatus of claim 2 , wherein the scanning particle microscope comprises a deflection mirror and a window of the light pointer system.5. The apparatus of claim 1 , wherein optical elements of the light pointer system claim 1 , which are arranged in the scanning particle microscope claim 1 , have an optically substantially transparent and electrically conductive coating.6. The apparatus of claim 2 , wherein optical elements of the light pointer system claim 2 , which are arranged in the scanning particle microscope claim 2 , have an optically substantially transparent and electrically conductive coating.7. The apparatus of claim 3 , wherein optical elements of the light pointer system claim 3 , which are arranged in the scanning particle microscope ...

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Номер записи: 52
30-04-2015 дата публикации

DEVICE AND METHOD FOR MEASURING DISTRIBUTION OF ATOMIC RESOLUTION DEFORMATION

Номер: US20150121575A1
Автор: JANG Bong Kyun, Kim Jae-Hyun, Kim Kyung-suk, LEE Hak Joo, Wang Chien-Kai
Принадлежит:

The present invention relates to an atomic resolution deformation distribution measurement device that can measure a deformation rate of an atomic scale with low expense by improving resolution using an AFM system, and the atomic resolution deformation distribution measurement device includes: a laser source generating a laser beam; a first cantilever and a second cantilever provided close to a measurement specimen or a reference specimen to cause deformation by an atomic force; an optical system controlling a light path of the laser beam so as to cause the laser beam to be sequentially reflected to the first cantilever and the second cantilever and locate the first cantilever and the second cantilever to an image point; a measurement unit measuring the laser beam reflected from the second cantilever; and a stage on which a measurement specimen or a reference specimen is located and movable in X, Y, and Z axis directions. 1. An atomic resolution deformation distribution measurement device comprising:a laser source generating a laser beam;a first cantilever and a second cantilever provided close to a measurement specimen or a reference specimen to cause deformation by an atomic force;an optical system controlling a light path of the laser beam so as to cause the laser beam to be sequentially reflected to the first cantilever and the second cantilever and locate the first cantilever and the second cantilever to an image point; anda measurement unit measuring the laser beam reflected from the second cantilever; anda stage on which a measurement specimen or a reference specimen is located and movable in X, Y, and Z axis directions.2. The atomic resolution deformation distribution measurement device of claim 1 ,wherein one of the first cantilever and the second cantilever is located on the measurement specimen and the other is located on the reference specimen, andthe measurement measures a result of overlapping of atom lattice location data of a surface of the ...

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Номер записи: 53
13-05-2021 дата публикации

Scanning Sensor Having a Spin Defect

Номер: US20210140996A1
Автор: Boss Jens, CHANG KEVIN, Degen Christian, Rhensius Jan
Принадлежит:

A sensor device includes a carrier, a force feedback sensor, and a probe containing a spin defect, the probe being connected to the force feedback sensor either directly or indirectly via a handle structure. In order to couple the spin defect to a microwave field in an efficient and robust manner, the sensor device includes an integrated microwave antenna arranged at a distance of less than 500 micrometers from the spin defect. The sensor device can be configured as a self-contained exchangeable cartridge that can easily be mounted in a sensor mount of a scanning probe microscope. 1. A sensor device , comprising:a carrier;a force feedback sensor connected to the carrier;a probe containing a spin defect, the probe being connected to the force feedback sensor either directly or indirectly via a handle structure; andan integrated microwave antenna arranged at a distance of less than 500 micrometers from the spin defect.2. The sensor device of claim 1 , wherein the probe is made of a diamond material claim 1 , and wherein the spin defect is an NV center.3. The sensor device of claim 1 , wherein the probe comprises a tip having a free end defining a sensing surface claim 1 , the spin defect being embedded in the tip within 100 nanometers from the sensing surface.4. The sensor device of claim 1 , comprising a handle structure connected to the force feedback sensor claim 1 ,wherein the probe comprises a flat slab defining a bottom surface and a top surface, the tip protruding from the bottom surface of the flat slab,wherein the handle structure has a distal end defining a flat mounting surface for the probe; andwherein the top surface of the flat slab is bonded to the flat mounting surface of the handle structure.5. The sensor device of claim 4 , wherein the mounting surface is producible by lithographic patterning of a wafer material.6. The sensor device of claim 1 , wherein the force feedback sensor is a piezoelectric force feedback sensor.7. The sensor device of claim 1 ...

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Номер записи: 54
05-05-2016 дата публикации

Force Detection for Microscopy Based on Direct Tip Trajectory Observation

Номер: US20160124014A1
Автор: King Gavin McLean, Sigdel Krishna Prasad
Принадлежит:

With example embodiments described herein, a probe tip of a scanning probe microscope (such as an atomic force microscope (AFM)) is directly detected as it moves in a tapping mode to determine the tip positions over time, and a force for the tip is computed from these determined tip positions. 1. An apparatus comprising:a scanning probe microscope, the scanning probe microscope having a moveable tip, and wherein the scanning probe microscope is configured to move the tip in a tapping mode to cause tapping movement for the tip;a position detector, the position detector configured to (1) directly detect the tapping tip, and (2) generate an output signal indicative of a plurality of positions for the detected tip over time; anda processor configured for operation in conjunction with the position detector, the processor configured to (1) process data representative of the output signal from the position detector, (2) determine a plurality of positions for the tapping tip over time in at least one dimension based on the processed data, (3) process the determined tip positions, and (4) compute a force for the tapping tip in at least one dimension based on the processed tip positions over time.2. The apparatus of wherein the scanning probe microscope is configured for observation of an object by the tapping tip claim 1 , and wherein the computed force comprises a force representative of an interaction force between the tapping tip and the object under observation.3. The apparatus of wherein the processor is further configured to (1) compute a first acceleration for the tapping tip based on a plurality of the detected tip positions over time while the tapping tip is not in contact with the object claim 2 , (2) compute a second acceleration for the tapping tip based on a plurality of the detected tip positions over time while the tapping tip is in contact with the object claim 2 , and (3) isolate the interaction force between the tapping tip and the object under observation ...

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Номер записи: 55
16-04-2020 дата публикации

SCANNING PROBE MICROSCOPY SYSTEM FOR AND METHOD OF MAPPING NANOSTRUCTURES ON THE SURFACE OF A SAMPLE

Номер: US20200116754A1
Автор: Dekker Albert, Kastelijn Aukje Arianne Annette, Kramer Geerten Frans Ijsbrand, Kruidhof Rik, NIEUWKOOP Evert, Sadeghian Marnani Hamed, Toet Peter Martijn, van Riel Martinus Cornelius Johannes Maria
Принадлежит:

The present document relates to a scanning probe microscopy system and method for mapping nanostructures on the surface of a sample. The system comprises a sample support structure, a scan head including a probe comprising a cantilever and a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system also includes an optical source, and a sensor unit for obtaining a sensor signal indicative of a position of the probe tip. The sensor unit includes a partially reflecting element for reflecting a reference fraction and for transmitting a sensing fraction of the optical signal. It further includes directional optics for directing the sensing fraction as an optical beam towards the probe tip, and for receiving a reflected fraction thereof to provide a sensed signal. Moreover the sensor includes an interferometer for providing one or more output signals, and signal conveyance optics for conveying the sensed signal and the reference signal to the interferometer. The directional optics is configured for directing the sensing fraction such that at least a part of the sensing fraction is reflected by the probe tip such as to form the reflected fraction. 1. A scanning probe microscopy system for mapping nanostructures on the surface of a sample , comprising:a sample support structure for supporting the sample,a scan head including a probe comprising a cantilever and a probe tip arranged on the cantilever,an actuator for scanning the probe tip relative to the sample surface for mapping of the nanostructures,an optical source for providing an optical signal, and [ reflect a reference fraction of the optical signal to provide a reference signal, and', 'transmit a sensing fraction of the optical signal;, 'a partially reflecting element, configured to, directing the sensing fraction as an optical beam towards the probe tip, and', 'receiving a reflected fraction of the optical beam to provide a sensed signal;, 'a directional optics configured for ...

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Номер записи: 56
10-05-2018 дата публикации

Metrological Scanning Probe Microscope

Номер: US20180128853A1
Автор: Cleveland Jason, Labuda Aleksander, Proksch Roger, Walters Deron
Принадлежит:

This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme. 1. An atomic force microscope system that operates to characterize a sample , comprising:an atomic force microscope probe having a cantilever with a tip;an objective lens which allows optical viewing in an area near the sample,the objective lens operable to direct a light beam to a surface of the cantilever and to obtain a return beam from the surface,the return beam being indicative of movement of the cantilever; a rotatable steering mirror that is rotatable in two orthogonal axes that are parallel to a reflecting surface of the steering mirror;', 'a light source emitting a first beam directed at the steering mirror, where the first beam has a first wavelength;', 'the steering mirror controlled to reflect the first beam on the surface of the cantilever opposite the tip, by pitching and yawing the steering mirror, and controlling a physical pivot where the two orthogonal axes intersect to coincide with a point of incidence where the first beam is reflected from the mirror;', 'a first mirror receiving the first beam from the first optical beam positioning unit and directing the first beam to the objective lens;', 'said first mirror receiving a reflection of the first beam from the surface of the cantilever, and', 'a first photodetector detecting a first light power of the first light beam reflected form the surface of the cantilever;, 'a first optical beam positioning unit, comprising a second light source emitting a second beam at a second wavelength different than the first wavelength;', 'a second rotatable steering mirror, that is rotatable in two orthogonal axes that are parallel to a reflecting surface of the rotatable steering mirror,', 'the second steering ...

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Номер записи: 57
02-05-2019 дата публикации

MULTIPLE INTEGRATED TIPS SCANNING PROBE MICROSCOPE

Номер: US20190128919A1
Автор: Amponsah Kwame
Принадлежит: Xallent, LLC

Device and system for characterizing samples using multiple integrated tips scanning probe microscopy. Multiple Integrated Tips (MiT) probes are comprised of two or more monolithically integrated and movable AFM tips positioned to within nm of each other, enabling unprecedented micro to nanoscale probing functionality in vacuum or ambient conditions. The tip structure is combined with capacitive comb structures offering laserless high-resolution electric-in electric-out actuation and sensing capability and novel integration with a Junction Field Effect Transistor for signal amplification and low-noise operation. This “platform-on-a-chip” approach is a paradigm shift relative to current technology based on single tips functionalized using stacks of supporting gear: lasers, nano-positioners and electronics. 1. A method of attaching a probe head to a scanning probe microscope , the method comprising the steps of:removing an existing probe head of the scanning probe microscope; andmounting a probe head to a sample stage of the scanning probe microscope.2. A method of attaching a probe head to a three-dimensional microscope , the method comprising the steps of:placing a sample stage under the three-dimensional microscope, wherein the sample stage is configured to move the sample in at least two axes; andmounting a probe head relative to the sample stage.3. The method of claim 2 , wherein the three-dimensional microscope is an optical microscope claim 2 , a scanning electron microscope claim 2 , or a transmission electron microscope.4. A method of operating a scanning probe microscope claim 2 , the method comprising the steps of:providing a probe with at least one tip, the probe comprising at least one monolithically integrated actuator and sensor, wherein the monolithically integrated actuator is configured to actuate and oscillate the probe tip; andmeasuring, using the monolithically integrated sensor, a motion of the oscillating probe tip.5. The method of claim 4 , ...

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Номер записи: 58
23-04-2020 дата публикации

HETERODYNE ATOMIC FORCE MICROSCOPY DEVICE, METHOD AND LITHOGRAPHIC SYSTEM

Номер: US20200124635A1
Автор: Mohtashami Abbas, Sadeghian Marnani Hamed, VAN ES Maarten Hubertus
Принадлежит:

A method to perform sub-surface detection of nanostructures in a sample, uses an atomic force microscopy system that comprising a scan head having a probe with a cantilever and a probe tip arranged on the cantilever. The method comprises: moving the probe tip and the sample relative to each other in one or more directions parallel to the surface for scanning of the surface with the probe tip; and monitoring motion of the probe tip relative to the scan head with a tip position detector during said scanning for obtaining an output signal. During said scanning acoustic vibrations are induced in the probe tip by applying a least a first and a second acoustic input signal respectively comprising a first and a second signal component at mutually different frequencies above IGHz, differing by less than IGHz to the probe, and analyzing the output signal for mapping at least subsurface nanostructures below the surface of the sample. 1. A heterodyne method to perform sub-surface detection of nanostructures in a sample , using an atomic force microscopy system that comprises a scan head including a probe , wherein the probe comprises a cantilever and a probe tip arranged on the cantilever , wherein the method comprises:moving the probe tip and the sample relative to each other in one or more directions parallel to a surface of the sample for a scanning of the surface with the probe tip; andmonitoring a motion of the probe tip relative to the scan head with a tip position detector during said scanning for obtaining an output signal; applying a first acoustic input signal comprising a first signal component at a first frequency to the probe, and', 'applying, in addition to said a first acoustic input signal, a second acoustic input signal comprising a second signal component at a second frequency,', 'wherein said first frequency and said second frequency are mutually different frequencies;, 'inducing, during said scanning, an acoustic vibrations in the probe tip byanalyzing the ...

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Номер записи: 59
17-05-2018 дата публикации

Method and Apparatus of Operating a Scanning Probe Microscope

Номер: US20180136251A1
Автор: Hu Shuiqing, Hu Yan, Ma Ji, Shi Jian, Su Chanmin
Принадлежит:

Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined, and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation. 1. A method for determining an occurrence of parachuting of a probe of a scanning probe microscope operating in an oscillating mode , the method comprising:providing relative motion between a probe and a sample and controlling that motion using a feedback loop that generates a feedback error signal in peak force tapping (PFT) mode;detecting at least one of a peak force, an adhesion force and a peak-to-peak force on the probe; anddetermining one of a group including: a) whether the peak force, the adhesion force or the peak-to-peak force within an oscillation period of the relative motion is less than a threshold value, b) a point at which the feedback error signal is between two threshold values indicating the peak force is about zero, and c) whether the standard deviation and/or spectrum amplitude, at a certain frequency or selected frequencies, of the feedback error signal is less than a threshold value which indicates that the feedback loop is open.2. The method of claim 1 , further comprising claim 1 , after determining an occurrence of parachuting claim 1 , returning the probe to the sample by moving at least one of the probe and the sample.3. The method of claim 2 , further comprising moving the probe toward the sample when the feedback error signal ...

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Номер записи: 60
18-05-2017 дата публикации

METHOD OF MEASURING A TOPOGRAPHIC PROFILE AND/OR A TOPOGRAPHIC IMAGE

Номер: US20170138982A1
Автор: Bellaton Bertrand, Consiglio Richard, Woirgard Jacques
Принадлежит: ANTON PAAR TRITEC SA

Measuring a topographic profile and/or a topographic image of a surface of a sample includes positioning an indenter out of contact with a sample and in a constant position with respect to a headstock; positioning a topographic tip to detect a surface of the sample and positioning a reference structure at a predetermined distance from said surface; measuring the relative position of the indenter with respect to the reference structure by a relative position sensor; translating said sample perpendicular to said longitudinal axis while maintaining the reference structure at said predetermined distance from the surface of the sample by the feedback control system and the second actuator while measuring the relative position of the indenter with respect to the reference structure by the relative position sensor; and generating a topographic profile and/or a topographic image based on measurements of the relative position. 1. A method of measuring one or both of a topographic image or a topographic profile of a surface of a sample , the method comprising: a headstock,', 'an indenter mounted on said headstock by a first actuator configured to displace the indenter parallel to a longitudinal axis of the indenter,', 'a force sensor configured to measure a force applied by said indenter,', 'a reference structure mounted on said headstock by a second actuator configured to displace the reference structure parallel to said longitudinal axis,', 'a topographic tip mounted on said reference structure and configured to detect a surface of a sample,', 'a relative position sensor configured to determine a relative position of the indenter with respect to the reference structure,', 'a feedback control system configured to control the second actuator based on detection of said surface of said sample by the topographic tip, and', 'a sample holder configured to hold said sample facing the indenter and the topographic tip, the sample holder being configured to be displaced in at least ...

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Номер записи: 61
07-08-2014 дата публикации

Method and Apparatus of Operating a Scanning Probe Microscope

Номер: US20140223615A1
Автор: Hu Shuiqing, Hu Yan, Ma Ji, Shi Jian, Su Chanmin
Принадлежит: Bruker Nano, Inc.

Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined, and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation. 1. A scanning probe microscope (SPM) comprising:a probe for moving in a periodic motion relative to a sample;a position detector for detecting a motion of the probe;a PFT mode force detection block for determining a substantially instantaneous force between the probe and the sample from the detected motion of the probe; anda controller for automatically controlling the periodic motion of the probe relative to the sample in response to the substantially instantaneous force determined and for maintaining a feedback setpoint;wherein the controller automatically controls a gain in a corresponding feedback loop.2. The SPM of claim 1 , further including a block for automatically controlling Z-limit.3. The SPM of claim 1 , wherein the controller provides relative scanning motion between the probe and the sample and automatically controls a scan rate.4. The SPM of claim 1 , wherein the feedback setpoint is a preset instantaneous force claim 1 , and the controller automatically optimizes the preset instantaneous force.5. The SPM of claim 1 , wherein the periodic motion is a relative oscillatory motion between the probe and the sample claim 1 , and wherein the instantaneous force is determined prior to the completion of one cycle of the oscillatory motion.6. The SPM ...

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Номер записи: 62
24-05-2018 дата публикации

Imaging a Gap Between Sample and Probe of a Scanning Probe Microscope in a Substantially Horizontal Side View

Номер: US20180143221A1
Автор: BRANDNER Markus, Gomez-Casado Alberto, Koller Daniel
Принадлежит:

A scanning probe microscope analyses a sample by moving a probe and the sample relative to one another. The scanning probe microscope includes a detection unit for detecting an image of a gap between the sample and the probe in a substantially horizontal side view. 1. A scanning probe microscope for analyzing a sample by moving a probe and the sample relative to one another , the scanning probe microscope , comprising:a detection unit for detecting an image of a gap between the sample and the probe in a substantially horizontal side view.2. The scanning probe microscope according to claim 1 , wherein the image in the substantially horizontal side view is detected at an angle of less than 5° to a horizontal axis.3. The scanning probe microscope according to claim 1 , further comprising:a drive unit configured for moving at least one of the probe and the sample for mutually approaching probe and sample from an initial distance to a final distance of less than 1 mm, based on the detected image of the gap.4. The scanning probe microscope according to claim 3 , wherein the drive unit is configured for moving at least one of the probe and the sample for mutually approaching probe and sample from the initial distance to an intermediate distance with a first velocity and subsequently from the intermediate distance to the final distance with a second velocity smaller than the first velocity based on the detected image of the gap.5. The scanning probe microscope according to claim 1 , wherein the detection unit is configured for being capable of detecting a size of the gap for samples of different sizes without readjustment.6. The scanning probe microscope according to claim 1 , further comprising:an illumination unit configured for illuminating the gap with electromagnetic radiation from a substantially horizontal side position.7. The scanning probe microscope according to claim 6 , comprising at least one of the following features:wherein the detecting unit and the ...

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Номер записи: 63
14-08-2014 дата публикации

Method and Apparatus of Using Peak Force Tapping Mode to Measure Physical Properties of a Sample

Номер: US20140230103A1
Автор: Hu Shuiqing, Hu Yan, Ma Ji, Shi Jian, Su Chanmin
Принадлежит: Bruker Nano, Inc.

Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation. 1. A method of operating a scanning probe microscope (SPM) , the method comprising:providing relative motion between a probe and a sample; anddetecting a parachuting probe relative to the sample while controlling the motion in PFT Mode.2. The method of claim 1 , wherein the detecting step includes determining when a feedback error signal is less than a threshold value.3. The method of claim 2 , wherein the determining step includes using one of a standard deviation and a spectrum amplitude at least one frequency of the feedback error signal.4. The method of claim 1 , wherein the detecting step includes determining when at least one of a group including peak force claim 1 , adhesion force claim 1 , and a peak-to-peak force within an oscillation period is less than a threshold value.5. The method of claim 1 , wherein the detecting parachuting includes:detecting motion of the probe;recovering, from the detected probe motion, a probe deflection based on a probe-sample interaction, the recovered probe deflection being substantially independent of parasitic probe deflection, wherein the parasitic probe deflection is caused by the hydrodynamic background associated with operation of the SPM, and wherein the recovering step includes subtracting the hydrodynamic ...

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Номер записи: 64
02-06-2016 дата публикации

PROBE MICROSCOPE

Номер: US20160154022A1
Автор: Humphris Andrew
Принадлежит:

A scanning probe microscope comprising: a signal generator providing a drive signal for an actuator to move a probe repeatedly towards and away from a sample. In response to the detection of an interaction of the probe with the sample the drive signal is modified to cause the probe to move away from the sample. The drive signal comprises an approach phase in which an intensity of the drive signal increases to a maximum value; and a retract phase in which the intensity of the drive signal reduces from the maximum value to a minimum value in response to the detection of the surface position. The intensity of the drive signal is held at the minimum value during the retract phase and then increased at the end of the retract phase. The duration of the retract phase is dependent on the maximum value in the approach phase. 1. A scanning probe microscope comprising:a probe that is mechanically responsive to a driving force;a signal generator for providing a drive signal to an actuator that generates the driving force by heating the probe, the drive signal being such as to cause the actuator to move the probe repeatedly towards and away from a sample;a detection system arranged to output a detection signal indicative of a position of the probe; andsignal processing apparatus arranged to monitor the probe as the probe approaches the sample and to detect a surface position at which the probe interacts with the sample;wherein in response to detection of the surface position the signal processing apparatus prompts the signal generator to modify the drive signal to cause the probe to move away from the sample,wherein the signal generator is arranged so that the drive signal comprises a series of cycles, each cycle comprising an approach phase in which an intensity of the drive signal increases to a maximum value to heat the probe and cause the probe to move towards the sample; and a retract phase after the approach phase in which the intensity of the drive signal reduces from the ...

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Номер записи: 65
31-05-2018 дата публикации

APPARATUS AND METHODS FOR INVESTIGATING A SAMPLE SURFACE

Номер: US20180149673A1
Автор: HUO Fengwei, WU Jin
Принадлежит:

An apparatus for investigating a sample surface is disclosed. The apparatus comprises: a probe array comprising a substrate and a plurality of probe tips extending from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface; an actuator configured to move the probe array towards the sample surface; a light source configured to illuminate the probe tips with an illumination through the substrate; and an image capture device arranged to detect a change in intensity of the illumination reflected from the probe tips. 1. An apparatus for investigating a sample surface , the apparatus comprising:a probe array comprising a substrate and a plurality of probe tips extending from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface;an actuator configured to move the probe array towards the sample surface;a light source configured to illuminate the probe tips with an illumination through the substrate; andan image capture device arranged to detect a change in intensity of the illumination reflected from the probe tips.2. An apparatus according to wherein the probe tips comprise an elastomer.3. An apparatus according to claim 2 , wherein the probe tips comprise polydimethylsiloxane (PDMS).4. An apparatus according to claim 1 , wherein the actuator is configured to move the probe array towards the sample surface and away from the sample surface.5. An apparatus according to claim 1 , further comprising an XY scanning stage configured to scan the probe array parallel to the sample surface.6. An apparatus according to claim 1 , wherein the probe tips of the probe array have a length of between 1 μm and 500 μm.7. An apparatus according to claim 1 , wherein the actuator is configured to move the probe array towards and/or away from the sample surface at a speed in the range of 0.1 μm/s to 2000 μm/s.8. An apparatus according to claim 1 , wherein ...

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Номер записи: 66
07-05-2020 дата публикации

SCANNING PROBE MICROSCOPE

Номер: US20200141970A1
Автор: Gray David, Humphris Andrew
Принадлежит:

A scanning probe microscope with a first actuator () configured to move a feature in the form of a tip () so that the feature follows a scanning motion. A vision system () is configured to collect light from a field of view to generate image data. The field of view includes the feature and the light from the field of view travels from the feature to the vision system via the steering element (). A tracking control system ()bis configured to generate one or more tracking drive signals in accordance with stored reference data. A second actuator () is configured to receive the one or more tracking drive signals and move the steering element on the basis of the one or more tracking drive signals so that the field of view follows a tracking motion which is synchronous with the scanning motion and the feature remains within the field of view. An image analysis system () is configured to analyse the image data from the vision system to identify the feature and measure an apparent motion of the feature relative to the field of view. A calibration system is configured to adjust the stored reference data based on the apparent motion measured by the image analysis system. 1. A scanning probe microscope comprising:a first actuator configured to move a feature so that the feature follows a scanning motion;a steering element;a vision system configured to collect light from a field of view to generate image data, wherein the field of view includes the feature and the light from the field of view travels from the feature to the vision system via the steering element;a tracking control system configured to generate one or more tracking drive signals in accordance with stored reference data;a second actuator configured to receive the one or more tracking drive signals and move the steering element on the basis of the one or more tracking drive signals so that the field of view follows a tracking motion which is synchronous with the scanning motion and the feature remains within the ...

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Номер записи: 67
07-05-2020 дата публикации

METHOD AND APPARATUS FOR EXAMINING A MEASURING TIP OF A SCANNING PROBE MICROSCOPE

Номер: US20200141972A1
Автор: Bauer Markus, Baur Christof, Kornilov Kinga
Принадлежит:

The present invention relates to a method for examining a measuring tip of a scanning probe microscope, wherein the method includes the following steps: (a) generating at least one test structure before a sample is analyzed, or after said sample has been analyzed, by the measuring tip; and (b) examining the measuring tip with the aid of the at least one generated test structure. 1. A method for examining a measuring tip of a scanning probe microscope , wherein the method includes the following steps:a. generating at least one test structure before a sample is analyzed, or after said sample has been analyzed, by the measuring tip, wherein generating the at least one test structure is carried out on the sample and/or a sample stage, and wherein generating the at least one test structure comprises a particle beam-induced deposition of the test structure and/or a particle beam-induced etching of the at least one test structure; andb. examining the measuring tip with the aid of the at least one test structure deposited and/or etched on the sample and/or the sample stage with the aid of the particle beam.2. The method of claim 1 , wherein a contour of the at least one test structure is matched to a contour of the sample.3. The method of claim 2 , wherein the contour of the at least one test structure is matched to the form of the measuring tip.4. The method of claim 2 , wherein the contour of the at least one test structure is embodied to detect a movement direction of the measuring tip that deviates from a sample normal.5. The method of claim 1 , wherein the test structure comprises at least one structure element with an undercut.6. The method of claim 1 , wherein the at least one test structure is generated at a site of the sample or of the sample stage at which the at least one test structure substantially does not impair a function of the sample or the sample stage.7. The method of claim 1 , wherein generating the at least one test structure comprises: providing a ...

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Номер записи: 68
18-06-2015 дата публикации

Nanoindenter Multimodal Microscope Objective for Mechanobiology

Номер: US20150168239A1
Автор: Amy Wagoner Johnson, Kimani Toussaint, Placid FERREIRA, William Wilson
Принадлежит: University of Illinois

Methods and apparatus for characterizing a sample in situ as to both its mechanical and optical characteristics. The apparatus comprises a reflective microscope with a concave primary mirror and a convex secondary mirror sharing a common optical axis, and an actuator vignetted by the convex secondary mirror for applying a force to a nanoprobe in a direction having a component along the common optical axis. The apparatus may addition include a source for generating an illuminating beam, a detector, and a processor for forming an image based on a signal provided by the detector.

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Номер записи: 69
16-06-2016 дата публикации

Metrological Scanning Probe Microscope

Номер: US20160169937A1
Автор: Cleveland Jason, Labuda Aleksander, Proksch Roger, Walters Deron
Принадлежит:

This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme. 1. An atomic force microscope system with two optical beam positioning units operating to characterize a sample , comprising:an atomic force microscope probe with a tip at one end of the cantilever;a sample which is located below the tip of the cantilever;an objective lens which allows optical viewing in an area of the cantilever or the sample, directs a light beam to the back of the cantilever opposite the tip and obtains a return beam from the cantilever indicative of the movement of the cantilever;two dichroic mirrors, one of which receives a beam from the first optical beam positioning unit and in turn directs the beam to the objective lens, and the other of which receives a beam from the second optical beam positioning unit and in turn directs the beam to the objective lens; ["a light source with a lens emitting an infrared beam directed at a steering mirror that is rotatable in two orthogonal axes that are parallel to the mirror's surface, one of such axes lying within the plane of incidence wherein lie both the infrared beam and the reflection of such beam;", 'focusing the axial position of the infrared beam reflected from the mirror on the back of the cantilever opposite the tip by pitching and yawing the steering mirror so that the physical pivot where the two orthogonal axes intersect coincides with point of incidence where the infrared beam is reflected from the mirror;', 'a lens group which collimates the infrared beam reflected from the steering mirror and directs it to a polarizing beamsplitter and quarter-waveplate and from which it is directed outside the first optical beam positioning unit to a dichroic mirror; and', 'the quarter-waveplate and ...

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Номер записи: 70
16-06-2016 дата публикации

METHOD OF ANALYZING SURFACE OF SAMPLE USING SCANNING PROBE MICROSCOPE AND SCANNING PROBE MICROSCOPE THEREFOR

Номер: US20160169938A1
Автор: Ahn Jaemin, Kim Seongheon, Kwon Youngnam, Paek Woonjung, Park Sungjun, Yun Dongjin
Принадлежит:

Provided are methods for analyzing a surface of a sample using a scanning probe microscope including a cell-attached probe and scanning probe microscopes therefor. 1. A method of analyzing a surface of a sample using a scanning probe microscope , the method comprising:providing a probe including a cantilever and a cell attached thereto;moving the probe relative to a sample surface using a scanner to allow interaction between the sample surface and the probe;measuring a deflection distance of the probe using a deflection sensor; anddetermining an interaction force between the probe and the sample surface based on the deflection distance.2. The method of claim 1 , wherein the scanning probe microscope includes the probe for detecting information about the sample surface claim 1 , the scanner for moving the probe relative to the sample to allow the probe to scan the sample surface claim 1 , and the deflection sensor for detecting a deflection of the probe claim 1 , wherein the probe includes a cantilever with one end connected to the scanner and the other end to which a cell is attached claim 1 , and the deflection sensor includes a light source that is positioned to irradiate light onto the other end of the cantilever and a position-sensitive photodetector that is positioned to detect the light reflected from the other end of the cantilever3. The method of claim 1 , further comprising providing a sample having the sample surface.4. The method of claim 1 , further comprising comparing the determined interaction force with a predetermined interaction force.5. The method of claim 4 , further comprising recognizing the sample surface to have anti-biofouling property claim 4 , if it is determined that the interaction force is an adhesion force and the determined interaction force is smaller than the predetermined interaction force; or recognizing the sample surface to have anti-biofouling property claim 4 , if it is determined that the interaction force is a repelling ...

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Номер записи: 71
14-06-2018 дата публикации

SCANNING PROBE SYSTEM WITH TWO PROVE DRIVERS

Номер: US20180164342A1
Автор: Humphris Andrew
Принадлежит:

A scanning probe system with a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever. A first driver is provided with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input. A second driver is provided with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input. A control system is arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles. A surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample. The control system is also arranged to modify the second drive signal in response to receipt of the surface signal from the surface detector, the modification of the second drive signal causing the second driver to control the probe tip. 1. A scanning probe system comprising: a probe comprising a cantilever extending from a base to a free end , and a probe tip carried by the free end of the cantilever; a first driver with a first driver input , the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input; a second driver with a second driver input , the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input; a control system arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles; and a surface detector arranged to generate a surface signal for each cycle when the surface detector detects an interaction of the probe tip with the surface of the sample , wherein the control system is also arranged to modify the ...

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Номер записи: 72
25-06-2015 дата публикации

MICROELECTROMECHANICAL SYSTEM AND METHODS OF USE

Номер: US20150177272A1
Автор: Clark Jason V.
Принадлежит:

Methods of measuring displacement of a movable mass in a microelectromechanical system (MEMS) include driving the mass against two displacement-stopping surfaces and measuring corresponding differential capacitances of sensing capacitors such as combs. A MEMS device having displacement-stopping surfaces is described. Such a MEMS device can be used in a method of measuring properties of an atomic force microscope (AFM) having a cantilever and a deflection sensor, or in a temperature sensor having a displacement-sensing unit for sensing a movable mass permitted to vibrate along a displacement axis. A motion-measuring device can include pairs of accelerometers and gyroscopes driven 90° out of phase. 1. A method of measuring displacement of a movable mass in a microelectromechanical system (MEMS) , the method comprising:moving the movable mass into a first position in which the movable mass is substantially in stationary contact with a first displacement-stopping surface;using a controller, automatically measuring a first difference between the respective capacitances of two spaced-apart sensing capacitors while the movable mass is in the first position, wherein each of the two sensing capacitors includes a respective first plate attached to and movable with the movable mass and a respective second plate substantially fixed in position;moving the movable mass into a second position in which the movable mass is substantially in stationary contact with a second displacement-stopping surface spaced apart from the first displacement-stopping surface;using the controller, automatically measuring a second difference between the respective capacitances while the movable mass is in the second position;moving the movable mass into a reference position in which the movable mass is substantially spaced apart from the first and the second displacement-stopping surfaces, wherein a first distance between the first position and the reference position is different from a second ...

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Номер записи: 73
21-06-2018 дата публикации

SCANNING PROBE MICROSCOPE

Номер: US20180172726A1
Автор: NAGAI Masamichi
Принадлежит:

An image capturing control unit controls a video camera so as to capture an image while switching between a first image capturing condition suitable for capturing a laser light spot and a second image capturing condition suitable for capturing an image of a cantilever for each single image. The image composition unit creates an image in which a laser light spot image and a cantilever image clearly appearing in each of two consecutive images are composed and displays the image on a display unit. A laser light center position detection unit, a cantilever tip position detection unit, and a position adjustment amount calculation unit calculate a position adjustment amount for adjusting an optical axis from a laser light center position and a cantilever tip position obtained by image processing from two each of two consecutive images, and also display the calculated numeric value on the display unit. 1. A scanning probe microscope comprising:a cantilever displacement detection unit including a flexible cantilever provided with a probe, a laser light source unit, a reflector configured to reflect laser light emitted from the laser light source unit to irradiate the laser light to the cantilever, and a detector configured to detect light reflected from the cantilever with respect to irradiation light;a drive unit configured to move at least one of the reflector and the laser light source unit for optical axis adjustment in the cantilever displacement detector; andan image capturing unit configured to capture an image of the cantilever and a vicinity thereof to which light is irradiated for the optical axis adjustment, whereina) an image capturing control unit configured to perform image capturing while switching a first image capturing condition suitable for performing image capturing of a laser light spot formed by irradiation of the laser light to the cantilever and a second image capturing condition suitable for performing image capturing of the cantilever,b) a ...

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Номер записи: 74
28-05-2020 дата публикации

Low Drift System for a Metrology Instrument

Номер: US20200166540A1
Автор: Neushul Andrew, Ruiter Anthonius
Принадлежит:

The present inventors have recognized that more accurate measurements can be taken with less drift due to thermal expansion by precisely controlling insulated heating and cooling modules abutting one another in substantial alignment to rapidly heat a sample to be scanned by a Scanning Probe Microscope (SPM) with minimal temperature variation. The heating and cooling modules can be “flat-packed,” with parallel surfaces of each module in contact with one another, to more efficiently heat a sample that is positioned in axial alignment with the heating and cooling modules. This can allow heating the sample to at least 250 degrees Celsius in less than 5 seconds, continuously maintaining a temperature of the sample to within ±0.001 degree Celsius, and maintaining a drift of less than 0.1 nanometers per minute in the z direction. 1. A low drift heater assembly of a metrology instrument for measuring a sample , the low drift heater assembly comprising:a structure for supporting the sample, the structure being configured to provide a low thermal mass that is operable to maintain a drift of the sample to less than 0.1 nanometers per minute.2. The heater assembly of claim 1 , wherein the structure comprises:a heating module providing a heat source; anda cooling module for cooling the heat source,wherein the heating and cooling modules abut one another in axial alignment, andwherein the heating and cooling modules are simultaneously active to control heat transfer through axial alignment to the sample.3. The heater assembly of claim 2 , wherein the heating and cooling modules are controlled in at least one closed-loop control system.4. The heater assembly of claim 2 , wherein the heat transfer is operable to heat the sample to at least 250 degrees Celsius in less than 5 seconds.5. The heater assembly of claim 2 , wherein the heat transfer is operable to maintain a temperature of the sample to within ±0.001 degree Celsius.6. The heater assembly of claim 2 , wherein a flat ...

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Номер записи: 75
30-06-2016 дата публикации

MINUTE OBJECT CHARACTERISTICS MEASURING APPARATUS

Номер: US20160187374A1
Автор: SOMENO Shuusuke, Yamaguchi Daichi
Принадлежит:

A minute object characteristics measuring apparatus is provided. The minute object characteristics measuring apparatus includes a holder, a cantilever, a measuring device, and a driver. The holder holds a minute object. The cantilever faces the minute object held by the holder. The measuring device measures a displacement of the cantilever. The driver drives one of the holder holding the minute object and the cantilever in a direction that the minute object held by the holder and the cantilever are brought close to or drawn away from each other. 1. A minute object characteristics measuring apparatus , comprising:a holder to hold a minute object;a cantilever to face the minute object held by the holder;a measuring device to measure a displacement of the cantilever;a driver to drive one of the holder holding the minute object and the cantilever in a direction that the minute object held by the holder and the cantilever are brought close to or drawn away from each other.2. The minute object characteristics measuring apparatus according to claim 1 , further comprising a processer to control the driver and to determine characteristics of the minute object based on a measurement result from the measuring device claim 1 ,wherein the cantilever is conductive and grounded, andwherein the processor determines a mirror force of the minute object based on an amount of the displacement of the cantilever at the time that the minute object held by the holder and the cantilever are brought close to each other.3. The minute object characteristics measuring apparatus according to claim 2 , wherein the processor determines an adhesive force of the minute object based on an amount of the displacement of the cantilever at the time that the minute object held by the holder and the cantilever claim 2 , having been in contact with each other claim 2 , are separated from each other.4. The minute object characteristics measuring apparatus according to claim 2 , further comprising a charger ...

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Номер записи: 76
15-07-2021 дата публикации

SYSTEMS, METHOD AND COMPUTER-ACCESSIBLE MEDIUM FOR PROVIDING BALANCED ASYMMETRIC INTERFEROMETRY FOR VIBRATIONALLY ISOLATED OPTICAL SCANNING PROBE(S)

Номер: US20210215737A1
Автор: BASOV DIMITRI N., MCLEOD ALEXANDER SWINTON, Xiong Lin, Zhang Shuai
Принадлежит: The Trustees of Columbia University in the City of New York

An exemplary apparatus can provide radiation to a sample(s), which can include, for example, a radiation source arrangement configured to provide radiation, a beam splitter configured to split the radiation into (i) a first radiation, and (ii) a second radiation. An optical element can also be provided which, in operation, can, e.g., (a) receive the first radiation and the second radiation, (b) reflect the first radiation as a reference radiation, (c) provide the second radiation as illumination for the sample(s), (d) receive a resultant radiation from the sample(s) that can be based on the illumination from the second radiation, and (e) provide the reference radiation and the resultant radiation to be detected and used for interferometric imaging or spectroscopy. 1. An apparatus for providing radiation to at least one sample , comprising:a radiation source arrangement configured to provide a radiation;a beam splitter configured to split the radiation into (i) a first radiation, and (ii) a second radiation; and receives the first radiation and the second radiation,', 'reflects the first radiation as a reference radiation,', 'provides the second radiation as illumination for the at least one sample,', 'receives a resultant radiation from the at least one sample that is based on the illumination from the second radiation, and', 'provides the reference radiation and the resultant radiation to be detected and used for at least one of interferometric imaging or spectroscopy., 'an optical element which, in operation2. The apparatus of claim 1 , further comprising a variable path length retro-reflector configured to:receive the first radiation,vary the optical phase of the first radiation; andprovide the first radiation to the optical element.3. The apparatus of claim 1 , wherein the optical element includes an objective lens.4. The apparatus of claim 1 , wherein the optical element includes a concave focusing mirror.5. The apparatus of claim 1 , wherein the first and ...

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Номер записи: 77
18-09-2014 дата публикации

Method and Apparatus of Operating a Scanning Probe Microscope

Номер: US20140283229A1
Автор: Hu Shuiqing, Hu Yan, Su Chanmin
Принадлежит: Bruker Nano, Inc.

An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum. 1. A method of operating a scanning probe microscope (SPM) comprising:generating relative motion between a probe and a sample,detecting motion of the probe;determining, from the detected probe motion, a probe deflection based on a probe-sample interaction, the probe deflection being substantially independent of parasitic probe deflection, wherein the parasitic probe deflection is caused by the background associated with operation of the SPM, and wherein the determining step includes subtracting the background from the detected probe motion by using a digital controller; andcontrolling the SPM in real time using the determining step.2. The method of claim 1 , where an amplitude of the probe-sample interaction is less than an amplitude of the parasitic probe deflection.3. The method of claim 1 , further comprising identifying an instantaneous force associated with the interaction.4. The method of claim 3 , wherein the generating step includes providing relative oscillatory motion between the probe and the sample claim 3 , and wherein the instantaneous force is identified prior to the completion of one cycle of the oscillatory motion.5. The method of claim 4 , further comprising using the instantaneous force to maintain a setpoint during imaging.6. The method of claim 5 , wherein the instantaneous force is a repulsive force.7. The method of claim 5 , wherein a minimum controllable force corresponding to the instantaneous force is less than about 1000 μN.8. The method of claim 7 , wherein the minimum controllable force is less than about 10 pN.9. The ...

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Номер записи: 78
14-07-2016 дата публикации

SCANNING PROBE MICROSCOPE HEAD DESIGN

Номер: US20160202288A1
Автор: Erickson Andrew Norman, Ippolito Stephen Bradley
Принадлежит:

A SPM head incorporates a probe and a cantilever on which the probe is mounted. The cantilever has a planar reflecting surface proximate a free end of the cantilever. The cantilever extends from a mechanical mount and a single-mode optical fiber is supported by the mechanical mount to provide a beam. A micromirror is mounted to reflect the beam substantially 90° to the planar reflecting surface. 1. A structure comprising:a probe;a cantilever on which the probe is mounted, said cantilever having a planar reflecting surface proximate a free end of the cantilever;a mechanical mount from which the cantilever extends;a single-mode optical fiber; said single-mode optical fiber supported by the mechanical mount to provide a beam; and,a micromirror mounted to reflect the beam substantially 90° to the planar reflecting surface.2. The structure of claim 1 , wherein a lens is disposed between the fiber and micro mirror.3. The structure of wherein the micromirror has a dimension less than 150μ.4. The structure of wherein the micromirror is attached to the fiber with a glue dollop.5. A method for attaching a micromirror to a fiber in a scanning probe microscopy (SPM) head claim 1 , said method comprising:supporting a micromirror with a membrane proximate a carrier having a V-groove supporting a fiber;urging the fiber in the V-groove against the micromirror to deflect the micromirror by distorting the membrane; and,gluing the micromirror to the fiber.6. The method of further comprising severing the membrane after curing.7. The method of wherein the membrane is attached to the carrier.8. The method of wherein the membrane is attached to a secondary support adjacent the carrier. This application is a continuation-in-part of application Ser. No. 14/805,679 filed on July 22, 2015 which claims priority of U.S. provisional application Ser. No. 62/027,385 filed on Jul. 22, 2014 entitled SCANNING PROBE MICROSCOPE HEAD DESIGN, and further this application claims priority of provisional ...

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Номер записи: 79
13-07-2017 дата публикации

Systems and Devices for Non-Destructive Surface Chemical Analysis of Samples

Номер: US20170199220A1
Автор: Belyaev Alexey V., Evplov Dmitry A., Gavrilyuk Vasily V., Grigorov Leonid N., Krayev Andrey V., Saunin Sergey A., Zhishimontov Vladimir V.
Принадлежит: AIST-NT, Inc.

Aspects of the present invention include systems and devices useful for surface chemical analysis of solid samples by Tip Enhanced Raman Spectrometry (“TERS”), and particularly it relates to devices useful for chemical analysis of molecular compounds located either on or within thin surface layer of solid samples. Even more particularly, aspects of the present invention relate to systems, and devices for non-destructive analysis combining both high sensitivity and high spatial resolution of analysis of chemical compounds located or distributed on the surface of solid samples with obtaining important information regarding vibration spectra of atoms and molecular groups contained in a thin surface layer of solid samples. These objectives are realized by implementation of computer-assisted systems that use sensors to carefully regulate the motion of, and force applied to, probes of atomic force microscopes. 1. A device for surface analysis of a sample , comprising:a scanning probe microscope (SPM) operably linked to an optical spectrometer and a computer processor, said SPM, optical spectrometer, and said processor programmed to carry out the following cyclic operations;(a) programmable switching between at least two different regimes of SPM operation while scanning a sample's surface;(b) moving a tip of a probe of said SPM to a position over a first point on said surface;(c) moving said tip and said selected point of said surface into contact with each other, said selected point of the surface corresponding to said first point during a first cycle of operation;(d) illuminating said tip and said selected point on said surface with a focused laser beam;(e) collecting light emitted from said selected point on said surface;(f) analyzing said light emitted by said point on said surface to determine the chemical composition of said selected point on said surface;(g) storing the current coordinates of said probe relative to the sample and the results of said analysis in step ...

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Номер записи: 80
25-09-2014 дата публикации

METHOD OF INVESTIGATING A SAMPLE SURFACE

Номер: US20140289911A1
Автор: Humphris Andrew
Принадлежит:

A method of investigating a sample surface. A probe is brought into close proximity with a first sample and scanned across the first sample. A response of the probe to its interaction with the sample is monitored using a detection system and a first data set is collected indicative of said response. The probe and/or sample is tilted through a tilt angle. The probe is scanned across the first sample or across a second sample after the tilting step, and a response of the probe to its interaction with the scanned sample is monitored using a detection system and a second data set is collected indicative of said response. The method includes the additional step of analysing the first data set prior to tilting the probe and/or sample in order to determine the tilt angle. 1. A method of investigating a sample surface , the method comprising the steps of:(a) Bringing a probe into close proximity with a first sample;(b) Scanning the probe across the first sample;(c) Monitoring a response of the probe to its interaction with the sample using a detection system and collecting a first data set indicative of said response;(d) Tilting the probe through a tilt angle with respect to the first sample;(e) Scanning the tilted probe across the first sample or across a second sample; and(f) Monitoring a response of the tilted probe to its interaction with the scanned sample using a detection system and collecting a second data set indicative of said response,wherein the method includes the additional step of analysing the first data set prior to tilting the probe in order to determine the tilt angle, and wherein the step of analysing the first data set comprises the steps of: searching the first data set and identifying asymmetric features therein; and determining the degree of asymmetry in the asymmetric features in order to provide an estimate of the tilt angle.2. (canceled)3. A method according to wherein a map of the sample surface is generated using the second data set.4. A method ...

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Номер записи: 81
27-06-2019 дата публикации

Material Property Measurements Using Multiple Frequency Atomic Force Microscopy

Номер: US20190195910A1
Автор: Roger Callahan, Roger Proksch
Принадлежит: Oxford Instruments AFM Inc, Oxford Instruments PLC

Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.

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Номер записи: 82
18-06-2020 дата публикации

Method and Apparatus of Operating a Scanning Probe Microscope

Номер: US20200191826A1
Автор: Hu Shuiqing, Hu Yan, Su Chanmin
Принадлежит:

An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum. 1generating relative motion between a probe and a sample,detecting motion of the probe;determining, from the detected probe motion, a probe deflection based on a probe-sample interaction, the probe deflection being substantially independent of parasitic probe deflection, wherein the parasitic probe deflection is caused by the background associated with operation of the SPM; andcontrolling the SPM in real time using the determining step; andwherein an amplitude of the probe-sample interaction is less than an amplitude of the parasitic probe deflection; andwherein free oscillation of the probe during the controlling step is indicative of a mechanical property of the sample.. A method of operating a scanning probe microscope (SPM) comprising: This application is a continuation of U.S. Non-Provisional patent application Ser. No. 15/449,584, filed Mar. 3, 2017 (and issued as U.S. Pat. No. 10,502,761 on Dec. 10, 2019), which is a continuation of U.S. Non-Provisional patent application Ser. No. 15/137,937, filed Apr. 25, 2016 (and issued as U.S. Pat. No. 9,588,136 on Mar. 7, 2017), which is a continuation of U.S. Non-Provisional patent application Ser. No. 14/288,180, filed May 27, 2014 (and issued as U.S. Pat. No. 9,322,842 on Apr. 26, 2016), which is a continuation of U.S. Non-Provisional patent application Ser. No. 12/618,641, filed Nov. 13, 2009 (and issued as U.S. Pat. No. 8,739,309 on May 27, 2014), which claims priority under 35 U.S.C. § 119(e) to U.S. Provisional Patent Application No. 61/114,399, filed on Nov. 13, 2008, the entirety of each of which ...

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Номер записи: 83
18-06-2020 дата публикации

Multiple integrated tips scanning probe microscope

Номер: US20200191827A1
Автор: Kwame Amponsah
Принадлежит: XALLENT Inc

Device and system for characterizing samples using multiple integrated tips scanning probe microscopy. Multiple Integrated Tips (MiT) probes are comprised of two or more monolithically integrated and movable AFM tips positioned to within nm of each other, enabling unprecedented micro to nanoscale probing functionality in vacuum or ambient conditions. The tip structure is combined with capacitive comb structures offering laserless high-resolution electric-in electric-out actuation and sensing capability and novel integration with a Junction Field Effect Transistor for signal amplification and low-noise operation. This “platform-on-a-chip” approach is a paradigm shift relative to current technology based on single tips functionalized using stacks of supporting gear: lasers, nano-positioners and electronics.

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Номер записи: 84
19-07-2018 дата публикации

COMPACT PROBE FOR ATOMIC-FORCE MICROSCOPY AND ATOMIC-FORCE MICROSCOPE INCLUDING SUCH A PROBE

Номер: US20180203037A1
Автор: FAUCHER Marc, WALTER Benjamin
Принадлежит:

A probe for atomic force microscopy comprises a tip for atomic force microscopy oriented in a direction referred to as the longitudinal direction and protrudes from an edge of a substrate in the longitudinal direction, wherein the tip is arranged at one end of a shuttle attached to the substrate at least via a first and via a second structure, which structures are referred to as support structures, at least the first support structure being a flexible structure, extending in a direction referred to as the transverse direction, perpendicular to the longitudinal direction and anchored to the substrate by at least one mechanical linkage in the transverse direction, the support structures being suitable for allowing the shuttle to be displaced in the longitudinal direction. An atomic force microscope comprising at least one such probe is also provided. 1. A probe for atomic force microscopy comprising a tip for atomic force microscopy that is oriented in a direction referred to as the longitudinal direction and protrudes from an edge of a substrate in said longitudinal direction , said tip being arranged at one end of a shuttle that is attached to said substrate at least via a first and via a second structure , which structures are referred to as support structures , wherein:said support structures are both anchored to the substrate and are linked to said shuttle at different positions, in said longitudinal direction, of the latter;at least said first support structure extends mainly in a direction referred to as the transverse direction, perpendicular to said longitudinal direction and is anchored to the substrate by at least one mechanical linkage in said transverse direction, the longitudinal and transverse directions forming a plane that is parallel to a main surface of the substrate, and wherein:said support structures are deformable in the longitudinal direction, allowing the shuttle to be displaced in this same direction.2. The probe for atomic force microscopy ...

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Номер записи: 85
02-10-2014 дата публикации

Actuator Position Calculation Device, Actuator Position Calculation Method, and Actuator Position Calculation Program

Номер: US20140297222A1
Автор: Shigeno Masatsugu, Wakiyama Shigeru, WATANABE Kazutoshi, WATANABE Masafumi
Принадлежит: HITACHI HIGH-TECH SCIENCE CORPORATION

A device for calculating a position of an actuator, the actuator including a movement mechanism configured to move in one direction in proportion to a control signal generated for each minimum movement amount ΔM and a movement amount detection sensor configured to detect a movement amount of the movement mechanism in a minimum resolution ΔS, where A=ΔS/ΔM≧2, and the device includes a position calculation unit configured to calculating a position SA of the movement mechanism at a target position from the control signal at a time point T1, at which the sensor signal becomes (S0+m×ΔS) or (S0−m×ΔS), where m is a natural number of 1 or more, the control signal at the target position of the movement mechanism is denoted by M0, and the sensor signal is denoted by S0. 1. A device for calculating a position of an actuator , the actuator comprising: a movement mechanism configured to move in one direction in proportion to a control signal generated for each minimum movement amount ΔM; and a movement amount detection sensor configured to detect a movement amount of the movement mechanism in a minimum resolution ΔS , where A=ΔS/ΔM≧2 , the device comprising:a processor; and acquiring the control signal for each ΔM and a sensor signal of the movement amount detection sensor; and', 'calculating a position SA of the movement mechanism at a target position from the control signal at a time point T1, at which the sensor signal becomes (S0+m×ΔS) or (S0−m×ΔS), where m is a natural number of 1 or more, and/or from the control signal generated right before the time point T1, where the control signal at the target position of the movement mechanism is denoted by M0 and the sensor signal is denoted by S0., 'a memory storing instructions, the instructions, when executed by the processor, causing the device to perform2. The device according to claim 1 , wherein the calculating of the position comprises calculating the position SA by using the following Equation 1 claim 1 ,{'br': None, 'i': ...

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Номер записи: 86
06-08-2015 дата публикации

Photothermal actuation of a probe for scanning probe microscopy

Номер: US20150219684A1
Автор: Andrew Humphris, Bin Zhao
Принадлежит: INFINITESIMA LTD

Various methods of driving a probe of a scanning probe microscope are disclosed. One set of methods distribute the energy of a radiation beam over a wide area of the probe by either scanning the beam or increasing its illumination area. Another method changes the intensity profile of the radiation beam with a diffractive optical element, enabling a more uniform intensity profile across the width of the illumination. Another method uses a diffractive optical element to change the circumferential shape of the radiation beam, and hence the shape of the area illuminated on the probe, in order to match the shape of the probe and hence distribute the energy over a wider area.

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Номер записи: 87
06-08-2015 дата публикации

MULTIPLE PROBE ACTUATION

Номер: US20150219685A1
Автор: Humphris Andrew
Принадлежит: Infinitesima Limited

A method of actuating a plurality of probes. Each probe may be made of two or more materials with different thermal expansion coefficients which are arranged such that when the probe is illuminated by an actuation beam it deforms to move the probe relative to a sample. Energy is delivered to the probes by sequentially illuminating them with an actuation beam via an objective lens in a series of scan sequences. Two or more of the probes are illuminated by the actuation beam in each scan sequence and the actuation beam enters the objective lens at a different angle to an optical axis of the objective lens for each probe which is illuminated in a scan sequence. The actuation beam is controlled so that different amounts of energy are delivered to at least two of the probes by the actuation beam during at least one of the scan sequences. 1. A method of actuating a plurality of probes , the method comprising delivering energy to the probes so that the probes deform relative to a sample , wherein the energy is delivered to the probes by sequentially illuminating them with an actuation beam in a series of scan sequences , wherein two or more of the probes are illuminated by the actuation beam in each scan sequence; and controlling the actuation beam so that different amounts of energy are delivered to at least two of the probes by the actuation beam during at least one of the scan sequences.2. The method of wherein the method comprises controlling the actuation beam so that at least two of the probes are illuminated by the actuation beam for a different amount of time during at least one of the scan sequences.3. The method of any preceding claim wherein the method comprises controlling the intensity of the actuation beam so that at least two of the probes are illuminated by the actuation beam with a different intensity during at least one of the scan sequences.4. The method of any preceding claim further comprising controlling the actuation beam over time so that different ...

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Номер записи: 88
06-08-2015 дата публикации

MULTIPLE PROBE DETECTION AND ACTUATION

Номер: US20150219686A1
Автор: Humphris Andrew
Принадлежит:

A method of detecting the positions of a plurality of probes. An input beam is directed into an optical device and transformed into a plurality of output beamlets which are not parallel with each other. Each output beamlet is split into a sensing beamlet and an associated reference beamlet. Each of the sensing beamlets is directed onto an associated one of the probes with an objective lens to generate a reflected beamlet which is combined with its associated reference beamlet to generate an interferogram. Each interferogram is measured to determine the position of an associated one of the probes. A similar method is used to actuate a plurality of probes. A scanning motion is generated between the probes and the sample. An input beam is directed into an optical device and transformed into a plurality of actuation beamlets which are not parallel with each other. 1. A method of detecting the positions of a plurality of probes , the method comprising:a. directing an input beam into an optical device;b. transforming the input beam with the optical device into a plurality of output beamlets;c. splitting each output beamlet into a sensing beamlet and an associated reference beamlet;d. simultaneously directing each of the sensing beamlets onto an associated one of the probes to generate a reflected beamlet;e. combining each reflected beamlet with its associated reference beamlet to generate an interferogram; andf. measuring each interferogram to determine the position of an associated one of the probes.2. The method of further comprising: directing a second input beam into a second optical device; transforming the second input beam with the second optical device into a plurality of actuation beamlets; simultaneously directing each of the actuation beamlets onto an associated one of the probes claim 1 , wherein each probe is arranged such that when the probe is illuminated by its respective actuation beamlet it deforms; and modulating the intensity of the second input beam ...

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Номер записи: 89
26-07-2018 дата публикации

SYSTEMS AND METHODS FOR NANO-TRIBOLOGICAL MANUFACTURING OF NANOSTRUCTURES

Номер: US20180210007A1
Автор: Carpick Robert W., Gosvami Nitya Nand, Khare Harmandeep S., LAHOUIJ Imene
Принадлежит: THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA

The presently disclosed subject matter provides systems and methods for generating nanostructures from tribological films. A probe tip can be immersed in a liquid mixture comprising a plurality of ink particles suspended in a medium. A substrate on which the tribological film is to be generated can also be immersed in the liquid mixture. A processor controlling movement of the probe tip can be configured to cause the probe tip to slide along the substrate in a shape of a desired pattern of the nanostructure with a contact force to cause one or more ink particles of the plurality of ink particles compressed underneath the probe tip to be transformed into a tribological film onto the substrate in the shape of the desired pattern of the nanostructure. 1. A method of generating a nanostructure on a substrate , comprising:immersing the substrate and a probe tip in a liquid mixture comprising a plurality of ink particles suspended in a medium;causing the probe tip to contact the substrate immersed in the liquid mixture; andcausing the probe tip to slide along the substrate in a shape of a desired pattern of the nanostructure with a contact force to cause one or more ink particles of the plurality of ink particles compressed underneath the probe tip to be transformed into a tribological film onto the substrate to thereby generate the nanostructure.2. The method of claim 1 , wherein the plurality of ink particles comprise at least one of a plurality of nanoparticles and a plurality of molecules.3. The method of claim 1 , wherein the probe tip comprises a tip of an atomic force microscopy probe.4. The method of claim 1 , wherein the substrate comprises a preexisting nanostructure and wherein the tribological film deposited on the preexisting nanostructure generates a multi-material nanostructured device.5. The method of claim 1 , further comprising:measuring an amount of friction between the probe tip and the nanostructure simultaneously while manufacturing the nanostructure ...

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Номер записи: 90
26-07-2018 дата публикации

SCANNING PROBE MICROSCOPY SYSTEM FOR MAPPING HIGH ASPECT RATIO NANOSTRUCTURES ON A SURFACE OF A SAMPLE

Номер: US20180210008A1
Автор: Crowcombe William Edward, Kuiper Stefan
Принадлежит:

The invention is directed at a scanning probe microscopy system for mapping nanostructures on a surface of a sample, the system being arranged for sensing a high aspect ratio nanostructure, the high aspect ratio nanostructure comprising at least one face having a slope with a slope angle relative to the surface of the sample that exceeds a predetermined threshold angle, the system comprising a metrology frame, a sample support structure for supporting a sample, a sensor head including a probe, wherein the probe comprises a cantilever and a probe tip, and wherein the scanning probe microscopy system further comprises an actuator for scanning the probe tip relative to the substrate surface for mapping of the nanostructures, wherein, for sensing the high aspect ratio nanostructure, the probe tip is arranged under a fixed offset angle with respect to the sensor head such as to be angled relative to the sample surface, and wherein the system further comprises a sensor head carrier for receiving the sensor head, the sensor head carrier and the sensor head being provided with a mutually cooperating mounting structure for forming a kinematic mount having at least three contact points for detachable mounting of the sensor head on the sensor head carrier. 1. Scanning probe microscopy system for mapping nanostructures on a surface of a sample , said nanostructures including nanostructures comprising at least one face having a slope with a slope angle relative to a normal to the surface of the sample , wherein the slope angle is smaller than a threshold angle , the system comprising a metrology frame , a sample support structure for supporting a sample , a sensor head including a probe , wherein the probe comprises a cantilever and a probe tip , and wherein the scanning probe microscopy system further comprises an actuator for scanning the probe tip relative to the substrate surface for mapping of the nanostructures ,wherein, for sensing the nanostructures, the probe tip is ...

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Номер записи: 91
05-08-2021 дата публикации

Nanoscale Dynamic Mechanical Analysis via Atomic Force Microscopy (AFM-nDMA)

Номер: US20210239732A1
Автор: Osechinskiy Sergey, Pittenger Bede, Ruiter Anthonius, Syed-Amanulla Syed-Asif
Принадлежит:

An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device. 1. A method for determining a mechanical property of a soft viscoelastic sample with an atomic-force-microscope (AFM)-based system , the method comprising: i) an average sample-loading force, generated by a probe of the system, and', 'ii) an area of contact between a tip of the probe and a surface of said viscoelastic sample configured as a thin film or a composite material with a Young modulus value no higher than 10 GPa, 'while maintaining at least one of'}to be substantially constant, repositioning the probe of the system towards the surface of said viscoelastic sample until a cantilever of the probe is deflected by a pre-determined amount from a nominal orientation of the cantilever;andmeasuring, at a set of frequencies within a range from 0.001 Hz to 1,000 Hz, a viscoelastic parameter of the surface of said sample in absence of using either a lock-in detection or a Fast-Fourier-Transform based analysis.2. The method according to claim 1 , wherein said measuring includesduring a first period of time acquiring, from a sensor of electronic circuitry of the system, a first set of electrical signals at a frequency from said set of frequencies to determine a depth of deformation of the surface with the tip of the probe, andduring a second period of time acquiring, from the sensor of the electronic circuitry of the system, a second set of electrical signals at a reference frequency to compensate for a change in the area of contact caused by the creep of the surface,wherein the sensor includes at least one of a deflection sensor and a sensor configured to measure a position of the probe with respect to the ...

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Номер записи: 92
03-08-2017 дата публикации

Field-Mapping and Focal-Spot Tracking for S-SNOM

Номер: US20170219621A1
Автор: Andreev Gregory, Osechinskiy Sergey
Принадлежит: BRUKER NANO, INCORPORATED

System and method for optical alignment of a near-field system, employing reiterative analysis of amplitude (irradiance) and phase maps of irradiated field obtained in back-scattered light while adjusting the system to arrive at field pattern indicative of and sensitive to a near-field optical wave produced by diffraction-limited irradiation of a tip of the near-field system. Demodulation of optical data representing such maps is carried out at different harmonics of probe-vibration frequency. Embodiments are operationally compatible with methodology of chemical nano-identification of sample utilizing normalized near-field spectroscopy, and may utilize suppression of background contribution to collected data based on judicious coordination of data acquisition with motion of the tip. Such coordination may be defined without knowledge of separation between the tip and sample. Computer program product with instructions effectuating the method and operation of the system. 1. A method for optical alignment of a near-field system , the method comprising:detecting a spatial light pattern obtained in light that has been delivered, through an optical system of said near-field system, to a probe of the near-field system and backscattered by said probe;repositioning the optical system to cause a focal spot of a beam of light, that has been delivered to the probe through said optical system, spatially coincide with a tip of the probe; andmaximizing an amplitude, of said spatial light pattern, that is sensitive to a near-field optical wave produced only by the tip in response to interaction thereof with said beam of light.2. A method according to claim 1 , further comprising operably cooperating the near-field system with a sample wider test claim 1 , and wherein said maximizing is devoid of using optical data representing any of mechanical response claim 1 , thermal expansion claim 1 , and photo-thermal response of the sample irradiated with said beam of light.3. A method ...

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Номер записи: 93
23-10-2014 дата публикации

OPTICAL BEAM POSITIONING UNIT FOR ATOMIC FORCE MICROSCOPE

Номер: US20140317790A1
Автор: Cleveland Jason, Labuda Aleksander, Proksch Roger, Walters Deron
Принадлежит:

This invention relates to an optical light beam positioning system that enables the combination of two or more light beams of different wavelengths to be focused onto a probe or sample of a scientific instrument, such as an atomic force microscope, for a number of specific uses typical to AFMs, like measuring the deflection or oscillation of the probe and illuminating an object for optical imaging, and less traditional ones like photothermal excitation of the probe, photothermal activated changes in the sample, photothermal cleaning of the probe and photochemical, photovoltaic, photothermal and other light beam induced changes in the sample. The focused light beams may be independently positioned relative to each other. 1a chassis;an atomic force microscope cantilever;an isolation system, that encloses the chassis, and provides acoustic and thermal isolation for the atomic force microscope system;a view system, coupled to said chassis, that has optical features which allow optical viewing in an area of the cantilever or of the sample;a head system, coupled to said chassis, that directs the optical beam onto the cantilever and obtains a return beam from the cantilever indicative of movement of the cantilever;an optical emitter assembly, having a supporting structure, an emitter held within first surfaces of said supporting structure and a lens coupled to second surfaces of said supporting structure, where said supporting structure is insertable and removable from said head system;a scanner system, coupled to said chassis, that includes a holder for the cantilever, a holder for the sample which is mounted below the cantilever, a mechanism for scanning the sample in the X, Y and Z dimensions, and a mechanism for translating the cantilever in the Z direction relative to the sample which permits the cantilever to be translated vertically downward to the point where the tip of the cantilever engages the sample, said scanner system minimizing the noise coupled into images ...

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Номер записи: 94
18-08-2016 дата публикации

OPTICAL KNIFE-EDGE DETECTOR WITH LARGE DYNAMIC RANGE

Номер: US20160238631A1
Автор: Aharoni Abraham
Принадлежит:

A detection arrangement and method for directing the sensitivity of an optical knife-edge detection system to its optimal operating point. This is referred to as an increase in the detection dynamic range of the system with advantageous applications for detecting motion of a surface such as for Atomic Force Microscopy as well as detecting acoustic vibrations on unstable surfaces. A pair of parallel reflecting surfaces, such as an optical slab waveguide, serve to reflect the sensing beam back onto the knife-edge detector once it is shifted off its sensing range. Allowing multiple reflections, the sensing beam is maintained on the knife-edge detector even at large angular offsets from the optimal operating point of the basic knife-edge detector. Use of a modified arrangement, with two knife-edge detectors at quadrature ensures near-optimal sensitivity at a detection dynamic range up to forty-fold larger than that of the basic knife-edge system. 1. A system for monitoring change in the direction of incidence of a light beam , comprising:a pair of optical reflecting surfaces disposed such that said light beam traverses between them, and aligned generally perpendicular to the direction in which said change in said direction of incidence of said light beam is to be monitored; anda pair of juxtaposed photodetector elements disposed at one end of said pair of optical reflecting surfaces, the boundary between said juxtaposed pair being aligned in the space between said optical reflecting surfaces such that the illumination spot of said beam passes from one photodetector element to the other as the direction of incidence of said beam changes.2. The system according to claim 1 , wherein said boundary is located in the center of the space between said optical reflecting surfaces.3. The system according to claim 1 , wherein said pair of optical reflecting surfaces are disposed such that said light beam traversing between said pair of optical reflecting surfaces illuminates ...

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Номер записи: 95
25-07-2019 дата публикации

METHOD OF AND SYSTEM FOR PERFORMING DEFECT DETECTION ON OR CHARACTERIZATION OF A LAYER OF A SEMICONDUCTOR ELEMENT OR SEMI-MANUFACTURED SEMICONDUCTOR ELEMENT

Номер: US20190227097A1
Автор: Meijer Timmerman Thijssen Rutger, Sadeghian Marnani Hamed, VAN ES Maarten Hubertus
Принадлежит:

The present document relates to a method of performing defect detection on a self-assembled monolayer of a semiconductor element or semi-manufactured semiconductor element, using an atomic force microscopy system. The system comprises a probe with a probe tip, and is configured for positioning the probe tip relative to the element for enabling contact between the probe tip and a surface of the element. The system comprises a sensor providing an output signal indicative of a position of the probe tip. The method comprises: scanning the surface with the probe tip; applying an acoustic vibration signal to the element; obtaining the output signal indicative of the position of the probe tip; monitoring probe tip motion during said scanning for mapping the surface of the semiconductor element, and using a fraction of the output signal for mapping contact stiffness indicative of a binding strength. 1. A method of performing a defect detection on or a characterization of a layer of a semiconductor element or a semi-manufactured semiconductor element , the layer being a self-assembled monolayer or a directed self-assembled layer , the method being performed using an atomic force microscopy system , wherein the system comprises a probe with a probe tip , and wherein the system wherein the system positions the probe tip relative to the semiconductor element to enable contact between the probe tip and a surface of the semiconductor element for performing the defect detection on or the characterization of the semiconductor element , wherein the system further comprises a sensor for sensing a position of the probe tip and for providing an output signal , the method comprising:scanning the surface of the semiconductor element with the probe tip;applying, using a transducer, an acoustic vibration signal to the semiconductor element;obtaining, from the sensor, the output signal that is indicative of the position of the probe tip during said scanning, the output signal including a ...

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Номер записи: 96
26-08-2021 дата публикации

SCANNING PROBE MICROSCOPE AND OPTICAL AXIS ADJUSTMENT METHOD IN SCANNING PROBE MICROSCOPE

Номер: US20210263068A1
Автор: YAMASAKI Kenji
Принадлежит:

It is intended to save time for adjusting a position of a detection unit. In a position adjustment process of a detector, a control device moves the detector obliquely with respect to a boundary line partitioning photodiodes on a plane on which the detector moves and moves the detector so that the position of the center of gravity of a spot of a laser beam and the center of a light-receiving surface coincide in response to the incident of at least a part of the laser beam on the light-receiving surface. 1. A scanning probe microscope comprising:a cantilever;an irradiation unit configured to irradiate the cantilever with a laser beam;a detection unit including a light-receiving surface for receiving the laser beam reflected by the cantilever, the detection unit being configured to detect the laser beam incident on the light-receiving surface;a drive unit configured to move the detection unit along a plane intersecting with an optical axis of the laser beam incident on the light-receiving surface; anda control unit configured to control the drive unit,wherein the light-receiving surface is provided with a plurality of light-receiving areas, andwherein the control unit performs a first control for controlling the drive unit so that the detection unit is moved obliquely with respect to an axis parallel to a boundary line partitioning the plurality of light-receiving areas and a second control for adjusting so that a center of gravity of a spot of the laser beam on the light-receiving surface is brought to be positioned at a center of the light-receiving surface in response to receiving the laser beam by the light-receiving surface.2. The scanning probe microscope as recited in claim 1 ,wherein the control unit performs the second control in response to detection by the detection unit that the center of gravity of the spot has passed over the boundary line partitioning the plurality of light-receiving areas.3. The scanning probe microscope as recited in claim 2 ,wherein ...

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Номер записи: 97
06-11-2014 дата публикации

MOTION SENSOR INTEGRATED NANO-PROBE N/MEMS APPARATUS, METHOD, AND APPLICATIONS

Номер: US20140331367A1
Автор: Amponsah Kwame, Lal Amit
Принадлежит:

A multi-tip nano-probe apparatus and a method for probing a sample while using the multi-tip nano-probe apparatus each employ located over a substrate: (1) an immovable probe tip with respect to the substrate; (2) a movable probe tip with respect to the substrate; and (3) a motion sensor that is coupled with the movable probe tip. The multi-tip nano-probe apparatus and related method provide for improved sample probing due to close coupling of the motion sensor with the movable probe tip, and also retractability of the movable probe tip with respect to the immovable probe tip. 1. A probe apparatus comprising:a substrate;at least one movable probe tip located over the substrate, the at least one movable probe tip being movable with respect to the substrate; andat least one motion sensor located over the substrate, the at least one motion sensor comprising at least one pressure sensitive component operatively coupled with at least one spring, the at least one motion sensor being coupled with the at least one movable probe tip.2. The probe apparatus of further comprising at least two immovable probe tips also located over the substrate claim 1 , the at least two immovable probe tips being immovable with respect to the substrate and separated by the movable probe tip.3. The probe apparatus of wherein the at least one movable probe tip:is freely movable with respect to the substrate; andhas a length from about 30 to about 500 microns and lateral dimensions from about 300 to about 1000 nanometers, and overhanging the substrate.4. The probe apparatus of wherein the at least one movable probe tip has an angle from about 30 to about 60 degrees with respect to the substrate.5. The probe apparatus of wherein the at least one motion sensor includes a field effect device and at least one spring.6. The probe apparatus of wherein the at least one motion sensor comprises a channel region of the field effect device and the at least one spring.7. The probe apparatus of wherein the at ...

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Номер записи: 98
01-08-2019 дата публикации

SCANNING PROBE MICROSCOPE

Номер: US20190234992A1
Автор: IWASA Masayuki, KUDO Shinya, Shikakura Yoshiteru, Ueno Toshihiro
Принадлежит:

Provided is a scanning probe microscope with which measurement data and a distribution image of differential data of the measurement data can be displayed selectively or together, an edge enhancement image can be obtained, and user convenience is improved. A scanning probe microscope () includes: a distribution image calculator () configured to calculate a one-dimensional or two-dimensional first distribution image () of measurement data, and a one-dimensional or two-dimensional second distribution image () of differential data of adjacent data elements of the measurement data; and a display controller () configured to instruct the distribution image calculator to calculate at least one of the first distribution image or the second distribution image, and to display the calculated distribution image on a predetermined display. 1. A scanning probe microscope , comprising: a cantilever including a probe to be brought into contact with or closer to a surface of a sample; and a displacement detector configured to detect a signal indicating a displacement of the cantilever ,the scanning probe microscope being configured to acquire measurement data obtained when a predetermined physical quantity between the cantilever and the surface of the sample is kept constant based on the signal, and when the probe is scanned relatively along the surface of the sample, a distribution image calculator configured to calculate a one-dimensional or two-dimensional first distribution image of the measurement data, and a one-dimensional or two-dimensional second distribution image of differential data of adjacent data elements of the measurement data; and', 'a display controller configured to instruct the distribution image calculator to calculate at least one of the one-dimensional or two-dimensional first distribution image or the one-dimensional or two-dimensional second distribution image, and to display, on a predetermined display, the calculated at least one of the one-dimensional or ...

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Номер записи: 99
01-09-2016 дата публикации

Multiple Integrated Tips Scanning Probe Microscope

Номер: US20160252545A1
Автор: Amponsah Kwame
Принадлежит: Xallent, LLC

Device and system for characterizing samples using multiple integrated tips scanning probe microscopy. Multiple Integrated Tips (MiT) probes are comprised of two or more monolithically integrated and movable AFM tips positioned to within nm of each other, enabling unprecedented micro to nanoscale probing functionality in vacuum or ambient conditions. The tip structure is combined with capacitive comb structures offering laserless high-resolution electric-in electric-out actuation and sensing capability and novel integration with a Junction Field Effect Transistor for signal amplification and low-noise operation. This “platform-on-a-chip” approach is a paradigm shift relative to current technology based on single tips functionalized using stacks of supporting gear: lasers, nano-positioners and electronics. 1. A scanning probe adapter comprising:a probe head having at least one probe tip; andan optical microscope configured to view the probe head in relation to a sample.2. The scanning probe adapter of claim 1 , wherein the probe head is mounted on a stage configured to align the at least one probe tip relative to a sample.3. The scanning probe adapter of claim 1 , wherein the probe head is mounted above a piezoelectric sample stage configured to move the sample in at least two axes and further configured to move the sample past the probe for scanning.4. The scanning probe adapter of claim 3 , wherein the piezoelectric stage is mounted onto a rotating stage configured to orient the sample in a particular direction.5. The scanning probe adapter of claim 2 , wherein claim 2 , the stage is mounted onto: (i) a first stage configured to move the stage along a first claim 2 , X axis; (ii) a second stage configured to move the stage along a second claim 2 , Y axis; and (iii) a third stage configured to move the stage along a third claim 2 , Z axis.7. The scanning probe adapter of claim 1 , wherein the probe head comprises a top component and a bottom component.8. The ...

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Номер записи: 100